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1. 发明专利

JP2014132634A Plasma generating device, method for controlling plasma generating device, and substrate processing apparatus using plasma generating device 有权
标题翻译：等离子体生成装置，等离子体生成装置的控制方法以及使用等离子体生成装置的基板处理装置
公开(公告)号：JP2014132634A
公开(公告)日：2014-07-17
申请号：JP2013171342
申请日：2013-08-21
申请人： Psk Inc , ピーエスケー・インコーポレーテッド , Hanyang Univ Industry-Univ Cooperation Foundation , 漢陽大学校産学協力団
发明人： CHUNG CHIN WOOK , KIM HYUN JUN , HAN DUKSUN , PARK KYOUNG SOO
IPC分类号： H01L21/3065 , H05H1/00 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To provide: a plasma generating device eliminating the potential difference generated between both ends of a coil to provide a balanced voltage to the coil, in a plasma treatment process; a method for controlling the plasma generating device; and a substrate processing apparatus using the plasma generating device.SOLUTION: A plasma generating device 300 according to an embodiment of the present invention includes: an RF power supply 311 providing an RF signal; a plasma chamber 312 in which gas is injected to generate plasma; a coil 313 installed in the plasma chamber 312 and inducing an electromagnetic field in the plasma chamber 312 with an application of the RF signal thereto; a capacitive element 314 connected to the grounding terminal of the coil 313; and a controller 315 adjusting the ratio between the impedance of the coil 313 and the impedance of the capacitive element 314.
摘要翻译：要解决的问题：提供：等离子体产生装置，其在等离子体处理过程中消除线圈两端之间产生的电位差，以向线圈提供平衡电压; 一种用于控制等离子体产生装置的方法; 以及使用等离子体产生装置的基板处理装置。解决方案：根据本发明实施例的等离子体产生装置300包括：提供RF信号的RF电源311; 等离子体室312，其中注入气体以产生等离子体; 安装在等离子体室312中的线圈313，并且通过施加RF信号来诱导等离子体室312中的电磁场; 连接到线圈313的接地端子的电容元件314; 以及调节线圈313的阻抗与电容元件314的阻抗之间的比率的控制器315。

2. 发明专利

JP2007227375A Long-distance plasma generator 审中-公开
标题翻译：长距离等离子发生器
公开(公告)号：JP2007227375A
公开(公告)日：2007-09-06
申请号：JP2007033886
申请日：2007-02-14
申请人： Hanyang Univ Industry-Univ Cooperation Foundation , 漢陽大学校産学協力団
发明人： JEON HYEONG-TAG , KIM IN-HOE , KIM SEOK-HOON , CHUNG CHIN-WOOK , LEE SANG KYU
IPC分类号： H05H1/46 , C23C16/505 , H01L21/205 , H01L21/3065
CPC分类号： H05H1/46 , H01J37/3211 , H01J37/32357 , H01J37/3244
摘要： PROBLEM TO BE SOLVED: To provide a long-distance plasma generator, capable of improving uniformity of a plasma treatment reaction on a substrate. SOLUTION: The plasma generator includes an RF antenna 107, provided in relation to a chamber, a plasma generation part 110 formed on an upper part inside the chamber and having a plurality of plasma generation gas lead-in tubes 102 uniformly conducted; a first shower head 130 provided at a lower part of the plasma generation part 110 with a plurality of plasma guiding holes 132 formed; and a second shower head 150 provided at a lower part of the first shower head 130, having formed a source gas guiding hole 157, and a plurality of second plasma guiding holes 154 each directly coupled with the first plasma guiding hole 132. A source gas lead-in part 140 is formed between the first shower head 130 and the second shower head 150, and a plurality of source gas lead-in tubes 104 communicate with the source gas lead-in part 140. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够提高基板上的等离子体处理反应的均匀性的长距离等离子体发生器。解决方案：等离子体发生器包括相对于室设置的RF天线107，等离子体产生部分110，其形成在室内的上部，并且具有均匀导电的多个等离子体产生气体引入管102; 设置在等离子体产生部110的下部的形成有多个等离子体引导孔132的第一喷头130; 以及设置在第一喷淋头130的下部的第二喷头150，其形成有源气体引导孔157，以及多个第二等离子体引导孔154，每个第二等离子体引导孔与第一等离子体引导孔132直接连接。源气体导入部分140形成在第一淋浴喷头130和第二喷头150之间，并且多个源气体引入管104与源气体引入部分140连通。版权所有（C） 2007年，日本特许厅和INPIT

