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1. 发明专利

JPH1192931A VACUUM FILM FORMING METHOD AND DEVICE THEREFOR 失效
公开(公告)号：JPH1192931A
公开(公告)日：1999-04-06
申请号：JP25535497
申请日：1997-09-19
申请人： FUJITSU LTD
发明人： WAKAMATSU HIROAKI , KOSHIKAWA YOSHIO
IPC分类号： C23C14/56 , C23C16/44 , G11B5/84 , G11B5/85 , H01L21/203 , H01L21/205 , H01L21/31 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a vacuum film forming method by which a film can be rapidly formed with a small-sized device and to provide a small-sized vacuum film forming device by which the film can be rapidly formed in the vacuum film forming method and the device by which the thin film is formed on a disk-shaped substrate surface via plural film-forming processes in a vacuum. SOLUTION: At least one set of two pieces one set guides 41, 42 (conveyors are allowable) are provided so as to pass through plural process rooms 31 to 34 in which shared film forming processes are respectively executed. Plural substrates 37 are arranged between guides 41, 42 so that facing outer edge parts of the substrates 37 are supported with the guides 41, 42 and the substrates 37 lie in a row along the guides 41, 42. Respective substrates 37 are made to pass respective process rooms by moving the substrates 37 along the guides 41, 42 to form thin films on the substrates 37.

2. 发明专利

JPH1139815A HEAD SLIDER AND HEAD-SUPPORTING SPRING ASSEMBLY 失效
公开(公告)号：JPH1139815A
公开(公告)日：1999-02-12
申请号：JP19002097
申请日：1997-07-15
申请人： FUJITSU LTD
发明人： IMAMURA TAKAHIRO , KOSHIKAWA YOSHIO
IPC分类号： G11B21/21
摘要： PROBLEM TO BE SOLVED: To achieve sure contact at a terminal part and prevent a deformation of a head slider because of a difference of thermal expansion coefficients of the slider and a head-supporting spring assembly, etc., by setting a part of a different height at a rear face of the head slider and coupling only the high part to the head-supporting spring assembly. SOLUTION: A thin film conductor terminal 32 is set via a thin film insulating layer 46 at a front face of a head-supporting spring 30 of a thin stainless plate provided at the side of a rear face of a head slider 20. The head 20 has a columnar conductor terminal 18 and projections 43 and 44, and fixed to the head-supporting spring 30 at positions of projections 42, 43, 44 by means of an adhesive 48 with conductive powder. Since the mechanical coupling is limited only to the vicinity of the projections 42, 43, 44, a deformation of the head slider 20 due to a difference of linear expansions of the head slider 20 and head-supporting spring 30 because of an environmental temperature change is controlled to minimum. The projections are easily formed with good positional accuracy to the head slider 20 on a ceramic substrate at low cost.

3. 发明专利

JPH08287628A INFORMATION RECORDING AND REPRODUCING DEVICE 失效
公开(公告)号：JPH08287628A
公开(公告)日：1996-11-01
申请号：JP9218995
申请日：1995-04-18
申请人： FUJITSU LTD
发明人： KOSHIKAWA YOSHIO
IPC分类号： G11B21/02 , G11B25/04
摘要： PURPOSE: To secure the reliability of recording/reproducing information and also to secure electrostatic force in an information recording and reproducing device capable of impressing a voltage upon electrodes holding a head assembly between them and vibrating the assembly by gradually deforming the whole of a movable beam after the shape of the counter electrodes. CONSTITUTION: This device is equipped with an information storage medium 3 to be stepwise rotated or moved straight, and a head assembly 2 consisting of a head 5 for recording and reproducing information on the information storage medium 3 and a cantilever 6 mounting the head 5 at the tip, and the head 5 is vibrated in contact with the surface of the information storage medium 3. An end part on the side opposite to the tip mounting the head 5 of the cantilever 6 is held between the plural counter electrodes 8 via gaps on both sides respectively in the vibrating direction, and the head assembly 2 is vibrated by electrostatic force generated by impressing the voltage between the plural electrodes 8 or the electrodes 8 and the head assembly 2.

