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    • 6. 发明专利
    • Impedance source circuit and impedance source circuit providing method
    • 阻抗源电路和阻抗源电路提供方法
    • JP2014145758A
    • 2014-08-14
    • JP2013220135
    • 2013-10-23
    • Keithley Instruments Incケースレー・インスツルメンツ・インコーポレイテッドKeithley Instruments,Inc.
    • JAMES A NIEMANN
    • G01R31/26G01R31/28
    • G01R31/2839G01R1/203G01R15/12
    • PROBLEM TO BE SOLVED: To change SMU(Source Measurement Unit) source impedance so as to ensure coincidence with variation DUT impedance.SOLUTION: The impedance source circuit of an SMU 70 includes a voltage source 72. Electrically controlled variable resistance having a control input is configured to adjust variable resistance connected to a DUT. A loop gain control unit is connected to the control input of the electrically controlled variable resistance. The loop gain control unit is configured to drive the control input of the electrically controlled variable resistance, and to adjust the variable resistance so as to ensure approximate coincidence with the impedance of the DUT. The impedance source circuit may include a voltage detector configured to detect both-end voltages of the DUT and a voltage reference. The loop gain control unit may be configured to drive the control input of the electrically controlled variable resistance on the basis of the voltages detected at both ends of the DUT and the voltage reference.
    • 要解决的问题:改变SMU(源测量单元)源阻抗,以确保与变形DUT阻抗一致。解决方案:SMU 70的阻抗源电路包括电压源72.具有控制输入的电控可变电阻为 配置为调整连接到DUT的可变电阻。 环路增益控制单元连接到电控可变电阻的控制输入端。 环路增益控制单元被配置为驱动电控可变电阻的控制输入,并且调整可变电阻以确保与DUT的阻抗近似一致。 阻抗源电路可以包括被配置为检测DUT的两端电压和电压基准的电压检测器。 环路增益控制单元可以被配置为基于在DUT的两端检测的电压和电压基准来驱动电控可变电阻的控制输入。