3. 发明专利

JP2010245494A Self-assembled monolayer film forming method, and copper wiring for use in semiconductor device and method of making the same 审中-公开
标题翻译：自组装单层膜形成方法和用于半导体器件的铜线及其制造方法
公开(公告)号：JP2010245494A
公开(公告)日：2010-10-28
申请号：JP2009154385
申请日：2009-06-29
申请人： Hanyang Univ Industry-Univ Cooperation Foundation , Hynix Semiconductor Inc , 株式会社ハイニックスセミコンダクターHynix Semiconductor Inc. , 漢陽大学校産学協力団
发明人： YEOM SEUNG-JIN , KIM JAE HONG , KANG SUNG GOON , HAN WON KYU
IPC分类号： H01L21/288 , C23C18/18 , C23C18/38 , C25D7/12 , H01L21/3205 , H01L23/52
CPC分类号： H01L23/53238 , H01L21/288 , H01L21/76861 , H01L21/76873 , H01L21/76874 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To provide a self-assembled monolayer film forming method that prevents the occurrence of voids or seams from being created, and to provide copper wiring for use in a semiconductor device and a method of making the same. SOLUTION: The method of forming the copper wiring of the semiconductor device includes the steps of forming an interlayer dielectric film on a semiconductor substrate having a metal line forming region; forming a self-assembled monolayer film on the interlayer dielectric film including a metal line forming region surface; adsorbing catalytic particles on a surface of the self-assembled monolayer; forming using an electroless plating process a copper seed layer on the self-assembled monolayer having the catalytic particles adsorbed thereto; and forming a copper film on the copper seed layer to fill in the metal line forming region. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种防止产生空隙或接缝的自组装单层膜形成方法，以及提供用于半导体器件的铜布线及其制造方法。解决方案：形成半导体器件的铜布线的方法包括在具有金属线形成区域的半导体衬底上形成层间绝缘膜的步骤; 在包括金属线形成区域表面的层间电介质膜上形成自组装单层膜; 将催化颗粒吸附在自组装单层的表面上; 使用化学镀方法在其上吸附催化剂颗粒的自组装单层上形成铜籽晶层; 并在铜籽晶层上形成铜膜以填充金属线形成区域。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2007041531A Data drive circuit, luminescence display device using the same, and its drive method 有权
标题翻译：数据驱动电路，使用其的发光显示装置及其驱动方法
公开(公告)号：JP2007041531A
公开(公告)日：2007-02-15
申请号：JP2006130863
申请日：2006-05-09
申请人： Hanyang Univ Industry-Univ Cooperation Foundation , Samsung Sdi Co Ltd , 三星エスディアイ株式会社 , 学校法人漢陽大学校産学協力団
发明人： CHUNG BO-YONG , RYU DO HYUNG , KIM HONG KWON , KWON OH-KYONG
IPC分类号： G09G3/30 , G09G3/20 , H01L51/50
CPC分类号： G09G3/3233 , G09G3/3283 , G09G3/3291 , G09G2300/0819 , G09G2300/0852 , G09G2300/0861 , G09G2310/0251 , G09G2310/027 , G09G2310/0289 , G09G2310/066 , G09G2320/0276 , G09G2320/043 , G09G2330/02
摘要： PROBLEM TO BE SOLVED: To provide a data drive circuit for displaying video of uniform brightness and to provide a luminescence display device using it and its drive method. SOLUTION: The data drive circuit comprises a gamma voltage part 300 for generating a plurality of gradation voltages, at least one current sink part for receiving supply of a prescribed current from a pixel during a first period of a horizontal period, a voltage generating part 310 for generating a comparison voltage increasing in a staircase wave form during the first period, at least one comparator 260 for generating a logical signal by comparing a compensation voltage generated according to the prescribed current with the comparison voltage, at least one compensation data generation part 240 for generating compensation data of p bits (p: natural number) when inputting the logical signal, and a digital-analog convertor for generating the synthesis data by using data of k bits (k: natural number) supplied from the outside and the compensation data, and selecting one gradation voltage out of the gradation voltages by a data signal according to a bit value of synthesis data. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于显示均匀亮度的视频的数据驱动电路，并提供使用它的发光显示装置及其驱动方法。解决方案：数据驱动电路包括用于产生多个灰度电压的伽玛电压部分300，用于在水平周期的第一周期期间从像素接收规定电流的供给的至少一个电流吸收部分，至少一个比较器260，用于通过将根据规定电流产生的补偿电压与比较电压进行比较来产生逻辑信号;至少一个补偿数据，用于产生在第一周期内以阶梯波形形式增加的比较电压; 生成部分240，用于在输入逻辑信号时产生p位（p：自然数）的补偿数据;以及数字模拟转换器，用于通过使用从外部提供的k位（k：自然数）的数据来产生合成数据，以及补偿数据，并根据合成数据的位值，通过数据信号从灰度电压中选择一个灰度电压。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2014173187A Correction and reproduction method for metal mold utilizing high-speed flame spray coating method and plasma ion nitriding method, and system therefor 有权
标题翻译：使用高速火焰喷涂方法和等离子体离子法的金属模具的校正和再现方法及其系统
公开(公告)号：JP2014173187A
公开(公告)日：2014-09-22
申请号：JP2013176688
申请日：2013-08-28
申请人： Kia Motors Corp , 起亞自動車株式会社 , Hanyang Univ Industry-Univ Cooperation Foundation , 漢陽大学校産学協力団
发明人： KANG CHUL HO , JUN SANG HWAN , KIM DEUK YONG , PARK GA YOUNG , BAE KYU YEOL , LEE CHANG HEE
IPC分类号： C23C28/00 , C23C4/08 , C23C8/38
CPC分类号： C23C28/02 , C23C4/02 , C23C4/08 , C23C4/129 , C23C4/18 , C23C8/02 , C23C8/38 , C23C28/321 , C23C28/34 , C23C28/36
摘要： PROBLEM TO BE SOLVED: To provide a correction and reproduction method for metal mold that improves building-up efficiency of a metal mold manufactured using a nodular graphite cast iron material by greatly improving wear resistance and fatigue resistance of the metal mold at a specific domain (breakage domain) of a press die of the nodular graphite cast iron material generating fine bending of an automobile door etc.SOLUTION: A correction and reproduction method for metal mold includes: a step of forming an iron-based alloy powder coating layer by a high-speed flame spray coating method at a breakage part of a press die made of a nodular graphite cast iron material as a base material; and a step of forming a nitrided layer on the coating layer by making a surface of the coating layer of the metal mold through a nitriding treatment in a plasma ion nitriding method and hardening the surface. As a preprocessing process of performing the high-speed flame spray coating method, the process further includes a step of controlling surface roughness of the breakage part of the metal mold to the surface, a step of polishing the surface of the coating layer before implementing the plasma ion nitriding method, and a step of removing impurities.
摘要翻译：要解决的问题：提供一种金属模具的校正和再现方法，其通过大大提高特定畴上的金属模具的耐磨性和耐疲劳性，提高使用球墨铸铁材料制造的金属模具的积聚效率（产生汽车门微小弯曲的球墨铸铁材料的压模的断裂区域等。金属模具的校正和再现方法包括：通过高的形成铁基合金粉末涂层的步骤在由球墨铸铁材料制成的压模的断裂部分作为基材的速喷火焰喷涂法; 以及通过在等离子体离子渗氮法中进行氮化处理而使金属模具的被覆层的表面成为表面而使涂层形成氮化层的工序。作为进行高速火焰喷涂法的预处理方法，该方法还包括将金属模具的断裂部的表面粗糙度控制到表面的步骤，在实施前，对涂层的表面进行研磨的工序等离子体离子渗氮法，除去杂质的工序。

