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21. 发明专利

JPH1116315A MAGNETIC HEAD AND MAGNETIC STORAGE 失效
公开(公告)号：JPH1116315A
公开(公告)日：1999-01-22
申请号：JP16993297
申请日：1997-06-26
申请人： HITACHI LTD
发明人： HORIGUCHI YASUYUKI , TOKISUE HIROMITSU , TANAKA HIDEAKI , YONEKAWA SUNAO
IPC分类号： G11B5/60 , G11B21/21
摘要： PROBLEM TO BE SOLVED: To enable contact start stop(CSS) activation only by a rotational force of a spindle on a smooth magnetic disk by providing a plurality of fine protrusions at the distal end portion of a protrusion provided at least one of a flying rail surface and a recess surface of a slider of a magnetic head. SOLUTION: Three protrusions 3 are provided on the flying rail surface 1 of a slider, and fine protrusions are further formed at distal end portions of the protrusions 3 by using the texture of the distal end portions of the protrusions 3 that can be in contact with the surface of a magnetic disk. The slider of the magnetic head contacts the surface of the magnetic disk through the fine protrusions at the distal end portions of the protrusions 3. The contact area is the sum of the areas of distal end surfaces of the fine protrusions at the distal end portions of the protrusions 3, and therefore the contact area is reduced in comparison with a conventional technique. Since the contact area is thus small, a frictional force acting on the slider can be reduced and CSS activation can be carried out without particularly carrying out releasing of sticking.

22. 发明专利

JPH08221732A THIN FILM MAGNETIC HEAD 失效
公开(公告)号：JPH08221732A
公开(公告)日：1996-08-30
申请号：JP2645895
申请日：1995-02-15
申请人： HITACHI LTD
发明人： HARA SHINICHI , YANAGIDA YASUHIDE , TOKISUE HIROMITSU , NAGAIKE SADAKUNI
IPC分类号： G11B5/31 , G11B5/60 , G11B21/21
摘要： PURPOSE: To obtain the structure of a thin film magnetic head easy for thin film process and superior in mechanical characteristic by making a thin film magnetic head for magnetic disk device an integrated structure including the suspension part. CONSTITUTION: The element part 14, wirings 21 and terminals 31 of the thin film magnetic head are formed on the side surface of the integrated thin film magnetic head, and a part of the supporting part 2 is made to be a flat plate. By this arrangement, the rigidity in the direction vertical to a recording disk is decreased and the rigidity in the direction parallel to the disk surface is increased.

23. 发明专利

JPH0793728A MAGNETIC RECORDING MEDIUM 失效
公开(公告)号：JPH0793728A
公开(公告)日：1995-04-07
申请号：JP23937293
申请日：1993-09-27
申请人： HITACHI LTD
发明人： WAKATSUKI KOSAKU , TOKISUE HIROMITSU , WATANABE KEIKO , TAKEUCHI YOSHINORI
IPC分类号： G11B23/00 , G11B5/41 , G11B21/21
摘要： PURPOSE:To prevent the growth of particles and to reduce the possibility of head crash due to dust by removing particles such as dust sticking to a magnetic head slider. CONSTITUTION:Grooves 2 have been almost radially formed in the outer circumferential region of a magnetic recording medium 1 over the entire circumference. After a magnetic disk device is worked for a prescribed time, a magnetic head slider 4a is transferred to the outer circumferential region of the medium 1 with the grooves 2. The medium 1 is brought into low-speed rotation and levitation gap is narrowed to bring the slider 4a into contact with the medium 1. Since particles such as dust sticking to the levitation face of the slider 4a can be scraped off, the possibility of head crash due to dust can be reduced.

24. 发明专利

JPH0714338A MAGNETIC DISK DEVICE 失效
公开(公告)号：JPH0714338A
公开(公告)日：1995-01-17
申请号：JP15325693
申请日：1993-06-24
申请人： HITACHI LTD
发明人： SHIMIZU TOSHIHIKO , TOKISUE HIROMITSU
IPC分类号： G11B21/12 , G11B21/22
摘要： PURPOSE:To reduce a danger of flawing a disk by providing a restraining plate for restraining a head supporting mechanism from displacing in the perpenducular direction to the surface of a disk at the time of its nonoperation on the head supporting mechanism on its side opposite to the disk surface. CONSTITUTION:Two sets of head supporting mechanism 7 exist between the disk, and the restraining plate 8 is provided to be inserted between these two mechanisms 7. Thus, since a slider 2 is restrained in displacement in the direction of separating from the disk 1 at the time of nonoperation, even when impact is given, the slider 2 is never separated from the disk surface. Consequently, the disk 1 is free from a hit, and a high impact resistance property can be obtained. Then, by making the thickness of the plate 8 about the same size as the space between the mechanisms 7, the mechanism 7 is not required to be lifted up like a loading and unloading mechanism, so that space between the disks can easily be narrowed. Then, at the time of operation, since the mechanism 7 is position in other area on the disk, the operation of the mechanism 7 is not prevented by the plate 8.

