会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明专利
    • REAL-TIME PHASE-SHIFT INTERFEROMETER
    • JPH07198319A
    • 1995-08-01
    • JP34947493
    • 1993-12-28
    • AGENCY IND SCIENCE TECHNOYO KEISOKU KENKYUSHO KK
    • KONUMA KAZUOKAMEYAMA TETSUYAKUWAYAMA SHIGEZUMINAKAMURA TORU
    • G01B9/02G01B11/24G01B11/245G01N21/45
    • PURPOSE:To form interference fringes without optical noise stably at a high speed by inserting a moving diffusing plate into an optical path, imparting minute change on interference light, casting the light on a body to be measured, and averaging the reflected light in time. CONSTITUTION:Irregular fluctuation is incessantly imparted on laser light 2 by the minute irregular patterns of the surface of a diffusing plate 20, which is linked to a rotating means 22, and the laser light 2 is cast or a measuring surface 12. The amplitude and the phase of the reflected light from the measuring surface 12 are transmitted through a 1/4-wavelength plate 6C, and the light is converted into the right and left circularly polarized light. The light is split into three beams with a splitting optical system 4. The light beams are transmitted through polarizing plates 16A-16C and become interference fringes. The images of the interference fringes are picked up with TV cameras 18A-18C and inputted into a signal. processing device 30. The phase difference of the circularly polarized light beams is measured. Minute optical fluctuation is imparted on the interference fringes with the diffusing plate 20. The interference fringes are integrated with the photoelectric conversion elements of the cameras 18A-18C at one field unit Therefore, speckle noises caused by dust and the like attached on the surface of glass can be readily removed. Thus, the stabilized interference fringes are obtained.