6. 发明专利

JP2014132570A Plasma chamber and substrate processing apparatus 审中-公开
标题翻译：等离子体室和基板处理装置
公开(公告)号：JP2014132570A
公开(公告)日：2014-07-17
申请号：JP2013272199
申请日：2013-12-27
申请人： Psk Inc , ピーエスケー・インコーポレーテッド , Hanyang Univ Industry-Univ Cooperation Foundation , 漢陽大学校産学協力団
发明人： LEE JONG SIK , CHO JEONGHEE , KIM HYUN JUN , CHUNG CHIN WOOK , HAN DUKSUN
IPC分类号： H05H1/46 , G03F7/40 , H01L21/3065
CPC分类号： H01J37/3211 , H01J37/321 , H01J37/32174 , H01J37/32357 , H01J37/32458
摘要： PROBLEM TO BE SOLVED: To provide a plasma chamber in which plasma is uniformly generated over the space thereof and a substrate processing apparatus.SOLUTION: A plasma chamber according to an embodiment of the present invention may include: a housing in which gas is injected to generate plasma; a first coil disposed on one surface of the housing; and a second coil disposed on the other surface of the housing.
摘要翻译：要解决的问题：提供等离子体在其空间上均匀地产生的等离子体室和基板处理装置。根据本发明的实施例的等离子体室可以包括：气体注入到壳体产生等离子体设置在所述壳体的一个表面上的第一线圈; 以及设置在所述壳体的另一个表面上的第二线圈。

