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1. 发明专利

JP2008217901A Measuring method of plated layer width, magnetic recording head and manufacturing method therefor 审中-公开
标题翻译：镀层厚度，磁记录头及其制造方法的测量方法
公开(公告)号：JP2008217901A
公开(公告)日：2008-09-18
申请号：JP2007053679
申请日：2007-03-05
申请人： Fujitsu Ltd , 富士通株式会社
发明人： HOSONO KAZUMASA , IKEGAWA YUKINORI , KATO MASAYA , YANAGAWA MASASHI , YAMAKAWA KAORU , ITO TAKASHI
IPC分类号： G11B5/31 , G11B5/455
CPC分类号： G11B5/3133 , G11B5/1278 , G11B5/3163 , G11B5/3193
摘要： PROBLEM TO BE SOLVED: To allow the width of a main magnetic pole manufactured by a semiconductor process to be accurately measured, by clarifying the boundary between the main magnetic pole and a stopper layer manufactured by the semiconductor process. SOLUTION: Stopper layers 76 are formed on both side faces in a core breadthwise direction of the main magnetic pole 72, formed as a plated layer in a perpendicular magnetic recording head through first inorganic insulating layers 74 made of SiO 2 , Al 2 O 3 , diamond-like carbon, and the like, and a first inorganic insulating layers 74 formed in between the main magnetic pole 72, and the stopper layers are made conspicuous during observation with a scan type electronic microscope, so that the interval of the first inorganic insulating layers 74 is measured with high accuracy as a core width W. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：通过澄清通过半导体工艺制造的主磁极和阻挡层之间的边界，允许准确地测量通过半导体工艺制造的主磁极的宽度。解决方案：阻挡层76形成在主磁极72的芯宽度方向的两个侧面上，通过由SiO 2制成的第一无机绝缘层74形成为垂直磁记录头中的镀层金刚石状碳等，形成在主磁极72之间的第一无机绝缘层74和/或在扫描式电子显微镜的观察期间使阻挡层明显，从而以高精度测量第一无机绝缘层74的间隔作为芯宽度W.版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2004095020A Thin film magnetic head and manufacturing method thereof 审中-公开
公开(公告)号：JP2004095020A
公开(公告)日：2004-03-25
申请号：JP2002252897
申请日：2002-08-30
申请人： Fujitsu Ltd , 富士通株式会社
发明人： IKEGAWA YUKINORI
IPC分类号： G11B5/23 , G11B5/31
CPC分类号： G11B5/313 , G11B5/232 , G11B5/3116 , G11B5/3133 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin-film magnetic head, by which GD and θ become independently controllable.
SOLUTION: This method includes: a process to form a high permeability layer 30 of a material having the permeability higher than that of a lower magnetic pole 23a, on a surface of the lower magnetic pole 23a to be confronted with an upper magnetic pole 26 through a gap layer 31 of the writing tip part side; a process to form the gap layer 31 on the high permeability layer 30; a process to form a 2nd insulation layer 35 on a 1st insulation layer 29 so as to reduce the level difference between the high permeability layer 30 and the 1st insulation layer 29, which is generated by the formation of the high permeability layer 30; and a process to form a 3rd insulation layer 36 having a drawing pen shaped part 33 while covering the 2nd insulation layer 35 and covering the required parts of the lower magnetic pole 23a.
COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2001167409A THIN-FILM MAGNETIC HEAD AND MAGNETIC RECORDING MEDIUM DRIVE ASSEMBLY 失效
公开(公告)号：JP2001167409A
公开(公告)日：2001-06-22
申请号：JP2000148073
申请日：2000-05-19
申请人： FUJITSU LTD
发明人： TAGAWA IKUYA , KUTSUZAWA TOMOKO , NISHIDA SHUJI , KIYOMIYA TERUO , OTSUKA YOSHINORI , MAETA HIROSHI , HASEGAWA MINORU , KAKEHI MASAHIRO , SEKIKAWA TAKESHI , IKEGAWA YUKINORI
IPC分类号： G11B5/008 , G11B5/012 , G11B5/31 , G11B5/39
摘要： PROBLEM TO BE SOLVED: To provide a thin-film magnetic head which allows an upper sub- magnetic pole to relatively easily align with respect to a lower sub-magnetic pole even if the lower sub-magnetic pole is made shorter than the upper sub- magnetic pole. SOLUTION: The upper sub-magnetic pole 31 facing a floating surface 24 a the front end extends backward at a first length SD. The lower sub-magnetic pole end layer 32 spreads backward at a second length GD shorter than the first length SD while facing the floating end 4 at the front end. The magnetic flux flow flowing from the upper sub-magnetic pole 31 to the lower sub-magnetic pole layer 32 is concentrated to the front end of the upper sub-magnetic pole 31 and the lower sub-magnetic pole end layer 32. A strong gap magnetic field is formed on the floating surface 24. Even more, the length in a longitudinal direction is shortened at such lower magnetic pole end layer 32 but a large spread is assured in a track width direction. The, the positioning of the upper sub-magnetic pole 31 with respect to the lower sub-magnetic pole end layer 32 is easily realized.

