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1. 发明专利

JP2011151857A Piezoelectric vibrator, electronic device, and electronic equipment 审中-公开
标题翻译：压电振动器，电子设备和电子设备
公开(公告)号：JP2011151857A
公开(公告)日：2011-08-04
申请号：JP2011095918
申请日：2011-04-22
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： KURODA TAKAHIRO
IPC分类号： H03H9/02 , H01L23/04 , H03H3/02 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator excellent in frequency characteristics by implementing a structure, in which electrical connection between a piezoelectric vibration piece and upper/lower substrates can be surely attained by securing airtightness while reducing a temperature at joining, and to provide a method for manufacturing the same. SOLUTION: A crystal oscillator 10 is composed by directly joining together an intermediate crystal plate 11, in which a crystal vibration piece 12 having excitation electrodes 14a and 14b provided on both main surfaces and a frame 13 are integrally formed, and the upper and lower substrates 2 and 3. The excitation electrodes 14a and 14b are, respectively, connected to connection parts 18a and 18b provided to the frame 13 on the opposite-side main surfaces via lead-out electrodes 15a and 15b and frame through-holes 50a and 50b. Solder 90 is buried in substrate through-holes 60a and 60b provided so as to be electrically connected to respective external connection terminals 8a and 8b in each of the upper and lower substrates 2 and 3. The excitation electrodes 14a and 14b are thereby conductive to the external connection terminals 8a and 8b, respectively. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决问题的方案为了提供一种通过实现一种结构来提供频率特性优异的压电振动器，其中通过在降低接合温度的同时确保气密性可以可靠地获得压电振动片和上/下基片之间的电连接，并提供其制造方法。解决方案：晶体振荡器10通过将中间晶体板11直接接合在一起而构成，在中间晶体板11中，在两个主表面上设置有激励电极14a和14b的晶体振动片12和框架13一体地形成，和下基板2和3.激励电极14a和14b分别通过引出电极15a和15b以及框架通孔50a连接到设置在相对侧主表面上的框架13的连接部分18a和18b 和50b。焊料90被埋置在与上，下基板2和3中的每一个中的各个外部连接端子8a和8b电连接的基板通孔60a和60b中。因此，激励电极14a和14b由此导通外部连接端子8a和8b。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2011139532A Method of manufacturing crystal wafer 有权
标题翻译：制造晶体波的方法
公开(公告)号：JP2011139532A
公开(公告)日：2011-07-14
申请号：JP2011055577
申请日：2011-03-14
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： MURAKAMI SHIRO , KOMINE KENJI
IPC分类号： H03H9/19 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/23 , H01L41/332 , H01L41/335 , H03H3/02
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric wafer and piezoelectric device in which, even when a piezoelectric substrate is formed by etching the piezoelectric wafer, a shape of the piezoelectric substrate is maintained and the piezoelectric substrate can be easily folded away from a piezoelectric wafer body. SOLUTION: In a piezoelectric wafer 10, a piezoelectric substrate 20, supporting parts 40 and a piezoelectric wafer body 12 are formed by etching. The piezoelectric substrate 20 is connected with the piezoelectric wafer body 12 via a plurality of supporting parts 40. Namely, the supporting parts 40 are connected to an end portion of a face (a proximal end face) 22 provided at a side of a proximal end 26 of the piezoelectric substrate 20. Outer side faces 46 of the supporting parts 40 are then formed continuously along a side face 24 of the piezoelectric substrate 20. Furthermore, on an inner side face 42 of each of the supporting parts 40, a first groove 44 is provided along the proximal end face 22 of the piezoelectric substrate 20. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决的问题：为了提供一种压电晶片和压电器件，其中即使当通过蚀刻压电晶片形成压电基板时，保持压电基板的形状，并且压电基板可以容易地从压电晶片体。解决方案：在压电晶片10中，通过蚀刻形成压电基板20，支撑部40和压电晶片体12。压电基板20经由多个支撑部40与压电晶片体12连接。即，支撑部40与设置在基端侧的面（近端面）22的端部连接然后，沿着压电基板20的侧面24连续地形成支撑部40的外侧面46.此外，在各支撑部40的内侧面42上形成有第一槽 44沿着压电基板20的近端面22设置。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2011114256A Nozzle, etchant supply device, and etching method 有权
标题翻译：喷嘴，电源供应器件和蚀刻方法
公开(公告)号：JP2011114256A
公开(公告)日：2011-06-09
申请号：JP2009271220
申请日：2009-11-30
申请人： Epson Toyocom Corp , Osaka Univ , エプソントヨコム株式会社 , 国立大学法人大阪大学
