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1. 发明专利

JP2007282192A Piezoelectric thin-film device 审中-公开
标题翻译：压电薄膜器件
公开(公告)号：JP2007282192A
公开(公告)日：2007-10-25
申请号：JP2007033609
申请日：2007-02-14
申请人： Ngk Insulators Ltd , Ngk Optoceramics Co Ltd , エヌジーケイ・オプトセラミックス株式会社 , 日本碍子株式会社
发明人： GOJI SHOSAKU , IWATA YUICHI , SUZUKI KENGO
IPC分类号： H03H9/54 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/29 , H01L41/313 , H03H9/17
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric thin-film device whose frequency-impedance characteristics are hardly influenced by spurious components. SOLUTION: A piezoelectric thin-film filter 1 has such a structure in which an adhesive layer 12, a cavity forming film 13, a lower-surface electrode 14, a piezoelectric thin-film 15, and upper-surface electrodes 16 are laminated in this order on a supporting substrate 11. Upper-surface electrodes 161 and 162 respectively face the lower-surface electrode 14 interposing the piezoelectric thin-film 15 in an exciting region E1 to form piezoelectric thin-film resonators R1 and R2. An upper-surface electrode 163 faces the lower-surface electrode 14 interposing the piezoelectric thin-film 15 in a non-exciting region E2. In the piezoelectric thin-film 15, ten pieces of lower-surface-electrode conduction holes HL are formed piercing the piezoelectric thin-film 15 between the upper surface and the lower surface for carrying out electrical conduction between the upper-surface electrode 163 and the lower-surface electrode 14, both of which mutually face each other interposing the piezoelectric thin-film 15 in the non-exciting region E2. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供其频率阻抗特性几乎不受假分量影响的压电薄膜器件。解决方案：压电薄膜滤光器1具有这样的结构，其中粘合层12，空腔形成膜13，下表面电极14，压电薄膜15和上表面电极16是层叠在支撑基板11上。上表面电极161和162分别面对将压电薄膜15插入励磁区域E1中的下表面电极14，以形成压电薄膜谐振器R1和R2。上表面电极163面对设置在非励磁区域E2中的压电薄膜15的下表面电极14。在压电薄膜15中，在上表面电极163和下表面电极163之间，在上表面和下表面之间穿过压电薄膜15，形成十个下表面电极导电孔HL，以进行导电下表面电极14彼此相互面对，将压电薄膜15插入到非激励区域E2中。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2007306210A The piezoelectric thin film device 有权
标题翻译：压电薄膜器件
公开(公告)号：JP2007306210A
公开(公告)日：2007-11-22
申请号：JP2006131445
申请日：2006-05-10
申请人： Ngk Insulators Ltd , Ngk Optoceramics Co Ltd , エヌジーケイ・オプトセラミックス株式会社 , 日本碍子株式会社
发明人： OSUGI YUKIHISA , GOJI SHOSAKU , SUZUKI KENGO
IPC分类号： H03H9/54 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/29 , H03H9/17 , H03H9/58
摘要： PROBLEM TO BE SOLVED: To prevent characteristic deterioration due to interference among a plurality of resonators in a piezoelectric thin film device including the plurality of resonators. SOLUTION: A piezoelectric thin film filter 1 has such a structure that an adhesion layer 12, a cavity forming film 13, a reverse-surface electrode 15, a piezoelectric thin film 16, and a top-surface electrode 17 are laminated in this order on a support material 11. A top-surface electrode 171 faces a lower surface electrode 151 across a piezoelectric thin film 26 in an opposition region E11 to constitute a resonator (series resonator) R11 including the top-surface electrode 171 and lower surface electrode 151 as driving electrodes. A top-surface electrode 172 faces a reverse-surface electrode 152 across the piezoelectric thin film 26 in an opposition region E12 to constitute a resonator (parallel resonator) R12 including the top-surface electrode 172 and reverse-surface electrode 172 as driving electrodes. A reverse-surface electrode 153 is a wiring electrode connecting the lower surface electrode 151 and reverse-surface electrode 152, and different in material and film thickness from the lower surface electrodes 151 and 152. The resonators R11 and R12 are acoustically separated from each other. