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    • 6. 发明专利
    • Piezoelectric thin-film device
    • 压电薄膜器件
    • JP2007282192A
    • 2007-10-25
    • JP2007033609
    • 2007-02-14
    • Ngk Insulators LtdNgk Optoceramics Co Ltdエヌジーケイ・オプトセラミックス株式会社日本碍子株式会社
    • GOJI SHOSAKUIWATA YUICHISUZUKI KENGO
    • H03H9/54H01L41/09H01L41/18H01L41/22H01L41/29H01L41/313H03H9/17
    • PROBLEM TO BE SOLVED: To provide a piezoelectric thin-film device whose frequency-impedance characteristics are hardly influenced by spurious components. SOLUTION: A piezoelectric thin-film filter 1 has such a structure in which an adhesive layer 12, a cavity forming film 13, a lower-surface electrode 14, a piezoelectric thin-film 15, and upper-surface electrodes 16 are laminated in this order on a supporting substrate 11. Upper-surface electrodes 161 and 162 respectively face the lower-surface electrode 14 interposing the piezoelectric thin-film 15 in an exciting region E1 to form piezoelectric thin-film resonators R1 and R2. An upper-surface electrode 163 faces the lower-surface electrode 14 interposing the piezoelectric thin-film 15 in a non-exciting region E2. In the piezoelectric thin-film 15, ten pieces of lower-surface-electrode conduction holes HL are formed piercing the piezoelectric thin-film 15 between the upper surface and the lower surface for carrying out electrical conduction between the upper-surface electrode 163 and the lower-surface electrode 14, both of which mutually face each other interposing the piezoelectric thin-film 15 in the non-exciting region E2. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供其频率阻抗特性几乎不受假分量影响的压电薄膜器件。 解决方案:压电薄膜滤光器1具有这样的结构,其中粘合层12,空腔形成膜13,下表面电极14,压电薄膜15和上表面电极16是 层叠在支撑基板11上。上表面电极161和162分别面对将压电薄膜15插入励磁区域E1中的下表面电极14,以形成压电薄膜谐振器R1和R2。 上表面电极163面对设置在非励磁区域E2中的压电薄膜15的下表面电极14。 在压电薄膜15中,在上表面电极163和下表面电极163之间,在上表面和下表面之间穿过压电薄膜15,形成十个下表面电极导电孔HL,以进行导电 下表面电极14彼此相互面对,将压电薄膜15插入到非激励区域E2中。 版权所有(C)2008,JPO&INPIT
    • 8. 发明专利
    • Sensor element and gas sensor
    • 传感器元件和气体传感器
    • JP2009236708A
    • 2009-10-15
    • JP2008083637
    • 2008-03-27
    • Ngk Insulators LtdNgk Optoceramics Co Ltdエヌジーケイ・オプトセラミックス株式会社日本碍子株式会社
    • SUZUKI YOSHIHIRONAKAGAKI KUNIHIKOOKUDA YUJI
    • G01N27/416G01N27/419
    • G01N27/4071G01N27/4073Y10T29/49
    • PROBLEM TO BE SOLVED: To provide a sensor element that does not affect the assembling or measurement accuracy during manufacturing of a gas sensor and has high strength, and to provide a gas sensor manufactured using such a sensor element. SOLUTION: In the gas sensor element 101 with a long plate-like shape, an amount of flexure as a parameter showing flexure degree in the thickness direction in a first section In1 as a section extending in a longitudinal direction of the sensor element 101 from the position 8/27 of a size of the sensor element apart from one end of the element to the other end, is set to be greater than or equal to 1/1360 and less than or equal to 1/670 with respect to the size in the longitudinal direction of the sensor element 101. The amount of flexure is defined as a sum of a distance from a regression line to an upper side maximum displacement point and a distance from the regression line to a lower side maximum displacement point when the relation of the position X in the longitudinal direction of the sensor element 101 and the displacement Y in a thickness direction of the surface is measured and the regression line is calculated by the least squares method from a scatter diagram on the X-Y plane of the X and Y as two variables. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种在气体传感器的制造过程中不影响组装或测量精度并具有高强度的传感器元件,并提供使用这种传感器元件制造的气体传感器。 解决方案:在具有长板状形状的气体传感器元件101中,作为在第一部分In1中作为沿传感器元件的纵向方向延伸的部分的厚度方向上的挠曲度的参数的弯曲量 101从传感器元件的尺寸从元件的一端到另一端的位置8/27设定为大于或等于1/1360且小于或等于1/670,相对于 传感器元件101的纵向尺寸。挠曲量被定义为从回归线到上侧最大位移点的距离和从回归线到下侧最大位移点的距离之和 测量传感器元件101的纵向上的位置X与表面的厚度方向上的位移Y之间的关系,并且通过XY平面上的散点图以最小二乘法计算回归线 an和X和Y为两个变量。 版权所有(C)2010,JPO&INPIT