专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2006071069A Magnetic bearing device and turbo molecular pump loaded with magnetic bearing device 有权
标题翻译：磁性轴承装置和装有磁力轴承装置的涡轮分子泵
公开(公告)号：JP2006071069A
公开(公告)日：2006-03-16
申请号：JP2004258426
申请日：2004-09-06
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWASHIMA TOSHIAKI , OTACHI YOSHINOBU
IPC分类号： F16C32/04 , F04D19/04
CPC分类号： F16C32/0444 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device having high control precision and low vibration at low cost and to provide a turbo molecular pump loaded with the magnetic bearing device.
SOLUTION: Folding line approximation characteristic for switching resolution of respective sensors by folding lines is set in a sensitivity conversion circuit 12 and a sensitivity reconversion processing part 14. The sensitivity conversion circuit 12 outputs an analog intermediate signal 52 for converting a high sensitivity analog-digital signal when displacement of a rotor shaft 113 is within ±50μm using a position of the rotor shaft when operating this turbo molecular pump normally as reference. The sensitivity conversion circuit 12 outputs an analog intermediate signal 52 for converting a low sensitivity analog-digital signal when displacement of the rotor shaft 113 is from +50μm to +250μm or from -50μm to -250μm. It is controlled to have high sensitivity when displacement of the rotor shaft 113 is in a scope of ±50μm and to have low sensitivity when its displacement exceeds this scope.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种低成本地具有高控制精度和低振动的磁轴承装置，并提供装载有磁轴承装置的涡轮分子泵。解决方案：在灵敏度转换电路12和灵敏度重新设置处理部分14中设置用于通过折叠线来切换各个传感器的分辨率的折线近似特性。灵敏度转换电路12输出用于转换高灵敏度的模拟中间信号52 当通常作为参考使用该涡轮分子泵时，使用转子轴的位置，转子轴113的位移在±50μm内的模拟数字信号。当转子轴113的位移为+50μm至+250μm或-50μm至-250μm时，灵敏度转换电路12输出用于转换低灵敏度模拟数字信号的模拟中间信号52。当转子轴113的位移在±50μm的范围内时，被控制为具有高灵敏度，并且当其位移超过该范围时具有低的灵敏度。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2004328822A Motor controller, motor device, vacuum pump, correction current value measuring device, and motor controlling method 审中-公开
公开(公告)号：JP2004328822A
公开(公告)日：2004-11-18
申请号：JP2003116437
申请日：2003-04-22
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： OTACHI YOSHINOBU , FUKAMI HIDEO , NAMIKI HIROYOSHI , KAWASHIMA TOSHIAKI , MAEJIMA YASUSHI
IPC分类号： F04D19/04 , H02P6/10
CPC分类号： H02P6/10 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To reduce vibration generated by a motor device by using a vacuum pump such as a molecular pump. SOLUTION: A correction value of an electromagnet current supplied to each electromagnet which makes torque generated by a motor constant is acquired for each prescribed angle of a rotor while rotating it, to correct the electromagnet current of each phase. The correction value may be calculated with a prescribed numerical expression by using an induced voltage of a motor or the like. The correction value is calculated for each prescribed angle when the motor is driven which is stored in a RAM, and while the motor is operated, the correction value is read out of the RAM to correct an electromagnet current. COPYRIGHT: (C)2005,JPO&NCIPI

3. 发明专利

JP2005290998A Vacuum pump, and control method thereof 有权
标题翻译：真空泵及其控制方法
公开(公告)号：JP2005290998A
公开(公告)日：2005-10-20
申请号：JP2004102907
申请日：2004-03-31
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWASHIMA TOSHIAKI , NAMIKI HIROYOSHI , FUKAMI HIDEO
IPC分类号： F04D19/04 , H02K7/09 , H02P5/00 , H02P29/00
