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1. 发明专利

JP2004328822A Motor controller, motor device, vacuum pump, correction current value measuring device, and motor controlling method 审中-公开
公开(公告)号：JP2004328822A
公开(公告)日：2004-11-18
申请号：JP2003116437
申请日：2003-04-22
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： OTACHI YOSHINOBU , FUKAMI HIDEO , NAMIKI HIROYOSHI , KAWASHIMA TOSHIAKI , MAEJIMA YASUSHI
IPC分类号： F04D19/04 , H02P6/10
CPC分类号： H02P6/10 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To reduce vibration generated by a motor device by using a vacuum pump such as a molecular pump. SOLUTION: A correction value of an electromagnet current supplied to each electromagnet which makes torque generated by a motor constant is acquired for each prescribed angle of a rotor while rotating it, to correct the electromagnet current of each phase. The correction value may be calculated with a prescribed numerical expression by using an induced voltage of a motor or the like. The correction value is calculated for each prescribed angle when the motor is driven which is stored in a RAM, and while the motor is operated, the correction value is read out of the RAM to correct an electromagnet current. COPYRIGHT: (C)2005,JPO&NCIPI

2. 发明专利

JP2006194083A Fixing structure of rotor shaft and rotor and turbo-molecular pump having the fixing structure 审中-公开
标题翻译：具有固定结构的转子轴和转子和涡轮分子泵的固定结构
公开(公告)号：JP2006194083A
公开(公告)日：2006-07-27
申请号：JP2003323378
申请日：2003-09-16
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： MAEJIMA YASUSHI , INAYOSHI YUTAKA , KAWANISHI SHINJI , SAKURAI ISAO , SUDA HIROYUKI , AKIMOTO TAKESHI
IPC分类号： F04D19/04 , F04D29/056 , F04D29/26 , F04D29/32 , F04D29/64
CPC分类号： F04D19/042 , F04D19/04 , F04D29/266
摘要： PROBLEM TO BE SOLVED: To provide a fixing structure of a rotor shaft and a rotor capable of keeping rotation balance of the rotor shaft and the rotor to prevent oscillation by stabilizing a contact condition of an contact surfaces of the rotor shaft and the rotor and to provide a turbo-molecular pump having the fixing structure.
SOLUTION: A fastening surface 257 on a rotor shaft 213 side in contact with the rotor 103 is concentrically formed in an outer peripheral portion on an upper surface of a fastening portion 253. A spot facing portion 259 whose upper surface is recessed more than the fastening surface 257 is formed at the inner periphery of the fastening surface 257. For this reason, when the rotor shaft 213 is fastened to the rotor 103, a clearance 265 is formed between an contact surface 187 of the rotor 103 and it by depth of the spot facing portion 259 in a portion in which the spot facing portion 259 is formed.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供转子轴和转子的固定结构，该转子轴和转子能够保持转子轴和转子的旋转平衡，以通过稳定转子轴和转子轴的接触表面的接触状态来防止振动并提供具有固定结构的涡轮分子泵。解决方案：与转子103接触的转子轴213侧上的紧固表面257同心地形成在紧固部253的上表面的外周部分中。上表面凹入更多的点对面部分259 紧固表面257形成在紧固表面257的内周。因此，当转子轴213紧固到转子103时，在转子103的接触表面187与它之间形成间隙265 形成有点对着部分259的部分中的光斑对向部分259的深度。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2007224924A Vacuum pump 有权
标题翻译：真空泵
公开(公告)号：JP2007224924A
公开(公告)日：2007-09-06
申请号：JP2007126861
申请日：2007-05-11
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： TAKAMINE MASAYOSHI , MAEJIMA YASUSHI , KAWANISHI SHINJI , SAKAGUCHI YUKO , OKUDERA SATOSHI , KABATA KENJI , INAYOSHI YUTAKA
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump preventing breakage of a rotating body caused by corrosion, and balancing the rotating body for a long time.
SOLUTION: This vacuum pump comprises a pump casing 1 with a gas intake port opened in an upper surface thereof, a rotor shaft 5 rotatably supported in the pump casing 1, a plurality of rotor blades 10, etc., which are accommodated in the pump casing 1 and integrated with an outer circumferential surface of a rotor 8 fixed to the rotor shaft 5, a plurality of stator blades 11, etc., which are alternately positioned between the plurality of rotor blades 10, etc., and fixed in the pump case 1, and a drive motor 9 to rotate the rotor shaft 5. A corrosion preventive film by the electroless plating is formed on an inner circumferential surface 8b and an outer circumferential surface 8a of the rotor 8, and a heat-resistant and corrosion-resistant adhesive 15a is applied to the inner circumferential surface 8b of the rotor 8 as a mass adding means 15.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种防止由腐蚀引起的旋转体破损的真空泵，并且能够长时间地平衡旋转体。
解决方案：该真空泵包括：泵壳1，其上表面具有开口的进气口，可旋转地支撑在泵壳1中的转子轴5，容纳有多个转子叶片10等在泵壳体1中，与固定在转子轴5上的转子8的外周面一体化，多个定子叶片11等交替配置在多个转子叶片10之间，固定在泵壳体1和驱动马达9中使转子轴5旋转。通过化学镀的防腐蚀膜形成在转子8的内周面8b和外周面8a上，耐热性并且耐腐蚀粘合剂15a作为质量添加装置15施加到转子8的内周面8b上。（C）2007，JPO＆INPIT

