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    • 5. 发明专利
    • Magnetic film and method for forming the same
    • JP4017032B2
    • 2007-12-05
    • JP2002097177
    • 2002-03-29
    • ソニー株式会社独立行政法人産業技術総合研究所
    • 薫 小林克巳 岡山純 明渡諭 杉本浩一郎 猪俣
    • H01F10/12H01F1/00H01F41/16
    • PROBLEM TO BE SOLVED: To efficiently and inexpensively form a thick high-permeability magnetic film. SOLUTION: After a powder of a metallic magnetic material and another power having a high electrical resistance are placed in a mixer 11 and mixed with each other as a powdered material 14, the material 14 is transformed into an aerosol in a chamber 12. Then the aerosol is jetted from a nozzle 15, and the particles 14a contained in the aerosol are stuck to the substrate 20a. Consequently, a magnetic film having a nanogranular structure, in which the main phase is constituted of the magnetic phase of the metallic magnetic material and grain boundaries are constituted of the high-electrical resistance powder, is formed on the substrate 20a. When a ferrite powder is used as the high electrical resistance powder, a magnetic film having a nanogranular structure, in which both the main phase and grain boundaries are constituted of the magnetic material, can be formed, and accordingly, the permeability of the magnetic film can be made higher. In this method, since the magnetic film is formed by making the particles of the powder material 14 stick to the substrate 20a, by only jetting the material 14 from the nozzle 15 in this method, a magnetic film having an appropriate thickness can be formed efficiently and inexpensively. COPYRIGHT: (C)2004,JPO