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump, and a control method thereof, in which action of a motor can be changed in accordance with loads or the like added to the motor, and/or in which motor vibration due to PWM control is reduced. SOLUTION: This vacuum pump is actuated by a PWM-controlled motor. The vacuum pump 1 comprises a vacuum pump main body 2 provided with the motor 16, and a controller 4 to control the motor 16. The controller 4 comprises a motor controller part 30 to supply drive current to the motor 16, a reference frequency generating part 32 to generate at least two kinds of reference frequency, and a reference frequency changing means 34 to change the reference frequency of the PWM control during rated operation where the motor 16 is rotated at rated rotation speed. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种真空泵及其控制方法，其中马达的动作可以根据添加到马达的载荷等而改变，和/或由于 PWM控制减少。
解决方案：该真空泵由PWM控制电机启动。真空泵1包括设置有电动机16的真空泵主体2和控制电动机16的控制器4.控制器4包括：电动机控制部30，用于向电动机16供给驱动电流;基准频率产生部 32，以产生至少两种参考频率;以及参考频率改变装置34，用于在电机16以额定转速旋转的额定运行期间改变PWM控制的参考频率。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2005249068A Magnetic bearing device and turbo-molecular pump loaded with the magnetic bearing device 有权
标题翻译：磁性轴承装置和装载有磁性轴承装置的涡轮分子泵
公开(公告)号：JP2005249068A
公开(公告)日：2005-09-15
申请号：JP2004060047
申请日：2004-03-04
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWASHIMA TOSHIAKI
IPC分类号： F04D19/04 , F16C32/04 , F16C39/06 , H03F3/217
CPC分类号： F04D19/042 , F04D29/058 , F16C32/0457 , F16C32/0489 , F16C2360/45 , H03F3/2173 , H03F2200/421
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device and a turbo-molecular pump loaded with the magnetic bearing device, decreasing the number of elements of an amplifier circuit for exciting an electromagnet to drive to reduce the cost required for manufacturing and installing the turbo-molecular pump, and decreasing an error in detecting an electric current flowing through the electromagnet. SOLUTION: One end 151a of an electromagnetic coil 151 for forming the respective electromagnets 104, 105, 106A, 106B is connected to a common node C. A selector circuit 280 composed of a transistor 281 and a diode 285 is connected to the common node C. On the other hand, an amplifier circuit 250 composed of a transistor 261 and a diode 265 is connected to the other end 151b of the electromagnet coil 151. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供装载有磁性轴承装置的磁性轴承装置和涡轮分子泵，减少用于激励电磁体的放大器电路的元件数量以驱动以降低制造所需的成本，以及安装涡轮分子泵，并减少检测流经电磁铁的电流的误差。解决方案：用于形成各个电磁体104,105,106A，106B的电磁线圈151的一端151a连接到公共节点C.由晶体管281和二极管285组成的选择器电路280连接到公共节点C.另一方面，由晶体管261和二极管265组成的放大器电路250连接到电磁线圈151的另一端151b。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2006317419A Position sensor, and magnetic bearing device mounted with the sensor 审中-公开
标题翻译：位置传感器和安装传感器的磁力轴承装置
公开(公告)号：JP2006317419A
公开(公告)日：2006-11-24
申请号：JP2005143328
申请日：2005-05-16
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWASHIMA TOSHIAKI
IPC分类号： G01B7/00 , F16C32/04
CPC分类号： F16C32/0446 , F16C2360/45 , G01D5/2451
摘要： PROBLEM TO BE SOLVED: To provide a position sensor capable of reducing AC ripples of a detected position signal and having a small phase delay, and a magnetic bearing device which is stable and has less vibration with the position sensor employed. SOLUTION: The position sensor is constituted of a position signal detection part consisting of a carrier wave transmitter 201 and a sensor 107, a multiplier 231 for multiplying a signal extracted from the position signal detection part with a signal from the transmitter 201, a delay device 237 for branching an output signal from the multiplier 231 and delaying one of the branched signals, and an adder 235 for adding an output signal from the delay device 237 with the other branched signal. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够减少检测到的位置信号的交流波纹并具有小的相位延迟的位置传感器，以及使用位置传感器稳定且振动较小的磁性轴承装置。位置传感器由由载波发射机201和传感器107构成的位置信号检测部分构成，乘法器231将从位置信号检测部分提取的信号与来自发射机201的信号相乘，延迟装置237，用于分支来自乘法器231的输出信号并延迟分支信号中的一个;以及加法器235，用于将来自延迟装置237的输出信号与另一分支信号相加。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2005273802A Magnetic bearing device and turbo molecular pump mounted with magnetic bearing device 审中-公开