4. 发明专利

JPH0831204B2 失效
公开(公告)号：JPH0831204B2
公开(公告)日：1996-03-27
申请号：JP23385685
申请日：1985-10-18
申请人： FUJITSU LTD
发明人： KOSHIKAWA YOSHIO , MIURA YOSHIMASA
IPC分类号： G11B5/187 , G11B5/245 , G11B5/31 , G11B5/60

5. 发明专利

JPH07141601A MAGNETIC MEMORY DEVICE 失效
公开(公告)号：JPH07141601A
公开(公告)日：1995-06-02
申请号：JP4669494
申请日：1994-03-17
申请人： FUJITSU LTD
发明人： KOSHIKAWA YOSHIO , IKEGAWA YUKINORI , MAETA HIROSHI , OTSUKA YOSHINORI , IMAMURA TAKAHIRO , MIZOSHITA YOSHIBUMI
IPC分类号： G01R33/09 , G01Q60/10 , G01Q80/00 , G01R33/07 , G01R33/10 , G11B5/00 , G11B5/127 , G11B5/33 , G11B5/35 , G11B5/37 , G11B5/39 , G11B5/48 , G11B5/54 , G11B9/00 , H01L43/08
摘要： PURPOSE:To execute reading out with decreased noises without receiving the influence of the ruggedness of a magnetic recording medium by scanning the surface of this medium with a probe consisting of a conductive and soft magnetic material while maintaining the specified spacing therebetween. CONSTITUTION:A tunnel current flows through the microspacing just before contact with the surface of the magnetic recording medium 1 when the needle- shaped probe 3 (3a) is brought near to the recording medium while a prescribed voltage is impressed between the probe and the medium. The magnetic recording medium 1 is scanned in its surface direction by the probe 3 while the specified spacing is maintained by automatically controlling the vertical position of the probe 3 so as to maintain the specified current. The magnetization recorded in the part of the magnetic recording medium 1 facing the probe 3 generates the magnetic flux passing a closed magnetic circuit formed by a magnetic flux detecting element 12 magnetically connected to the part where the probe 3 is mounted, a return yoke 14a, the magnetic recording medium 1 and the probe 3. The reading out of the data recorded on the medium 1 is executed by detecting a change in the resistance of this magnetic flux detecting element 12.

6. 发明专利

JPH0778301A MAGNETIC RECORDING AND REPRODUCING DEVICE 失效
公开(公告)号：JPH0778301A
公开(公告)日：1995-03-20
申请号：JP22151593
申请日：1993-09-07
申请人： FUJITSU LTD
发明人： KOSHIKAWA YOSHIO
IPC分类号： G11B5/02 , G11B5/09
摘要： PURPOSE:To make a device light in weight, small in size and to generalize the use by packaging plural magnetic recording units, input/output chip and control chip on a substrate and mounting it on a printed circuit board or housing in a case. CONSTITUTION:The thin planar magnetic units 1, signal processing circuit chip 3 and control chip 4 are packaged on the substrate 2, and the recording/ reproducing operations of specified data are attained on the magnetic storage units 1 through the signal processing circuit 3. The control is made so that the continuous recording/reproducing operations on the units 1 are efficiently performed. Connecting terminals 6 are provided on the substrate 2 so that the substrate 2 packaged with the plural magnetic storage units 1, input/output chip 3 and control chip 4, is mounted on the printed circuit board 5, or by housing further the subsatrate in the case 7, a module unit 10 is formed.