发明人： YUKI HIROAKI , YAMAMURA KAZUYA
IPC分类号： H01L21/306 , C03C15/00 , C23F1/08
摘要： PROBLEM TO BE SOLVED: To provide a nozzle preventing a device from corroding with an etchant by receiving the etchant having not been sucked fully from a suction opening, to provide an etchant supply device equipped with the nozzle, and to provide an etching method. SOLUTION: The nozzle 4, configured to supply the etchant to a surface 101 to be processed of a workpiece 10, includes: a nozzle body 41 which has a feed opening 412a for feeding the etchant and the suction opening 413a for sucking the etchant fed from the feed opening 412a, the feed opening 412a and suction opening 413a being disposed below the surface 101 to be processed; and a liquid reception portion 42 for receiving the etchant having not been sucked fully from the suction opening 413a. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种防止装置通过接收未被吸入口完全吸入的蚀刻剂的腐蚀剂的喷嘴，以提供配备有喷嘴的蚀刻剂供给装置，并提供蚀刻方法。解决方案：构造成将待蚀刻剂供给待加工的工件10的表面101的喷嘴4包括：喷嘴体41，其具有用于供给蚀刻剂的进料口412a和用于吸附蚀刻剂的吸入口413a 从供给口412a供给的蚀刻液，供给口412a和吸入口413a配置在被处理面101的下方。以及用于接收未被吸入开口413a完全吸入的蚀刻剂的液体接收部分42。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2011076097A Wave plate, polarizing converter, polarized light illumination device and optical pickup device 有权
标题翻译：波片，极化转换器，偏振光照明装置和光学拾取装置
公开(公告)号：JP2011076097A
公开(公告)日：2011-04-14
申请号：JP2010243316
申请日：2010-10-29
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： OTO MASAYUKI
IPC分类号： G02B5/30 , G11B7/135
摘要： PROBLEM TO BE SOLVED: To provide a means for forming a laminated half-wave plate for a triple-wavelength compatible optical pickup device. SOLUTION: A first and a second wave plates using crystal having birefringence are laminated together in such a manner that their optical axes intersect to form a laminated wave plate functioning as a half-wave plate as a whole. Phase differences of the first and the second wave plates relative to an ordinary ray and an extraordinary ray with respect to a predetermined wavelength λ are set to be Γ1 and Γ2, an order of a high-mode order is set to be a natural number n, whereby the high-order mode laminated half-wave plate is formed so as to satisfy: Γ1=180°+360°×n; and Γ2=180°+360°×n. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于形成用于三波长兼容的光学拾取装置的叠层半波片的装置。解决方案：使用具有双折射的晶体的第一和第二波片层叠在一起，使得它们的光轴相交，从而形成作为半波片整体起作用的叠层波片。第一和第二波片相对于普通光线和相对于预定波长λ的非凡光线的相位差被设置为Γ1和Γ2，高模量次序的顺序被设置为自然数n 由此形成高阶模式层叠半波片，以满足：Γ1= 180°+ 360°×n; Γ2= 180°+ 360°×n。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2011065175A Wavelength plate and optical pickup device using the same 审中-公开
标题翻译：波长板和使用它的光学拾取器件
公开(公告)号：JP2011065175A
公开(公告)日：2011-03-31
申请号：JP2010246107
申请日：2010-11-02
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： OTO MASAYUKI
IPC分类号： G02B5/30 , G11B7/135
摘要： PROBLEM TO BE SOLVED: To provide a half-wavelength plate in which two sheets of wavelength plates are pasted and temperature dependence of the phase difference of a plate is reduced. SOLUTION: The wavelength plate becomes by pasting together a first wavelength plate having a phase difference τ 1 (deg) and an azimuth of an optical axis θ 1 (deg) and a second wavelength plate having a phase difference τ 2 (deg) and an azimuth of an optical axis θ 2 (deg). The first wavelength plate and the second wavelength plate are pasted to satisfy θ 1 =(90+θ/2)/2, θ 2 =θ 1 +90+θ/2, when the phase difference τ 1 (deg) of the first wavelength plate and that τ 2 (deg) of the second wavelength plate are taken as τ 1 =τ 2 =360n+180 (n=0, 1, 2, ...), and an angle between polarization faces of incoming light and outgoing light is taken as θ(deg). COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供其中粘贴两张波片的半波长板，并降低板的相位差的温度依赖性。解决方案：波长板通过将具有相位差τ 1 （deg）的第一波长板和光轴θ 1°（deg）的方位粘合在一起）和具有相位差τ 2 （deg）和光轴θ 2（°）的方位角的第二波长板。第一波长板和第二波长板被粘贴以满足θ =（90 +θ/ 2）/ 2，θ 2 =θ 当第一波长板的相位差τ 1（s / s）（deg）和第二波长板的τ 2 （度）时，SB> + 90 +θ/ 2是取为τ 1 =τ 2 = 360n + 180（n = 0,1,2，...），以及入射光和出射的极化面之间的角度光取为θ（度）。版权所有（C）2011，JPO＆INPIT

