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21. 发明专利

JPH0871903A COATING BAND RETAINING MECHANISM OF TREAD PRESSURE PAD DEVICE 失效
公开(公告)号：JPH0871903A
公开(公告)日：1996-03-19
申请号：JP23433194
申请日：1994-09-01
申请人： AMITEC KK
发明人： KAWAKITA HITOSHI
IPC分类号： B24B21/06 , B24B21/10
摘要： PURPOSE: To provide the coating band retaining mechanism of a tread pressure pad device in which a wear-resistant coating band can be easily attached thereto and detached therefrom. CONSTITUTION: Plate springs 55 are continuedly connected to pinching plates 50 which pinch the end edges of a coating band 43 in positions of both side surfaces of a pad frame 40, and the pinching plates 50 are made to be energized in a direction parted from the attaching surfaces 44 of the pad frame 40, so that when fixing screws 58 to fix the pinching plates 50 are loosed, the pinching plates 50 are parted from the side surfaces of the pad frame 40 and are surfaced therefrom by the action of the plate springs 55 and such a clearance that the coating band 43 is inserted therein can be retained between the pinching plates 50 and the attaching surfaces 44.

22. 实用新型

JPH03100061U 失效
公开(公告)号：JPH03100061U
公开(公告)日：1991-10-18
申请号：JP855990
申请日：1990-01-30
IPC分类号： B24B21/10

23. 发明专利

JPH01321157A SUPPORTING BODY FOR WORKPIECE OF BELT GRINDER 失效
公开(公告)号：JPH01321157A
公开(公告)日：1989-12-27
申请号：JP15742188
申请日：1988-06-24
申请人： KUSHIBIKI KOGYO KK
发明人： KUSHIBIKI ATSUO
IPC分类号： B24B21/04 , B24B21/10 , B24B21/12 , B24B21/14
摘要： PURPOSE:To prevent an edge portion from being excessively scraped off by forming the interval between the outer peripheral face of an elastically pressing roller and the outer peripheral face of a supporting roller which are opposite to each other via a ring belt to be larger on the edge portions of a band-like metal plate workpiece than on the center portion thereof. CONSTITUTION:As a workpiece 2 which is a band like metal plate is sent into between a rubber elastic roller 6 and a supporting roller 3 with both edges thereof being guided by each groove 15 of a pair of guide members 12, the workpiece 2 is installed between a ring type belt 1 on which abrasive grains are deposited and the supporting face 9 of the supporting roller 3. At this time, both edge portions of the workpiece 2 are slightly elastically deformed toward the supporting roller 3 side by the pressing force of the elastically pressing roller 6, causing the elastically pressing force on the surface of the workpiece 2 to be nearly equal at the edge portions and center portion thereof, to uniformly grind the surface by means of the ring type belt 1. The other side is ground by means of a grinder in which the elastically pressing roller 6 and supporting roller 3 are reversely placed. Thus, it can be prevented that the edge portions of the workpiece is excessively scraped off more than the center portion, enabling highly accurate grinding.

24. 实用新型

JPS4952193U 失效
公开(公告)号：JPS4952193U
公开(公告)日：1974-05-09
申请号：JP9416472
申请日：1972-08-10
IPC分类号： B24B21/04 , B24B21/10 , B24B41/00 , B24B41/02

25. 实用新型

JPS469435Y1 失效
公开(公告)号：JPS469435Y1
公开(公告)日：1971-04-02
申请号：JP2299967
申请日：1967-03-19
IPC分类号： B24B21/10

26. 发明专利

JP5586854B2 Both end surfaces grinding apparatus of the billet 有权
公开(公告)号：JP5586854B2
公开(公告)日：2014-09-10
申请号：JP2009024828
申请日：2009-02-05
申请人：株式会社万陽
发明人：博康塩川
IPC分类号： B24B9/00 , B24B21/10

27. 发明专利

JP2011062806A Grinding plate oscillating type belt grinding machine with number of projections 审中-公开
标题翻译：抛光板振动式带式抛光机
公开(公告)号：JP2011062806A
公开(公告)日：2011-03-31
申请号：JP2009218194
申请日：2009-09-19
申请人： Yanagisawa Mitsunori , Tochio Yanagisawa , 柳澤光範 , 十千夫柳澤
发明人： YANAGISAWA TOCHIO
IPC分类号： B24B21/10
摘要： PROBLEM TO BE SOLVED: To shorten a grinding time by continuously exerting a large grinding force to the place to be ground such as burrs or irregularity on the outer peripheral surface of the object to be ground, and also to shorten the working time required for smoothing the object to be ground. SOLUTION: The grinding plate oscillating type belt grinding machine is equipped with a grinding plate oscillating mechanism 37 which provides a lot of linear projection rows by extending to the inclined direction with respect to the traveling direction of the grinding belt 11 on a grinding belt receiving surface forming side of the grinding plate 27, disperses and disposes the projection parts 33 on the grinding belt receiving surface forming side, forms the grinding belt receiving surface 28 by the top surface 32 of the projection parts 33, oscillates the grinding plate 27, and continuously reciprocates the grinding belt receiving surface 28 to the direction perpendicular to the traveling direction of the grinding belt 11. The belt grinding machine is equipped with a belt oscillating mechanism 47 which continuously reciprocates the grinding belt 11 to the direction perpendicular to the traveling direction. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了通过在被研磨对象的外周面上连续地施加大的研磨力来减少研磨时间，例如毛刺或不规则，并且缩短工作时间需要平滑待研磨的物体。解决方案：研磨板振动式带式磨床配备有研磨板摆动机构37，磨机摆动机构37通过在磨削中相对于研磨带11的行进方向相对于倾斜方向延伸而提供大量的线性突起排研磨板27的带接收面形成侧，将突出部33分散并配置在研磨带接收面形成侧，通过突起部33的顶面32形成研磨带接收面28，使研磨板27摆动并且将研磨带接收表面28连续往往与研磨带11的行进方向垂直的方向往复运动。带式研磨机配备有带式摆动机构47，该带振动机构47使研磨带11向垂直于行进方向的方向连续往复运动方向。版权所有（C）2011，JPO＆INPIT

