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21. 发明专利

JPH04264749A WAFER TRANSFER ROBOT 失效
公开(公告)号：JPH04264749A
公开(公告)日：1992-09-21
申请号：JP2499691
申请日：1991-02-20
申请人： EBARA CORP
发明人： KONDO FUMIO , KANEMITSU YOICHI , OGAMINO HIROAKI , IKEDA YUKIO
IPC分类号： B25J9/06 , B25J9/00 , B65G49/00 , B65G49/07 , B65G54/02 , H01L21/677 , H01L21/68
摘要： PURPOSE:To provide a wafer transfer robot in which detrimental dusts, oil mist,.etc., do not occur on a wafer and do not affect influence to a using temperature, etc. CONSTITUTION:A wafer conveying arm 10 supported by at least two magnetic bearings 2, 3 in noncontact state and horizontally and linearly moving, a vacuum room R containing a rotor 1 and the arm 10, and the magnetic bearings 2, 3 for supporting the rotor 1 in the noncontact state, are provided. The arm 10 includes a part 11 composed of a magnetic material. A magnet 12 for magnetically coupling the magnetic material part 11 of the arm and means for moving the magnet 12 are provided at the exterior of the room R. Since there is no contact part, no dusts, due to wear during operation are generated. Mist of lubricant is not generated as well. Further, since no magnetic fluid seal is used, a using temperature is high, and no gas is generated in a high vacuum environment. Power necessary for moving the arm can be reduced from a load of power to be supplied to the rotor.

22. 发明专利

JPS61171502A HOLLOW YARN MEMBRANE MODULE 失效
公开(公告)号：JPS61171502A
公开(公告)日：1986-08-02
申请号：JP1079485
申请日：1985-01-25
申请人： EBARA CORP
发明人： IKEDA YUKIO , MARUYAMA SHINSAKU , INO TAKAO
IPC分类号： B01D63/02
摘要： PURPOSE:To dispense with a separate protective container for bringing a membrane surface to a wet state, by supporting hollow yarn membranes opened at the upper ends thereof and closed at the lower ends thereof by an upper tube plate and a lower tube plate to constitute a both-end support structure and connecting both tube plates by a sleeve. CONSTITUTION:The upper ends of hollow yarn membranes 11 are fixed to an upper tube plate 14 in an opened state while the lower ends thereof are fixed to a lower tube plate 9 to be closed and both tube plates 14, 19 are connected by the sleeve 12 for surrounding the hollow yarn membranes 11. A large number of piercing holes 19a for guiding a liquid to be treated and a scrubbing medium to the hollow yarn membranes are provided to the lower tube plate 19 and a plurality of air vent holes 12 are provided to the upper part of the sleeve 12 while a plurality of ports 12C coming to backwashing discharge ports are provided to the lower part of said sleeve. By this constitution, transport becomes easy as a module single product and the deterioration of the hollow yarn membranes is easily prevented by bringing said membranes to a wet state by sealing a liquid therein.

23. 发明专利

JPS6151598A Method of reducing radioactive waste 失效
标题翻译：减少放射性废物的方法
公开(公告)号：JPS6151598A
公开(公告)日：1986-03-14
申请号：JP17340784
申请日：1984-08-22
申请人： Ebara Corp
发明人： IKEDA YUKIO , YOSHIOKA TAKESHI , UENO SHUICHI
IPC分类号： B01J49/00 , B01J49/02 , G21F9/00 , G21F9/12

