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1. 发明专利

JP2005288672A Method and device for manufacturing micro-structure 审中-公开
标题翻译：用于制造微结构的方法和装置
公开(公告)号：JP2005288672A
公开(公告)日：2005-10-20
申请号：JP2004111768
申请日：2004-04-06
申请人： Fuji Xerox Co Ltd , Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , 富士ゼロックス株式会社
发明人： TSUNO TAKESHI , GOTO TAKAYUKI , TAWARA SATOSHI , KINOUCHI MASAHITO , GOTO NOBURO , ASANO SHIN , HASEGAWA OSAMU , YAMADA TAKAYUKI , TAKAHASHI MUTSUYA
IPC分类号： B81C3/00 , B05D1/00 , B05D3/12 , B81C1/00 , B81C99/00 , C07C2/02
CPC分类号： B81C3/008
摘要： PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing a micro-structure having high form accuracy. SOLUTION: A fine movement stage 52 of a small stroke length having higher positioning accuracy than prescribed positioning accuracy in a coarse movement stage 51 of a large stroke length is installed on the coarse movement stage 51. The coarse movement stage 51 is moved to a desired position. The present position of a thin film 25 on the fine movement stage 52 is measured with high accuracy by using a laser length measuring device 64 and a mirror 55 arranged on the fine movement stage 52. The measured value of the laser length measuring device 64 is fed back to a stage control device 61. A difference of the present position and a target position is calculated by an error correcting part 63 to generate an error correction command value. By moving the fine movement stage 52 to the target position by the error correction command value, an error of the coarse movement stage 51 is corrected. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于制造具有高成形精度的微结构的方法和装置。解决方案：在粗动台51上安装有在大行程长度的粗移动台51中具有比规定的定位精度高的定位精度的小行程长度的精细移动台52。粗动台51移动到期望的位置。通过使用设置在微动台52上的激光长度测量装置64和反射镜55，高精度地测量薄膜25在微移动台52上的当前位置。激光长度测量装置64的测量值为反馈到载物台控制装置61.通过误差校正部63计算当前位置和目标位置的差异，生成纠错指令值。通过误差校正指令值将微动台52移动到目标位置，校正粗动级51的误差。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2005288673A Device for manufacturing micro-structure 审中-公开
标题翻译：用于制造微结构的装置
公开(公告)号：JP2005288673A
公开(公告)日：2005-10-20
申请号：JP2004111769
申请日：2004-04-06
申请人： Fuji Xerox Co Ltd , Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社 , 富士ゼロックス株式会社
发明人： TSUNO TAKESHI , GOTO TAKAYUKI , TAWARA SATOSHI , KINOUCHI MASAHITO , GOTO NOBURO , ASANO SHIN , HASEGAWA OSAMU , YAMADA TAKAYUKI , TAKAHASHI MUTSUYA
IPC分类号： B81C3/00 , B29C65/00 , B81C99/00
CPC分类号： B29C65/002 , B29C64/35 , B29C65/006 , B29C65/7817 , B29C66/0222 , B29C66/028 , B29C66/73161 , B29C66/7352 , B29C66/9672 , B29K2995/0072 , Y10T74/20354
摘要： PROBLEM TO BE SOLVED: To provide a device for manufacturing a micro-structure having high form accuracy. SOLUTION: A coarse movement stage 51 of a large stroke length having prescribed positioning accuracy and a fine movement stage 52 of a small stroke length installed on the coarse movement stage 51 and having higher positioning accuracy than the prescribed positioning accuracy in the coarse movement stage 51 are provided as stage devices 5 in a vacuum container 21. As stage control parts 6, a laser length measuring device 64 for performing a length measurement up to a mirror 55 installed on the fine movement stage 52 and a stage control device 61 for driving the fine movement stage 52 by the measurement of the laser length measuring device 64 are provided. As pressure contact mechanism parts 4, a pressing rod 44 for holding a pressure contact member 24 arranged oppositely to a member 25 to be pressed and contacted held by the stage devices 5 and pressing, contacting and separating the pressure contact member 24, and a pressure contact driving mechanism 41 for imparting pressure contact force to the pressing rod 44 are provided. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于制造具有高成形精度的微结构的装置。
解决方案：具有规定的定位精度的大行程长度的粗移动台51和安装在粗动台51上的小行程长度的精细移动台52，并且具有比粗略的规定定位精度更高的定位精度移动台51设置在真空容器21中作为平台装置5.作为舞台控制部6，用于对安装在微动台52上的反射镜55进行长度测量的激光长度测量装置64和舞台控制装置61 用于通过测量激光长度测量装置64来驱动微动台52。作为压力接触机构部件4，用于保持压力接触部件24的按压杆44，该压力接触部件24相对于被平台装置5保持的被按压和接触的部件25相对地设置，并且压紧，接触和分离压力接触部件24，提供了用于向按压杆44施加压力接触力的接触驱动机构41。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2012170923A Stirring device 有权
标题翻译：搅拌装置
公开(公告)号：JP2012170923A
公开(公告)日：2012-09-10
申请号：JP2011037241
申请日：2011-02-23
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： TAWARA SATOSHI
IPC分类号： B01F7/16 , B01F7/18 , B01F15/00 , B01F15/02
摘要： PROBLEM TO BE SOLVED: To uniformly and efficiently mix powder into a liquid material and to efficiently wash the interior of a stirring tank.SOLUTION: This stirring device includes: a stirring tank 50 having a tank body 51 open on both sides of a first imaginary axis A1, a removable lid for closing a main opening, and an input chamber forming cylinder 55 communicated with an auxiliary opening 53; support legs supporting the stirring tank in such a way as to be capable of rocking about a second imaginary axis; a stirring mechanism 20 having a stirring blade 21; and a lift mechanism 70 for moving the stirring mechanism 20 in such a way that the stirring blade 21 can make a reciprocating movement between a retreat position P1 below a material input position for the input chamber forming cylinder 55 and a main stirring position P2 inside the tank body. The stirring mechanism 20 includes a stirring shaft 22 to which the stirring blade 21 is secured, and a motor 23 disposed away from the stirring shaft in a direction perpendicular to the stirring shaft. A hydraulic actuator 71 of the lift mechanism 70 is provided in the position G of the center of gravity of the stirring mechanism 20 within a plane perpendicular to the stirring shaft 22.
摘要翻译：要解决的问题：为了均匀有效地将粉末混合到液体材料中并有效地洗涤搅拌槽的内部。解决方案：该搅拌装置包括：搅拌槽50，其具有在第一假想轴线A1的两侧开口的箱体51，用于封闭主开口的可拆卸盖子以及与辅助件连通的输入室形成缸体55 开53 支撑腿支撑搅拌槽，以便能够围绕第二假想轴摆动; 具有搅拌叶片21的搅拌机构20; 以及用于使搅拌机构20移动的提升机构70，使得搅拌叶片21能够在输入室形成缸55的材料输入位置之下的后退位置P1和内部的主搅拌位置P2之间往复运动坦克体。搅拌机构20包括搅拌轴22，搅拌叶片21固定在搅拌轴22上，马达23沿与搅拌轴垂直的方向离开搅拌轴。在垂直于搅拌轴22的平面内，提升机构70的液压致动器71设置在搅拌机构20的重心位置G.（C）2012，JPO＆INPIT