4. 发明专利

JP2005108348A Method for manufacturing perpendicular magnetic recording head 审中-公开
标题翻译：制造全能磁记录头的方法
公开(公告)号：JP2005108348A
公开(公告)日：2005-04-21
申请号：JP2003341896
申请日：2003-09-30
申请人： Fujitsu Ltd , 富士通株式会社
发明人： SATO KAZUAKI , SAKUMICHI FUJIO , YAMAWAKI SEIGO , KOSHIKAWA YOSHIO , MIZOSHITA YOSHIBUMI , IKEGAWA YUKINORI
IPC分类号： G11B5/31
摘要： PROBLEM TO BE SOLVED: To efficiently manufacturing a highly accurate perpendicular magnetic recording head by accurately forming the section of a writing main magnetic pole into an inverted trapezoidal shape, and by preventing a variation in manufacturing.
SOLUTION: The method for manufacturing a perpendicular magnetic head provided with a magnetic yoke having a main magnetic pole opposed to a recording medium, a writing magnetic pole having a coil wound on the magnetic yoke, and a reproduction element, includes steps of: forming a main magnetic layer 20 as the main magnetic pole; forming a barrier layer 22 made of a nonmagnetic material on the surface of the main magnetic layer 20; and also forming a tip of the main pole 10 whose cross-section is formed into an inverted trapezoidal shape.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过将写入主磁极的部分精确地形成为倒梯形形状，并且通过防止制造变化来有效地制造高精度垂直磁记录头。解决方案：一种具有磁轭的方法，该磁轭具有与记录介质相对的主磁极，具有缠绕在磁轭上的线圈的书写磁极和再现元件，包括以下步骤：：形成主磁性层20作为主磁极; 在主磁性层20的表面上形成由非磁性材料制成的阻挡层22; 并且还形成其横截面形成为倒梯形形状的主极10的尖端。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2010020856A Magnetic head manufacturing method and information storage device 审中-公开
标题翻译：磁头制造方法和信息存储装置
公开(公告)号：JP2010020856A
公开(公告)日：2010-01-28
申请号：JP2008181910
申请日：2008-07-11
申请人： Fujitsu Ltd , 富士通株式会社
发明人： KOJIMA TAKASHI , IKEGAWA YUKINORI , KON JUNICHI , AOKI TAKESHI
IPC分类号： G11B5/31
摘要： PROBLEM TO BE SOLVED: To provide a magnetic recording head manufacturing method that forms reversed trapezoidal main poles of a narrow pattern width.
SOLUTION: The magnetic recording head manufacturing method includes steps of: forming, on a base plate, a resist layer having a reversed trapezoidal groove at the end to face the medium; applying first ashing to the resist layer, shrinking the resist layer to reduce the groove dimension in the core width direction, and forming a magnetic material layer in the groove to make the recording magnetic pole.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供形成窄图案宽度的反向梯形主极的磁记录头制造方法。解决方案：磁记录头制造方法包括以下步骤：在底板上形成具有反向梯形槽的抗蚀剂层，该抗蚀层在端部处面向介质; 对抗蚀剂层施加第一灰化，使抗蚀剂层收缩以减小芯宽度方向上的凹槽尺寸，并在凹槽中形成磁性材料层以制成记录磁极。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2008004161A Manufacturing method of metal pattern 审中-公开
标题翻译：金属图案的制造方法
公开(公告)号：JP2008004161A
公开(公告)日：2008-01-10
申请号：JP2006172396
申请日：2006-06-22
申请人： Fujitsu Ltd , 富士通株式会社
发明人： SUZUKI KENTARO , TACHIBANA MASANORI , IKEGAWA YUKINORI
IPC分类号： G11B5/39 , H01L21/3205
CPC分类号： G11B5/3912 , G11B5/3163 , G11B5/855
摘要： PROBLEM TO BE SOLVED: To make it possible to polish a surface of a board into a flat face even if materials of different polishing rates such as a metal layer and an insulated layer are mixed and finish the metal layer into predetermined film thickness without variation.
SOLUTION: This method is characterized by having; a process to carry out deposition of a stopper film 20 on a surface of insulating film after adhering and forming an insulating film 11 on the board surface by covering the surface of the metal layer 10 of a predetermined pattern; a process to form a resist pattern 22 to expose only an evagination part 11a of the insulating film 11 which covers the metal layer 10, remove a stopper film 20 from a surface of the evagination part 11a, and form the stopper layer 20a on the surface of the insulating film covered with the resist pattern; a polishing process to carry out polish processing to the surface of the board 5 and polish the evagination part 11a up to the point regulated by the stopper layer 20a; and a process to carry out finish polishing of the surface of the board 5 after removing the stopper layer 20a from the surface of the insulating film 11.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：即使将诸如金属层和绝缘层的不同抛光速率的材料混合并将金属层整理成预定的膜厚度，也可以将板的表面抛光成平面没有变化。
解决方案：该方法的特征在于：通过将金属层10的表面覆盖预定图案而在基板表面上粘接并形成绝缘膜11之后，在绝缘膜的表面上进行停止膜20的沉积的工序; 形成抗蚀剂图案22以仅暴露覆盖金属层10的绝缘膜11的分解部分11a的工艺，从分离部分11a的表面去除阻挡膜20，并在表面上形成止动层20a 的绝缘膜被抗蚀剂图案覆盖; 对板5的表面进行抛光处理的抛光工序，将分散部11a抛光至由止挡层20a调节的点; 以及从绝缘膜11的表面除去阻挡层20a之后，对板5的表面进行精加工的工序。（C）2008，JPO＆INPIT

