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1. 发明专利

JP2005288672A Method and device for manufacturing micro-structure 审中-公开
标题翻译：用于制造微结构的方法和装置
公开(公告)号：JP2005288672A
公开(公告)日：2005-10-20
申请号：JP2004111768
申请日：2004-04-06
申请人： Fuji Xerox Co Ltd , Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , 富士ゼロックス株式会社
发明人： TSUNO TAKESHI , GOTO TAKAYUKI , TAWARA SATOSHI , KINOUCHI MASAHITO , GOTO NOBURO , ASANO SHIN , HASEGAWA OSAMU , YAMADA TAKAYUKI , TAKAHASHI MUTSUYA
IPC分类号： B81C3/00 , B05D1/00 , B05D3/12 , B81C1/00 , B81C99/00 , C07C2/02
CPC分类号： B81C3/008
摘要： PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing a micro-structure having high form accuracy. SOLUTION: A fine movement stage 52 of a small stroke length having higher positioning accuracy than prescribed positioning accuracy in a coarse movement stage 51 of a large stroke length is installed on the coarse movement stage 51. The coarse movement stage 51 is moved to a desired position. The present position of a thin film 25 on the fine movement stage 52 is measured with high accuracy by using a laser length measuring device 64 and a mirror 55 arranged on the fine movement stage 52. The measured value of the laser length measuring device 64 is fed back to a stage control device 61. A difference of the present position and a target position is calculated by an error correcting part 63 to generate an error correction command value. By moving the fine movement stage 52 to the target position by the error correction command value, an error of the coarse movement stage 51 is corrected. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于制造具有高成形精度的微结构的方法和装置。解决方案：在粗动台51上安装有在大行程长度的粗移动台51中具有比规定的定位精度高的定位精度的小行程长度的精细移动台52。粗动台51移动到期望的位置。通过使用设置在微动台52上的激光长度测量装置64和反射镜55，高精度地测量薄膜25在微移动台52上的当前位置。激光长度测量装置64的测量值为反馈到载物台控制装置61.通过误差校正部63计算当前位置和目标位置的差异，生成纠错指令值。通过误差校正指令值将微动台52移动到目标位置，校正粗动级51的误差。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2007294600A Sequential alignment device, and sequential alignment method 有权
标题翻译：顺序对准装置和顺序对准方法
公开(公告)号：JP2007294600A
公开(公告)日：2007-11-08
申请号：JP2006119460
申请日：2006-04-24
申请人： Fuji Xerox Co Ltd , Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , 富士ゼロックス株式会社
发明人： ISHIOKA MASATO , TSUNO TAKESHI , UCHIUMI ATSUSHI , GOTO TAKAYUKI , YAMADA TAKAYUKI
IPC分类号： H01L21/02
摘要： PROBLEM TO BE SOLVED: To raise efficiency in positioning when two substrates are joined.
SOLUTION: A sequential alignment device includes: a first stage 5 for movably supporting a target substrate in a z direction; a second stage 6 for supporting a donor substrate in an xy direction, where a plurality of patterns to be joined with the target substrate are formed; a detecting device 15 for receiving diffractive light 42 which is obtained by reflection against horizontal positioning alignment marks 34, 35 after radiating a laser beam 41 to the horizontal positioning alignment marks 34, 35 formed on the donor substrate; and a measuring instrument 17 for measuring the position of the donor substrate concerning the xy direction, based on the diffractive light 42. The detecting device 15 is fixed to the first stage 5.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提高两个基板接合时的定位效率。解决方案：顺序对准装置包括：用于在z方向上可移动地支撑目标衬底的第一级5; 用于在xy方向上支撑施主衬底的第二级6，其中形成与目标衬底接合的多个图案; 用于接收衍射光42的检测装置15，该衍射光42在将激光束41辐射到形成在供体基板上的水平定位对准标记34,35之后，通过反射水平定位对准标记34,35获得; 以及用于基于衍射光42测量施主基板与xy方向的位置相关的测量仪器17.检测装置15固定在第一阶段5.版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2005288673A Device for manufacturing micro-structure 审中-公开
标题翻译：用于制造微结构的装置
公开(公告)号：JP2005288673A
公开(公告)日：2005-10-20
申请号：JP2004111769
申请日：2004-04-06
申请人： Fuji Xerox Co Ltd , Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , 富士ゼロックス株式会社
发明人： TSUNO TAKESHI , GOTO TAKAYUKI , TAWARA SATOSHI , KINOUCHI MASAHITO , GOTO NOBURO , ASANO SHIN , HASEGAWA OSAMU , YAMADA TAKAYUKI , TAKAHASHI MUTSUYA
IPC分类号： B81C3/00 , B29C65/00 , B81C99/00
CPC分类号： B29C65/002 , B29C64/35 , B29C65/006 , B29C65/7817 , B29C66/0222 , B29C66/028 , B29C66/73161 , B29C66/7352 , B29C66/9672 , B29K2995/0072 , Y10T74/20354
