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1. 发明专利

JP2010286368A Physical quantity detector and method of controlling the physical quantity detector, abnormality diagnosis system, and method of diagnosing abnormality 有权
标题翻译：物理量检测器和物理量检测器的控制方法，异常诊断系统和诊断异常的方法
公开(公告)号：JP2010286368A
公开(公告)日：2010-12-24
申请号：JP2009140700
申请日：2009-06-12
申请人： Epson Toyocom Corp , Seiko Epson Corp , Seiko Npc Corp , エプソントヨコム株式会社 , セイコーNpc株式会社 , セイコーエプソン株式会社
发明人： NARUSE HIDETO , TAKADA YUTAKA , SATO KENJI , TAKAHASHI MASAYUKI
IPC分类号： G01C19/56 , G01C19/5614 , G01C19/5621 , G01M17/007 , G01M99/00 , G01P21/02
CPC分类号： G01C19/56
摘要： PROBLEM TO BE SOLVED: To provide a physical quantity detector diagnosing abnormality more reliably, to provide a method of controlling the physical quantity detector, and to provide a system and a method for diagnosing abnormality. SOLUTION: An angular velocity detector 1 (one example of the physical quantity detectors) includes: a gyrosensor element 100 (one example of physical quantity detection elements) for generating a detection signal corresponding to the magnitude of angular velocity (one example of physical quantities) and a leakage signal of vibration based on a drive signal (square wave voltage signal 22) in a detection electrode; a drive circuit 20 for generating a drive signal; a synchronous detection circuit 350 for performing synchronous detection to a signal 36 to be detected including a detection signal and a leakage signal, based on a detection signal 34 in synchronization with the drive signal; and a phase change circuit 352 for changing relative timing of at least one of rising and falling of the detection signal 34 to the signal 36 to be detected so that at least one portion of the leakage signal is outputted by synchronous detection, based on a control signal 64. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供更可靠地诊断异常的物理量检测器，提供一种控制物理量检测器的方法，并且提供用于诊断异常的系统和方法。角速度检测器1（物理量检测器的一个示例）包括：用于产生与角速度的大小相对应的检测信号的陀螺仪传感器元件100（物理量检测元件的一个示例）物理量）和基于检测电极中的驱动信号（方波电压信号22）的振动泄漏信号; 用于产生驱动信号的驱动电路20; 同步检测电路350，用于与驱动信号同步地基于检测信号34对包括检测信号和泄漏信号的待检测信号36进行同步检测; 以及相位改变电路352，用于将检测信号34的上升和下降中的至少一个的相对定时改变为待检测的信号36，使得通过同步检测输出至少一部分泄漏信号，基于控制信号64.版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2009300253A Sensor and manufacturing method thereof 审中-公开
标题翻译：传感器及其制造方法
公开(公告)号：JP2009300253A
公开(公告)日：2009-12-24
申请号：JP2008155099
申请日：2008-06-13
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： SATO KENJI , KIKUCHI TAKAYUKI
IPC分类号： G01C19/56 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide a sensor for stably mounting a package for storing a gyroscope 10, and to provide a method of manufacturing the sensor. SOLUTION: A ceramic package 12 stores the gyroscope 10, includes a surface 14 orthogonally crossing a detection axis, and forms a rectangular parallelepiped excluding a cube. In a substrate 38, the ceramic package 12 is mounted on a first surface 24, an electrode 30 electrically connected to the gyroscope 10 is provided on a second surface 26, and the substrate is made of a material at least containing resin. A resin section 36 covers the entire surface other than a surface opposite to the first surface 24 in the ceramic package 12, and adheres to a region for continuously surrounding the ceramic package 12 in the first surface 24. The ceramic package 12 is disposed so that either side excluding the shortest side of the rectangular parallelepiped is positioned vertical to the substrate 38. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于稳定地安装用于存储陀螺仪10的包装的传感器，并且提供一种制造传感器的方法。解决方案：陶瓷包装12存储陀螺仪10，包括与检测轴正交的表面14，并且形成不包括立方体的长方体。在基板38中，陶瓷封装12安装在第一表面24上，电连接到陀螺仪10的电极30设置在第二表面26上，并且基板由至少包含树脂的材料制成。树脂部分36覆盖除了陶瓷封装12中与第一表面24相对的表面之外的整个表面，并且粘附到在第一表面24中连续包围陶瓷封装12的区域。陶瓷封装12设置成使得不包括长方体的最短边的任一侧垂直于基板38定位。（C）2010，JPO＆INPIT

