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    • 81. 发明专利
    • Semiconductor test module and test method of semiconductor device
    • 半导体器件的半导体测试模块和测试方法
    • JP2005127765A
    • 2005-05-19
    • JP2003361572
    • 2003-10-22
    • Toshiba Corp株式会社東芝
    • OSADA TATSUOGOTO KENJITSURUMURA KOJIFUJIMORI MASARUNAKAJIMA YASUYUKI
    • G01R31/316G01R31/28G01R31/3183G01R31/319
    • G01R31/2889
    • PROBLEM TO BE SOLVED: To provide a semiconductor device test module and its test method capable of testing a semiconductor device in a short time, while keeping reliability of the semiconductor device, without increasing the number of testers.
      SOLUTION: This semiconductor device test module 100 is equipped with an interface 195 for inputting test condition information when a test object is tested from an external testing device 300 for testing an electrical characteristic of the test object 400, and outputting test result information for showing a test result of the test object to the external testing device, a storage part 115 capable of storing the test condition information, an operation processing part 170 for processing the test condition information independently of the external testing device, output parts 130, 140 for outputting a test signal based on the test condition information to the test object following an instruction from the operation processing part, input parts 150, 160 for inputting a response signal from the test object to the test signal, and a storage part 114 capable of storing information based on the response signal as test result information.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种能够在保持半导体器件的可靠性的同时在短时间内测试半导体器件的半导体器件测试模块及其测试方法,而不增加测试器的数量。 解决方案:该半导体器件测试模块100配备有用于当从外部测试装置300测试测试对象以测试测试对象400的电气特性时输入测试条件信息的接口195,并输出测试结果信息 用于将测试对象的测试结果显示给外部测试装置,能够存储测试条件信息的存储部分115,用于独立于外部测试装置处理测试条件信息的操作处理部分170,输出部分130,140 用于根据来自操作处理部分的指令将测试条件信息输出到测试对象信息,以及用于将来自测试对象的响应信号输入到测试信号的输入部分150,160以及能够 基于响应信号存储信息作为测试结果信息。 版权所有(C)2005,JPO&NCIPI
    • 84. 发明专利
    • Inspection circuit
    • 检查电路
    • JP2004333249A
    • 2004-11-25
    • JP2003128012
    • 2003-05-06
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • IDE YUJIMATSUMOTO ASAKONARUSE KAZUHIRO
    • G01R31/3183G01R31/316H03M1/10
    • PROBLEM TO BE SOLVED: To solve problems that inspection costs for AD converters and DA converters increase as inspection time is lengthened when serially measuring the AD and DA converters, and that the price of an LSI tester rises to increase the inspection cost for the AD and DA converters even if the LSI tester is given a plurality of analog units allowing the AD and DA converters to be measured in parallel by the respective analog units.
      SOLUTION: The DA converters 5 are measured in parallel by means of analog input signal generators 2 fewer than the AD converters 5 by using an analog input signal conversion circuit 4 capable of converting input signals outputted from the signal generators 2 into one or more signals and a digital signal selector circuit 7 capable of selecting/outputting, in an arbitrary order, output signals of the plurality of DA converters 5. The DA converters 15 also uses a conversion circuit 14 and a selector circuit 16.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了解决AD转换器和DA转换器的检测成本随着AD和DA转换器串行测量时检测时间的延长而增加的问题,LSI测试仪的价格上涨,从而增加了检测成本 AD和DA转换器,即使LSI测试仪被给予多个模拟单元,允许AD和DA转换器由相应的模拟单元并行测量。 解决方案:DA转换器5通过使用能够将从信号发生器2输出的输入信号转换为一个或多个的模拟输入信号转换电路4,通过比AD转换器5少的模拟输入信号发生器2来并行测量 更多信号和数字信号选择电路7能够以任意顺序选择/输出多个DA转换器5的输出信号.DA转换器15还使用转换电路14和选择器电路16。 (C)2005,JPO&NCIPI