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：为了防止包括多个谐振器的压电薄膜器件中的多个谐振器之间的干扰导致的特性恶化。解决方案：压电薄膜滤光器1具有如下结构：将粘合层12，空腔形成膜13，反面电极15，压电薄膜16和顶表面电极17层压在这种顺序在支撑材料11上。顶表面电极171跨越对置区域E11中的压电薄膜26面向下表面电极151，以构成包括顶表面电极171和下表面的谐振器（串联谐振器）R11 电极151作为驱动电极。顶表面电极172在对置区域E12中面对跨越压电薄膜26的反面电极152，以构成包括顶表面电极172和反面电极172的谐振器（并联谐振器）R12作为驱动电极。反面电极153是连接下表面电极151和反面电极152的布线电极，并且材料和膜厚度与下表面电极151和152不同。谐振器R11和R12彼此声学分离。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2007086003A Measuring element for oscillation type gyroscope 有权
标题翻译：振动型陀螺仪的测量元件
公开(公告)号：JP2007086003A
公开(公告)日：2007-04-05
申请号：JP2005277903
申请日：2005-09-26
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OI TOMOYOSHI , GOJI SHOSAKU , KIKUCHI TAKAYUKI , OSUGI YUKIHISA
IPC分类号： G01C19/56 , G01C19/5607 , G01C19/5621 , H01L41/08 , H01L41/18 , H01L41/187
摘要： PROBLEM TO BE SOLVED: To reduce a zero-point temperature drift due to the contribution of the electrostatic coupling in wiring for detecting oscillating arm, on the base of an oscillator. SOLUTION: A measuring element for an oscillation type gyroscope includes a base 2A, having a first axis X and a second axis Y that extends along a predetermined surface, the oscillator for providing a detection oscillating arm for detecting rotating angle speeds about a drive oscillating arm and the second axis Y, an actuation side signal electrode 32 provided on the drive oscillating arm, a driving-side grounding electrode 33 provided on the drive oscillating arm, detection-side signal electrodes 30A-30D, respectively provided on the detection oscillating arm, detection-side grounding electrodes 31, respectively provided on the detection oscillating arm, detection-side signal wiring 40 forming on the base 2A corresponding to the detection-side signal electrodes, and detection-side grounding wiring 41 forming on the base 2A, corresponding to the detection-side grounding electrodes 31. A plurality of the detection-side signal wiring 40 is provided on the base 2A, and also the detection-side signal wiring 40 is separated mutually and electrically. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了在振荡器的基极上减少由于用于检测摆臂的布线中的静电耦合的贡献引起的零点温度漂移。解决方案：用于振荡型陀螺仪的测量元件包括具有沿预定表面延伸的第一轴线X和第二轴线Y的基座2A，用于提供检测摆动臂的振荡器，用于检测关于驱动摆动臂和第二轴Y，设置在驱动摆动臂上的致动侧信号电极32，设置在驱动振荡臂上的驱动侧接地电极33，分别设置在检测侧的检测侧信号电极30A-30D 分别设置在检测用振荡臂上的检测侧接地电极31，与检测侧信号电极对应的基板2A上形成的检测侧信号配线40以及形成在基座2A上的检测侧接地配线41 对应于检测侧接地电极31.多个检测侧信号布线40设置在基座2A上，相互和电气分离。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2003315048A Vibrating piece, method of manufacturing the same vibrator, and vibrating gyroscope 有权
标题翻译：振动片，制造相同振动器的方法和振动陀螺仪
公开(公告)号：JP2003315048A
公开(公告)日：2003-11-06
申请号：JP2002165308
申请日：2002-06-06
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： KIKUCHI TAKAYUKI , GOJI SHOSAKU , OSUGI YUKIHISA
IPC分类号： G01C19/56 , G01C19/5621 , G01C19/5628 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/332 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To reduce a deviation for each vibrator regarding a zero-point temperature drift of an output from the vibrator in the vibrator having a vibrating piece provided with a pair of main faces and a pair of side faces.
