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1. 发明专利

JP4093765B2 Mounting a semiconductor element circuit 有权
公开(公告)号：JP4093765B2
公开(公告)日：2008-06-04
申请号：JP2002033048
申请日：2002-02-08
申请人：トヨタ自動車株式会社 , 株式会社豊田中央研究所
发明人：幸夫宮地 , 伸二小池 , 政彦山中 , 雅人橋本
IPC分类号： H01L23/48 , H01L23/52 , H01L21/3205
CPC分类号： H01L24/32 , H01L2224/37 , H01L2224/371 , H01L2224/40 , H01L2224/40095 , H01L2224/40137 , H01L2224/40225 , H01L2224/83801 , H01L2224/84801 , H01L2924/1305 , H01L2924/13055 , H01L2924/00 , H01L2924/00014 , H01L2924/00012

2. 发明专利

JP3919591B2 A method of manufacturing a semiconductor device 有权
公开(公告)号：JP3919591B2
公开(公告)日：2007-05-30
申请号：JP2002121300
申请日：2002-04-23
申请人：トヨタ自動車株式会社 , 株式会社豊田中央研究所
发明人：隆英杉山 , 賢志植田 , 雅人橋本 , 宏明田中 , 雅康石子
IPC分类号： H01L29/739 , H01L29/78

3. 发明专利

JP3489505B2 Semiconductor sensor 有权
公开(公告)号：JP3489505B2
公开(公告)日：2004-01-19
申请号：JP26944499
申请日：1999-09-22
申请人：トヨタ自動車株式会社
发明人：和身千田 , 英美千田 , 倫久岡山 , 敬子根木 , 雅人橋本 , 勝長尾
IPC分类号： G01P15/125 , G01C19/56 , G01C19/5726 , G01C19/5755 , G01C19/5769 , G01L9/00 , G01L9/12 , H01L29/84
CPC分类号： G01P2015/0814

4. 发明专利

JP3551821B2 A method of manufacturing a semiconductor device 有权
公开(公告)号：JP3551821B2
公开(公告)日：2004-08-11
申请号：JP8646999
申请日：1999-03-29
申请人：トヨタ自動車株式会社
发明人：敬子根木 , 雅人橋本
IPC分类号： G01C19/56 , G01C19/5755 , G01C19/5769 , H01L29/84

5. 发明专利

JP4636220B2 Physical quantity detecting device 有权
公开(公告)号：JP4636220B2
公开(公告)日：2011-02-23
申请号：JP2001266284
申请日：2001-09-03
申请人：トヨタ自動車株式会社
发明人：英一中谷 , 和身千田 , 英美千田 , 倫久岡山 , 雅裕杉本 , 敬子根木 , 雅人橋本
IPC分类号： G01C19/56 , G01P9/04 , G01L9/12 , G01P15/125 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a physical quantity detection apparatus capable of preventing damage to a stopper and a vibrator by reducing impacts caused when the vibrator collides against the stopper. SOLUTION: In angular velocity detection apparatus having the stopper 11 for controlling the amount of displacement of the vibrator 10 relative to a fixed part 41, an impact reducing means is provided for reducing the impact force of the collision between the stopper 11 and the vibrator 10. The impact reducing means comprises an etched hole 10b set in large size, and a semi- annular elastic piece 15b or an inclined part 22c, etc.

6. 发明专利

JP3489534B2 Sensor device and the sensor element 有权
公开(公告)号：JP3489534B2
公开(公告)日：2004-01-19
申请号：JP2000119553
申请日：2000-04-20
申请人：トヨタ自動車株式会社
发明人：和身千田 , 英美千田 , 倫久岡山 , 敬子根木 , 雅人橋本 , 勝長尾
IPC分类号： G01C19/56 , G01C19/5726 , G01C19/5762 , G01P15/125 , H01L29/84 , G01P9/04

7. 发明专利

JP3729192B2 The method of manufacturing a semiconductor sensor and the same semiconductor sensor 有权
公开(公告)号：JP3729192B2
公开(公告)日：2005-12-21
申请号：JP2003314796
申请日：2003-09-05
申请人：トヨタ自動車株式会社
发明人：和身千田 , 英美千田 , 倫久岡山 , 敬子根木 , 雅人橋本 , 勝長尾
IPC分类号： G01C19/56 , G01C19/5755 , G01C19/5769 , H01L29/84 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide a semiconductor sensor having stable vibration characteristics and high detection accuracy and to provide a method of manufacturing the same. SOLUTION: The semiconductor sensor comprises a movable part 40 supported on a substrate 10 through an insulating layer 20 capable of vibrating on the substrate, driving parts 50a, 42a, 50b, 42b vibrating the movable part based on a voltage applied, and a detecting part including detecting electrodes 60a, 60b and detecting a displacement of the movable part in the direction of a detecting axis as changes in a capacitance. While the movable part and the substrate are kept to be at the same potential, the impedance between the movable part and the substrate is kept to be a predetermined high one. Consequently, since no potential difference is produced between the substrate and the movable part, no electrostatic force is produced therebetween, resulting in stabilizing the vibration characteristics of the movable part. Furthermore, a current caused by the voltage applied to the driving parts does not affect the detection of the detecting part, and the detection accuracy of the sensor is improved. COPYRIGHT: (C)2004,JPO

8. 发明专利

JP3525862B2 The sensor element and the sensor device 有权
公开(公告)号：JP3525862B2
公开(公告)日：2004-05-10
申请号：JP2000149558
申请日：2000-05-22
申请人：トヨタ自動車株式会社
发明人：和身千田 , 英美千田 , 倫久岡山 , 敬子根木 , 雅人橋本 , 勝長尾
IPC分类号： G01L1/14 , G01C19/56 , G01C19/5762 , G01P15/08 , G01P15/125 , G01P15/13 , H01L29/84 , G01P9/04
CPC分类号： G01C19/5719 , G01P2015/0814

9. 发明专利

JP3512004B2 Dynamic quantity detecting device 有权
公开(公告)号：JP3512004B2
公开(公告)日：2004-03-29
申请号：JP2000387396
申请日：2000-12-20
申请人：トヨタ自動車株式会社
发明人：雅人橋本
IPC分类号： G01P9/04 , G01C19/56 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To enhance the accuracy of detecting angular velocity by causing vibrators to stably vibrate with a large amplitude in a first direction in the case of a dynamical quantity detector for detecting angular velocity by detecting the vibration of the vibrators in a second direction normal to the first direction with the vibrators kept vibrating in the first direction. SOLUTION: The vibrators 20-1 and 20-1 are supported displaceably in the Y-axis direction on main frames 30-1 to 30-4 via beams 31a to 31d for detection. The main frames 30-1 to 30-4 are supported displaceably in the X-axis direction on a substrate 10 via beams 33a to 33d and 34a to 34d for driving. The main frames 30-1 and 30-3 are connected to each other by link beams 41a and 41c, and a link 42a while the main frames 30-2 and 30-4 are connected to each other by link beams 41c and 41d, and a link 42b. The links 42a and 42b are connected to each other by sub-link beams 43a to 43d and sub-links 44a and 44b.

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