6. 发明专利

JP2010286468A Dual tuning fork type vibrating reed, vibration type sensor element, and vibration type sensor 审中-公开
标题翻译：双调弦式振动台，振动式传感器元件和振动式传感器
公开(公告)号：JP2010286468A
公开(公告)日：2010-12-24
申请号：JP2010015510
申请日：2010-01-27
申请人： Epson Toyocom Corp , Seiko Epson Corp , エプソントヨコム株式会社 , セイコーエプソン株式会社
发明人： NISHIZAWA RYUTA , ICHIKAWA SO
IPC分类号： G01P15/10 , H01L41/08 , H01L41/18 , H01L41/22 , H01L41/29 , H01L41/311
摘要： PROBLEM TO BE SOLVED: To provide a dual tuning fork type vibrating reed having a small size and high sensitivity. SOLUTION: The dual tuning fork type vibrating reed 100 is such that a first vibration arm part 10 has a first region 12, and a second region 14 and a third region 16 aligned in due order in a direction from a first base end 30 toward a second base end 40; a second vibration arm part 20 has a fourth region 22, a fifth region 24 and a sixth region 26 aligned, in this order, in a direction from the first base end 30 toward the second base end 40; first exciting electrodes 110 connected mutually electrically are formed on front and rear surfaces of the first region 12, both side faces of the second region 14, front and rear surfaces of the third region 16, both side faces of the fourth region 22, front and rear surfaces of the fifth region 24 and both side faces of the sixth region 26; and a second exciting electrodes 120 mutually connected electrically are formed on both the side faces of the first region 12, front and rear surfaces of the second region 14, both side faces of the third region 16, the front and rear surfaces of the fourth region 22, both the side faces of the fifth region 24 and front and rear surfaces of the sixth region 26. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供具有小尺寸和高灵敏度的双音叉型振动片。解决方案：双音叉型振动片100使得第一振动臂部分10具有第一区域12，以及第二区域14和第三区域16，该第二区域14和第三区域16在从第一基端 30朝向第二基端40; 第二振动臂部20具有第四区域22，第五区域24和第六区域26，该第四区域22，第五区域24和第六区域26依次从第一基端30向第二基端40的方向排列。在第一区域12的前表面和后表面上形成有第一激励电极110，第二区域14的两个侧面，第三区域16的前表面和后表面，第四区域22的两个侧面，前面和后面第五区域24的后表面和第六区域26的两个侧面; 并且在第一区域12的两个侧面，第二区域14的前表面和后表面，第三区域16的两个侧面，第四区域的前表面和后表面上形成有电连接的第二激励电极120 22，第五区域24的侧面和第六区域26的前表面和后表面两者。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2010286368A Physical quantity detector and method of controlling the physical quantity detector, abnormality diagnosis system, and method of diagnosing abnormality 有权
标题翻译：物理量检测器和物理量检测器的控制方法，异常诊断系统和诊断异常的方法
公开(公告)号：JP2010286368A
公开(公告)日：2010-12-24
申请号：JP2009140700
申请日：2009-06-12
申请人： Epson Toyocom Corp , Seiko Epson Corp , Seiko Npc Corp , エプソントヨコム株式会社 , セイコーNpc株式会社 , セイコーエプソン株式会社
发明人： NARUSE HIDETO , TAKADA YUTAKA , SATO KENJI , TAKAHASHI MASAYUKI
IPC分类号： G01C19/56 , G01C19/5614 , G01C19/5621 , G01M17/007 , G01M99/00 , G01P21/02
CPC分类号： G01C19/56