24. 发明专利

JPS59150546A Method for controlling backwashing development ratio of ion exchange resin 失效
标题翻译：用于控制离子交换树脂的回流发展比例的方法
公开(公告)号：JPS59150546A
公开(公告)日：1984-08-28
申请号：JP2289483
申请日：1983-02-16
申请人： Ebara Corp
发明人： HAGIWARA MASAHIRO , ISAYAMA YASUSHI , IKEDA YUKIO , INO TAKAO
IPC分类号： B01J49/00
摘要： PURPOSE: To make it possible to always keep a constant backwashing development ratio, by correcting a set flow amount value so as to obtain the development ratio preset on the basis of the inflow temp. of backwashing water while operating the flow amount of backwashing water so as to set the same to the corrected set flow amount by a control valve.
CONSTITUTION: In a method for controlling the backwashing development ratio of backwashing work for supplying backwashing water to ion exchange resins 2, 3 from the lower parts thereof while withdrawing the same from the upper parts of said resins 2, 3, the temp. and flow amount of backwashing water in an inflow pipeline 7 are measured by a thermometer 8 and a flow meter 9. Further, a flow amount reaching a backwashing water development ratio preset on the basis of the aforementioned measured temp. is calculated by a regulator 15 and regulated by a control valve 10 so as to adjust the aforementioned measured from amount to the aforementioned temp. corrected desired flow amount. As a result, a constant backwashing development ratio can be always kept even if water temp. is changed in developing ion exchange resin by backwashing water.
COPYRIGHT: (C)1984,JPO&Japio
摘要翻译：目的：通过校正设定的流量值，能够始终保持反冲洗显影率的恒定，以获得基于流入温度预先设定的显影倍数。的反冲洗水，同时操作反冲洗水的流量，以便通过控制阀将其设置为校正的设定流量。构成：在用于控制反冲洗工作的反冲洗发展率的方法中，用于从其下部向离子交换树脂2,3提供反冲洗水，同时将其从所述树脂2,3的上部排出，并且通过温度计8和流量计9测量流入管路7中的反冲洗水的流量。此外，基于上述测定温度预先设定的反冲洗水显影比的流量。由调节器15计算并由控制阀10调节，以将上述测量值从上述温度调节到上述温度。修正的期望流量。因此，即使在水温下也能保持恒定的反冲洗发展比例。通过反冲洗水改变开发离子交换树脂。

25. 发明专利

JPH05212378A ULTRAVIOLET BEAM PROJECTOR WITH CURRENT MIXING PLATE 失效
公开(公告)号：JPH05212378A
公开(公告)日：1993-08-24
申请号：JP4777892
申请日：1992-02-05
申请人： TOSHIBA CORP , EBARA CORP
发明人： NAGAI HIROSHI , NAKAJIMA TAKESHI , IKEDA YUKIO , MASHITA NORIYOSHI
IPC分类号： C02F1/32 , C02F1/58
摘要： PURPOSE:To obtain an ultraviolet beam projector equipped with an ultraviolet beam lamp with the capability of removing bacteria, an organic substance and free oxygen from a liquid economically and efficiently. CONSTITUTION:The subject ultraviolet beam projector for purification of a liquid with a circular and angular cross section, is equipped internally with installed ultraviolet beam lamps 2 and an inlet 8 and an outlet 9 for the liquid on both ends of the device. In addition, the projector is composed of internally installed current mixing plates 4 at any appropriate pitch so that the liquid flows in a direction at right angles with the ultraviolet beam lamp 2.

26. 发明专利

JPH04264748A WAFER TRANSFER ROBOT 失效
公开(公告)号：JPH04264748A
公开(公告)日：1992-09-21
申请号：JP2499591
申请日：1991-02-20
申请人： EBARA CORP
发明人： KONDO FUMIO , KANEMITSU YOICHI , MATSUMURA MASAO , IKEDA YUKIO
IPC分类号： B25J9/06 , H01L21/677 , H01L21/68
摘要： PURPOSE:To provide a wafer transfer robot in which detrimental dusts, oil mist, etc., do not occur on a wafer and do not affect influence to a using temperature, etc. CONSTITUTION:A wafer conveying arm 10 supported by at least two magnetic bearings 2, 3 in noncontact state, a vacuum room R containing a rotor 1 and the arm 10, the magnetic bearings 2, 3 for supporting the rotor 1 in the noncontact state, and linear motors 11, 12 for horizontally and linearly moving the arm 10, are provided. Since there is no contact part, no dusts, due to wear during operation are generated. Mist of lubricant is not generated as well. Further, since no magnetic fluid seal is used, a using temperature is high, and no gas is generated in a high vacuum environment.

