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    • 2. 发明专利
    • Semiconductor device
    • 半导体器件
    • JP2006066716A
    • 2006-03-09
    • JP2004248843
    • 2004-08-27
    • Fuji Electric Holdings Co Ltd富士電機ホールディングス株式会社
    • IKEDA YOSHINARIYAMASHITA MITSUO
    • H01L23/48H01L23/34
    • H01L2224/37H01L2224/37147H01L2224/40H01L2224/40095H01L2224/40225H01L2224/48091H01L2224/73265H01L2224/77272H01L2224/83801H01L2224/84801H01L2924/13055H01L2924/181H01L2924/19107H01L2924/351H01L2924/00014H01L2924/00H01L2924/00012
    • PROBLEM TO BE SOLVED: To improve a fatigue life and reliability of a solder bonding portion by suppressing low the elution of Ni filmed on the surface of a base metal to a solder and the growth of a metal compound generated on a bonding interface with regard to the solder bonding portion between members comprising a module type semiconductor device. SOLUTION: In the module type semiconductor device, a power semiconductor chip 3 is mounted on a conductor pattern 2a of an insulating substrate 2 packaged on a copper base plate 1, and a lead frame 4 is connected to the upper surface electrode of the semiconductor chip. In such a module type semiconductor device soldering respective members and bonding their faces, an Ni film 9 is formed by filming Ni as surface treatment on a solder bonding surface of each of bonding members including the semiconductor chip 3. Further, a Cu film 10 is formed on the surface of the Ni film for thickness (of ≤1 μm) to be perfectly dissolved in solder bonding steps, and the members are then solder-bonded by Sn-rich soldering. Thus, a ternary metal compound of Cu-Ni-Sn is generated on the bonding interface of the solder, this metal compound becomes a barrier to suppress the elution of Ni and the growth of the metal compound with electrification and heating during actual use, thereby improving reliability of the solder bonding portion. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:通过抑制在基体金属表面上焊接到焊料上的Ni的洗脱以及在接合界面上产生的金属化合物的生长,来提高焊接部分的疲劳寿命和可靠性 关于包括模块型半导体器件的部件之间的焊料接合部分。 解决方案:在模块型半导体器件中,功率半导体芯片3安装在封装在铜基板1上的绝缘基板2的导体图案2a上,引线框4连接到铜基板1的上表面电极 半导体芯片。 在这样的模块型半导体器件中焊接各个部件并粘合它们的表面时,通过在包括半导体芯片3的每个接合部件的焊接接合表面上对作为表面处理的Ni进行表面处理来形成Ni膜9.此外,Cu膜10是 在Ni膜的表面上形成厚度(≤1μm)的表面,以便在焊接步骤中完全溶解,然后通过富含Sn的焊接将这些部件焊接。 因此,在焊料的接合界面上产生Cu-Ni-Sn的三元金属化合物,该金属化合物在实际使用中成为阻碍Ni的洗脱和金属化合物在带电和加热的生长的屏障,由此 提高焊料接合部的可靠性。 版权所有(C)2006,JPO&NCIPI
    • 4. 发明专利
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • JP2006049456A
    • 2006-02-16
    • JP2004226310
    • 2004-08-03
    • Fuji Electric Holdings Co Ltd富士電機ホールディングス株式会社
    • YOSHIHARA KATSUHIKOIKEDA YOSHINARIYAMASHITA MITSUO
    • H01L21/607H01L25/07H01L25/18
    • H01L2224/37H01L2224/37147H01L2224/40H01L2224/40095H01L2224/40225H01L2924/13055H01L2924/00H01L2924/00012