摘要： PROBLEM TO BE SOLVED: To provide a device for manufacturing a micro-structure having high form accuracy. SOLUTION: A coarse movement stage 51 of a large stroke length having prescribed positioning accuracy and a fine movement stage 52 of a small stroke length installed on the coarse movement stage 51 and having higher positioning accuracy than the prescribed positioning accuracy in the coarse movement stage 51 are provided as stage devices 5 in a vacuum container 21. As stage control parts 6, a laser length measuring device 64 for performing a length measurement up to a mirror 55 installed on the fine movement stage 52 and a stage control device 61 for driving the fine movement stage 52 by the measurement of the laser length measuring device 64 are provided. As pressure contact mechanism parts 4, a pressing rod 44 for holding a pressure contact member 24 arranged oppositely to a member 25 to be pressed and contacted held by the stage devices 5 and pressing, contacting and separating the pressure contact member 24, and a pressure contact driving mechanism 41 for imparting pressure contact force to the pressing rod 44 are provided. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于制造具有高成形精度的微结构的装置。
解决方案：具有规定的定位精度的大行程长度的粗移动台51和安装在粗动台51上的小行程长度的精细移动台52，并且具有比粗略的规定定位精度更高的定位精度移动台51设置在真空容器21中作为平台装置5.作为舞台控制部6，用于对安装在微动台52上的反射镜55进行长度测量的激光长度测量装置64和舞台控制装置61 用于通过测量激光长度测量装置64来驱动微动台52。作为压力接触机构部件4，用于保持压力接触部件24的按压杆44，该压力接触部件24相对于被平台装置5保持的被按压和接触的部件25相对地设置，并且压紧，接触和分离压力接触部件24，提供了用于向按压杆44施加压力接触力的接触驱动机构41。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2005257357A Method and apparatus for estimating normal temperature joined state 有权
标题翻译：用于估计正常温度接合状态的方法和装置
公开(公告)号：JP2005257357A
公开(公告)日：2005-09-22
申请号：JP2004066831
申请日：2004-03-10
申请人： Fuji Xerox Co Ltd , Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , 富士ゼロックス株式会社
发明人： OHIRA TATSUYA , GOTO TAKAYUKI , YAMADA TAKAYUKI , YAMAZAKI YOSHIFUMI
IPC分类号： G01N33/20 , G01N33/00
摘要： PROBLEM TO BE SOLVED: To provide a normal temperature joined state estimating method capable of estimating a state of joined strength or the like at the joining of a material, having roughness of nm to μm order for the surface in a pressure contact state at the normal temperature, and to provide an apparatus therefor.
SOLUTION: The normal temperature joined state apparatus is equipped with a means 111 of determining an interaction energy function parameter between two atoms, on the basis of composition; a means 112 of determining an interface atom structure model, based on a crystal structure; a means 113 of calculating internal stress energy, based on a macroelastic energy function from surface roughness; a surface roughness wavelength; the Poisson's ratio and Young's modulus; a means 114 of calculating the interfacial interaction energy corresponding to a surface-to-surface distance based on the function and the model; a means 115 of calculating the ideal jointing strength from the energy, corresponding to the distance; a means 116 of calculating adhesion energy from the energy, corresponding to the distance; and a means 117 of deciding normal temperature jointing possibility, from the magnitude relation of the adhesion energy and the internal stress energy.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够估计在接合材料时的接合强度等的状态的常温接合状态估计方法，其中压敏接触状态的表面具有nm至μm的粗糙度在常温下，并提供一种装置。解决方案：常温接合状态设备配备有基于组成确定两个原子之间的相互作用能函数参数的装置111; 基于晶体结构确定界面原子结构模型的装置112; 基于表面粗糙度的宏观能量函数计算内部应力能的手段113; 表面粗糙度波长; 泊松比和杨氏模量; 基于功能和模型计算对应于表面到距离的界面相互作用能量的装置114; 计算与能量相对应的能量的理想接合强度的装置115; 计算对应于距离的能量的附着能的装置116; 以及从附着能和内部应力能的大小关系决定常温接合可能性的装置117。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2004358602A Manufacturing method of laminated structure and laminated structure 有权
公开(公告)号：JP2004358602A
公开(公告)日：2004-12-24
申请号：JP2003159534
申请日：2003-06-04
申请人： Fuji Xerox Co Ltd , Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , 富士ゼロックス株式会社
发明人： TAKAHASHI MUTSUYA , YAMADA TAKAYUKI , HOTTA HIROYUKI , GOTO TAKAYUKI , TSUNO TAKESHI , KINOUCHI MASAHITO
IPC分类号： B81C1/00 , B81C99/00 , B81C5/00
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a laminated structure whereby the laminated structure the height of which is more than a few hundred μm is manufactured in a short period of time and favorably in yield and the laminated structure.
SOLUTION: A process to carry out separation is repeated after arranging a target substrate 46 on a donor substrate on which a plurality of cross-section pattern members 45-1, -2 corresponding to a cross-section pattern of the structure are formed in such a way as to face it and welding this target substrate on the cross-section pattern members 45-1, -2 by positioning it on them. The cross-section pattern members 45-1, -2 are formed as below-mentioned at the time of manufacturing the laminated structure by connecting the cross-section pattern members 45-1, -2 on the target substrate by transferring and laminating it on them by this process. The cross-section pattern members 45-1, -2 are formed by plating in a space of the resist pattern layers 44-1, -2, -3 which are a reversed pattern of the cross-section pattern of the structure, and are formed by removing the resist pattern layers 44-1, -2, -3.
COPYRIGHT: (C)2005,JPO&NCIPI

