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    • 71. 发明专利
    • SPUTTERING DEVICE
    • JPS6411969A
    • 1989-01-17
    • JP16535187
    • 1987-07-03
    • HITACHI LTD
    • NAKAGAWA YUKIOOSHITA YOICHISETOYAMA HIDETSUGUNATSUI KENICHI
    • C23C14/36C23C14/35
    • PURPOSE:To reduce the quantity of permanent magnets and the manufacturing cost by arranging a magnetic metal on the inside of a permanent magnet on the reverse side of a target in a magnetron sputtering devise and bringing one end of the magnetic metal into contact with a permanent magnet to be magnetized. CONSTITUTION:When a permanent magnet for the center part and a permanent magnet for the peripheral part are arranged on the reverse side of target 2 as a film forming material to a base 3 in a magnetron sputtering device, Fe or other magnetic metal 6 on behalf of the permanent magnet for the center part is arranged, the magnetic metal 6 is magnetized by bringing its one end into contact with the permanent magnet 5 for the external peripheral part and at the same time, the part facing the target 2 of the magnetic metal 6 is operated as a magnetic pole. A permanent magnet of past complicated form composed of a permanent magnet for the peripheral part and a permanent magnet for the central part is not required, part of a permanent magnet on the rear of a target for a magnetron sputtering is substituted by a magnetic metal and, accordingly, the structure of permanent magnet is simplified and the cost of the permanent magnet also can be drastically reduced.
    • 72. 发明专利
    • HIGH-FREQUENCY ION SOURCE APPALIED DEVICE
    • JPS6366826A
    • 1988-03-25
    • JP20952386
    • 1986-09-08
    • HITACHI LTD
    • NATSUI KENICHIOSHITA YOICHIHAKAMATA YOSHIMIKUROSAWA YUKIOKAMEI MITSUHIRO
    • H01L21/302H01J27/16
    • PURPOSE:To suppress the high-frequency intrusion into ion extracting power supplies and stabilize the operation as an ion source by inserting a high-frequency attenuator reducing high-frequency propagation between an ion extracting device and both pole terminals of the power supplies feeding the voltage to the ion extracting device. CONSTITUTION:An ion extracting device is constituted of an extracting electrode 2 applied with the positive voltage with respect to the container potential of a machining chamber 4 and an accelerating electrode 3 applied with the negative voltage with respect to the container potential of the machining chamber 4, and the electric field for accelerating positive ions from a plasma chamber 1 toward the machining chamber 4 is formed between the electrodes 2 and 3. DC stabilized power supplied 15, 15' are connected to individual electrodes via high-frequency blocking filters 14, 14' and a filter 14'' between the container of the machining chamber 4 and the DC power supplies. In addition, if high-frequency blocking filters 17, 17' and insulating transformers 15, 15' are inserted in commercial-frequency power supplies 18, 18' for the DC stabilized power supplies, the high-frequency current intrusion into grounding cables 19, 19' of the commercial-frequency power supplies is blocked.
    • 73. 发明专利
    • DEVICE FOR ULTRAHIGH VACUUM VAPOR DEPOSITION
    • JPS62218556A
    • 1987-09-25
    • JP6137986
    • 1986-03-19
    • HITACHI LTD
    • KOZONO YUZONARUSHIGE SHINJIMITSUOKA KATSUYAKOMURO MATAHIROHANAZONO MASANOBUOSHITA YOICHI
    • C23C14/24
    • PURPOSE:To positively control magnetic properties of a magnetic artificial ultralattice film which is vapor-deposited and formed on a base plate by provid ing a magnetic pole at the neighborhood of the base plate in an ultrahigh vac uum chamber and impressing an external magnetic field in the in-plane direction or the vertical direction of a face of the base plate for the base plate. CONSTITUTION:In the inside of a vacuum vessel 2 having Torr ultrahigh vacuum, a magnetic material evaporated by an electron gun beam 8 is vapor- deposited on a base plate 1 held by a manipulator 7 for the base plate via a magnetic shielding plate 40 and a shutter 30 and thereby a magnetic artificial ultralattice film is formed. In the above-mentioned device for ultrahigh vacuum vapor deposition, a magnetic pole consisting of yokes 3a, 3b, a coil 4, an iron core 5, and an outer peripheral iron core 6 is provided to the neighborhood of the above-mentioned base plate 1, and an external magnetic field is impressed in the in-plane direction of the face of the base plate 1. Or the external magnetic field is impressed in the vertical direction of the face of the base plate 1 by the other magnetic pole (figure omitted). Thereby magnetic anisotropy is imparted on the above-mentioned film in the in-plane direction or the vertical direction.