28. 发明专利

JP2008284684A Method and apparatus for polishing edge of substrate using polishing arm 审中-公开
标题翻译：使用抛光ARM抛光底板的方法和装置
公开(公告)号：JP2008284684A
公开(公告)日：2008-11-27
申请号：JP2008132102
申请日：2008-05-20
申请人： Applied Materials Inc , アプライドマテリアルズインコーポレイテッドApplied Materials,Incorporated
发明人： GARRY C ETTINGER , BUTTERFIELD PAUL D , MANENS ANTOINE P
IPC分类号： B24B21/10 , B24B9/00 , B24B21/06
CPC分类号： B24B21/004 , B24B9/065 , B24B27/0038
摘要： PROBLEM TO BE SOLVED: To provide a system adapted for polishing an edge of a substrate. SOLUTION: An apparatus adapted for polishing the edge of the substrate include (1) a polishing tape having a polishing surface and a second surface, (2) a longitudinal axis, and a polishing arm 201 adapted for contacting the polishing surface of the polishing tape with the edge of the substrate. The polishing arm 201 includes (i) a polishing head 204 adapted to contact with the second surface of the polishing tape, (ii) a rocker arm 304 connected to the polishing head 204 and adapted to rotate the polishing head 204 around the longitudinal axis of the polishing arm 201, and (iii) a load arm 314 extended adjacently along the rocker arm 304 and adapted to transfer the polishing head 204 in the direction orthogonal to the longitudinal axis of the polishing arm 201. Numerous other embodiments are provided. Further a method thereof is also provided. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供适于抛光衬底边缘的系统。解决方案：适于抛光衬底的边缘的设备包括（1）具有研磨表面和第二表面的抛光带，（2）纵向轴线，以及抛光臂201，其适于接触抛光表面的抛光表面抛光带与基板的边缘。抛光臂201包括（i）适于与抛光带的第二表面接触的抛光头204，（ii）连接到抛光头204的摇臂304，其适于使抛光头204绕纵向轴线旋转抛光臂201和（iii）沿着摇臂304相邻延伸并适于沿与抛光臂201的纵向轴线正交的方向传送抛光头204的负载臂314。提供了许多其它实施例。此外，还提供了其方法。版权所有（C）2009，JPO＆INPIT

29. 发明专利

JP2007168022A Shaft working device 审中-公开
标题翻译：轴工作装置
公开(公告)号：JP2007168022A
公开(公告)日：2007-07-05
申请号：JP2005369508
申请日：2005-12-22
申请人： Showa Seiko Co Ltd , 株式会社ショーワ精工
发明人： OZAWA TETSUYA
IPC分类号： B24B9/00 , B23Q17/00 , B24B21/10 , B24B49/10 , B24B49/12
摘要： PROBLEM TO BE SOLVED: To provide a shaft working device which simultaneously improves working precision and working efficiency. SOLUTION: A belt 56 slides against a corner part C of a cutout part 3 of a pinion shaft 1 when the belt 56 is rotated and driven by each of rollers 50. The corner part C of the cutout part 3 of the pinion shaft 1 held on a setting jig main body 24 is worked in an R shape thereby. The pinion shaft 1 is not worked manually by a worker as conventionally but mechanically (automatically) worked by the belt 56, and as a result, the working precision of the corner part C of the cutout part 3 is improved and stabilized, and the working efficiency of the corner part C is also improved. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种同时提高加工精度和工作效率的轴加工装置。解决方案：当皮带56由每个辊子50旋转和驱动时，皮带56抵靠小齿轮轴1的切口部分3的拐角部分C滑动。小齿轮的切口部分3的拐角部分C 保持在定位夹具主体24上的轴1被加工成R形。小齿轮轴1不像现有技术那样由工作人员手动地进行加工，而是由带56机械地（自动地）加工，结果，切口部3的角部C的加工精度得到改善和稳定，工作角部C的效率也得到提高。版权所有（C）2007，JPO＆INPIT

30. 发明专利

JP2005526383A Method and apparatus for heating a polishing pad 审中-公开
公开(公告)号：JP2005526383A
公开(公告)日：2005-09-02
申请号：JP2003580034
申请日：2003-03-28
申请人：ラムリサーチコーポレーションLam Research Corporation
发明人：ウェイ・デイビッド , グエン・トゥアン , サイモン・ジョゼフ・ピー． , ジアン・リンダ , ジン・アンジュン・ジェリー , スリバトサン・スリドハラン , チョウ・レン , ファム・スエン , ラマヌジャム・カットゲンハリー・ワイ． , ルオン・トニー
IPC分类号： B24B21/10 , B24B37/12 , B24B49/14 , H01L21/304 , B24B37/00
CPC分类号： B24B37/12 , B24B21/10 , B24B49/14
摘要：【課題】
【解決手段】化学機械平坦化（ＣＭＰ）システムで使用される温度制御システムであって、線状研磨ベルト（１０２）と、線状研磨ベルト上の処理位置の上に基板（１０４）を当てることができるキャリア（１０８）とを備えるシステムが開示される。温度制御システムは、さらに、処理位置より後の位置における線状研磨ベルトの温度を決定するように構成された温度センサ（１６０）を備える。温度制御システムは、また、温度センサから受信された出力に応じ、プラテンの複数の区域のうちの選択区域に供給される温度調整済みの流体の流れを制御するためのコントローラ（１５０）を備える。

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