6. 发明专利

JP2004292916A Method and apparatus for manufacturing microstructure 审中-公开
公开(公告)号：JP2004292916A
公开(公告)日：2004-10-21
申请号：JP2003089162
申请日：2003-03-27
申请人： Fuji Xerox Co Ltd , Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , 富士ゼロックス株式会社
发明人： HOTTA HIROYUKI , YAMADA TAKAYUKI , TAKAHASHI MUTSUYA , GOTO TAKAYUKI , TSUNO TAKESHI
IPC分类号： B81C3/00 , C23C26/00 , C23C28/00
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a microstructure, which can layer an extremely thin film at a high transferring rate, and to provide an apparatus therefor.
SOLUTION: This manufacturing method comprises measuring the distance and adjusting the angle between a donor substrate 12 and a target substrate 16, at three points. Distance-measuring portions 9a, 9b and 9c measure the distance between the donor substrate 12 and the target substrate 16, and angle-adjusting portions 10a, 10b and 10c adjust the distance between a substrate holder 5 connected to a substrate holder 4 for holding the target substrate 16 and a substrate holder 6 to adjust the angle between the donor substrate 12 and the target substrate 16. The distance-measuring portions 9a, 9b and 9c, and the angle-adjusting portions 10a, 10b and 10c are each connected to a control part 11, and the control part 11 controls the angle-adjusting portions 10a, 10b and 10c on the basis of measured values from the distance-measuring portions 9a, 9b and 9c, so that the angle between the donor substrate 12 and the target substrate 16 becomes 0-degree.
COPYRIGHT: (C)2005,JPO&NCIPI