SOLUTION: The vibrating piece 2 is provided with the pair of mutually nearly parallel main faces 2c, 2d and the pair of side faces 2a, 2b. A width TA of one main face 2c is smaller than a width TB of the other main face 2d. The vibrator is provided with the vibrating piece 2 and the fixation part of the vibrating piece 2. The vibrator is used suitably for a vibrating gyroscope.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了减少每个振动器在具有设置有一对主面和一对侧面的振动片的振动器中来自振动器的输出的零点温漂的偏差。解决方案：振动片2设置有一对相互接近平行的主面2c，2d和一对侧面2a，2b。一个主面2c的宽度TA小于另一个主面2d的宽度TB。振动器设置有振动片2和振动片2的固定部分。振动器适用于振动陀螺仪。版权所有（C）2004，JPO

5. 发明专利

JP2007108053A Oscillator and measuring element for oscillation gyroscope 审中-公开
标题翻译：振荡器的振动和测量元件
公开(公告)号：JP2007108053A
公开(公告)日：2007-04-26
申请号：JP2005300102
申请日：2005-10-14
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： TAI TOMOYOSHI , KIKUCHI TAKAYUKI , GOJI SHOSAKU , OSUGI YUKIHISA
IPC分类号： G01C19/56 , G01C19/5607 , G01C19/5621 , H01L41/08 , H01L41/18 , H01L41/187
摘要： PROBLEM TO BE SOLVED: To constrain the parasitic oscillation of a detecting oscillation arm for Y-axes resulting from rotational angular velocity around Z-axis in order to reduce measurement errors of rotational angular velocity around Y-axis for a oscillator in an oscillation gyroscopes capable of measuring each rotational angular velocity around Y-axis and Z-axis. SOLUTION: The oscillator 1A is formed along a specified plane consisting of X-axis and Y-axis. The oscillator 1A is equipped with a driving oscillation arm 4, a detecting oscillation arm 36 for Y-axes in which detected oscillation is excited in the direction of Z-axis in response to the rotational angular velocity of the oscillator when the oscillator rotates around Y-axis, a detecting oscillation arm 37 for Z-axes in which detected oscillation is excited in a specified plane in response to the rotational angular velocity of the oscillator when the oscillator rotates around Z-axis, and a base 2A. The detecting oscillation arm 36 for Y-axes is equipped with an elongated arm body 8 and a wide-ranging section 9 prepared at the leading point of the arm body 8. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了限制由Z轴周围的旋转角速度引起的Y轴的检测用振动臂的寄生振荡，以减少振动器在Y轴方向上的旋转角速度的测量误差能够测量围绕Y轴和Z轴的每个旋转角速度的振动陀螺仪。解决方案：振荡器1A沿着由X轴和Y轴组成的特定平面形成。振荡器1A配备有驱动振荡臂4，用于Y轴的检测振荡臂36，其中当振荡器围绕Y旋转时响应于振荡器的旋转角速度在Z轴方向上激发检测到的振荡轴，Z轴的检测振荡臂37，其中当振荡器围绕Z轴旋转时响应于振荡器的旋转角速度在指定平面中激发检测到的振荡的基准2A和基极2A。用于Y轴的检测摆动臂36配备有在臂体8的前端准备的细长臂体8和宽范围的部分9.版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2007064714A Element for measuring vibration gyroscope 有权
标题翻译：用于测量振动陀螺仪的元件
公开(公告)号：JP2007064714A
公开(公告)日：2007-03-15
申请号：JP2005248828
申请日：2005-08-30
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OI TOMOYOSHI , GOJI SHOSAKU , KIKUCHI TAKAYUKI , OSUGI YUKIHISA
IPC分类号： G01C19/56 , G01C19/5621 , H01L41/08 , H01L41/18 , H01L41/187