25. 发明专利

JPH06333354A FLOATING HEAD SLIDER UTILIZING NEGATIVE PRESSURE AND ROTARY DISK MEMORY DEVICE 失效
公开(公告)号：JPH06333354A
公开(公告)日：1994-12-02
申请号：JP11696493
申请日：1993-05-19
申请人： HITACHI LTD
发明人： TAKEUCHI YOSHINORI , TOKUYAMA MIKIO , TOKISUE HIROMITSU , KODAIRA HIDEKAZU , AGARI KOJI , MATSUMOTO MASAAKI
IPC分类号： G11B21/21
摘要： PURPOSE:To maintain nearly the specified flying height of the slider in the radial direction of a reading medium, thereby averting the adhesion of dust on an inflow side bearing surface and suppressing the fluctuation in the flying height with the external disturbance at the time of seeking. CONSTITUTION:This floating head slider has a pair of side rails 15, a cross rail 18 disposed on the inflow side of a center rail 20 mounted with a transducer 11 and inverted step-shaped recessed parts 19 enclosed by these rails. Side rails 15 are provided with constricted parts 21 nearer the inflow side from the center and have a shape which increases in the floating surface width toward the outflow side and does not arrive at the outflow end. The cross rail 18 arrives at the inflow end and is formed of nearly the same plane. Tapered parts are abolished. Both sides of the inflow end may be provided with the second recessed parts. As a result, the positive pressure of the side rails is reduced, the speed characteristic for floating is thus maintained nearly constant even if the negative pressure is decreased by the miniaturization of the slider.

26. 发明专利

JPH0461227A EVACUATION METHOD OF VACUUM APPARATUS 失效
公开(公告)号：JPH0461227A
公开(公告)日：1992-02-27
申请号：JP17000290
申请日：1990-06-29
申请人： HITACHI LTD
发明人： KITSUNAI HIROYUKI , TOKISUE HIROMITSU
IPC分类号： C23C14/24 , H01L21/205 , H01L21/265 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To effectively prevent dust particles from adhering and to realize a high throughput by a method wherein a cover provided with filters in positions parallel to a vacuum evacuation port and an air introduction port of a vacuum apparatus is arranged and constituted so as to cover a substrate to be treated. CONSTITUTION:A wafer 1 is covered with a cover 17 which is provided with filters 14 in positions parallel to a vacuum evacuation port and a gas introduction port of a load-lock chamber and in which a vacuum evacuation port 15 and an air introduction port 16 have been formed. When the load-lock chamber 4 is evacuated to produce a vacuum from an evacuation port, the wafer 1 is covered with the cover 17 and is not contaminated with dust particles which are stirred up. The evacuation port 15 is situated in a position parallel to the evacuation port 5 and a flow inside the load-lock chamber is not disturbed. The inside of the cover 17 is connected to the load-lock chamber 4 via the filters 14 so as to prevent dust particles from entering the inside of the cover 17. When the load-lock chamber is returned to an atmospheric state, the wafer 1 is covered with the cover 17 and is not contaminated with the dust particles which are stirred up at leakage.

27. 发明专利

JPH0341346A DUST DETECTING METHOD 失效
公开(公告)号：JPH0341346A
公开(公告)日：1991-02-21
申请号：JP17549689
申请日：1989-07-10
申请人： HITACHI LTD
发明人： TSUTSUMI YOSHITSUGU , TSUZUKI KOICHI , KOBAYASHI JUNICHI , ICHIKAWA YOKO , TOKISUE HIROMITSU , AKATSU TOSHIO , MURAMATSU KIMIO
IPC分类号： G01N15/06
摘要： PURPOSE:To specify the dust generating place of an apparatus to be inspected by providing a dust sensor having a mechanism recording the data of detected dust. CONSTITUTION:At first, a dust detecting mechanism and a mechanism detecting the time when dust is detected are mounted and a dust sensor capable of recording the data of detected dust is charged in an apparatus whose internal dust generating state must be detected. Subsequently, the dust in the apparatus is detected by the dust sensor and the data of a time when dust is detected is also recorded. When the recording of the dust data in the apparatus to be inspected is completed, a dust generating map is prepared on the basis of the dust data recorded by the dust sensor. The dust generating place of the apparatus to be inspected is specified by the map. The detection time data of dust is contained in the prepared map and, by comparing the detection time with the chart of the required time of each step in the apparatus to be inspected, the generation place of dust can be specified.