3. 发明专利

JP2008058143A Inertial sensor, manufacturing method of inertial sensor, and mounting structure of inertial sensor body 审中-公开
标题翻译：惯性传感器，惯性传感器的制造方法和惯性传感器体的安装结构
公开(公告)号：JP2008058143A
公开(公告)日：2008-03-13
申请号：JP2006235130
申请日：2006-08-31
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： SATO KENJI , MATSUNAGA MASATAKA
IPC分类号： G01C19/56 , G01C19/5628 , G01C21/12 , G01P15/08
摘要： PROBLEM TO BE SOLVED: To provide an inertial sensor which can set a detection shaft at a prescribed angle without great cost increase, and without deteriorating detection performance of a detection element. SOLUTION: The inertial sensor is equipped with: an inertial sensor body 10 having a crystal oscillation element 11 which is the detection element for detecting the magnitude of a physical quantity in the detection shaft direction, a ceramic package 17 for storing the crystal oscillation element 11, and a mounting electrode 18 formed on the outside bottom surface of the ceramic package 17; and a metal ball 2 connected to the mounting electrode 18, for tilting the detection shaft at a prescribed angle from the normal direction to be detected. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种惯性传感器，其可以将检测轴设置在规定角度而不会大幅度增加，并且不会降低检测元件的检测性能。解决方案：惯性传感器配备有惯性传感器体10，其具有作为用于检测检测轴方向上的物理量的大小的检测元件的晶体振荡元件11，用于存储晶体的陶瓷封装17 振动元件11和形成在陶瓷封装17的外侧底面上的安装电极18; 以及连接到安装电极18的金属球2，用于使检测轴以与要检测的法线方向成规定角度倾斜。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2007281554A Forming method of minute electrode 审中-公开
标题翻译：分电极的形成方法
公开(公告)号：JP2007281554A
公开(公告)日：2007-10-25
申请号：JP2006101638
申请日：2006-04-03
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： SATO KENJI
IPC分类号： H03H3/02
摘要： PROBLEM TO BE SOLVED: To provide a technology of forming the corner of a minute electrode formed on a substrate so as to have a desired shape and of forming an electrode more minute than one metal mask. SOLUTION: In the method for forming the minute electrode 50, the minute electrode is formed on the surface 11 of a crystal substrate 10 by using metal masks, a first metal mask 20 and a second metal mask 30 are laminated on the surface 11 of the crystal substrate 10 and electrode forming openings 21, 31 of the first metal mask 20 and the second metal mask 30 are combined to form an electrode forming opening 40 with a prescribed shape. Corners 40a to 40d having no etching residue are formed to the electrode forming opening 40 by crossing straight line parts 22, 23 of the electrode forming opening 21 with straight line parts 32, 33 of the electrode forming opening 31. Moreover, the minute electrode 50 having no etching residue is formed at the position of the electrode forming opening 40 by the vapor deposition method. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种技术，其形成在基板上形成的微小电极的角部以具有期望的形状并且形成比一个金属掩模更加微小的电极。解决方案：在形成微小电极50的方法中，通过使用金属掩模在晶体基板10的表面11上形成微小电极，在表面上层叠第一金属掩模20和第二金属掩模30 将第一金属掩模20和第二金属掩模30的晶体基板10的11和电极形成开口21,31组合形成规定形状的电极形成开口40。通过将电极形成开口21的直线部分22,23与电极形成开口31的直线部分32,33交叉，而在电极形成开口40上形成没有蚀刻残留物的角部40a至40d。此外，微小电极50 通过气相沉积法在电极形成开口40的位置处形成没有蚀刻残留物。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2007096701A Method of manufacturing crystal substrate 有权
标题翻译：制造水晶基板的方法
公开(公告)号：JP2007096701A
公开(公告)日：2007-04-12
申请号：JP2005282826
申请日：2005-09-28
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： SATO KENJI
IPC分类号： H03H9/19 , H01L41/18 , H01L41/337 , H01L41/39
CPC分类号： H03H9/19 , H03H9/02086 , H03H9/02157