7. 发明专利

JP2013121817A Heat storage device of vehicle 有权
标题翻译：车辆热存储装置
公开(公告)号：JP2013121817A
公开(公告)日：2013-06-20
申请号：JP2012130942
申请日：2012-06-08
申请人： Hyundai Motor Co Ltd , 現代自動車株式会社 , Hanyang Univ Industry-Univ Cooperation Foundation , 漢陽大学校産学協力団
发明人： CHOI YONG HYUN , KIM YONG CHUL , PARK CHUN-KYU , PARK JUNGHA , PARK MANHEE , LEE KI-HYUNG , SON JUNG-WOOK
IPC分类号： B60H1/08 , B60H1/00 , F28D20/00
CPC分类号： F01P11/00 , F01P2011/205 , F01P2025/04 , F01P2025/30 , F02N19/10 , F28D20/02 , F28D20/028 , F28D2020/0013 , F28D2021/008 , Y02E60/145
摘要： PROBLEM TO BE SOLVED: To provide a heat storage device of a vehicle that can substitute a PTC heater and a warm-up additional device and decreases the fuel consumption and overcomes the environmental control.SOLUTION: The heat storage device contains: a heat insulating container that is formed with a passage entrance and a passage outlet; a cooling water passage that is disposed to penetrate the passage entrance and the passage outlet, and of which one end is coupled to a cooling water discharge port of an engine and the other end is coupled with a cooling water inflow port of the engine and the cooling water circulates; a heat exchanger that has a cooling fin that is formed on the cooling water passage inside the heat insulating container; a phase change material filled inside the heat insulating container and performs heat exchange with the cooling water that flows the cooling water passage through the cooling fin; a phase change material temperature sensor that perceives the phase change material temperature; a heat insulating container internal pressure sensor; a temperature sensor of engine cooling water that circulate the engine; and a control part that makes the cooling water circulate through the cooling water passage according to the engine operating condition and the temperature of the cooling water, and makes the cooling water and the phase change material exchange the heat each other.
摘要翻译：要解决的问题：提供一种能够替代PTC加热器和预热附加装置的车辆的蓄热装置，并且降低燃料消耗并克服环境控制。解决方案：储热装置包括：隔热容器，其形成有通道入口和通道出口; 设置成穿过通道入口和通道出口的冷却水通道，其一端联接到发动机的冷却水排出口，另一端与发动机的冷却水流入口连接，冷却水循环; 具有冷却翅片的热交换器，所述冷却翅片形成在所述隔热容器内的所述冷却水通道上; 填充在隔热容器内的相变材料，与冷却水通过冷却片流动的冷却水进行热交换; 感应相变材料温度的相变材料温度传感器; 绝热容器内部压力传感器; 发动机冷却水的温度传感器，使发动机循环; 以及控制部，其使冷却水根据发动机运转状态和冷却水的温度循环通过冷却水通道，并使冷却水和相变材料彼此交换热量。版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP2009110935A Paste composition for plasma display panel 有权
标题翻译：用于等离子体显示面板的糊状组合物
公开(公告)号：JP2009110935A
公开(公告)日：2009-05-21
申请号：JP2008225967
申请日：2008-09-03
申请人： Hanyang Univ Industry-Univ Cooperation Foundation , Samsung Sdi Co Ltd , 三星エスディアイ株式会社 , 漢陽大学校産学協力団
发明人： KU HUI-YOUNG , KIM KI-JOON , LEE YOO-JUNG , SEO NA-RI , PAIK UN-GYU , CHO CHAE-WOONG
IPC分类号： H01J9/227 , H01J9/02 , H01J11/02 , H01J11/22 , H01J11/34 , H01J11/42
CPC分类号： C09K11/02
摘要： PROBLEM TO BE SOLVED: To provide a paste composition for a plasma display panel, capable of improving dispersibility. SOLUTION: The paste composition for the plasma display panel contains: a mixed dispersant containing inorganic particles, an acid dispersant and a base dispersant; a binder; and solvent. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供能够提高分散性的等离子体显示面板用糊剂组合物。解决方案：用于等离子体显示面板的糊剂组合物包含：含有无机颗粒的混合分散剂，酸分散剂和基础分散剂; 粘合剂溶剂。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2007041586A Data drive circuit, luminescence display device using the same, and its drive method 有权
标题翻译：数据驱动电路，使用其的发光显示装置及其驱动方法
公开(公告)号：JP2007041586A
公开(公告)日：2007-02-15
申请号：JP2006197262
申请日：2006-07-19
