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1. 发明专利

JP2006194083A Fixing structure of rotor shaft and rotor and turbo-molecular pump having the fixing structure 审中-公开
标题翻译：具有固定结构的转子轴和转子和涡轮分子泵的固定结构
公开(公告)号：JP2006194083A
公开(公告)日：2006-07-27
申请号：JP2003323378
申请日：2003-09-16
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： MAEJIMA YASUSHI , INAYOSHI YUTAKA , KAWANISHI SHINJI , SAKURAI ISAO , SUDA HIROYUKI , AKIMOTO TAKESHI
IPC分类号： F04D19/04 , F04D29/056 , F04D29/26 , F04D29/32 , F04D29/64
CPC分类号： F04D19/042 , F04D19/04 , F04D29/266
摘要： PROBLEM TO BE SOLVED: To provide a fixing structure of a rotor shaft and a rotor capable of keeping rotation balance of the rotor shaft and the rotor to prevent oscillation by stabilizing a contact condition of an contact surfaces of the rotor shaft and the rotor and to provide a turbo-molecular pump having the fixing structure.
SOLUTION: A fastening surface 257 on a rotor shaft 213 side in contact with the rotor 103 is concentrically formed in an outer peripheral portion on an upper surface of a fastening portion 253. A spot facing portion 259 whose upper surface is recessed more than the fastening surface 257 is formed at the inner periphery of the fastening surface 257. For this reason, when the rotor shaft 213 is fastened to the rotor 103, a clearance 265 is formed between an contact surface 187 of the rotor 103 and it by depth of the spot facing portion 259 in a portion in which the spot facing portion 259 is formed.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供转子轴和转子的固定结构，该转子轴和转子能够保持转子轴和转子的旋转平衡，以通过稳定转子轴和转子轴的接触表面的接触状态来防止振动并提供具有固定结构的涡轮分子泵。解决方案：与转子103接触的转子轴213侧上的紧固表面257同心地形成在紧固部253的上表面的外周部分中。上表面凹入更多的点对面部分259 紧固表面257形成在紧固表面257的内周。因此，当转子轴213紧固到转子103时，在转子103的接触表面187与它之间形成间隙265 形成有点对着部分259的部分中的光斑对向部分259的深度。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2007239464A Fixing structure of rotor shaft and rotor, and turbo-molecular pump including the same 有权
标题翻译：转子轴和转子的固定结构以及包括其的涡轮分子泵
公开(公告)号：JP2007239464A
公开(公告)日：2007-09-20
申请号：JP2006058647
申请日：2006-03-03
申请人： Boc Edwards Kk , Bocエドワーズ株式会社
发明人： MAEJIMA YASUSHI , OTACHI YOSHINOBU , WADA RUMIKO , INAYOSHI YUTAKA , KAWANISHI SHINJI , SAKURAI ISAO , SUDA HIROYUKI , AKIMOTO TAKESHI
IPC分类号： F04D19/04 , F04D29/32
摘要： PROBLEM TO BE SOLVED: To provide a fixing structure of a rotor shaft and a rotor capable of keeping rotation balance of the rotor shaft and the rotor and preventing oscillation by keeping a contact condition of abutment surface of the rotor shaft and the rotor stable, and a turbo-molecular pump including the same.
SOLUTION: A counter bore part 259 of which upper surface is depressed from the abutment surface 257 is formed on an upper surface of a joining part 253 from a section where a penetrating shaft part 255 is formed to a section until an inner circumference of the abutment surface 257. Also, the upper surface of the counter bore part 259 is machined perpendicularly to an axial direction. Moreover, an annular projection part 261 of radial direction length L4 is projectingly provided by depth D1 of the counter bore part 259 at a position between a bolt hole 161 and the penetration shaft part 255 and separate from the penetrating shaft part 255 by about length L3. The annular projection part 261 is provided concentrically with the penetrating shaft 255.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供转子轴和转子的固定结构，其能够保持转子轴和转子的旋转平衡，并通过保持转子轴和转子的抵接表面的接触状态来防止振动稳定的，以及包括其的涡轮分子泵。解决方案：从接合表面257凹陷上表面的反孔部件259形成在从形成穿透轴部分255的部分到连接部分253的内部的内周的部分的上表面另外，台面孔部分259的上表面垂直于轴向加工。此外，径向长度为L4的环形突出部261在螺孔161和穿透轴部255之间的位置处突出地设置有反孔部259的深度D1，并且与穿透轴部255分离大约长度L3 。环形突起部261与穿透轴255同心地设置。版权所有（C）2007，JPO＆INPIT

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