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1. 发明专利

JP2003021909A Exposure device 审中-公开
标题翻译：曝光装置
公开(公告)号：JP2003021909A
公开(公告)日：2003-01-24
申请号：JP2001205812
申请日：2001-07-06
申请人： Adtec Engineeng Co Ltd , 株式会社アドテックエンジニアリング
发明人： MOMOSE KATSUMI , MIZUTANI GUNJI , NAKAGAWA WATARU , ASAMI MASATOSHI , KUGAMUURUTEI KUMUTEINI
IPC分类号： G03B27/58 , G03F1/00 , G03F1/68 , G03F7/20 , H05K3/00 , G03F1/08
CPC分类号： G03B27/58
摘要： PROBLEM TO BE SOLVED: To provide an exposure device where adhesive ness between a glass mask and an object to be exposed can be improved.
SOLUTION: In the device, a sealed space 4 is formed by installing a pressurizing glass 3 with a specified spacing on a backside of the glass mask 1. Pressurized air is introduced from a pressurizing source 5 to the sealed space 4, the pressure of the sealed space 4 is raised, the glass mask 1 is expanded in the direction of a base plate 50 and the adhesiveness with the base plate 50 is improved.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种曝光装置，其可以改善玻璃罩和待曝光物体之间的粘合性。解决方案：在该装置中，通过在玻璃掩模1的背面上安装具有指定间隔的加压玻璃3来形成密封空间4.加压空气从加压源5引入密封空间4，密封空间4升高，玻璃面罩1沿基板50的方向膨胀，并且与基板50的粘合性提高。

2. 发明专利

JP2007333965A Illumination device for exposure 审中-公开
标题翻译：用于曝光的照明装置
公开(公告)号：JP2007333965A
公开(公告)日：2007-12-27
申请号：JP2006164901
申请日：2006-06-14
申请人： Adtec Engineeng Co Ltd , 株式会社アドテックエンジニアリング
发明人： MIZUTANI GUNJI , IMAI HIROYUKI , TOKI TADAHIRO , ORITO GEN
IPC分类号： G03F7/20
摘要： PROBLEM TO BE SOLVED: To provide an illumination device for exposure having a plurality of lamps in which each lamp state can be monitored. SOLUTION: A power supply module 2 is provided in each lamp 1 and a plurality of the power supply modules 2 are controlled by a controller 3 to turn on each lamp 1. The power supply module 2 has a lighting circuit 20, and the lighting circuit 20 includes a lighting detector 21, which sends a signal indicating a lighting or non-lighting state of each lamp 1 to the controller 3 to display the result on a display device 4. A voltage detecting device 22 is connected to the lighting circuit 20 and detects a voltage upon lighting each lamp 1. A voltage judging device 23 judges whether the lamp is lighted at a rated specification voltage or not. The upper and lower reference voltages in the voltage judging device 23 are arbitrarily set by an upper and lower limit reference voltage setting device 5, and the qualification reference of the lamp voltage is variable according to the characteristics of the lamp 1 or exposure conditions. The judgment result by the voltage judging device 23 is sent to the controller 3 and displayed and notified on the display device 4. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于曝光的照明装置，其具有可以监视每个灯状态的多个灯。
解决方案：在每个灯1中设置电源模块2，并且多个电源模块2由控制器3控制以接通每个灯1.电源模块2具有点亮电路20，照明电路20包括点亮检测器21，其将指示每个灯1的点亮或非点亮状态的信号发送到控制器3，以将结果显示在显示装置4上。电压检测装置22连接到照明电路20，并且在点亮每个灯1时检测电压。电压判断装置23判断灯是否以额定规格电压点亮。电压判定装置23中的上下参考电压由上下参考电压设定装置5任意设定，灯电压的鉴定基准根据灯1的特性或曝光条件而变化。电压判断装置23的判断结果被发送到控制器3，并在显示装置4上显示并通知。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2002123189A INSPECTION DEVICE FOR DISPLAY BOARD OR CIRCUIT BOARD 失效
公开(公告)号：JP2002123189A
公开(公告)日：2002-04-26
申请号：JP2000315081
申请日：2000-10-16
申请人： SOUSHIYOU TEC KK , ADTEC ENGINEENG CO LTD
发明人： OKUNO TOSHIO , MIZUTANI GUNJI , NAGASHIMA MASATOMO , FURUMI TADASHI
IPC分类号： G01R1/06 , G01R31/02 , G01R31/28 , G09F9/00 , G09G3/00 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To provide an inspection device for display boards or circuit boards which enables the display boards or the circuit boards to be replaced in a nearly occupancy area required for inspection of the board, dispenses with a conventional side space for their replacement and is miniaturized. SOLUTION: In the inspection device for the display boards or the circuit boards performing inspection by bringing a terminal 4 for inspection of a probe block B for inspection into press-contact with an electrode pad 3 of the display board or the circuit board P, a probe supporting frame body 2 has an expandable and shrinkable structure, the probe supporting frame body 2 is expanded, a board supporting frame body 1 is relatively moved forward and the display board or the circuit board P is pushed out forward from the tip of the terminal 4 of the probe block B through an expanded opening part 16 of the probe supporting frame body 2 to exchange the display board or the circuit board P supported by the board supporting frame body 1.

4. 发明专利

JP2002091336A DISPLAY PANEL OR SUPPORT FRAME BODY FOR PROBE BLOCK 失效
公开(公告)号：JP2002091336A
公开(公告)日：2002-03-27
申请号：JP2000276573
申请日：2000-09-12
申请人： SOUSHIYOU TEC KK , ADTEC ENGINEENG CO LTD
发明人： OKUNO TOSHIO , MIZUTANI GUNJI , NAGASHIMA MASATOMO
IPC分类号： G01R1/06 , G01R1/04 , G01R31/28 , G02F1/13 , G09F9/00 , G09G3/00
摘要： PROBLEM TO BE SOLVED: To provide a display panel or a support frame body for a probe block which can appropriately deal with display panels having different sizes in an inspection device. SOLUTION: The increase in opening or the decrease in opening of each support frame body 1 is made possible by moving the frame sides 2, 3, 4, and 5 of a frame body 1 which supports the display panel or the probe block which supports the frame body 1.

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