摘要： PROBLEM TO BE SOLVED: To obtain a means of uniformly beveling an AT cut crystal substrate which is a rectangular flat plate by solving the problem that the crystal substrate is not processed to a uniform bevel width when the crystal substrate is put in a cylindrical container together with an abrasive material to bevel the crystal substrate and the container is rotated at a specified rotating speed for a specified time for beveling. SOLUTION: The crystal substrate is obtained by: previously cutting four corners of an AT cut crystal substrate in a rectangular flat plate shape; putting the substrate in the cylindrical container together with the abrasive material; and rotating the cylindrical container at the specified rotating speed to bevel peripheral edge parts of the crystal substrate. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了获得通过解决当将晶体基板放置在其中时晶体基板未被加工成均匀斜面宽度的问题而获得将矩形平板的AT切割晶体基板均匀地倾斜的方法圆柱形容器与研磨材料一起倾斜晶体基板，并且容器以指定的转速旋转规定的时间用于斜切。解决方案：晶体基板通过以下方式获得：预先切割矩形平板形状的AT切割晶体基板的四个角; 将基材与研磨材料一起放在圆筒形容器中; 并以规定的旋转速度旋转圆筒形容器以倾斜晶体衬底的周边边缘部分。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2007064752A Piezoelectric vibrator and adjustment method 审中-公开
标题翻译：压电振动器和调整方法
公开(公告)号：JP2007064752A
公开(公告)日：2007-03-15
申请号：JP2005249707
申请日：2005-08-30
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： SATO KENJI
IPC分类号： G01C19/56 , G01C19/5769 , H01L41/08 , H01L41/18 , H01L41/22 , H01L41/253 , H03H3/04 , H03H9/02
CPC分类号： H03H9/2473 , G01C19/5607
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator of a piezoelectric vibration gyro and its adjustment method with reduced adjustment cost. SOLUTION: The piezoelectric vibrator for a piezoelectric vibration gyro uses an electrically conductive paste made of stably-dispersed metallic nanoparticles as an additional mass for adjustment. The electrically conductive paste is discharged from a nozzle for an inkjet printer, is coated on a predetermined position on the surface of the piezoelectric vibrator, and is sintered at a predetermined temperature, thereby achieving desired vibration characteristics. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供压电振动陀螺仪的压电振动器及其调节方法，调整成本降低。解决方案：用于压电振动陀螺仪的压电振动器使用由稳定分散的金属纳米颗粒制成的导电浆料作为用于调节的附加质量。导电膏从喷墨打印机的喷嘴排出，涂覆在压电振动器的表面上的预定位置，并在预定温度下烧结，从而获得所需的振动特性。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2010025695A Angular velocity detection circuit, angular velocity detector, and failure determination system 有权
标题翻译：角速度检测电路，角速度检测器和故障确定系统
公开(公告)号：JP2010025695A
公开(公告)日：2010-02-04
申请号：JP2008186137
申请日：2008-07-17
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： SATO KENJI
IPC分类号： G01C19/56 , G01C19/5614 , G01P21/02
CPC分类号： G01C19/5607
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity detection circuit, an angular velocity detector, and a failure determination system for increasing failure detection precision of an oscillator. SOLUTION: The angular velocity detection circuit 5 is connected to an oscillator 10 excited based on a drive signal and detects angular velocity. The angular velocity detection circuit 5 includes: a self-vibration component extraction means 331 that receives, from the oscillator 10, a detection signal including an angular velocity component based on a Coriolis force and a self-vibration component based on the excited vibration and extracts the self-vibration component from the detection signal; a DC conversion means 332 including an integration means 336 that integrates an output signal of the self-vibration component extraction means 331; and a temperature characteristic correction means 333 that compensates for a variation depending on temperature in an output signal of the DC conversion means 332. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于增加振荡器的故障检测精度的角速度检测电路，角速度检测器和故障确定系统。解决方案：角速度检测电路5连接到基于驱动信号激励的振荡器10，并检测角速度。角速度检测电路5包括：自振部件提取装置331，其从振荡器10接收包括基于科里奥利力的角速度分量和基于激发的振动和提取物的自振分量的检测信号检测信号的自振分量; DC转换装置332，包括积分装置336，积分装置336对自身振动分量提取装置331的输出信号进行积分; 以及温度特性校正装置333，其补偿根据DC转换装置332的输出信号中的温度的变化。版权所有：（C）2010，JPO＆INPIT