7. 发明专利

JP2004223637A Method for manufacturing laminated structure and laminated structure 有权
公开(公告)号：JP2004223637A
公开(公告)日：2004-08-12
申请号：JP2003012690
申请日：2003-01-21
申请人： Fuji Xerox Co Ltd , Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , 富士ゼロックス株式会社
发明人： YAMADA TAKAYUKI , TAKAHASHI MUTSUYA , HOTTA HIROYUKI , OZAWA TAKASHI , SUZUKI SADAICHI , NAGAO TASUKE , GOTO TAKAYUKI , TSUNO TAKESHI
IPC分类号： B81C3/00 , B29C67/00 , B81B1/00
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a laminated structure for manufacturing even the laminated structure having a laminating direction height more than a few hundred μm in a short time and the laminated structure.
SOLUTION: A pattern member 1 in which a plurality of cross-sectional shape members 11-1 to 11-3 corresponding to a cross-sectional pattern of the structure are integrally connected to a frame shaped member 12 by a connecting member 13 is formed by patterning a planar metal member. The pattern member 1 is fixed to a supporting table 3 via an adhesive sheet 2. The structure 5 is manufactured by laminating each of the cross-sectional shape members 11-1 to 11-3 in the pattern member 1 on a target substrate 4, while transferring the members 11-1 to 11-3 in order.
COPYRIGHT: (C)2004,JPO&NCIPI

8. 发明专利

JP2013231876A Developer holding member and image forming apparatus 有权
标题翻译：开发商控股会员和图像形成装置
公开(公告)号：JP2013231876A
公开(公告)日：2013-11-14
申请号：JP2012104187
申请日：2012-04-27
申请人： Fuji Xerox Co Ltd , 富士ゼロックス株式会社
发明人： HINO TOSHIO , UNAGIDA YASUNORI , YAMADA TAKAYUKI
IPC分类号： G03G15/08
摘要： PROBLEM TO BE SOLVED: To suppress a decrease in image quality caused by a developer holding member having concave grooves formed at distances in a circumferential direction on an outer peripheral surface of a cylindrical body.SOLUTION: A developing sleeve 106B (sleeve body 200) is produced in an ellipsoidal shape to make concave grooves 110 on a long axis L1 side of an ellipse shallow, and concave grooves 110 on a short axis L2 side deep. On the long axis L1 side of the ellipse in the developing sleeve 106B, a developing gap becomes narrow but the amount of developer (conveyance amount) is reduced; in contrast, on the short axis L2 side, the developing gap becomes wide but the amount of developer G (conveyance amount) increases. Accordingly, unevenness in the amount of developer supplied to a photoreceptor 72 is offset, and unevenness in image density is suppressed.
摘要翻译：要解决的问题：抑制由在圆筒体的外周面上沿周向形成有凹槽的显影剂保持构件引起的图像质量的降低。解决方案：显影套筒106B（套筒主体200）是产生椭圆形，以使椭圆浅的长轴L1侧的凹槽110和在短轴L2侧的凹槽110深。在显影套筒106B中的椭圆的长轴L1侧，显影间隙变窄，但显影剂的量（输送量）减少; 相反，在短轴L2侧，显影间隙变宽，但是显影剂G的量（输送量）增加。因此，供给到感光体72的显影剂的量的不均匀性被偏移，并且图像浓度的不均匀被抑制。