    • 74. 发明专利
    • SPUTTERING DEVICE
    • JPS621867A
    • 1987-01-07
    • JP14036385
    • 1985-06-28
    • HITACHI LTD
    • OSHITA YOICHINAKAGAWA YUKIO
    • C23C14/36C23C14/35
    • PURPOSE:To eliminate the attraction force by a permanent magnet in the stage of exchanging a target by respectively independently attaching and detaching the permanent magnet and target in the stage of assembling a target electrode. CONSTITUTION:The target 5 is assembled and installed and thereafter the permanent magnet 6 is assembled in the prescribed position in the stage of assembling the target electrode 4. The electrode 4 is removed from a vacuum vessel 1 and is fixed onto a hydraulic operating table 16 in the stage of exchanging the target 5. a supporting plate 8 is removed and a shaft 18 is forced upward to release the target 5 and the magnet 6. The target 5 is held fixed to a target electrode container 9 by a hermetic means but the attraction force of the magnet 6 does not act at this point of the time and therefore the target can be easily exchanged. The assembly is executed reverse therefrom. The external force by the magnet 6 does not act during the exchange of the target 5 according to the above-mentioned mechanism and therefore the constitution of the target 5 is made simple.
    • 75. 发明专利
    • Puffer type gas circuit breaker
    • PUFFER型气体断路器
    • JP2013131414A
    • 2013-07-04
    • JP2011280666
    • 2011-12-22
    • Hitachi Ltd株式会社日立製作所
    • SAKUYAMA TOSHIAKIURAI HAJIMEOSHITA YOICHIKOIZUMI MAKOTOYAGINUMA NOBUYUKIHIROSE MAKOTOSATO MASARU
    • H01H33/985H01H33/915
    • PROBLEM TO BE SOLVED: To provide a puffer type gas circuit breaker including a heat puffer chamber and a machine puffer chamber capable of improving breaking performance.SOLUTION: The puffer type gas circuit breaker includes: a heat puffer chamber 23 which has a fixed main contact 11 and a movable main contact 12, and a fixed arc contact 13 and a movable arc contact 14, capable of contacting and leaving each other, arranged in a container filled with arc-extinguishing insulation gas, is provided with an insulation nozzle 15 to surround the fixed and movable arc contacts 13, 14, and guides insulation gas having been raised in pressure with heat of an arc in an arc space part 19 into a cylinder 21 where the insulation nozzle 15 is fixed; and a machine puffer chamber 23 which is provided in series therewith and raises the pressure of the insulation gas by mechanical compression. Insulation gas swivel flow generation means is provided at a part which links the arc space part 19 and heat puffer chamber 22 to each other.