7. 发明专利

JP2000020915A MAGNETIC HEAD AND ITS PRODUCTION 失效
公开(公告)号：JP2000020915A
公开(公告)日：2000-01-21
申请号：JP18478098
申请日：1998-06-30
申请人： FUJITSU LTD
发明人： OTSUKA YOSHINORI , TAGAWA IKUYA , IKEGAWA YUKINORI , KUTSUZAWA TOMOKO , UEHARA YUJI , HASEGAWA MINORU
IPC分类号： G11B5/127 , G11B5/187 , G11B5/31 , G11B5/39
摘要： PROBLEM TO BE SOLVED: To enhance the strength of generated magnetic fields by executing shaping of magnetic poles in a magnetic head and a process for generating the same. SOLUTION: This process for producing the magnetic head includes various stages of forming a recording lower magnetic pole and a recording upper magnetic pole and partially subjecting the pole near the floating surface of the upper magnetic pole and the upper layer part of the lower magnetic pole existing on the lower periphery of the pole to a trimming treatment by an ion milling method and regulates the magnetic core width of the pole. In this case, the ion milling method executes milling by regulating the incident angle θi of ions within the range of 65 to 85 deg. with the flanks of the upper magnetic pole. As a result, the decrease in the film thickness on the surface of the upper magnetic pole may be substantially prevented.

