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    • 42. 发明专利
    • Vacuum processing apparatus gate valve
    • 真空加工装置门阀
    • JP2005038950A
    • 2005-02-10
    • JP2003198163
    • 2003-07-17
    • Hitachi Kasado Eng Co Ltd日立笠戸エンジニアリング株式会社
    • KURIHARA KIYOSHIKUDO KATSUYOSHIMATSUDA SHINICHIRO
    • B65G49/00F16K3/16F16K51/02H01L21/677H01L21/68
    • PROBLEM TO BE SOLVED: To provide a gate valve mechanism in which a valve opening/closing operation is one operation in a linear operation, in a vacuum processing apparatus.
      SOLUTION: The mechanism is provided with a protruding portion in which a gate end 4-a moving in/out together with the opening/closing operation of a valve is provided along the inner wall 1-a of a reaction chamber. The valve opening/closing operation is made into one linear operation by a bellow flange with a bearing guide, and a small gap between the opening portion 3 of the reaction chamber 1 and the gate end 4-a is maintained when the gate valve is closed. The mechanism has a mechanism in which twisting prevention of a gate sealing surface is applied and sealing can be maintained.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种闸阀机构,其中阀打开/关闭操作是线性操作中的一个操作,在真空处理设备中。 解决方案:机构设置有突出部分,其中沿着反应室的内壁1-a设置有门端4-a与阀的打开/关闭操作一起移入/移出的突出部分。 阀门打开/关闭操作由具有轴承导向件的波纹管法兰形成一个线性操作,当闸阀关闭时,保持反应室1的开口部分3与闸门端部4-a之间的小间隙 。 该机构具有防止浇口密封面受到扭转的机构,能够保持密封性。 版权所有(C)2005,JPO&NCIPI
    • 43. 发明专利
    • Anti-freezing structure of track steel beam
    • 轨道钢梁抗冻结构
    • JP2005036433A
    • 2005-02-10
    • JP2003198152
    • 2003-07-17
    • Hitachi Kasado Eng Co Ltd日立笠戸エンジニアリング株式会社
    • KAKEHI YUTAKAMATSUZAKI TAKESHIAIZU KAZUO
    • E01H8/08E01B19/00
    • Y02A30/38
    • PROBLEM TO BE SOLVED: To solve the following problems about a conventional method: a system, wherein a heater is installed, is lacking in easiness of maintenance and inexpensiveness of a device; and a device is hard to constitute, due to the existence of a vertical rib and a horizontal rib, serving as a strength member of a track steel beam, when a hot-air type snow-melting system is to be applied to the track steel beam. SOLUTION: A duct is mounted inside the track steel beam in accordance with the arrangement of the strength member of the steel beam; a top surface of the duct is provided with an opening; and a hot-air heater is connected to the duct. The top surface of the duct serves as a traveling surface of the track steel beam. In such a constitution, the hot-air heaters are provided at both ends of the track steel beam, and connected to the duct. COPYRIGHT: (C)2005,JPO&NCIPI
    • 解决以下问题:为了解决以往的方法存在以下问题:安装有加热器的系统不容易维护,装置成本低廉; 并且由于存在作为轨道钢梁的强度构件的垂直肋和水平肋,所以当将热风式的融雪系统施加到轨道钢时,难以构成装置 光束。

      解决方案:根据钢梁强度构件的布置,将管道安装在轨道钢梁内; 管道的顶面设置有开口; 并且热风加热器连接到管道。 管道的顶面用作轨道钢梁的行进面。 在这种结构中,热风加热器设置在轨道钢梁的两端,并连接到管道。 版权所有(C)2005,JPO&NCIPI