4. 发明专利

JP2011119301A Actuator for vacuum 审中-公开
标题翻译：真空执行器
公开(公告)号：JP2011119301A
公开(公告)日：2011-06-16
申请号：JP2009272763
申请日：2009-11-30
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： TAWARA SATOSHI , YOKOYAMA TADAYUKI
IPC分类号： H01L21/31 , C23C16/44 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide an actuator for vacuum, capable of simplifying and miniaturizing a configuration, improving driving accuracy and facilitating the core shift adjustment of a shaft. SOLUTION: The actuator for the vacuum includes an output shaft 3 which is arranged through a vacuum container 11 and includes a magnetic material, a power generation unit 2 which rotationally drives the output shaft 3 from the outside of the vacuum container 11, an attachment unit 4 which is attached to the outer side of the vacuum container 11, supports the power generation unit 2 and includes a non-magnetic material, a magnetic fluid seal 5 which is arranged between the output shaft 3 and the attachment unit 4 and partitions the inside of the vacuum container 11 and the power generation unit 2, and a bearing 6 which is arranged near the magnetic fluid seal 5 and rotatably supports the output shaft 3. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种真空致动器，能够简化和小型化构造，提高驱动精度并促进轴的换档调整。解决方案：用于真空的致动器包括：输出轴3，其通过真空容器11设置并包括磁性材料;发电单元2，其从真空容器11的外部旋转地驱动输出轴3; 附接到真空容器11的外侧的安装单元4支撑发电单元2并且包括非磁性材料，布置在输出轴3和附接单元4之间的磁性流体密封件5和分隔真空容器11和发电单元2的内部，以及布置在磁性流体密封件5附近并可旋转地支撑输出轴3的轴承6.（C）2011，JPO＆INPIT

