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21. 发明专利

JP3599880B2 Cantilever chip 失效
公开(公告)号：JP3599880B2
公开(公告)日：2004-12-08
申请号：JP5479996
申请日：1996-03-12
申请人：オリンパス株式会社
发明人：克宏松山
IPC分类号： G01B21/30 , G01N37/00 , G01Q20/04 , G01Q60/16 , G01Q60/38 , G01Q70/16 , H01J37/28 , G01N13/16 , G12B21/08
CPC分类号： G01Q70/16 , G01Q70/10 , Y10S977/873

22. 发明专利

JP3599485B2 Contactor and a method of manufacturing the same 失效
公开(公告)号：JP3599485B2
公开(公告)日：2004-12-08
申请号：JP17372296
申请日：1996-07-03
申请人：電気化学工業株式会社
发明人：範昭中崎 , 和男加藤 , 盛一坂輪
IPC分类号： G01R1/067 , G01N37/00 , G01Q60/16 , G01Q60/38 , G01Q70/16 , H01R4/58

23. 发明专利

JP3576677B2 Electrostatic actuators and probe using the actuator, the scanning probe microscope, processing device, a recording and reproducing apparatus 失效
公开(公告)号：JP3576677B2
公开(公告)日：2004-10-13
申请号：JP2610396
申请日：1996-01-19
申请人：キヤノン株式会社
发明人：隆行八木 , 進安田
IPC分类号： G01B7/34 , B25J9/12 , B81B3/00 , G01B7/00 , G01N27/60 , G01N37/00 , G01Q10/04 , G01Q30/04 , G01Q60/04 , G01Q60/16 , G01Q60/38 , G01Q80/00 , G11B9/00 , G11B9/14 , H02N1/00 , G01N13/10 , G01N13/16
CPC分类号： G01Q10/04 , G01Q80/00 , G11B9/1418 , H02N1/006 , Y10S977/725 , Y10S977/851 , Y10S977/864 , Y10S977/872 , Y10S977/891 , Y10S977/904
摘要： An electrostatic actuator includes a movable plate arranged on a substrate through a gap, a movable electrode arranged on the movable plate, and a fixed electrode arranged on the substrate to oppose the movable electrode. The movable electrode and the fixed electrode are arranged not to overlap at any portion in a direction perpendicular to a surface of the fixed electrode. The movable electrode and the fixed electrode have comb-like shapes.

24. 发明专利

JP2004271276A Manufacturing method of probe for scanning probe microscope, inspection method, and usage 有权
公开(公告)号：JP2004271276A
公开(公告)日：2004-09-30
申请号：JP2003060157
申请日：2003-03-06
申请人： Toyota Motor Corp , トヨタ自動車株式会社
发明人： TAKAZAWA NOBUAKI , SHIMAZAKI RYUJI
IPC分类号： C01B31/02 , G01Q60/16 , G01Q60/38 , G01Q70/10 , G01Q70/12 , G01Q70/16 , G01N13/16 , G01N13/12 , G12B21/08
CPC分类号： G01Q70/12 , Y10S977/876
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a probe for a scanning probe microscope equipped with a peak part made of monolayer carbon nanotubes, its inspection method, and its usage. SOLUTION: According to this manufacturing method of a probe for a scanning probe microscope equipped with a peak part made of monolayer carbon nanotubes, a catalyst metal is given to an end of a probe substrate and then the catalyst given part on the end of the probe substrate is irradiated with arc discharge generated between thin needle-like carbon electrodes in an inert gas atmosphere in the probe microscope, thereby causing the single layer carbon nanotubes to grow up on the catalyst given part. COPYRIGHT: (C)2004,JPO&NCIPI