    • 44. 发明专利
    • Track of monorail
    • 单轨轨迹
    • JP2004084263A
    • 2004-03-18
    • JP2002246075
    • 2002-08-27
    • Hitachi Kasado Eng Co LtdHitachi Ltd日立笠戸エンジニアリング株式会社株式会社日立製作所
    • AWA MASANAOMATSUZAKI SHINICHIROSHIMIZU AKIOIWAMOTO NOBORU
    • E01B25/10E01D2/00E01D19/04E01D101/24
    • PROBLEM TO BE SOLVED: To prevent concrete track beams on which a straddle type monorail runs from dropping in the event that anchor bolts are damaged by a large earthquake.
      SOLUTION: The track beams constitute double tracks. The track beams 20L, 20R are connected to a post 10 at their respective ends via bearings 30L, 30R. The brackets 34L, 34R of the bearings 30L, 30R are surrounded by connectors 41L, 41R. The connectors 41L, 41R are connected to each other by a wire rope 46. In the event that the anchor bolts securing the one track beam 20L to the post 10 are damaged by a large earthquake making the track beam 20L likely to move past the post 10L and drop, the wire rope 46 pulls the track beam toward the other bearing 30R, preventing the track beam from dropping.
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:如果在大型地震中地脚螺栓损坏的情况下,为了防止跨骑式单轨轨道的混凝土轨道梁落下。

      解决方案:轨道梁构成双轨。 轨道梁20L,20R通过轴承30L,30R在它们各自的端部处连接到柱10。 轴承30L,30R的支架34L,34R被连接器41L,41R包围。 连接器41L,41R通过钢丝绳46彼此连接。在将一个轨道梁20L固定到立柱10的锚固螺栓被大的地震破坏的情况下,使得轨道梁20L可能移动经过柱 10L并下降,钢丝绳46将轨道梁拉向另一轴承30R,防止轨道梁掉落。 版权所有(C)2004,JPO

    • 46. 发明专利
    • Method and device for transporting substrate
    • 用于运输基板的方法和装置
    • JP2003282669A
    • 2003-10-03
    • JP2002086199
    • 2002-03-26
    • Hitachi High-Technologies CorpHitachi Kasado Eng Co Ltd日立笠戸エンジニアリング株式会社株式会社日立ハイテクノロジーズ
    • UCHIMAKI YOICHIEGAWA YUKOKAJI TETSUNORI
    • B65G1/00B65G49/07H01L21/00H01L21/677H01L21/68
    • H01L21/67727H01L21/67276H01L21/67736H01L21/67778Y10S414/135Y10S414/137Y10S414/141
    • PROBLEM TO BE SOLVED: To provide a method and a device for transporting single wafer in which transport for an wafer and connection for the wafer between a wafer transport means and each processing device are prevented from being rate- controlled, and throughput is prevented from deteriorated, even if processes differ from one another for each processing device in a bay. SOLUTION: Each of bays 100, 200, 300,... is connected to an inter-bay transport line 400 through each of bay stockers 130, 230, 330,..., respectively. The bay 100 consists of a loop-like sheet-fed transport line 120, and processing devices 101-106 that are placed side by side along a direction crossing a transport direction of the inter-bay transport line 400. The processing devices 101-103 are placed side by side on one side of the sheet-fed transport line 120. The processing devices 104-106 are placed side by side on the other side of the line. The processing devices 101-106 comprises transport robots 11-16 and a chamber (not shown in a figure) in which a wafer W is processed one by one. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种传输单晶片的方法和装置,其中防止晶片的传输和晶片在晶片传送装置和每个处理装置之间的连接被速率控制,并且吞吐量为 即使处理间隔中的每个处理装置的处理彼此不同,也防止了劣化。 解决方案:每个隔间100,200,300,...分别通过每个隔间储存器130,230,330,...连接到间隔间输送线400。 海湾100由环状单张纸输送线120和沿着与间隔间输送线400的输送方向交叉的方向并排放置的处理装置101-106组成。处理装置101-103 被并排地放置在单张纸输送线路120的一侧。处理装置104-106并排放置在线的另一侧。 处理装置101-106包括输送机器人11-16和其中晶片W逐个处理的室(未示出)。 版权所有(C)2004,JPO