标题翻译：磁性轴承装置和涡轮分子泵安装有磁性轴承装置
公开(公告)号：JP2005273802A
公开(公告)日：2005-10-06
申请号：JP2004089147
申请日：2004-03-25
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWASHIMA TOSHIAKI , NAMIKI HIROYOSHI , FUKAMI HIDEO
IPC分类号： F04D19/04 , F16C32/04 , F16C39/06
CPC分类号： F04D19/048 , F16C32/0446 , F16C32/0476 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device and a turbo molecular pump mounted with the magnetic bearing device capable of reducing the vibration by precluding deterioration in the controllability of a rotor shaft resulting from dispersion in the axially directed position of the rotor shaft and performing a position control of the rotor shaft with the optimum magnetic force in the specified installation attitude. SOLUTION: The sensor sensitivity for adjustment of the sensitivity is stored in a sensitivity storing part 281. The sensitivity storing part 281 emits the stored sensitivity to a sensitivity changeover part 283, which makes changing-over according to the given output and emits the appropriate signal to a sensor signal amplification part 252. The amplification part 252 makes adjustment of the sensor sensitivity according to the sensitivity value stored in the sensitivity storing part 281 in conformity to the given sensor signal, and a sensor output signal 153 having the sensor output voltage V after adjustment is emitted to an A/D converter 154. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种安装有磁轴承装置的磁轴承装置和涡轮分子泵，该磁轴承装置能够通过排除由于在轴向指向位置的分散导致的转子轴的可控性的降低而减少振动转子轴，并以指定的安装姿态以最佳磁力执行转子轴的位置控制。解决方案：灵敏度调节的传感器灵敏度被存储在灵敏度存储部分281中。灵敏度存储部分281将存储的灵敏度发射到灵敏度切换部分283，灵敏度转换部分283根据给定的输出进行转换并发射到传感器信号放大部分252的适当信号。放大部分252根据给定的传感器信号，根据存储在灵敏度存储部分281中的灵敏度值来调节传感器灵敏度，并且传感器输出信号153具有传感器调整后的输出电压V被发射到A / D转换器154.版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2005076792A Magnetic bearing device 审中-公开
标题翻译：磁力轴承装置
公开(公告)号：JP2005076792A
公开(公告)日：2005-03-24
申请号：JP2003309497
申请日：2003-09-02
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWASHIMA TOSHIAKI
IPC分类号： F16C32/04 , H02K7/09
CPC分类号： F16C32/0461 , F16C32/0448 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of improving the sensitivity of a displacement sensor, with respect to the magnetic bearing device wherein an electromagnet and the displacement sensor share magnetic poles. SOLUTION: Radial magnetic pole parts 43 are composed of rectangular iron core pieces 32, 33 respectively having grooves 37, 38 on their axial central parts. The iron core piece 32 is divided into a magnetic pole part 39 and a magnetic pole part 40 by the groove 37, similarly the iron core piece 33 is divided into the magnetic pole part 41 and the magnetic pole part 42 by the groove 38. Radial electromagnetic coils 34a, 34b are respectively wound on the iron core pieces 32, 33. A radial sensor coil 36a is wound over the magnetic pole part 39 and the magnetic pole part 41, and similarly a radial sensor coil 36b is wound over the magnetic pole part 40 and the magnetic pole part 42. The radial sensor coils 36a, 36b are mounted on a radial magnetic pole part 43 through a shield plate 35 with respect to the radial electromagnetic coils 34a, 34b. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够提高位移传感器的灵敏度的磁性轴承装置相对于电磁体和位移传感器共享磁极的磁轴承装置。解决方案：径向磁极部分43由在其轴向中心部分上分别具有凹槽37,38的矩形铁芯片32,33组成。铁芯片32通过槽37被分成磁极部分39和磁极部分40，类似地，铁芯片33通过槽38被分成磁极部分41和磁极部分42。径向电磁线圈34a，34b分别缠绕在铁芯片32,33上。径向传感器线圈36a缠绕在磁极部分39和磁极部分41上，类似地，径向传感器线圈36b缠绕在磁极上部分40和磁极部分42.径向传感器线圈36a，36b相对于径向电磁线圈34a，34b通过屏蔽板35安装在径向磁极部分43上。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2004301322A Magnetic bearing device and turbo-molecular pump mounted with this magnetic bearing device 有权