    • PROBLEM TO BE SOLVED: To provide an ultrasonic jointing method improved so that high junction intensity may be secured under the conditions of lower load and low ultrasonic vibration energy when carrying out ultrasonic junction of a lead frame to a circuit board. SOLUTION: The end face of a lead frame 4 for wiring is superposed on the top of a conductor pattern 2b of an insulating substrate 2a, and an ultrasonic jointing method of a lead frame for directly metal junction is carried out by adding pressure force and supersonic vibration to a bonded surface, via an ultrasonic bonding tool 8 pressed on the lead frame. Further, while heating the junction work with a heater 9 so as to make such a preheated high temperature state where it is easy to soften and to provide plastic flow, inert gas is sprayed on the bonded surface from a gas injection nozzle 10 so that this bonded surface may be isolated from a surrounding air atmosphere for preventing the rapid growth of an oxide film. In this state, the bonding tool is pressed so as to carry out the ultrasonic junction. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种改进的超声波接合方法,使得当在引线框架到电路板的超声波接合时,在低负载和低超声波振动能量的条件下可以确保高结强度。 解决方案:用于布线的引线框架4的端面叠置在绝缘基板2a的导体图案2b的顶部上,并且通过添加压力来执行用于直接金属结的引线框架的超声波接合方法 通过按压在引线框架上的超声焊接工具8,对接合表面施加力和超音速振动。 另外,在利用加热器9进行加热加热的同时,使其易于软化并提供塑性流动的预热高温状态,从气体注入喷嘴10向接合面喷射惰性气体, 粘合表面可以与周围空气气氛隔离,以防止氧化膜的快速生长。 在该状态下,按压接合工具以进行超声波接合。 版权所有(C)2006,JPO&NCIPI
    • 5. 发明专利
    • Semiconductor device, and its manufacturing method
    • 半导体器件及其制造方法
    • JP2008091801A
    • 2008-04-17
    • JP2006273527
    • 2006-10-05
    • Fuji Electric Holdings Co Ltd富士電機ホールディングス株式会社
    • YAMASHITA MITSUO
    • H01L23/48B23K1/00B23K35/22B23K35/26B23K101/40C22C13/00
    • H01L2224/34H01L2224/48091H01L2224/49111H01L2224/73265H01L2224/77272H01L2224/83801H01L2224/84801H01L2924/00014H01L2924/01322H01L2924/351H01L2924/00H01L2224/37099H01L2224/37599H01L2924/00012
    • PROBLEM TO BE SOLVED: To achieve a jointing part excellent in thermal resistance and thermal fatigue, and face-jointing a wiring conductor to a surface electrode of a semiconductor device and jointing the semiconductor device to a conductor substrate with high positional precision, using a soldering material free from lead. SOLUTION: A solder paste of a Sn3.5Ag0.5Cu particle (melting temperature: 220°C) is applied on the surface of a conductor substrate 12; and a semiconductor device 14 is placed thereon. A cream solder of mixed particles (solidus temperature: 220°C, liquidus temperature: 345°C) of a Sn20Ag20Cu0.4Ni powder and a Sn3.5Ag0.5Cu0.07Ni0.01Ge powder in the weight ratio of 62:35, is applied on a surface electrode of the semiconductor device 14; and a wiring conductor 16 is placed thereon. The resultant is heated at 250°C in this state to melt the solder paste of the Sn3.5Ag0.5Cu particle and to make the cream solder of a Sn14.2Ag13.2Cu0.28Ni0.035Ge in total composition into a solid-liquid coexistence state. Then, the resultant is cooled to joint the conductor substrate 12, the semiconductor device 14 and the wiring conductor 16 through the Sn3.5Ag0.5Cu jointing material 17 and the Sn14.2Ag13.2Cu0.28Ni0.035Ge jointing material 15. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题为了实现热阻和热疲劳性优异的接合部分,并且将布线导体面对半导体器件的表面电极并且将半导体器件以高位置精度接合到导体基板, 使用不含铅的焊接材料。 解决方案:将Sn3.5Ag0.5Cu颗粒的焊膏(熔化温度:220℃)施加到导体基板12的表面上; 并且在其上放置半导体器件14。 将Sn20Ag20Cu0.4Ni粉末和Sn3.5Ag0.5Cu0.07Ni0.01Ge粉末的重量比为62:35的混合颗粒(固相线温度:220℃,液相线温度:345℃)的膏状糊料施加 在半导体器件14的表面电极上; 并且布线导体16放置在其上。 在该状态下将所得物在250℃下加热以熔化Sn3.5Ag0.5Cu颗粒的焊膏,并使Sn14.2Ag13.2Cu0.28Ni0.035Ge的膏状焊料的总组成变为固液共存 州。 然后,将所得物冷却,通过Sn3.5Ag0.5Cu接合材料17和Sn14.2Ag13.2Cu0.28Ni0.035Ge接合材料15将导体基板12,半导体器件14和布线导体16接合。 版权所有(C)2008,JPO&INPIT