8. 发明专利

JPH1186215A PLANAR TYPE THIN FILM MAGNETIC HEAD AND ITS FABRICATION 失效
公开(公告)号：JPH1186215A
公开(公告)日：1999-03-30
申请号：JP24093597
申请日：1997-09-05
申请人： FUJITSU LTD
发明人： IKEGAWA YUKINORI , KANAMINE MASAAKI
IPC分类号： G11B5/31 , G11B5/60
摘要： PROBLEM TO BE SOLVED: To obtain a planar type thin film magnetic head and a fabrication method thereof which is capable of generating a recording signal magnetic field of a relatively large output by reducing a magnetic resistance at a back closure section of a magnetic circuit. SOLUTION: This planar type thin film magnetic head includes: a lower magnetic pole 24 having a first end and a second end; and an upper magnetic pole 26 having a first end, magnetically connected to the first end of the lower magnetic pole 24, and a second end. A gap 30 is demarcated between the second end of the lower magnetic pole 24 and the second end of the upper magnetic pole 26. The thin film magnetic head further includes a spirally wound coil 32 having a center positioned in the vicinity of the gap 30 and passing between the upper magnetic pole 26 and the lower magnetic pole 24. The coil 32 is buried in an insulating layer.

9. 发明专利

JPH0696422A PRODUCTION OF THIN-FILM MAGNETIC HEAD 失效
公开(公告)号：JPH0696422A
公开(公告)日：1994-04-08
申请号：JP24309192
申请日：1992-09-11
申请人： FUJITSU LTD
发明人： IKEGAWA YUKINORI
IPC分类号： G11B5/31
摘要： PURPOSE:To prevent the phenomenon that an upper magnetic film peels from the interlayer insulating layer of the uppermost part by a difference in the coefft. of thermal expansion even if a lower magnetic pole and the upper magnetic film for forming the upper magnetic pole deposited on the interlayer insulating layer in the uppermost part coated with a thin-film coil are heat-treated in a magnetic field in the process for production of the thin-film magnetic head to be used for a magnetic disk device, etc. CONSTITUTION:A gap layer 13, the interlayer insulating layers 14, 16 consisting of thermosetting resins, the thin-film coil 15 and the interlayer insulating layer 17 of the uppermost part are successively formed on a substrate 11 formed with the lower magnetic pole 12 and thereafter, the upper magnetic film is deposited over the entire on the substrate 11 including the interlayer insulating layer 17 of the uppermost part. The upper magnetic film is parted by the circumference of the interlayer insulating layer 17 of the above-mentioned uppermost part and a part exclusive of the region where the upper magnetic pole is intended to be formed is removed prior to the heat- treatment of the upper magnetic film and the lower magnetic pole 12 in the magnetic field, by which the upper magnetic layer 31 partially exposed with the interlayer insulating layer 17 of the uppermost part is formed.

10. 发明专利

JP2010061733A Method of manufacturing magnetic head 审中-公开
标题翻译：制造磁头的方法
公开(公告)号：JP2010061733A
公开(公告)日：2010-03-18
申请号：JP2008226294
申请日：2008-09-03
申请人： Fujitsu Ltd , 富士通株式会社
发明人： FUJITA MUTSUMI , IKEGAWA YUKINORI , ITO TAKASHI
IPC分类号： G11B5/31
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic head which predicts neck height with high precision in a wafer stage and to increase product precision and yield of a product in a process of manufacturing the magnetic head.
SOLUTION: The manufacturing method includes steps of: forming a pair of neck height monitors (NH monitor) 30a, 30b to hold a flare point F of the main magnetic pole 10 after forming the main magnetic pole 10 in a wafer substrate; measuring a relative distance (ΔNH) between a center position C of the NH monitors 30a and 30b and the flare point F; and predicting the neck height of the main magnetic pole 10 based on the measurement result of the relative distance (ΔNH).
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造磁头的方法，其在晶片台中高精度地预测颈部高度，并且在制造磁头的过程中提高产品的产品精度和产量。解决方案：制造方法包括以下步骤：在晶片衬底中形成主磁极10之后，形成一对颈部高度监视器（NH监视器）30a，30b以保持主磁极10的扩口点F. 测量NH监视器30a和30b的中心位置C与闪光点F之间的相对距离（ΔNH）; 并且基于相对距离（ΔNH）的测量结果来预测主磁极10的颈部高度。版权所有（C）2010，JPO＆INPIT

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