5. 发明专利

JP2010141092A Normal-temperature bonding device 有权
标题翻译：正温接合装置
公开(公告)号：JP2010141092A
公开(公告)日：2010-06-24
申请号：JP2008315431
申请日：2008-12-11
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： KINOUCHI MASAHITO , GOTO TAKAYUKI , TAWARA SATOSHI , TSUNO TAKESHI , UCHIUMI ATSUSHI , IDE KENSUKE , SUZUKI KITEN
IPC分类号： H01L21/02 , B23K20/00 , B23K101/40
CPC分类号： H01L21/6838 , B23K20/02 , B23K2201/40 , H01L21/67201 , Y10T156/10 , Y10T156/17
摘要： PROBLEM TO BE SOLVED: To improve reliability in wafer bonding, and to reduce manufacturing cost. SOLUTION: A normal-temperature bonding device 1 includes: a cartridge 11; a conveyance device for conveying the cartridge 11; a lower side stage for holding the cartridge 11; an upper side stage facing a wafer 50-1 mounted on the cartridge 11 when the lower stage holds the cartridge 11; and a compression-bonding mechanism for bringing the upper stage closer to the lower stage. The upper wafer 50-1 held to the upper stage is directly brought into contact with the upper stage. Thus, the conveyance device can convey the wafer 50-1 without direct contact with the wafer 50-1. The wafer 50-1 can be held to the lower stage without direct contact with the lower stage. As a result, the normal-temperature bonding device can prevent contamination of the wafer 50-1 to be bonded. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提高晶片接合的可靠性，降低制造成本。常温接合装置1包括：盒11; 用于输送盒11的输送装置; 用于保持盒11的下侧台阶; 当下级保持盒11时，面对安装在盒11上的晶片50-1的上侧级; 以及用于使上层更靠近下级的压缩机构。保持在上层的上晶片50-1直接与上层接触。因此，输送装置可以不与晶片50-1直接接触而输送晶片50-1。可以将晶片50-1保持在下级而不与下级直接接触。结果，常温接合装置能够防止待接合的晶片50-1的污染。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2003075337A Integrated surface plasmon resonance sensor 审中-公开
标题翻译：集成表面等离子体共振传感器
公开(公告)号：JP2003075337A
公开(公告)日：2003-03-12
申请号：JP2001265220
申请日：2001-09-03
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： INUZUKA HIROMASA , UCHIUMI ATSUSHI , TAWARA SATOSHI , GOTO TAKAYUKI , NAKAYAMA HIROYUKI
IPC分类号： G01N33/543 , G01N21/27 , G01N21/41
CPC分类号： G01N21/553
摘要： PROBLEM TO BE SOLVED: To provide an integrated surface plasmon resonance sensor having high measurement accuracy, and having a minute optical element capable of efficiently and accurately measuring plural samples. SOLUTION: This integrated surface plasmon resonance sensor can sequentially analyze the presence of occurrence of biochemical reactions in plural samples while relatively moving a transparent substrate and a silicon substrate by entering a laser beam emitted from the minute optical element into the transparent substrate through a diffraction grating and by detecting the intensity of reflected light emitted from the transparent substrate through another diffraction grating adjacent to the diffraction grating by the minute optical element.
摘要翻译：要解决的问题：提供具有高测量精度的集成表面等离子体共振传感器，并且具有能够有效且精确地测量多个样品的微小光学元件。解决方案：该集成表面等离子体共振传感器可以依次分析多个样品中生物化学反应发生的存在，同时通过衍射光栅将从微小光学元件发射的激光束进入透明衬底，同时相对移动透明衬底和硅衬底并且通过由微小光学元件检测从透明基板通过与衍射光栅相邻的另一衍射光栅发射的反射光的强度。