摘要： PROBLEM TO BE SOLVED: To provide a physical quantity detector diagnosing abnormality more reliably, to provide a method of controlling the physical quantity detector, and to provide a system and a method for diagnosing abnormality. SOLUTION: An angular velocity detector 1 (one example of the physical quantity detectors) includes: a gyrosensor element 100 (one example of physical quantity detection elements) for generating a detection signal corresponding to the magnitude of angular velocity (one example of physical quantities) and a leakage signal of vibration based on a drive signal (square wave voltage signal 22) in a detection electrode; a drive circuit 20 for generating a drive signal; a synchronous detection circuit 350 for performing synchronous detection to a signal 36 to be detected including a detection signal and a leakage signal, based on a detection signal 34 in synchronization with the drive signal; and a phase change circuit 352 for changing relative timing of at least one of rising and falling of the detection signal 34 to the signal 36 to be detected so that at least one portion of the leakage signal is outputted by synchronous detection, based on a control signal 64. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供更可靠地诊断异常的物理量检测器，提供一种控制物理量检测器的方法，并且提供用于诊断异常的系统和方法。角速度检测器1（物理量检测器的一个示例）包括：用于产生与角速度的大小相对应的检测信号的陀螺仪传感器元件100（物理量检测元件的一个示例）物理量）和基于检测电极中的驱动信号（方波电压信号22）的振动泄漏信号; 用于产生驱动信号的驱动电路20; 同步检测电路350，用于与驱动信号同步地基于检测信号34对包括检测信号和泄漏信号的待检测信号36进行同步检测; 以及相位改变电路352，用于将检测信号34的上升和下降中的至少一个的相对定时改变为待检测的信号36，使得通过同步检测输出至少一部分泄漏信号，基于控制信号64.版权所有（C）2011，JPO＆INPIT

8. 发明专利

JP2010268475A High frequency piezoelectric device 有权
标题翻译：高频压电器件
公开(公告)号：JP2010268475A
公开(公告)日：2010-11-25
申请号：JP2010133725
申请日：2010-06-11
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： IWATA KOICHI
IPC分类号： H03H9/19 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/332
摘要： PROBLEM TO BE SOLVED: To obtain a means for small-sizing a contour shape of a high frequency piezoelectric vibrator. SOLUTION: A recessed part 2 is formed on one principal surface of a crystal substrate 1, an electrode 3 is disposed almost in the center of an opposite plane side, a lead electrode 4 extends from the electrode 3 to a terminal part of the crystal substrate 1 and is connected with a pad electrode 5 provided in a thick part of an annular surrounding portion of the crystal substrate 1, and a full-surface electrode 6 is deposited to the recessed side of the crystal substrate 1, thereby constituting a high frequency piezoelectric vibrator. In addition, in the thick annular surrounding portion, a thick part α of the annular surrounding portion of one side is formed smaller than other sides. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：获得用于小型化高频压电振动器的轮廓形状的装置。解决方案：在晶体基板1的一个主表面上形成凹陷部分2，电极3几乎位于相对平面侧的中心，引线电极4从电极3延伸到晶体基板1并且与设置在晶体基板1的环形周围部分的厚部分中的焊盘电极5连接，并且在该晶体基板1的凹陷侧沉积全面电极6，由此构成高频压电振动器。此外，在厚的环状周围部分中，一侧的环形环绕部分的厚部分α形成为比其他侧面小。版权所有（C）2011，JPO＆INPIT