25. 发明专利

JP2004157071A Sample surface measuring device 有权
公开(公告)号：JP2004157071A
公开(公告)日：2004-06-03
申请号：JP2002324972
申请日：2002-11-08
申请人： Casio Comput Co Ltd , カシオ計算機株式会社
发明人： YAMAGUCHI MICHIYA
IPC分类号： G01B7/34 , G01N23/225 , G01N23/227 , G01Q30/02 , G01Q60/02 , G01Q60/10 , G01Q60/16 , G01N13/10 , G01N13/12
摘要： PROBLEM TO BE SOLVED: To measure irregularities on the sample surface and the kind of an element constituting a sample by one device. SOLUTION: When measuring the irregularities on the sample 1 surface, the tip part of a probe 3 provided movably into/from the inside of a cylindrical extraction electrode 4 is projected from the lead electrode 4, and the projected tip part of the probe 3 is drawn close to the sample 1 surface, and a tunnel current between them is detected, to thereby measure the irregularities on the sample 1 surface. On the other hand, When measuring the kind of the element constituting the sample 1, the whole probe 3 is stored in the lead electrode 4, and an extraction voltage of about 3.5-4.5 kV is applied between the probe 3 and the lead electrode 4 from an extraction voltage application circuit 13, and the sample 1 surface is irradiated with electron beams emitted by field emission from the tip part of the probe 3, and a characteristic X-ray emitted from the sample 1 surface is detected, to thereby measure the kind of the element constituting the sample 1 based on the detection result. COPYRIGHT: (C)2004,JPO

26. 发明专利

JP3524326B2 Method of manufacturing a female mold substrate and the female-type substrate used for manufacturing of micro-hour hand and minute hour hand and the manufacturing method of the probe with the female substrate 失效
公开(公告)号：JP3524326B2
公开(公告)日：2004-05-10
申请号：JP13288297
申请日：1997-05-07
申请人：キヤノン株式会社
发明人：隆行八木 , 康弘島田 , 勉池田
IPC分类号： G01N37/00 , B29C33/38 , G01Q60/16 , G01Q60/38 , G01N13/16 , G01N13/12 , G12B21/04 , G12B21/08
CPC分类号： G01Q70/16 , Y10S977/875
摘要： A female mold substrate used for the production of a microprobe tip or probe detecting a tunneling current or weak force includes a substrate provided with a recess section and a heat-flowable layer having flowability by heat treatment formed on the substrate and covering the recess. The female mold substrate is made by forming a recess section on the top surface of a substrate and forming a heat-flowable layer on the top surface of the substrate including the recess section. A microprobe tip detecting a tunneling current or weak force is made by forming a tip material layer on the female mold substrate and transferring the tip of material layer onto another substrate.

27. 发明专利

JP2004108930A Method and apparatus of manufacturing probe 有权
标题翻译：制造探针的方法与装置
公开(公告)号：JP2004108930A
公开(公告)日：2004-04-08
申请号：JP2002271753
申请日：2002-09-18
申请人： Seiko Instruments Inc , セイコーインスツルメンツ株式会社
发明人： HIRATA MASAKAZU , OMI MANABU
IPC分类号： B81C99/00 , G01Q60/16 , G01Q60/22 , G01Q60/60 , G01Q70/00 , G01Q70/16 , G01N13/24 , B81C5/00 , G12B21/02 , G12B21/04
摘要： PROBLEM TO BE SOLVED: To provide a method and an apparatus of manufacturing a probe of a scanning probe microscope, which accurately form a minute aperture at the tip of the probe at a low cost.
SOLUTION: In the method, a metal wire 101 with a sharp section at its edge is covered by a film 102 so that the thinnest portion of the film 102 is on the sharp section of the metal wire 101, and the film 102 is dipped into etchant 202 in such a state that the sharp section of the metal wire 101 is at its lower position thereby carrying out an etching process. The top of the sharp section of the metal wire 101 is exposed by the etching process, and therefore the aperture is formed. The exposure of the metal wire 101 is detected by connecting an electrode 203 with the metal wire 101 and an ohm meter 205 and by observing a value of resistance between the metal wire 101 and the electrode 203, and thereby accurately forming the minute aperture at the low cost.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种制造扫描探针显微镜的探针的方法和装置，其以低成本在探针的尖端精确地形成微小孔。解决方案：在该方法中，在其边缘处具有尖锐部分的金属线101被膜102覆盖，使得膜102的最薄部分在金属线101的尖锐部分上，并且膜102 在金属线101的尖锐部分处于其较低位置的状态下浸入蚀刻剂202中，从而进行蚀刻处理。通过蚀刻工艺使金属线101的尖锐部分的顶部露出，因此形成孔。通过将电极203与金属线101和欧姆计205连接并且通过观察金属线101和电极203之间的电阻值来检测金属线101的曝光，从而在低成本。版权所有（C）2004，JPO

