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    • 39. 发明专利
    • Plasma mass spectroscope
    • 等离子体质谱仪
    • JP2009043608A
    • 2009-02-26
    • JP2007208177
    • 2007-08-09
    • Agilent Technol Incアジレント・テクノロジーズ・インクAgilent Technologies, Inc.
    • YAMADA NORIYUKINISHIJIMA TAKESHI
    • H01J49/10G01N27/62H01J49/06
    • H01J49/105
    • PROBLEM TO BE SOLVED: To improve sensitivity as an analyzer by reducing ion density of plasma, and increasing an ion amount of analyzed elements contained in the ion beam. SOLUTION: A small collision chamber 36 is installed that is demarcated by a side wall 35 extended surrounding the plasma along an axis line direction so as to limit spreading of the plasma toward a side direction in the rear face side of a skimmer cone 33, and a flat part 56 of a first electrode 53 equipped with an aperture 57 which is positioned on the rear side of the side wall 35 and in which the ion beam is made passable. In the small collision chamber 36, since its interior pressure is raised without introducing additional gas, argon ion is neutralized by collision/recombination of ion and electron, so that the ion density of the plasma is reduced. By this, a beam diameter at the time of extraction/transportation of the ions can be suppressed comparatively small. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:通过降低等离子体的离子密度和增加离子束中包含的分析元素的离子量来提高作为分析仪的灵敏度。 解决方案:安装一个小型碰撞室36,其被围绕等离子体延伸的侧壁35沿着轴线方向划分,以限制等离子体在分离器锥体的后表面侧的侧向扩展 33和第一电极53的平坦部分56,其配备有位于侧壁35的后侧上的孔57,并且其中离子束可通过。 在小碰撞室36中,由于其内部压力升高而不引入额外的气体,所以通过离子和电子的碰撞/复合来中和氩离子,使得等离子体的离子密度降低。 由此,可以抑制离子的萃取/输送时的光束直径。 版权所有(C)2009,JPO&INPIT