7. 发明专利

JP2003075333A Surface plasmon resonance sensor device 审中-公开
标题翻译：表面等离子体共振传感器装置
公开(公告)号：JP2003075333A
公开(公告)日：2003-03-12
申请号：JP2001263283
申请日：2001-08-31
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： UCHIUMI ATSUSHI , NAKAYAMA HIROYUKI , GOTO TAKAYUKI , INUZUKA HIROMASA , TAWARA SATOSHI
IPC分类号： G01N21/27
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive surface plasmon resonance sensor device capable of measuring multiple samples at a time and having a simple structure. SOLUTION: This surface plasmon resonance sensor device 30 is provided with: a surface plasmon resonance sensor 40 having at least one inspection part 41 comprising a recessed reflecting surface having a metal thin film 42 installed for generating surface plasmon resonance and machined so as to generate the surface plasmon resonance, and a biochemical reaction detection position 43 disposed on the thin film 42 and abutting on the sample 44; a light source part 50 for irradiating, to the reflecting surface of the inspection part 41 of the surface plasmon resonance sensor, a parallel light beam having a beam width having a breadth covering the entire detection area in the reflecting surface; and a light detection means 60 for detecting the reflected light of the light beam reflected by the reflecting surface of the inspection part 41 and emitted from the surface plasmon resonance sensor.
摘要翻译：要解决的问题：提供一种能够一次测量多个样品并具有简单结构的廉价的表面等离子体共振传感器装置。解决方案：该表面等离子体共振传感器装置30具有：具有至少一个检查部分41的表面等离子体共振传感器40，该检查部分41包括凹入的反射表面，该反射表面具有安装用于产生表面等离子体共振的机械加工的金属薄膜42，表面等离子体共振和设置在薄膜42上并邻接在样品44上的生化反应检测位置43; 用于向表面等离子体共振传感器的检查部41的反射面照射具有覆盖反射面的整个检测区域的宽度的光束宽度的平行光束的光源部50; 以及光检测装置60，用于检测由检查部分41的反射表面反射并从表面等离子体共振传感器发射的光束的反射光。

8. 发明专利

JP2003057171A Optical fiber type surface plasmon resonance sensor apparatus 审中-公开
标题翻译：光纤型表面等离子体共振传感器装置
公开(公告)号：JP2003057171A
公开(公告)日：2003-02-26
申请号：JP2001243592
申请日：2001-08-10
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： UCHIUMI ATSUSHI , NAKAYAMA HIROYUKI , GOTO TAKAYUKI , INUZUKA HIROMASA , TAWARA SATOSHI
IPC分类号： G01N21/27
摘要： PROBLEM TO BE SOLVED: To provide an optical fiber type surface plasmon resonance sensor apparatus that is inexpensive and has improved measurement accuracy since it has a simple configuration and can be machined easily, and further can be made multiple since measuring a number of samples simultaneously. SOLUTION: The optical fiber type surface plasmon resonance sensor apparatus 20 is provided with at least one optical fiber 30 that has a thin film 32 for causing surface plasmon resonance and has a tip end face 31 that is machined to a specific angle, a light source section 40 for applying white light beams to the tip surface 31 of the optical fiber 30, a beam splitter 50 that is included between the light source section 40 and the optical fiber 30, and a spectrophotometer 60 for detecting the reflection light of light beams that are reflected on the tip surface 31 of the optical fiber 30 and are guided via the beam splitter 50.
摘要翻译：要解决的问题：提供一种便宜且具有提高的测量精度的光纤型表面等离子体共振传感器装置，因为它具有简单的结构并且可以容易地加工，并且还可以同时测量多个样品而进行多次。解决方案：光纤型表面等离子体共振传感器装置20设置有至少一个光纤30，该光纤30具有用于引起表面等离子体共振的薄膜32，并且具有加工成特定角度的尖端面31，光源用于将白光束施加到光纤30的尖端表面31的部分40，包括在光源部分40和光纤30之间的分束器50以及用于检测光束的反射光的分光光度计60 被反射在光纤30的尖端表面31上并且经由分束器50被引导。