28. 发明专利

JP3456541B2 Conductive needle-like single crystal body and embedded products 失效
公开(公告)号：JP3456541B2
公开(公告)日：2003-10-14
申请号：JP18504993
申请日：1993-07-27
申请人：電気化学工業株式会社
发明人：和男加藤 , 勝雨宮
IPC分类号： C30B11/12 , C30B29/62 , G01Q60/16 , G01Q60/38 , G01Q70/10 , G01Q70/16 , G01R1/067 , H01B1/00 , H01B1/08 , H01B1/14 , H01L21/66 , H01L29/06

29. 发明专利

JP2003287488A Method and apparatus for manufacturing probe for scanning probe microscope, and probe manufactured by the same method 有权
标题翻译：用于扫描探针显微镜制造探针的方法和装置，以及由该方法制造的探针
公开(公告)号：JP2003287488A
公开(公告)日：2003-10-10
申请号：JP2002089394
申请日：2002-03-27
申请人： Unisoku Co Ltd , 株式会社ユニソク
发明人： UEDA KAZUYUKI , YOSHIMURA MASAMITSU , NAGAMURA TOSHIHIKO
IPC分类号： G01Q60/16 , G01Q60/38 , G01Q70/00 , G01Q70/12 , G01Q70/16 , G01Q90/00 , G01N13/10 , G12B21/02
摘要： PROBLEM TO BE SOLVED: To obtain a probe with carbon nanotubes for a scanning probe microscope which can manufacture in an atmosphere in a short manufacturing time in a mass production and which does not exert an adverse influence on mechanical and electrical characteristics of the nanotubes.
SOLUTION: A method for manufacturing the probe for the scanning probe microscope comprises the steps of: opposing the probe 5 of a metal or a semiconductor sharpened at a tip end to an electrode 4 at a small interval in a container 3 for filling a solution 2 for dispersing the carbon nanotubes 7 in an organic solvent; and applying a voltage to the probe 5 and the electrode 4 to adhere the nanotubes 7 to the tip end of the probe 5.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了获得用于扫描探针显微镜的碳纳米管的探针，该扫描探针显微镜可以在大批量生产的制造时间短的气氛中制造，并且不会对机械和电气特性产生不利影响纳米管解决方案：用于制造用于扫描探针显微镜的探针的方法包括以下步骤：将金属或探针5的前端尖锐的探针5以小间隔相对于电极4在容器3中填充用于将碳纳米管7分散在有机溶剂中的溶液2; 并向探针5和电极4施加电压以将纳米管7粘附到探针5的尖端。版权所有（C）2004，JPO

30. 发明专利

JP2003149119A CONDUCTIVE TRANSPARENT PROBE 审中-公开
公开(公告)号：JP2003149119A
公开(公告)日：2003-05-21
申请号：JP2001341651
申请日：2001-11-07
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： MURASHITA TATSU
IPC分类号： G01Q60/16 , G01Q60/22 , G01Q60/38 , G01N13/12 , G12B21/06 , G12B21/08
摘要： PROBLEM TO BE SOLVED: To provide a conductive transparent probe applicable to shear force/ gap control without damaging tunnel current injection and light-condensing efficiency. SOLUTION: The probe has an optical fiber 1 provided with a sharpened-tip taper part 5 at one end, a conductive transparent film 4 formed on the surface of the taper part 5 and a first metallic film 6 formed on the outer circumferential surface of the optical fiber 1. With the conductive transparent film 4 and the first metallic film 6 connected electrically and the other end of the optical fiber 1 fixed to a fixing plate 9, the length and thickness of the first metallic film 6, from the part adjacent to the taper part 5 of the conductive transparent probe which excites the optical fiber 1 at the axial orthogonal direction with a sensing oscillator 8 to the area containing the other end, are respectively set not less than 5 mm, the value that the optical fiber 1 oscillates integrally with the sensing oscillator 8, and 0.2-10 μm.

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