27. 发明专利

JPH0494104A MAGNETIC LEVITATION/DRIVING DEVICE 失效
公开(公告)号：JPH0494104A
公开(公告)日：1992-03-26
申请号：JP21042590
申请日：1990-08-10
申请人： EBARA CORP
发明人： KANEMITSU YOICHI , IKEDA YUKIO
IPC分类号： G03F7/16 , B05C11/08 , B05C13/00 , H01F7/20 , H01L21/027 , H01L21/265 , H01L21/30
摘要： PURPOSE:To control two diameter axis-wise movements of a levitation plate by obtaining a signal which is proportional to a diameter axis-wise rotation angle of a levitation plate from a differential signal of output values between potential sensors and by controlling an excitation current of an electromagnetic coil based on the signal to change magnetic flux between a yoke part and the levitation plate. CONSTITUTION:A signal which is proportional to a diameter axis-wise rotation angle of an levitation plate 100 is obtained from a differential signal between outputs of two displacement sensors 203a, 203c on a diagonal line. An excitation current of an electromagnetic coil 303 connected to a quartered yoke part 302 is controlled based on the signal, and flux 311 between the yoke part 302 and the levitation plate 100 is changed to control two diameter axis-wise movements. The four yoke parts 302 form a pair of two yoke parts on a diagonal line, and energize the excitation coil 303 to produce magnetic flux in reverse direction each other. The magnetic flux 311 by the excitation coil 303 passes through the levitaiton plate 100, the yoke part 302, an electromagnetic core 304, a connecting yoke 305 and the levitation plate 100.

28. 发明专利

JPS59150545A Method and apparatus for regenerating ion exchange resin 失效
标题翻译：用于再生离子交换树脂的方法和装置
公开(公告)号：JPS59150545A
公开(公告)日：1984-08-28
申请号：JP2289383
申请日：1983-02-16
申请人： Ebara Corp
发明人： HAGIWARA MASAHIRO , IKEDA YUKIO , OOMORI YOUJI , INO TAKAO
IPC分类号： B01J49/00
摘要： PURPOSE: To surely perform the separation of anion and cation exchange resins due to the final speed difference thereof and to enhance the separation capacity of a clad, by always controlling the flow amount of water or air supplied to an ion exchange resin regenerating tower to a set flow amount.
CONSTITUTION: In an ion exchange resin regenerating apparatus equipped with a water supply pipe L
1 , an air supply pipe L
3 and a discharge pipe L
2 , flow meters 35, 31 and control valves 29, 32 are provided to the water supply pipe L
1 and the air supply pipe L
3 and the control valves are controlled on the basis of the signals from the aforementioned flow meters by regulators 30, 33. That is, in performing the physical washing treatment and/or chemical regenerating treatment of the ion exchange resin in a state received in the regenerating tower 2, the flow amount of water or air supplied in physical washing operation or chemical regenerating operation is measured by each of the flow meters 31, 35 and the flow amount of water to be supplied or air to be supplied is controlled so as to adjust the flow amount in each flow mater to a preset flow amount. As a result, the separation due to the final speed difference of anion and cation exchange resins can be surely performed within a short time.
COPYRIGHT: (C)1984,JPO&Japio
摘要翻译：目的：为了确保阴离子交换树脂和阳离子交换树脂由于其最终的速度差异而分离，并且通过总是控制向离子交换树脂再生塔供应的水或空气的流量来控制包层的分离能力设定流量。构成：在配备有供水管L1，供气管L3和排出管L2的离子交换树脂再生装置中，在供水管L1和空气中设置有流量计35,31和控制阀29,32 供给管L3和控制阀根据来自上述流量计的信号由调节器30,33进行控制。也就是说，在接收到的状态下进行离子交换树脂的物理洗涤处理和/或化学再生处理在再生塔2中，通过流量计31,35中的每一个测量在物理洗涤操作或化学再生操作中供应的水或空气的流量，并且将被供给的水的流量或被供给的空气被控制为以将每个流量中的流量调节到预设的流量。结果，由于阴离子交换树脂和阳离子交换树脂的最终速度差的分离，可以在短时间内确实进行。

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