9. 发明专利

JP2010247418A Laminated structure, donor substrate and manufacturing method of laminated structure 审中-公开
标题翻译：层压结构，多孔基板和层压结构的制造方法
公开(公告)号：JP2010247418A
公开(公告)日：2010-11-04
申请号：JP2009098835
申请日：2009-04-15
申请人： Fuji Xerox Co Ltd , 富士ゼロックス株式会社
发明人： HIROTA MASANORI , TAKAHASHI MUTSUYA , TABATA KAZUAKI , YAMAZAKI YOSHIFUMI , YAMADA TAKAYUKI
IPC分类号： B32B15/01 , C25D1/00 , H05K3/20
摘要： PROBLEM TO BE SOLVED: To provide a laminated structure provided with laminated bodies of metallic films having ≥5 μm film thickness with certain intervals on a substrate, wherein the adhesive strength among the metallic films is made higher than a case that the difference of the thickness of the metallic films of the same class between that of the laminated body belonging to a group having the minimum surface area and that of a laminated body belonging to a group having the maximum surface area when the plurality of the laminated body is divided into a plurality of kinds of the groups each having a different surface area in the plane direction is over 2 μm.
SOLUTION: The laminated structure 10 is constructed by providing a plurality of the laminated bodies 12 having one or a plurality of the metallic films 14 having ≥5 μm thickness laminated with the certain interval on the substrate 16. The plurality of laminated body 12 constituting the laminated structure 10 is divided into a plurality of kinds of the groups each having different surface area in the plane direction of the substrate 16 and the difference of the metallic films 14 in the same class between that of the laminated body 12 belonging to a first group having the maximum surface area and that of the laminated body 12 belonging to a second group having the minimum surface area is ≤2 μm.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种层叠结构，其在基板上设置有具有一定间隔的厚度≥5μm的金属膜的层叠体，其中金属膜之间的粘合强度高于差异属于具有最小表面积的层的层叠体与属于多个层叠体的最大表面积的层叠体的金属膜的厚度相同的金属膜的厚度分割在平面方向上具有不同表面积的多个组中的多个组合超过2μm。解决方案：层压结构体10通过在基板16上设置多个层叠体12而构成，该多个层叠体12具有一定间隔地层叠了厚度≥5μm的一层或多层金属膜14。多层叠体构成层叠结构体10的层叠体12分别成为在基板16的平面方向上具有不同的表面积的金属膜14与属于具有最大表面积的第一组和属于具有最小表面积的第二组的层压体12的第一组≤2μm。版权所有（C）2011，JPO＆INPIT

10. 发明专利

JP2010214286A Micro fluidic device and fluid control method 有权
标题翻译：微流体装置和流体控制方法
公开(公告)号：JP2010214286A
公开(公告)日：2010-09-30
申请号：JP2009063109
申请日：2009-03-16
申请人： Fuji Xerox Co Ltd , 富士ゼロックス株式会社
发明人： TAKAHASHI MUTSUYA , HIROTA MASANORI , YAMADA TAKAYUKI
IPC分类号： B01J19/00 , B81B1/00
CPC分类号： B01F13/0059 , B01F5/0644 , B01F2005/0017 , Y10T137/87652
摘要： PROBLEM TO BE SOLVED: To provide a micro fluidic device in which shear force is more effectively generated as compared with the case that the flow directions of two adjacent fluids are not the directions opposite to each other on the boundary between the two adjacent fluids, and to provide a fluid control method.
SOLUTION: The micro fluidic device 1 includes: a fluid branch part 10 and a common flow channel 11. The fluid branch part 10 is provided with: a first introduction pipe 2 into which a first fluid is introduced; a second introduction pipe 3 into which a second fluid is introduced and which is disposed adjacently to the first introduction pipe 2; and a plurality of rectification parts 4 each of which is connected to the first and second introduction pipes 2, 3 and used for generating helical flows respectively in the fluids L1, L2 flowing in the first and second introduction pipes. The common flow channel 11 is connected to the fluid branch part 10 and used for merging the first fluid with the second fluid. The rectification part 4 for generating helical flows having the same direction in all of the first and second fluids L1, L2 consists of a rectification plate obtained by layering a plurality of thin film patterns the adjacent ones of which have the positions shifted from each other by a predetermined angle in the circumferential direction.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种微流体装置，其中与两相邻流体之间的边界上的两个相邻流体的流动方向不是彼此相反的方向的情况相比，更有效地产生剪切力流体，并提供流体控制方法。微流体装置1包括：流体分支部10和公共流路11.流体分支部10设置有：第一导入管2，第一流体被引入到该第一导入管2中; 第二导入管3，其与第一导入管2相邻配置而引入第二流体; 以及多个整流部4，每个整流部4分别与第一导入管2,3和第二导入管3连接，分别用于在流过第一导入管和第二导入管的流体L1，L2中产生螺旋流。公共流路11连接到流体分支部10，用于将第一流体与第二流体并入。用于产生在所有第一和第二流体L1，L2中具有相同方向的螺旋流的整流部分4由整流板组成，该整流板通过将相邻位置相互偏移的相邻的多个薄膜图案分开在圆周方向上的预定角度。版权所有（C）2010，JPO＆INPIT

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