申请人： Hanyang Univ Industry-Univ Cooperation Foundation , Samsung Sdi Co Ltd , 三星エスディアイ株式会社 , 学校法人漢陽大学校産学協力団
发明人： CHUNG BO-YONG , RYU DO HYUNG , KWON OH-KYONG
IPC分类号： G09G3/30 , G09G3/20 , H01L51/50
CPC分类号： G09G3/3291 , G09G3/3233 , G09G2300/0819 , G09G2300/0852 , G09G2300/0861 , G09G2310/027 , G09G2310/0275 , G09G2320/0295 , G09G2320/043
摘要： PROBLEM TO BE SOLVED: To provide a data drive circuit for displaying video of uniform brightness. SOLUTION: The data drive circuit comprises at least one current sink part controlled so that a prescribed current flows in a data line connected to a pixel 140, at least one voltage generation part for resetting a voltage value of a gradation voltage by using a compensation voltage generated when the prescribed current flows, at least one digital-analog convertor 250 for selecting one gradation voltage out of the gradation voltages by a data signal in accordance with a bit value of data supplied from the outside, and at least one switching part for supplying the data signal to the data line. The prescribed current is set higher than a current flowing when the pixel emits light at the maximum brightness. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供用于显示均匀亮度的视频的数据驱动电路。解决方案：数据驱动电路包括至少一个电流吸收部分，其被控制使得规定电流在连接到像素140的数据线中流动，至少一个电压产生部分，用于通过使用用于复位灰度电压的电压值在规定电流流动时产生的补偿电压，至少一个数字模拟转换器250，用于根据从外部提供的数据的位值，通过数据信号从灰度电压中选择一个灰度电压，以及至少一个开关将数据信号提供给数据线的部分。规定的电流被设定为高于当像素以最大亮度发光时流动的电流。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2007041532A Data drive circuit, organic luminescence display device using the same, and its drive method 有权
标题翻译：数据驱动电路，使用其的有机发光显示装置及其驱动方法
公开(公告)号：JP2007041532A
公开(公告)日：2007-02-15
申请号：JP2006130865
申请日：2006-05-09
申请人： Hanyang Univ Industry-Univ Cooperation Foundation , Samsung Sdi Co Ltd , 三星エスディアイ株式会社 , 学校法人漢陽大学校産学協力団
发明人： CHUNG BO-YONG , RYU DO HYUNG , KIM HONG KWON , KWON OH-KYONG
IPC分类号： G09G3/30 , G09G3/20 , H01L51/50
CPC分类号： G09G3/3233 , G09G3/2011 , G09G3/3283 , G09G3/3291 , G09G2300/0819 , G09G2300/0852 , G09G2300/0861 , G09G2310/0251 , G09G2310/027 , G09G2310/0289 , G09G2320/0276 , G09G2320/043
摘要： PROBLEM TO BE SOLVED: To provide a data drive circuit for displaying video of uniform brightness. SOLUTION: The data drive circuit comprises a gamma voltage part 300 for generating a plurality of gradation voltages, at least one digital-analog convertor for selecting one gradation voltage of the gradation voltages by using first data Data1 of k bits (k: natural number) supplied from the outside by data signal, at least one decoder for generating second data of p bits (p: natural number) by using the first data of the k bits, at least one current sink part for receiving supply of a prescribed current from a pixel during a first period of a horizontal period, at least one voltage controller for controlling a voltage value of the data signal by using a compensation voltage and the second data generated according to the prescribed current, and at least one switching part for supplying the data signal controlling the voltage value to the pixel during a second period excluding the first period in the horizontal period. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供用于显示均匀亮度的视频的数据驱动电路。解决方案：数据驱动电路包括用于产生多个灰度电压的伽玛电压部分300，至少一个数字模拟转换器，用于通过使用k位（k：1）的第一数据Data1来选择灰度电压的一个灰度电压，自然数），用于通过使用k位的第一数据产生p位（p：自然数）的第二数据的至少一个解码器，至少一个电流宿部分，用于接收规定的在水平周期的第一周期期间来自像素的电流;至少一个电压控制器，用于通过使用补偿电压和根据规定电流产生的第二数据来控制数据信号的电压值;以及至少一个开关部件，在水平周期内不包括第一周期的第二周期期间，将控制电压值的数据信号提供给像素。版权所有（C）2007，JPO＆INPIT

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