8. 发明专利

JP2008139054A Angular velocity sensor 审中-公开
标题翻译：角速度传感器
公开(公告)号：JP2008139054A
公开(公告)日：2008-06-19
申请号：JP2006323088
申请日：2006-11-30
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： KIKUCHI TAKAYUKI , SATO KENJI
IPC分类号： G01C19/56 , G01C19/5628 , H01L41/08 , H01L41/18
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of detecting precisely an angular velocity, even when an angle of a detection axis of the angular velocity sensor to an actual rotation applied axis is great, without inclining a piezoelectric oscillator to be fixed. SOLUTION: This angular velocity sensor using vibration of a piezoelectric oscillation piece has the first axis for detecting the angular velocity and the second axis set along a direction orthogonal to the first axis, and a detection sensitivity of the second axis is 15-55% of detection sensitivity of the first axis. Sensitivity correction of 15% or less is enough in attaching wherein an angle of the detection axis of the angular velocity sensor to the actual rotation applied axis is up to 40°, and an output sensitivity caused by the attaching angle can be corrected by computation processing based on a software. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：为了提供能够精确地检测角速度的角速度传感器，即使当角速度传感器的检测轴相对于实际旋转轴施加的角度大时，也不会将压电振荡器倾斜到被固定。解决方案：使用压电振动片的振动的角速度传感器具有用于检测沿着与第一轴正交的方向的角速度和第二轴组的第一轴，并且第二轴的检测灵敏度为15度，第一轴的检测灵敏度的55％。 15％以下的灵敏度校正足以使角速度传感器的检测轴与实际旋转轴的角度达到40°，并且可以通过计算处理来校正由安装角度引起的输出灵敏度基于软件。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2008096420A Inertial sensor, inertial sensor device, and production method thereof 有权
标题翻译：惯性传感器，惯性传感器装置及其制造方法
公开(公告)号：JP2008096420A
公开(公告)日：2008-04-24
申请号：JP2007119281
申请日：2007-04-27
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： MATSUNAGA MASATAKA , SATO KENJI
IPC分类号： G01C19/56
CPC分类号： G01P1/023 , G01C19/56 , H01L2924/181 , H05K3/3426 , Y10T29/49002 , H01L2924/00012
摘要： PROBLEM TO BE SOLVED: To provide an inertial sensor capable of setting a detection axis at a predetermined angle, without deteriorating the detection performance of detecting elements. SOLUTION: The inertial sensor device includes a plurality of leads connected electrically with a mounting substrate, a gyro sensor 10, installation angle of which is determined based on shape of a lead terminal 20 composed by a plurality of the leads, containing a sensor responding to operation for a detection axis 70, and a mold fixing the gyro sensor 10 to make a perpendicular line of the basal plane 61 of a mold package to intersect with the detection axis 70 at a predetermined angle. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够将检测轴设置在预定角度的惯性传感器，而不会使检测元件的检测性能恶化。解决方案：惯性传感器装置包括与安装基板电连接的多个引线，陀螺仪传感器10，其安装角度基于由多个引线构成的引线端子20的形状来确定，该引线端子20包含传感器响应于检测轴70的操作，以及模具固定陀螺传感器10，以使模具包装的基面61的垂直线以预定角度与检测轴70相交。版权所有（C）2008，JPO＆INPIT

10. 发明专利

JP2008058145A Inertial sensor and manufacturing method of inertial sensor 审中-公开
标题翻译：惯性传感器的惯性传感器和制造方法
公开(公告)号：JP2008058145A
公开(公告)日：2008-03-13
申请号：JP2006235132
申请日：2006-08-31
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： SATO KENJI , MATSUNAGA MASATAKA
IPC分类号： G01C19/56 , G01C19/5628 , G01C21/00 , G01C21/26
摘要： PROBLEM TO BE SOLVED: To provide an inertial sensor which acquires a stable characteristic as a sensor, and sets a detection shaft at a prescribed angle.
SOLUTION: The inertial sensor is equipped with: a sensor body 10 having a crystal oscillation element 11 which is a detection element for detecting the magnitude of a physical quantity in the detection shaft direction, a ceramic package 17 for storing the crystal oscillation element 11, a mounting electrode 18 formed on the outside bottom surface of the ceramic package 17, and a metal ball 2 connected to the mounting electrode 18, for tilting the detection shaft at a prescribed angle from the normal direction to be detected; a lead frame 4 connected to the mounting electrode 18 including the metal ball 2; and a resin 5 for molding the sensor body 10.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种惯性传感器，其获得作为传感器的稳定特性，并将检测轴设定为规定角度。解决方案：惯性传感器配备有传感器体10，其具有作为用于检测检测轴方向的物理量的检测元件的晶体振荡元件11，用于存储晶体振荡的陶瓷封装17 元件11，形成在陶瓷封装17的外侧底面上的安装电极18和连接到安装电极18的金属球2，用于使检测轴以与要检测的法线方向成规定角度倾斜; 连接到包括金属球2的安装电极18的引线框架4; 以及用于模制传感器体10的树脂5.版权所有（C）2008，JPO＆INPIT

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