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    • 22. 发明专利
    • Semiconductor device
    • 半导体器件
    • JPS59130429A
    • 1984-07-27
    • JP24399183
    • 1983-12-26
    • Hitachi Ltd
    • MATSUBARA TOSHIAKI
    • H01L23/522H01L21/31H01L21/768
    • H01L21/31
    • PURPOSE:To check the infiltration of contaminative ion by the groove and to prevent said ion from reaching an active region by separating a protective insulating film of a guide part from that of the active region by the groove and further by separating completely by a PSG flim formed thereon. CONSTITUTION:The protective insulating film is separated into two parts, regions 12a and 12b by an opening for contact arranged on an emitter region and the annular grooves 15. Among these, the protective film 12a present on the both sides is connected to an active region flatly whereas the internal protective film 12b is completely separated from the active region. When the emitter diffusion layer 11 is formed, a thin oxide film 12' is formed on the surface of said layer 11 and an opening B for contact and the grooves 15 for isolated regions are simultaneously formed after then. When the overall removal is finished leaving an aluminum wiring layer 13, an window 20 is produced, after which a PSG film 14 is formed on the whole surface.
    • 目的:检查凹槽中污染离子的渗透,并通过将槽引导部分的保护绝缘膜与有源区的保护绝缘膜分开,并通过PSG膜完全分离,防止所述离子到达有源区 形成在其上。 构成:保护绝缘膜通过布置在发射极区域上的接触开口和环形槽15分成两部分区域12a和12b。其中,存在于两侧的保护膜12a连接到有源区域 内部保护膜12b与活性区域完全分离。 当形成发射极扩散层11时,在所述层11的表面上形成薄氧化物膜12'和用于接触的开口B.此后,同时形成用于隔离区域的槽15。 当总体去除完成留下铝布线层13时,产生窗口20,之后在整个表面上形成PSG膜14。
    • 24. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS5850772A
    • 1983-03-25
    • JP14789281
    • 1981-09-21
    • HITACHI LTD
    • MATSUBARA TOSHIAKI
    • H01L21/8224H01L21/331H01L27/082H01L29/68H01L29/73H01L29/78
    • PURPOSE:To obtain a lateral transistor available for the free trimming of the control of amplification factors and emitter dimensions, by controlling emitter currents by voltage impression onto a gate electrode. CONSTITUTION:Since a P type inversed layer 5 is generated on the surface of an N type Si substrate 1 under the gate by impressing a voltage onto the gate G and the area of a P type emitter 3 increases resulting in the reduction of a substantial base width WB, and thereby the amplification factor hFE of the lateral P-N-P transistor fluctuates by the gate voltage VG. Further, a plurality of P type emitters 3a, 3b are provided on the surface of an N layer 9, the gate G is provided on the surface of the N layer (base) between emitters via insulating films 4, the emitter area (peripheral length) is substantially increased by the P type inverted layer 5 generated by impressing a negative voltage onto the gate, and emitter currents are varied resulting in the fluctuation of the hFE. Thus, by providing an insulating gate electrode on the base and impressing a voltage thereon, the base width is varied resulting in the control of the hFE, and the N layer is formed on the base surface resulting in the control of the hFE. Further, collector currents are varied by making the emitter area and the peripheral length variable, and thereby programmable elements or elements available for trimming can be obtained.