标题翻译：磁性轴承装置和与该磁性轴承装置安装的涡轮分子泵
公开(公告)号：JP2004301322A
公开(公告)日：2004-10-28
申请号：JP2004025342
申请日：2004-02-02
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWASHIMA TOSHIAKI , YAMAMOTO MASAYUKI
IPC分类号： F04D29/056 , F04D19/04 , F04D29/04 , F04D29/058 , F16C32/04
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device, and a turbo-molecular pump mounted with this magnetic bearing device for reducing cost required for manufacturing and installing the turbo-molecular pump by reducing the element number of an amplifier circuit for excitedly driving an electromagnet, and reducing the number of cables for connecting the electromagnet and the amplifier circuit. SOLUTION: An electromagnet coil 151 is connected on one end to a common node R. The other end is connected to the amplifier circuit 410 composed of one transistor 411 and one diode 415. One end of the electromagnet coil 151 is common in the respective electromagnets, and this common node R is controlled so as to maintain intermediate voltage Vc by an intermediate voltage maintaining circuit 451. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种磁性轴承装置和安装有该磁性轴承装置的涡轮分子泵，通过减少用于制造和安装涡轮分子泵的元件数量来降低制造和安装涡轮分子泵所需的成本激励地驱动电磁铁，并减少用于连接电磁铁和放大器电路的电缆数量。解决方案：电磁线圈151的一端连接到公共节点R.另一端连接到由一个晶体管411和一个二极管415组成的放大器电路410.电磁线圈151的一端在相应的电磁铁，并且该公共节点R被控制以便通过中间保持电路451保持中间电压Vc。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2004286045A Magnetic bearing device, and pump unit mounting the same magnetic bearing device 审中-公开
标题翻译：磁力轴承装置和泵单元安装相同的磁性轴承装置
公开(公告)号：JP2004286045A
公开(公告)日：2004-10-14
申请号：JP2003075303
申请日：2003-03-19
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： KAWASHIMA TOSHIAKI
IPC分类号： F04D29/056 , F04D19/04 , F04D29/058 , F16C32/04 , F16C39/06 , H02N15/00 , F04D29/04
CPC分类号： F16C32/0457 , F04D19/048 , F16C32/0442 , F16C32/0489 , F16C2360/45
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing device, and a pump unit mounting the magnetic bearing device, in which position control to a rotary body is performed at high speed and with strong force, and in which vibration generated from the pump unit can be reduced, and electric/magnetic noise generated from the pump device is reduced. SOLUTION: An electromagnetic winding 151 is changeable to a high voltage mode in which power is fed from a high voltage power source 171 and a low voltage mode in which power is fed from a low voltage power source 271. This change is determined based on if current change speed diL/dt is reference current change speed diLs/dt or over or not. When it is the reference current change speed diLs/dt or over, it is changed to the high voltage mode. When it is less than the reference current change speed diLs/dt, it is changed to the low voltage mode. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种磁轴承装置和安装磁轴承装置的泵装置，其中以高速和强力执行对旋转体的位置控制，并且由此产生的振动泵单元可以减少，并且从泵装置产生的电/磁噪声减小。解决方案：电磁绕组151可变为高压模式，其中从高电压电源171供电并且从低电压电源271供电的低电压模式。该变化被确定基于当前变化速度diL / dt是否是参考电流变化速度diLs / dt或以上。当参考电流变化速度diLs / dt或以上时，变为高电压模式。当它小于参考电流变化速度diLs / dt时，它变为低电压模式。版权所有（C）2005，JPO＆NCIPI

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式