4. 发明专利

JP2005105846A Vacuum pump 审中-公开
标题翻译：真空泵
公开(公告)号：JP2005105846A
公开(公告)日：2005-04-21
申请号：JP2003336398
申请日：2003-09-26
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWANISHI SHINJI , MAEJIMA YASUSHI , KINOSHITA YUICHI
IPC分类号： F04D27/00 , F04D19/04 , F04D29/04 , F04D29/05 , F04D29/058 , F04D29/059 , F16C32/04
CPC分类号： F16C39/02 , F04D19/04 , F04D27/0292 , F16C32/0442 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump capable of carrying out the stop of drive of a motor without giving damage to main components when abnormal vibration occurs in a device.
SOLUTION: A shaft 11 has a rotation side protruded portion 81 and a stator column 18 has a stopper 61. The stopper 61 is located where a cavity formed between a fixation side protruded portion 63 and a rotor portion 34 has a preset clearance α and a cavity formed between itself and the rotation side protruded portion 81 has a preset clearance β. When abnormal vibration occurs in the device, an abnormal condition is detected by putting the stopper 61 in contact with part of a rotation portion and the drive of the motor 10 is stopped. Thus, even when an increase in the amount of vibration is provided at the rotation portion of the shaft 11 or the rotor 24, the turbo-molecular pump 1 can be stopped without giving damage to the main components.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种在装置中发生异常振动的情况下能够执行电机的驱动停止而不会对主要部件造成损害的真空泵。解决方案：轴11具有旋转侧突出部81，定子柱18具有止动件61.止动件61位于形成在固定侧突出部63和转子部34之间的空腔具有预设间隙 α和自身与旋转侧突出部81之间形成的空腔具有预设间隙β。当装置发生异常振动时，通过使止动件61与旋转部分的一部分接触并且马达10的驱动停止来检测到异常状况。因此，即使在轴11或转子24的旋转部分设置振动量增加的情况下，也可以停止涡轮分子泵1而不损害主要部件。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2007278267A Molecular pump and flange 有权
标题翻译：分子泵和法兰
公开(公告)号：JP2007278267A
公开(公告)日：2007-10-25
申请号：JP2006167968
申请日：2006-06-16
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： MAEJIMA YASUSHI , OTACHI YOSHINOBU , WADA RUMIKO , ENOMOTO YOSHIHIRO , BAILEY CHRIS , STEPHENSON DAWN , WILSON KATE
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D27/0292 , F04D29/522 , F04D29/601 , F04D29/644
摘要： PROBLEM TO BE SOLVED: To provide a molecular pump and a flange capable of easily forming an impact buffer structure. SOLUTION: The impact buffer structure for consuming impact energy is provided in the flange of the molecular pump. An insertion hole is provided in the flange. A buffer member formed of an independent small component is fitted into and fixed to the insertion hole. A bolt hole through which a bolt is inserted is provided within the buffer member, for fixing the flange to a vacuum vessel. Thin-wall parts are provided in the buffer member by forming hollow parts. Upon the occurrence of impact in a rotational direction of a rotor part