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    • 34. 发明专利
    • Detection device, exposure device, and method for manufacturing device
    • 检测装置,曝光装置和制造装置的方法
    • JP2013187206A
    • 2013-09-19
    • JP2012048611
    • 2012-03-05
    • Canon Incキヤノン株式会社
    • MAEDA HIRONORI
    • H01L21/027G01B11/00
    • G03F9/7084G01B11/002G01B11/0608G01B11/14G01N21/41G01S17/88G03F7/70641G03F9/7026G03F9/7057
    • PROBLEM TO BE SOLVED: To promptly and highly accurately detect a position of a mark provided on a rear surface of the object to be measured.SOLUTION: A detection device which detects a mark provided on a rear surface of the object to be measured comprises a first detector, a second detector, and a processing unit. The first detector illuminates the mark from a surface side of the object to be measured and detects an image of the illuminated mark. The second detector is disposed in a position in which a relative positional relation with the first detector is fixed, and detects a surface position of the object to be measured. The processing unit obtains the information indicating a focus state of the image of the mark in the first detector on the surface position detected by the second detector.
    • 要解决的问题:及时且高精度地检测设在被测量物体的后表面上的标记的位置。解决方案:检测设置在被测量物体的后表面上的标记的检测装置包括: 第一检测器,第二检测器和处理单元。 第一检测器从要测量的物体的表面侧照亮标记并检测照明标记的图像。 第二检测器设置在与第一检测器的相对位置关系固定的位置,并且检测被测量物体的表面位置。 处理单元从由第二检测器检测到的表面位置获得指示第一检测器中的标记的图像的聚焦状态的信息。