    • 要解决的问题:提供一种包括热冲击室和能够提高断裂性能的机器吹气室的吹气式气体断路器。解决方案:吹气式气体断路器包括:热冲击室23,其具有固定的主触点 11和可移动主触头12以及能够接触和离开布置在填充有灭弧绝缘气体的容器中的可动电弧触头13和可动电弧触头14设置有绝缘喷嘴15,以围绕 固定和可移动的电弧触头13,14引导绝缘气体,其已经在电弧空间部分19中的电弧的热量被压力升高到绝缘喷嘴15被固定的气缸21中; 以及与其串联设置的机器冲洗室23,并通过机械压缩提高绝缘气体的压力。 绝缘气体旋转流产生装置设置在将电弧空间部分19和热冲击腔室22彼此连接的部分上。
    • 79. 发明专利
    • Puffer type gas-blast circuit breaker
    • PUFFER型气体断路器
    • JP2007157376A
    • 2007-06-21
    • JP2005347604
    • 2005-12-01
    • Hitachi LtdJapan Ae Power Systems Corp株式会社日本Aeパワーシステムズ株式会社日立製作所
    • URAI HAJIMEOSAWA NAOKIOSHITA YOICHITSUKUSHI MASANORI
    • H01H33/915
    • PROBLEM TO BE SOLVED: To provide a puffer type gas-blast circuit breaker which miniaturizes an operation unit and reduces operation force in the operation unit while utilizing mechanical compression and thermal expansion.
      SOLUTION: A hollow section 20 is formed at a center axis 5a of a cylinder 5 for forming a buffer chamber 9 along with a piston 6; the hollow section 20 is opened to the buffer chamber 9 at the initial stage of opening operation for taking pressure by thermal expansion into the buffer chamber 9; arc-extinguishing gas in the buffer chamber 9 is mechanically compressed when a fixed ark contact 1 goes out of a nozzle throat section 3a of an insulating nozzle 3; and the hollow section 20 is opened to a peripheral gas space positioned on a side opposite to the buffer chamber of the piston 6 for double flow.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种吹气式气体爆破断路器,其使操作单元小型化并且在利用机械压缩和热膨胀的同时降低操作单元中的操作力。 解决方案:中空部分20形成在气缸5的中心轴线5a处,用于与活塞6一起形成缓冲室9; 中空部20在打开操作的初始阶段向缓冲室9打开,以通过热膨胀进入缓冲室9中的压力; 当固定方舟接触器1从绝缘喷嘴3的喷嘴喉部分3a出来时,缓冲室9中的灭弧气体被机械地压缩; 并且中空部20对位于与活塞6的缓冲室相反的一侧的周边气体空间开放,用于双流。 版权所有(C)2007,JPO&INPIT
    • 80. 发明专利
    • Gas circuit breaker
    • 气体断路器
    • JP2005332745A
    • 2005-12-02
    • JP2004151630
    • 2004-05-21
    • Hitachi Ltd株式会社日立製作所
    • MOROOKA HISAJITAKEZAWA YOSHITAKASHIRAISHI KATSUHIKOURAI HAJIMEOSHITA YOICHI
    • H01H33/70H01H33/02H01H33/91
    • PROBLEM TO BE SOLVED: To provide a gas circuit breaker improving an arc distinguishing performance.
      SOLUTION: The gas circuit breaker is provided with: a fixed contactor 1 and a movable contactor 2 contactably and separably arranged in a container filled with an insulating gas; a tubular nozzle 10 installed surrounding the contact-separation parts of the fixed contactor and the movable contactor; and a buffer room 7 to compress the insulating gas and eject it into the nozzle while interlocked with the movable contactor. A nozzle 10 is formed by a composite material composed by adding an inorganic filler to a resin of lower heat resistance than that of a fluororesin, gas pressure inside the nozzle is elevated by an abrasion gas generated from the resin of lower heat resistance than that of the fluororesin by arc energy, and the arc distinguishing performance is improved.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种提高电弧鉴别性能的气体断路器。 解决方案:气体断路器设有:固定接触器1和活动接触器2,可接触地并分离地布置在填充有绝缘气体的容器中; 安装在固定接触器和活动接触器的接触分离部分周围的管状喷嘴10; 以及缓冲室7,用于压缩绝缘气体并将其喷射到与活动接触器互锁的喷嘴中。 喷嘴10由复合材料形成,该复合材料通过将无机填料添加到比氟树脂的耐热性低的树脂中,喷嘴内的气体压力由耐热性低于树脂的耐热性产生的磨损气体升高 通过电弧能量的氟树脂,并且提高了电弧区分性能。 版权所有(C)2006,JPO&NCIPI