in the molecular pump, for example, by breaking of the rotor part, the flange, together with the molecular pump, is slid in a rotational direction of the rotor part. This causes the bolt, through which the flange is fixed to the vacuum vessel, to hit against the buffer member resulting in plastic deformation of the buffer member. The plastic deformation of the buffer member consumes energy for molecular pump rotation and can buffer the impact generated in the molecular pump. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供能够容易地形成冲击缓冲结构的分子泵和凸缘。解决方案：在分子泵的法兰中提供消耗冲击能量的冲击缓冲结构。在凸缘上设有插孔。由独立的小部件形成的缓冲部件嵌合并固定于插入孔。在缓冲构件内设置有螺栓插入的螺栓孔，用于将凸缘固定到真空容器。通过形成中空部分在缓冲部件中设置薄壁部分。在分子泵中的转子部分的旋转方向发生冲击时，例如通过转子部分的断裂，凸缘与分子泵一起在转子部分的旋转方向上滑动。这使得凸缘固定到真空容器的螺栓撞击缓冲构件，导致缓冲构件的塑性变形。缓冲构件的塑性变形消耗分子泵旋转的能量，并可缓冲分子泵产生的冲击。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2007239464A Fixing structure of rotor shaft and rotor, and turbo-molecular pump including the same 有权
标题翻译：转子轴和转子的固定结构以及包括其的涡轮分子泵
公开(公告)号：JP2007239464A
公开(公告)日：2007-09-20
申请号：JP2006058647
申请日：2006-03-03
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： MAEJIMA YASUSHI , OTACHI YOSHINOBU , WADA RUMIKO , INAYOSHI YUTAKA , KAWANISHI SHINJI , SAKURAI ISAO , SUDA HIROYUKI , AKIMOTO TAKESHI
IPC分类号： F04D19/04 , F04D29/32
摘要： PROBLEM TO BE SOLVED: To provide a fixing structure of a rotor shaft and a rotor capable of keeping rotation balance of the rotor shaft and the rotor and preventing oscillation by keeping a contact condition of abutment surface of the rotor shaft and the rotor stable, and a turbo-molecular pump including the same.
SOLUTION: A counter bore part 259 of which upper surface is depressed from the abutment surface 257 is formed on an upper surface of a joining part 253 from a section where a penetrating shaft part 255 is formed to a section until an inner circumference of the abutment surface 257. Also, the upper surface of the counter bore part 259 is machined perpendicularly to an axial direction. Moreover, an annular projection part 261 of radial direction length L4 is projectingly provided by depth D1 of the counter bore part 259 at a position between a bolt hole 161 and the penetration shaft part 255 and separate from the penetrating shaft part 255 by about length L3. The annular projection part 261 is provided concentrically with the penetrating shaft 255.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供转子轴和转子的固定结构，其能够保持转子轴和转子的旋转平衡，并通过保持转子轴和转子的抵接表面的接触状态来防止振动稳定的，以及包括其的涡轮分子泵。解决方案：从接合表面257凹陷上表面的反孔部件259形成在从形成穿透轴部分255的部分到连接部分253的内部的内周的部分的上表面另外，台面孔部分259的上表面垂直于轴向加工。此外，径向长度为L4的环形突出部261在螺孔161和穿透轴部255之间的位置处突出地设置有反孔部259的深度D1，并且与穿透轴部255分离大约长度L3 。环形突起部261与穿透轴255同心地设置。版权所有（C）2007，JPO＆INPIT

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