    • 27. 发明专利
    • SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
    • JPS61193467A
    • 1986-08-27
    • JP3269285
    • 1985-02-22
    • HITACHI LTD
    • NISHIO YOJIMATSUBARA TOSHIAKIFURUTOKU SHOICHIMURABAYASHI FUMIO
    • H01L21/82H01L27/118
    • PURPOSE:To increase the efficiency of packaging of mounted gates by a construction wherein the width of chip central reinforcement lines is multiplied integrally as against basic cells and made allowable for the density of a current flowing therethrough, and further basic cells are formed also under the chip reinforcement lines. CONSTITUTION:A chip central power reinforcement line 10 formed of Al 2 runs in the logitudinal direction and is connected to power lines 22 on basic cells through a through hole and also to a chip peripheral power line 23. A chip central earthing power reinforcement line 11 formed of Al 2 runs likewise in the longitudinal direction and is connected to earthing power lines 26 on the basic cells through a through hole and also to a chip peripheral earthing power line 27 through the through hole and an Al 1 wiring 29. In this constitution, the width of the chip central reinforcement lines 10 and 11 is multiplied integrally as against that of the basic cells 20 and narrowed toward the central portion in accordance with the density of a current flowing therethrough. Accordingly, basic cells which can be developed as logic gates are increased in the place wherein the chip central reinforcement lines 10 and 11 are narrowed, and therefore the number of mounted gates can be increased in the same chip area in comparison with a gate array having a uniform width.
    • 28. 发明专利
    • Semiconductor integrated circuit device
    • 半导体集成电路设备
    • JPS59139725A
    • 1984-08-10
    • JP1271283
    • 1983-01-31
    • Hitachi Ltd
    • SUZUKI YUKIROUMASUDA IKUROUIWAMURA MASAHIROKATOUNO SHINJIURAGAMI KENYOSHIMURA MASAYOSHIMATSUBARA TOSHIAKI
    • H03K19/0185H03K19/0175H03K19/018H03K19/08H03K19/094H03K19/0944H03K19/177
    • H03K19/17744H03K19/017518H03K19/01806H03K19/09425H03K19/09448H03K19/1778H03K19/17792
    • PURPOSE:To reduce both the delay time of transmission and the dependency on capacity for a semiconductor IC device by providing an input buffer for TTL- CMOS level conversion and an input buffer for CMOS-TTL level conversion and using a bipolar transistor to the output of a buffer converter. CONSTITUTION:A semiconductor IC device is provided with an input buffer 20 for TTL-CMOS conversion, an output buffer 22 for CMOS-TTL conversion and an internal logical block 21 which works at the CMOS level. The input signals IN1-IN19 of TTL levels are converted into CMOS levels by level converters 201-20n of the buffer 20. These converted signals of CMOS levels are applied to each logical gate of the block 21. Then bipolar output TRs Q1 and Q2 are used to charge or discharge the output capacity CS of each of converters 201-20n of the buffer 20. This device reduces both the delay time of transmission and the dependency on capacity and increases the working speed of the semiconductor IC device.
    • 目的:通过提供用于TTL-CMOS电平转换的输入缓冲器和用于CMOS-TTL电平转换的输入缓冲器以及使用双极晶体管来输出半导体IC器件的输出,以减少传输的延迟时间和半导体IC器件的容量依赖性 一个缓冲转换器。 构成:半导体IC器件具有用于TTL-CMOS转换的输入缓冲器20,用于CMOS-TTL转换的输出缓冲器22和工作于CMOS电平的内部逻辑块21。 TTL电平的输入信号IN1-IN19由缓冲器20的电平转换器201-20n转换成CMOS电平。这些CMOS电平的转换信号被加到块21的每个逻辑门。然后双极性输出TR Q1和Q2是 用于对缓冲器20的每个转换器201-20n的输出电容CS进行充电或放电。该装置减小了传输的延迟时间和对容量的依赖性,并且增加了半导体IC器件的工作速度。
    • 29. 发明专利
    • Semiconductor integrated circuit device
    • 半导体集成电路设备
    • JPS59139724A
    • 1984-08-10
    • JP1271183
    • 1983-01-31
    • Hitachi Ltd
    • SUZUKI YUKIROUMASUDA IKUROUIWAMURA MASAHIROKATOUNO SHINJIURAGAMI KENYOSHIMURA MASAYOSHIMATSUBARA TOSHIAKI
    • H03K19/0185H03K19/0175H03K19/018H03K19/08H03K19/094H03K19/0944H03K19/0952H03K19/177
    • H03K19/17744H03K19/017518H03K19/01806H03K19/09425H03K19/09448H03K19/1778H03K19/17792
    • PURPOSE:To reduce the dependency on the output capacity for the working speed of a buffer and to improve the degree of integration by using an internal logical block which works at the CMOS level, a buffer for TTL-CMOS level input conversion and a buffer for CMOS-TTL level output conversion. CONSTITUTION:A semiconductor integrated circuit device is provided with an input buffer 20 for TTL-CMOS level conversion, an internal logical block 21 which works at the CMOS level and an output buffer 22 for CMOS-TTL level conversion. The input signals of TTL levels supplied to terminals 1-19 are converted into CMOS levels by input level converters 201-20n of the buffer 20 and then applied to each gate of a block 21. The output signal of CMOS level delivered from the block 21 is converted into the TTL level through each of level converters 221-22m of the buffer 22 and delivered. Each transistor TR of buffers 20 and 22 is converted into a bipolar TR. This device reduces the dependency on the output capacity for the buffer working speed and improves the density of integration.