9. 发明专利

JP2010263388A Surface acoustic wave element, and surface acoustic wave device 审中-公开
标题翻译：表面声波元件和表面声波设备
公开(公告)号：JP2010263388A
公开(公告)日：2010-11-18
申请号：JP2009112339
申请日：2009-05-01
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： YAMANAKA KUNIHITO , SAKUMA MASAYASU
IPC分类号： H03H9/25 , H01L35/30 , H01L41/09 , H01L41/18 , H03H9/145
摘要： PROBLEM TO BE SOLVED: To provide a SAW element and a SAW device, capable of effectively and sufficiently performing variable control of frequency.
SOLUTION: In the SAW element 1, an IDT 3 for exciting SAW and heater electrodes 5a, 5b are provided on the main surface of a piezoelectric substrate 2 made of quartz, and the heater electrodes are disposed on both sides of a direction orthogonal to the SAW propagation direction for the IDT. When the frequency versus temperature characteristic of the piezoelectric substrate is expressed by a quadratic curve or a cubic curve, the operation temperature range of the SAW element is set not to include an extremal value but allow the quadratic curve or cubic curve to always change in a negative direction for the rise in a temperature.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供能够有效且充分地执行频率的可变控制的SAW元件和SAW器件。解决方案：在SAW元件1中，用于激发SAW和加热器电极5a，5b的IDT 3设置在由石英制成的压电基板2的主表面上，并且加热器电极设置在方向与IDT的SAW传播方向正交。当压电基板的频率对温度特性由二次曲线或三次曲线表示时，SAW元件的工作温度范围被设定为不包括极值，但允许二次曲线或三次曲线总是在温度上升的负方向。版权所有（C）2011，JPO＆INPIT

10. 发明专利

JP2010232932A Piezoelectric vibration chip 有权
标题翻译：压电振动芯片
公开(公告)号：JP2010232932A
公开(公告)日：2010-10-14
申请号：JP2009077828
申请日：2009-03-26
申请人： Epson Toyocom Corp , エプソントヨコム株式会社
发明人： YAMADA AKINORI
IPC分类号： H03H9/215 , H01L41/09 , H01L41/18 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To increase an area of an excitation electrode, while making a vibrating arm short, and attain improvement in excitation efficiency and reduction in a CI value as well as miniaturization in a piezoelectric vibration chip of a bending vibration mode.
SOLUTION: The vibrating arm 23 of the piezoelectric vibration chip 21 includes a first groove portion 27, extending from an arm portion 24 to an area of a wide spindle portion 25 at a tip of the vibrating arm, on each of top and reverse surfaces thereof, and a first excitation electrode 29 is formed on an internal surface thereof. The spindle portion includes a second bottomed groove portion 28, parallel with the first groove portion, on each of top and reverse surfaces at a part 26 protruding from a side face of the arm portion 24 along the width. A side face of the second groove portion which is adjacent to the first groove portion is formed continuously in level with the side face of the arm portion without any step, and a second excitation electrode 30 is formed continuously on the side face and the side face of the arm part.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了增加激励电极的面积，同时使振动臂短，并且提高激发效率和降低CI值以及弯曲振动模式的压电振动芯片的小型化。解决方案：压电振动芯片21的振动臂23包括从臂部24延伸到振动臂的尖端处的宽心轴部25的区域的第一槽部27，在其内表面上形成第一激励电极29。主轴部分包括与第一凹槽部分平行的第二底部凹槽部分28，其在从臂部分24的侧面沿着宽度突出的部分26的每个顶表面和反面上。与第一槽部相邻的第二槽部的侧面与臂部的侧面无级地连续形成，第二激励电极30在侧面和侧面的手臂部分。版权所有（C）2011，JPO＆INPIT

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