7. 发明专利

JPH06131635A HORIZONTAL MAGNETO RESISTANCE EFFECT THIN FILM MAGNETIC HEAD 失效
公开(公告)号：JPH06131635A
公开(公告)日：1994-05-13
申请号：JP28197492
申请日：1992-10-20
申请人： FUJITSU LTD
发明人： KOSHIKAWA YOSHIO , MIZOSHITA YOSHIBUMI
IPC分类号： G11B5/23 , G11B5/39
摘要： PURPOSE:To reproduce a recording medium recorded with high density in excellent sensitivity. CONSTITUTION:The end surfaces 40, 41 of a magnetic pole 33 are slopes, and a gap part 42 has a tapered shape where a gap length becomes long in proportion to that a gap depth is deepened. A surface side part 51 has the narrow gap length l10. The rear side part 52 of the gap part 42 has the long gap length l11. The magneto resistance effect element 35 is constituted so as to be provided with a wide sense area 54.

8. 发明专利

JPH064825A PRODUCTION OF THIN-FILM MAGNETIC HEAD 失效
公开(公告)号：JPH064825A
公开(公告)日：1994-01-14
申请号：JP15928192
申请日：1992-06-18
申请人： FUJITSU LTD
发明人： KOSHIKAWA YOSHIO
IPC分类号： G11B5/31
摘要： PURPOSE:To enable the formation of high-accuracy patterns on an interlayer insulating layer consisting of a resin film to be formed between a chip layer and a coil conductor layer or between the coil conductor layer and a magnetic pole. CONSTITUTION:The first magnetic layer and the gap layer 14 are successively formed on a substrate and further, the coil conductor layer held by the interlayer insulating layer 35 consisting of a curable resin and the second magnetic pole layer are successively laminated and formed on the gap layer 14. Resist film patterns 31 are formed in the prescribed regions of a base material (gap layer) 14 and a plating ground surface film 32 is formed on the base material 14 including these resist film patterns 31. The surface of the plating ground surface film 32 is then subjected to a water repelling treatment to form a water repelling film 33 and thereafter the resist film patterns 31 are removed. A resin film 34 is applied to these removed regions and is cured, by which the interlayer insulating layer 35 is formed.

9. 发明专利

JPH04344309A THIN FILM MULTILAYER MAGNETIC MATERIAL 失效
公开(公告)号：JPH04344309A
公开(公告)日：1992-11-30
申请号：JP11631991
申请日：1991-05-21
申请人： FUJITSU LTD
发明人： KANAMINE MASAAKI , HOSONO KAZUMASA , KOSHIKAWA YOSHIO , AOYAMA SUSUMU , TODA JUNZO
IPC分类号： G11B5/147 , G11B5/31
摘要： PURPOSE:To suppress the generation of edge curling magnetic walls with a small number of layers on the thin film multilayer magnetic material to be used as high frequency magnetic core material. CONSTITUTION:A lamination is performed while intervening nonmagnetic layer 3 between two thin film magnetic layers 2a and 2b. The magnetic layers 2a and 2b are equipped with one axis anisotropy and the both edge parts of the cross sectional area are formed like a point.

10. 发明专利

JPH04291256A PHOTOMASK 失效
公开(公告)号：JPH04291256A
公开(公告)日：1992-10-15
申请号：JP5497991
申请日：1991-03-19
申请人： FUJITSU LTD
发明人： KOSHIKAWA YOSHIO
IPC分类号： G03F1/00 , G03F1/68 , G03F9/00 , G11B5/84
摘要： PURPOSE:To obtain the photomask which allows rapid, easy and precise positioning onto a disk substrate which is coated with a photoresist film and has a central hole relating to the photomask for forming an exposure pattern on the substrate which is to be worked and has a through-hole. CONSTITUTION:The photomask 21 having the mask pattern 2 for transfer on one surface of the substrate 22 for the mask is provided with at least one through-hole 23 corresponding to a circular or rectangular central hole 16 provided on the disk substrate 15 to be formed with the exposure pattern and the mask pattern 24 for transfer on the basis of the through-hole 23. This through-hole 23 is used as the hole for positioning the above-mentioned disk substrate 15.

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