摘要： PROBLEM TO BE SOLVED: To reduce zero-point temperature drift with electrostatic coupling in signal wires for detection contributing thereto at a base part, as to an element for measuring a vibration gyroscope comprising the base part, a drive vibration arm, and a Y-axis detection vibration arm. SOLUTION: A vibrator is equipped with a base part 2A, a drive vibration arm, and a detection vibration arm for detecting rotational angular velocity around a prescribed axis. Detection-side signal wires 40 and 50 are formed on a surface and backside 2a and 2b, respectively, of the base part correspondingly to detection-side signal electrodes. Detection-side grounding wires 41 and 51 are formed on the surface and backside, respectively, of the base part correspondingly to detection-side grounding electrodes. A detection-side signal wire connection part 60 connects a detection-side signal electrode on the surface of the base part and a detection-side signal electrode on the backside of the base part. A detection-side grounding wire connection part 61 connects a detection-side grounding wire on the surface of the base part and a detection-side grounding wire on the backside of the base part. The width of the grounding wire connection part and that of the signal wire connection part change, respectively. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了减少在基部对其进行检测的信号线中的静电耦合的零点温度漂移，关于用于测量包括基部的振动陀螺仪的元件，驱动振动臂和 Y轴检测振动臂。解决方案：振动器配备有基部2A，驱动振动臂和检测振动臂，用于检测围绕规定轴的旋转角速度。检测侧信号线40和50分别形成在与检测侧信号电极相对应的基部的表面和背面2a和2b上。检测侧接地线41和51分别在与检测侧接地电极对应的基部的表面和背面上形成。检测侧信号线连接部60将基部的表面上的检测侧信号电极和基部的背面侧的检测侧信号电极连接。检测侧接地线连接部61将基部的表面上的检测侧接地线与基部的背面侧的检测侧接地线连接。接地线连接部分和信号线连接部分的宽度分别变化。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2004289217A Manufacturing method of vibration reed, vibration reed and vibrator 有权
公开(公告)号：JP2004289217A
公开(公告)日：2004-10-14
申请号：JP2003075457
申请日：2003-03-19
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： GOJI SHOSAKU
IPC分类号： H01L41/09 , H01L41/18 , H01L41/22 , H01L41/332 , H03H3/02 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To provide a method for enhancing the accuracy of dimension of an outer profile of a vibration reed when manufacturing the vibration reed formed with a recessed part. SOLUTION: A member 20 to be processed is provided with: a substrate 1; metallic masks 5A, 5B located on the substrate 1 and formed with a first opening 6; and a photo resist film 7A for coating the metallic masks 5A, 5B and the first opening 6. A second opening 10 is formed in the photo resist film 7A. Etching processing is applied to the member 20 to be processed to form a contour 12 of the vibration reed corresponding to the second opening 10. Then the photo resist film 7A is removed. Moreover, etching processing is applied to a vibrator 1A to form a recessed part in the vibration reed corresponding to the first opening 6. COPYRIGHT: (C)2005,JPO&NCIPI

8. 发明专利

JP2006275968A Drive element 有权
标题翻译：驱动元件
公开(公告)号：JP2006275968A
公开(公告)日：2006-10-12
申请号：JP2005099489
申请日：2005-03-30
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OKADA NAOTSUYO , KIKUCHI TAKAYUKI , GOJI SHOSAKU
IPC分类号： G01N5/02 , H01L41/08 , H01L41/18 , H01L41/187
摘要： PROBLEM TO BE SOLVED: To prevent a functional film from being peeled from an electrode film in a drive element equipped with a substrate capable of being driven by applying voltage, the electrode film, and the functional film comprising palladium or palladium alloy.
