专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2006071069A Magnetic bearing device and turbo molecular pump loaded with magnetic bearing device 有权
标题翻译：磁性轴承装置和装有磁力轴承装置的涡轮分子泵
公开(公告)号：JP2006071069A
公开(公告)日：2006-03-16
申请号：JP2004258426
申请日：2004-09-06
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWASHIMA TOSHIAKI , OTACHI YOSHINOBU
IPC分类号： F16C32/04 , F04D19/04
CPC分类号： F16C32/0444 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device having high control precision and low vibration at low cost and to provide a turbo molecular pump loaded with the magnetic bearing device.
SOLUTION: Folding line approximation characteristic for switching resolution of respective sensors by folding lines is set in a sensitivity conversion circuit 12 and a sensitivity reconversion processing part 14. The sensitivity conversion circuit 12 outputs an analog intermediate signal 52 for converting a high sensitivity analog-digital signal when displacement of a rotor shaft 113 is within ±50μm using a position of the rotor shaft when operating this turbo molecular pump normally as reference. The sensitivity conversion circuit 12 outputs an analog intermediate signal 52 for converting a low sensitivity analog-digital signal when displacement of the rotor shaft 113 is from +50μm to +250μm or from -50μm to -250μm. It is controlled to have high sensitivity when displacement of the rotor shaft 113 is in a scope of ±50μm and to have low sensitivity when its displacement exceeds this scope.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种低成本地具有高控制精度和低振动的磁轴承装置，并提供装载有磁轴承装置的涡轮分子泵。解决方案：在灵敏度转换电路12和灵敏度重新设置处理部分14中设置用于通过折叠线来切换各个传感器的分辨率的折线近似特性。灵敏度转换电路12输出用于转换高灵敏度的模拟中间信号52 当通常作为参考使用该涡轮分子泵时，使用转子轴的位置，转子轴113的位移在±50μm内的模拟数字信号。当转子轴113的位移为+50μm至+250μm或-50μm至-250μm时，灵敏度转换电路12输出用于转换低灵敏度模拟数字信号的模拟中间信号52。当转子轴113的位移在±50μm的范围内时，被控制为具有高灵敏度，并且当其位移超过该范围时具有低的灵敏度。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2004328822A Motor controller, motor device, vacuum pump, correction current value measuring device, and motor controlling method 审中-公开
公开(公告)号：JP2004328822A
公开(公告)日：2004-11-18
申请号：JP2003116437
申请日：2003-04-22
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： OTACHI YOSHINOBU , FUKAMI HIDEO , NAMIKI HIROYOSHI , KAWASHIMA TOSHIAKI , MAEJIMA YASUSHI
IPC分类号： F04D19/04 , H02P6/10
CPC分类号： H02P6/10 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To reduce vibration generated by a motor device by using a vacuum pump such as a molecular pump. SOLUTION: A correction value of an electromagnet current supplied to each electromagnet which makes torque generated by a motor constant is acquired for each prescribed angle of a rotor while rotating it, to correct the electromagnet current of each phase. The correction value may be calculated with a prescribed numerical expression by using an induced voltage of a motor or the like. The correction value is calculated for each prescribed angle when the motor is driven which is stored in a RAM, and while the motor is operated, the correction value is read out of the RAM to correct an electromagnet current. COPYRIGHT: (C)2005,JPO&NCIPI