9. 发明专利

JP2013029090A Air blowing cooling device 有权
标题翻译：空气吹风冷却装置
公开(公告)号：JP2013029090A
公开(公告)日：2013-02-07
申请号：JP2011167545
申请日：2011-07-29
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： TAWARA SATOSHI
IPC分类号： F04D25/08 , F04D29/58
摘要： PROBLEM TO BE SOLVED: To provide an air blowing cooling device having a structure capable of sufficiently cooling wind sent from a blower, and having a structure easily attachable/detachable to/from the blower.SOLUTION: This air blowing cooling device includes a plurality of bar-shaped arms 21 each provided with a cold storage part 211 capable of cooling outside air in the longitudinal direction, a base part 22 which supports respective one ends of the plurality of bar-shaped arms 21 and to which the plurality of bar-shaped arms 21 is radially disposed, and installation parts 23 detachably installed to the blower 10 so that the respective cold storage parts 211 of the plurality of bar-shaped arms 21 are disposed in positions for receiving the wind from the blower 10.
摘要翻译：解决的问题：提供一种具有能够充分地冷却从鼓风机送出的风的结构的吹风冷却装置，并且具有容易地从鼓风机附接/拆卸的结构。该吹风冷却装置包括多个条形臂21，每个条形臂21设置有能够沿纵向冷却外部空气的冷藏部211;基部22，其支撑多个杆形臂21，多个条形臂21径向设置在该杆状臂21上，以及可拆卸地安装到鼓风机10的安装部23，使得多个条形臂21的各个冷藏部211布置在从鼓风机10接收风的位置。（C）2013，JPO＆INPIT

10. 发明专利

JP2012170924A Stirring device 有权
标题翻译：搅拌装置
公开(公告)号：JP2012170924A
公开(公告)日：2012-09-10
申请号：JP2011037245
申请日：2011-02-23
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： TAWARA SATOSHI
IPC分类号： B01F7/16 , B01F7/18 , B01F15/00 , B01F15/02
摘要： PROBLEM TO BE SOLVED: To uniformly and efficiently mix powder into a liquid material and to efficiently wash the interior of a stirring tank.SOLUTION: This stirring device includes: a stirring tank 50 having a tank body 51 open on both sides of a first imaginary axis A1, a removable lid for closing a main opening, and an input chamber forming cylinder 55 communicated with an auxiliary opening 53; support legs for supporting the stirring tank in such a way as to be capable of rocking about a second imaginary axis; a stirring mechanism 20 having a stirring blade 21; and a lift mechanism 70 for moving the stirring mechanism 20 in such a way that the stirring blade 21 can make a reciprocating movement between a retreat position P1 below a material input position for the input chamber forming cylinder 55 and a main stirring position P2 inside the tank body. The stirring mechanism 20 includes a stirring shaft 22 to which the stirring blade 21 is secured and a motor 23 disposed away from the stirring shaft in a direction perpendicular to the stirring shaft. The lift mechanism 70 includes a hydraulic actuator 71 for moving the stirring mechanism 20 and a base action regulation mechanism 77 for regulating the relative rotation of a base 35 of the stirring mechanism to the input chamber forming cylinder 55.
摘要翻译：要解决的问题：为了均匀有效地将粉末混合到液体材料中并有效地洗涤搅拌槽的内部。解决方案：该搅拌装置包括：搅拌槽50，其具有在第一假想轴线A1的两侧开口的箱体51，用于封闭主开口的可拆卸盖子以及与辅助件连通的输入室形成缸体55 开53 用于支撑搅拌槽的支撑腿，以便能够围绕第二假想轴摆动; 具有搅拌叶片21的搅拌机构20; 以及用于使搅拌机构20移动的提升机构70，使得搅拌叶片21能够在输入室形成缸55的材料输入位置之下的后退位置P1和内部的主搅拌位置P2之间往复运动坦克体。搅拌机构20包括搅拌轴22，搅拌叶片21被固定在该搅拌轴22上，马达23沿与搅拌轴垂直的方向离开搅拌轴。提升机构70包括用于移动搅拌机构20的液压致动器71和用于调节搅拌机构的基部35相对于输入室形成缸55的相对旋转的基本动作调节机构77.权利要求（C ）2012，JPO＆INPIT

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