SOLUTION: The drive element 1 includes the substrate 2 capable of being driven by applying the voltage, the electrode films 3A and 3B formed on the substrate in order to apply the voltage to the substrate 2 and comprising metal other than palladium and palladium alloy, and the functional film 5 formed on the substrate 2 in such a manner of not being overlapped with the electrode films 3A and 3B in a plane view and comprising palladium or palladium alloy.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了防止功能膜从配备有能够通过施加电压驱动的基板的驱动元件中的电极膜剥离，电极膜和包含钯或钯合金的功能膜。解决方案：驱动元件1包括能够通过施加电压驱动的基板2，形成在基板上的电极膜3A和3B，以将电压施加到基板2并且包括除钯和钯之外的金属合金以及以与平面图不重合电极膜3A和3B的方式形成在基板2上的功能膜5，并且包括钯或钯合金。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2005227299A Vibration type gyroscope 有权
标题翻译：振动式陀螺仪
公开(公告)号：JP2005227299A
公开(公告)日：2005-08-25
申请号：JP2005134263
申请日：2005-05-02
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： KIKUCHI TAKAYUKI , GOJI SHOSAKU , OSUGI YUKIHISA , SOMA TAKAO
IPC分类号： G01C19/56 , G01C19/5607 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To enable to detect a rotation angular velocity with a high sensitivity, without making a projection section of a fixed weight toward a rotation axis direction from a vibrator, when the vibrator is installed, a vibration arm of the vibrator is to be perpendicularly extended to the rotation axis. SOLUTION: The main arm of 101A of the vibrator 2 consists of a base part 3 and at least one set of the inflection vibrator pieces 4A, 4B extending in the direction of crossing a length direction of the base part 3 from the base part 3. The base part 3 and the inflection vibrator pieces 4A, 4B are formed substantially to be extended in a predetermined plane X-Y. One edge part 3a of the base part 3 of the vibrator 2 is fixed. The vibrator 2 rotates on a Z-axis. The vibrator 2 is vibrated like an arrow head D on a fixed portion 26, the inflection vibrator pieces 4A, 4B are vibrating inflectionally like the arrow head A on a connection part 25. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了能够以高灵敏度检测旋转角速度，而不使来自振动器的朝向旋转轴线方向的固定重量的突出部分，当安装振动器时，振动臂振动器垂直于旋转轴线延伸。解决方案：振动器2的101A的主臂由基部3和至少一组沿底座部分3的长度方向从底部延伸的弯曲振动片4A，4B组成基部3和弯曲振动片4A，4B基本上形成为在预定平面XY中延伸。振动器2的基部3的一个边缘部分3a是固定的。振动器2在Z轴上旋转。振动器2像固定部分26上的箭头D一样振动，弯曲振动片4A，4B像连接部分25上的箭头A一样变动地变形。（C）2005，JPO＆NCIPI

10. 发明专利

JP2005024298A Physical quantity measuring device 有权
标题翻译：物理量测量装置
公开(公告)号：JP2005024298A
公开(公告)日：2005-01-27
申请号：JP2003187356
申请日：2003-06-30
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： GOJI SHOSAKU , KIKUCHI TAKAYUKI
IPC分类号： G01C19/56 , G01C19/5621 , H01L41/08 , H01L41/18 , H01L41/22 , H01L41/29 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To reduce furthermore a zero point temperature drift of a vibrator, and to suppress increase of the zero point temperature drift in particular even if the vibrator is miniaturized. SOLUTION: This physical quantity measuring device is equipped with the vibrator and electrode systems for exciting driving vibration to the vibrator and detecting detection vibration excited by the vibrator corresponding to a physical quantity applied to the vibrator. At least a part of the electrode systems 19, 20 is equipped with gold films 11, 23 having the thickness below 45 nm and metal base films 10, 22 provided between the gold films and the vibrator. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了进一步减小振动器的零点温度漂移，并且特别是即使振动器小型化，也可以抑制零点温度漂移的增加。解决方案：该物理量测量装置装备有振动器和电极系统，用于激励振动器的驱动振动，并检测振动器激励的检测振动，该振动对应于施加到振动器的物理量。电极系统19,20的至少一部分配备有厚度低于45nm的金膜11,23和设置在金膜和振动器之间的金属基膜10,22。版权所有（C）2005，JPO＆NCIPI

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