3. 发明专利

JP2007278267A Molecular pump and flange 有权
标题翻译：分子泵和法兰
公开(公告)号：JP2007278267A
公开(公告)日：2007-10-25
申请号：JP2006167968
申请日：2006-06-16
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： MAEJIMA YASUSHI , OTACHI YOSHINOBU , WADA RUMIKO , ENOMOTO YOSHIHIRO , BAILEY CHRIS , STEPHENSON DAWN , WILSON KATE
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D27/0292 , F04D29/522 , F04D29/601 , F04D29/644
摘要： PROBLEM TO BE SOLVED: To provide a molecular pump and a flange capable of easily forming an impact buffer structure. SOLUTION: The impact buffer structure for consuming impact energy is provided in the flange of the molecular pump. An insertion hole is provided in the flange. A buffer member formed of an independent small component is fitted into and fixed to the insertion hole. A bolt hole through which a bolt is inserted is provided within the buffer member, for fixing the flange to a vacuum vessel. Thin-wall parts are provided in the buffer member by forming hollow parts. Upon the occurrence of impact in a rotational direction of a rotor part in the molecular pump, for example, by breaking of the rotor part, the flange, together with the molecular pump, is slid in a rotational direction of the rotor part. This causes the bolt, through which the flange is fixed to the vacuum vessel, to hit against the buffer member resulting in plastic deformation of the buffer member. The plastic deformation of the buffer member consumes energy for molecular pump rotation and can buffer the impact generated in the molecular pump. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供能够容易地形成冲击缓冲结构的分子泵和凸缘。解决方案：在分子泵的法兰中提供消耗冲击能量的冲击缓冲结构。在凸缘上设有插孔。由独立的小部件形成的缓冲部件嵌合并固定于插入孔。在缓冲构件内设置有螺栓插入的螺栓孔，用于将凸缘固定到真空容器。通过形成中空部分在缓冲部件中设置薄壁部分。在分子泵中的转子部分的旋转方向发生冲击时，例如通过转子部分的断裂，凸缘与分子泵一起在转子部分的旋转方向上滑动。这使得凸缘固定到真空容器的螺栓撞击缓冲构件，导致缓冲构件的塑性变形。缓冲构件的塑性变形消耗分子泵旋转的能量，并可缓冲分子泵产生的冲击。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2007239464A Fixing structure of rotor shaft and rotor, and turbo-molecular pump including the same 有权
标题翻译：转子轴和转子的固定结构以及包括其的涡轮分子泵
公开(公告)号：JP2007239464A
公开(公告)日：2007-09-20
申请号：JP2006058647
申请日：2006-03-03
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： MAEJIMA YASUSHI , OTACHI YOSHINOBU , WADA RUMIKO , INAYOSHI YUTAKA , KAWANISHI SHINJI , SAKURAI ISAO , SUDA HIROYUKI , AKIMOTO TAKESHI
IPC分类号： F04D19/04 , F04D29/32
摘要： PROBLEM TO BE SOLVED: To provide a fixing structure of a rotor shaft and a rotor capable of keeping rotation balance of the rotor shaft and the rotor and preventing oscillation by keeping a contact condition of abutment surface of the rotor shaft and the rotor stable, and a turbo-molecular pump including the same.
SOLUTION: A counter bore part 259 of which upper surface is depressed from the abutment surface 257 is formed on an upper surface of a joining part 253 from a section where a penetrating shaft part 255 is formed to a section until an inner circumference of the abutment surface 257. Also, the upper surface of the counter bore part 259 is machined perpendicularly to an axial direction. Moreover, an annular projection part 261 of radial direction length L4 is projectingly provided by depth D1 of the counter bore part 259 at a position between a bolt hole 161 and the penetration shaft part 255 and separate from the penetrating shaft part 255 by about length L3. The annular projection part 261 is provided concentrically with the penetrating shaft 255.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供转子轴和转子的固定结构，其能够保持转子轴和转子的旋转平衡，并通过保持转子轴和转子的抵接表面的接触状态来防止振动稳定的，以及包括其的涡轮分子泵。解决方案：从接合表面257凹陷上表面的反孔部件259形成在从形成穿透轴部分255的部分到连接部分253的内部的内周的部分的上表面另外，台面孔部分259的上表面垂直于轴向加工。此外，径向长度为L4的环形突出部261在螺孔161和穿透轴部255之间的位置处突出地设置有反孔部259的深度D1，并且与穿透轴部255分离大约长度L3 。环形突起部261与穿透轴255同心地设置。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2006112490A Magnetic bearing device 审中-公开
标题翻译：磁力轴承装置
公开(公告)号：JP2006112490A
公开(公告)日：2006-04-27
申请号：JP2004299170
申请日：2004-10-13
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： NAMIKI HIROYOSHI , OTACHI YOSHINOBU
IPC分类号： F16C32/04
CPC分类号： F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of performing precision control even with an A/D converter with a small number of digits, for safe operation even under disturbance.
SOLUTION: At such timing as a rotor 103 reaches a preset number of rotations, a gain signal setting part 11 specifies a gain signal 13 of high sensitivity in a high resolution mode. If a disturbance is applied, an A/D converter 10 overflows and a state signal 25 of the A/D converter 10 is set. The gain signal setting part 11 here specifies a gain signal 13 of low sensitivity to enter a normal mode. Thus, the incapability of measurement is avoided even a disturbance is applied, allowing a stable positioning.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：即使在具有数字数字的A / D转换器的情况下，也能够即使在干扰下也能够进行安全运行，所以能够进行精密控制的磁轴承装置。解决方案：在转子103达到预定转数的定时，增益信号设定部分11以高分辨率模式指定高灵敏度的增益信号13。如果施加了干扰，则A / D转换器10溢出并且A / D转换器10的状态信号25被置位。增益信号设定部11在此指定进入正常模式的低灵敏度的增益信号13。因此，即使施加干扰也避免了测量的不能力，从而允许稳定的定位。版权所有（C）2006，JPO＆NCIPI

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式