    • 目的:为了减少对缓冲器工作速度的输出容量的依赖性,并通过使用工作于CMOS电平的内部逻辑块来提高积分程度,一个用于TTL-CMOS电平输入转换的缓冲器和一个用于 CMOS-TTL电平输出转换。 构成:半导体集成电路器件具有用于TTL-CMOS电平转换的输入缓冲器20,工作于CMOS电平的内部逻辑块21和用于CMOS-TTL电平转换的输出缓冲器22。 提供给端子1-19的TTL电平的输入信号由缓冲器20的输入电平转换器201-20n转换成CMOS电平,然后施加到块21的每个栅极。从块21传送的CMOS电平的输出信号 通过缓冲器22的每个电平转换器221-22m被转换成TTL电平并传送。 缓冲器20和22的每个晶体管TR被转换成双极性TR。 该设备减少了对缓冲区工作速度的输出容量的依赖性,并提高了集成密度。
    • 30. 发明专利
    • Semiconductor device equipped with protecting circuit
    • 配有保护电路的半导体器件
    • JPS58198908A
    • 1983-11-19
    • JP8143782
    • 1982-05-17
    • Hitachi Ltd
    • MATSUBARA TOSHIAKI
    • H03F1/42H03F1/52
    • H03F1/52
    • PURPOSE:To increase the degree of integration and to prevent a surface breakdown between the emitter and base of a bipolar TR by forming a Zener diode structure between the 1st conduction type emitter area and the 2nd conduction type base area of the TR. CONSTITUTION:An epitaxial growth layer 3 is formed on a semiconductor substrate 1 and an island 10 is formed of an insulating layer 4. An N layer 8 as a collector C and a P layer 5 as a base B are formed in the island 10 and an N layer 7 as an emitter E is formed in a base B by impurity diffusion. Further, a P layer 6 is formed at part of the P layer 5 in contact with at least the bottom surface part of the N layer 7. In this case, the diameter B of the P layer is less than the diameter A of the N layer. Therefore, an area with higher dielectric strength than an original TR is formed at the contacting part between the P layer 6 and emitter layer 7, so a breakdown occurs to not the surface, but this contacting part.
    • 目的:通过在TR的第一导电型发射极区域和第二导电型基极区域之间形成齐纳二极管结构来增加积分度并防止双极性TR的发射极和基极之间的表面击穿。 构成:外延生长层3形成在半导体衬底1上,岛10由绝缘层4形成。作为集电体C的N +层8和作为基底B的P层5形成在 岛10和作为发射极E的N +层7通过杂质扩散形成在基底B中。 此外,在P层5的至少与N +层7的底面部分接触的部分处形成P +层6.在这种情况下,P +层的直径B 小于N +层的直径A。 因此,在P +层6和发射极层7之间的接触部分处形成具有比原始TR更高的介电强度的区域,因此不发生击穿而不是表面,而是接触部分。