28. 发明专利

JPH02146374A NON-CONTACT MECHANICAL SEAL 失效
公开(公告)号：JPH02146374A
公开(公告)日：1990-06-05
申请号：JP30022088
申请日：1988-11-28
申请人： HITACHI LTD
发明人： SATO EIICHI , INOUE KO , TOKISUE HIROMITSU , MASE MASAHIRO
IPC分类号： F16J15/34
摘要： PURPOSE:To avoid a seal surface contact at the time of a seal gas cut off, by connecting a stationary seal ring back surface and its retaining means with a bellows seal which has an internal space and is expandable/contractable axially, and making the connection of the internal space and the seal surface, and retaining the outside of the bellows seal at an atmospheric pressure. CONSTITUTION:Seal gas is supplied to a seal surface 4a through a gas supply hole 8b under a normal operation condition, and a stationary seal ring 4 receives a right direction force which makes large a seal surface opening h between the ring 4 and a rotary seal ring 3. Also, seal gas is supplied to the internal space 7a of a bellows seal 7 through a connection hole 4b, and a right direction force is added on the stationary seal ring 4, and the opening h is maintained. When seal gas is cut off, the pressure of the seal surface 4a and the internal space 7a lowers, and the seal surface 4a comes under the condition of vacuum due to a space S2 connecting this with a vacuum chamber 10. Also, the internal space 7a comes under the condition of vacuum, too, and as the lower pressure than that at a back surface chamber 9 which is of atmospheric pressure, is brought in, the bellows seal 7 tries to contract itself. As a result, the opening h expands and the condition of non-contact between the sealing 3 and the sealing 4 is maintained.

29. 发明专利

JPS63164235A PLATE-SHAPED MATERIAL HOLDING APPARATUS 失效
公开(公告)号：JPS63164235A
公开(公告)日：1988-07-07
申请号：JP30845186
申请日：1986-12-26
申请人： HITACHI LTD
发明人： HASHIMOTO TAIZO , MURAMATSU KIMIO , NAKAGAWA TAKASHI , TSUMAKI NOBUO , TOKISUE HIROMITSU
IPC分类号： B65H5/14 , B65G49/07 , B65H3/14 , H01L21/677 , H01L21/68
摘要： PURPOSE:To obtain a holding apparatus, which can prevent the damages and the yield of dust of a plate shaped material, by providing a pushing-force generating part, which generates a force that pushes the plate-shaped material held by a head in the arbitrary engaging direction. CONSTITUTION:A fluid is made to blow to a plate-shaped material 1, or the fluid is sucked through a sucking surface. A stream layer is formed between the plate-shaped material 1 and the sucking surface in this way, and balance is provided between the sucking pressure and the flowing pressure. A head 12 sucks and holds the plate- shaped material 1. A plurality of engaging parts 5 are arranged so as to about on the side surface of the plate-shaped material 1, which is sucked and held with the side surface of the head 2. A pushing-force generating part 16 generates a force, which pushes the plate-shaped material 1 held by the head 2 in the direction of the arbitarry engaging parts 5. Said pushing-force generating part 16 inclines, e.g., the head 2 with respect to the horizontal direction. Thus a force of component F in the direction in parallel with the sucking surface of the head 2 is energized on the plat-shaped material 1. Thus the frequent hitting phenomenons of the plate-shaped material to a guide can be suppressed, and the damages and the yield of dust of the plate-shaped material can be prevented.

30. 发明专利

JPS6387439A HOLDING DEVICE FOR PLATE-LIKE BODY 失效
公开(公告)号：JPS6387439A
公开(公告)日：1988-04-18
申请号：JP22816886
申请日：1986-09-29
申请人： HITACHI LTD
发明人： TOKISUE HIROMITSU , TSUMAKI NOBUO
IPC分类号： B25J15/06 , B65H3/14 , H01L21/677 , H01L21/68
摘要： PURPOSE:To hold a plate-like body in a non-contact manner by means of a high hold force, by providing a holding body, having a holding surface, which serves to form a plane-like gap between the plate-like body and the holding body. CONSTITUTION:A valve device 8D of a fluid feed source 8 and a valve device 12D of a fluid suction source 12 are brought into an opening state to actuate a holding mechanism. When, with this state, a device frame 13 is lowered and is caused to approach a plate-like body 1, since a holding body 2 is movable to a device frame 13 through the force of a spring-like body 14, a proper gap (h) is automatically formed and held between a holding surface 2A of the holding body 2 and an upper surface 1A of the plate-like body 1 by means of a fluid force. When the held plate-like body 1 is placed on a plane, only suction of fluid is stopped, and a device frame 13 is raised. After the plate-like body 1 is separated from a device, the feed of fluid is also stopped.

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