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21. 发明专利

JPH04139381A HEAT TREATMENT FURNACE 失效
公开(公告)号：JPH04139381A
公开(公告)日：1992-05-13
申请号：JP26181690
申请日：1990-09-28
申请人： TEL SAGAMI LTD
发明人： HIDANO MASARU
IPC分类号： F27D1/12 , C30B31/12 , F27B17/00 , H01L21/205 , H01L21/22 , H01L21/31
摘要： PURPOSE:To perform an efficient cooling of a circumference of a furnace chamber and prevent any influence of heat from being applied to an air pipe disposed around the furnace chamber or various wirings by a method wherein a circulating pipe for circulating cooling medium is disposed between a thermal insulating material and a partition wall spaced apart from the thermal insulating material. CONSTITUTION:An outside part of a heater 30 is covered by a thermal insulating material 34 and a metallic cylindrical inner shell 36 is disposed at an outer surface of the thermal insulating material 34. A metallic outer shell 38 of cylindrical form acting as a partition wall is disposed at an outside part of the inner shell 36 while being spaced apart. A circulating pipe 40 in which cooling medium for cooling an outer side of the thermal insulating material is disposed between the inner shell 36 and the outer shell 38. As the inner shell 36 is cooled by flowing cooling water in a circulating pipe 40, heat generated at the heater 30 is transmitted to the inner shell 36 through the thermal insulating material 34 and this is cooled by the cooling water circulating pipe 40. In addition, since it is possible to decrease a temperature outside the outer shell 38 by the heat exchanging with the cooling medium in the cooling pipe, the circumference part of a furnace chamber 14 can be efficiently cooled.

22. 发明专利

JPH04135601A METHOD FOR CLEANING TRAP 失效
公开(公告)号：JPH04135601A
公开(公告)日：1992-05-11
申请号：JP25493290
申请日：1990-09-26
申请人： TEL SAGAMI LTD
发明人： OKASE WATARU
IPC分类号： B01D8/00 , H01L21/205 , H01L21/22 , H01L21/31
摘要： PURPOSE:To prevent the scattering of a trapped material, to improve safety and to obviate the generation of dust by injecting an org. caking agent into the trap to cake the trapped material, then demounting the trap from an evacuating line and treating the trapped material together with the caking agent. CONSTITUTION:A trap 1 inserted in an evacuating line 30 and used for trapping the harmful matter in a gas circulating through the line 30 is cleaned. In this case, an org. caking agent 43 (e.g. urethane foam) is injected into the trap 1 from a caking agent feeder 42 to cake the trapped material 41, then the trap 1 is demounted from the line 30, and the trapped material 41 is treated along with the caking agent 43. Namely, the trapped material is not scattered when the trap is demounted from the line 30, hence safety is improved, and the dust, etc., decreasing the yield of the product are not generated.

23. 发明专利

JPH04133314A VERTICAL-TYPE HEAT TREATMENT APPARATUS 失效
公开(公告)号：JPH04133314A
公开(公告)日：1992-05-07
申请号：JP25493190
申请日：1990-09-25
申请人： TEL SAGAMI LTD
发明人： NISHI HIRONOBU
IPC分类号： H01L21/22 , H01L21/205 , H01L21/31 , H01L21/677 , H01L21/68
摘要： PURPOSE:To suppress drop of the treatment efficiency due to the transfer operation of an object to be treated and to suppress the defect of the object due to an increase in the waiting time by a method wherein a function of pretreating the object is additionaly provided to a stocker for storing a container for treatment use, which has been provided so as to keep the object on standby and all devices from the stocker of a container, for conveyance use, in which the object has been housed to a vertical- type heat treatment furnace are incorporated inside a series of devices. CONSTITUTION:A wafer boat 4 conveyed to a vertical-type heat treatment furnace 30 by using a boat conveyance mechanism 40 is loaded inside a reaction container 31 by using a boat elevator 38; a semiconductor wafer 2 is treated. On the other hand, the wafer boat 4 conveyed to a boat stocker 50 is placed on a turntable 52; it is covered with a reaction table 54 which has been lowered; a desired pretreatment is executed during the waiting period of a heat treatment process by using a gas, for pretreatment use, which has been supplied from a treatment gas introduction pipe 56. The boat stocker 50, a carrier stocker in which a wafer carrier 3 conveyed from a previous process is housed, a transfer mechanism of the semiconductor wafer 2 and individual mechanisms 40, 60 which transfer and convey the wafer boat 4 are installed inside one apparatus.

24. 发明专利

JPH04114424A HEAT TREATMENT DEVICE 失效
公开(公告)号：JPH04114424A
公开(公告)日：1992-04-15
申请号：JP23418390
申请日：1990-09-04
申请人： TEL SAGAMI LTD
发明人： MIYAGAWA KAZUHISA
IPC分类号： F27B17/00 , F27D3/06 , H01L21/205 , H01L21/22 , H01L21/31
摘要： PURPOSE:To improve the fixing efficiency of a boat carrier by a method wherein the fine adjustment mechanism of the retainer part of a boat holding bar type member in the right and left directions as well as the other fine adjustment mechanism making alignment of the central line direction of a fork with that of a heat treatment chamber by swiveling the other end side of said bar type member using one side of said member as a fulcrum are provided. CONSTITUTION:The position of a reaction tube 4 as a heat treatment chamber is roughly set up and then a boat 3 carrier is arranged. Next, after this arrangement, a seesaw base 51 is aligned by shifting in the right and left directions on a sliding plate 58 using a bolt 61 and a nut 62 so that the point-held position by a screw 40 in a retainer part 2 may be located on the prolonged line of the central line of the reaction tube 4 to fix the position in the right and left directions to a fixing base 6. Next, the retainer part 2 is rotated on the seesaw base 51 centered on the point-held position by the screw 40 turning a knob thereby swivelling the other end 1B of a fork l in the right and left directions. Finally, the central line direction of the fork l is aligned with the central line direction of the reaction tube 4.

25. 发明专利

JPH04113616A BOAT TRANSFER APPARATUS 失效
公开(公告)号：JPH04113616A
公开(公告)日：1992-04-15
申请号：JP23281490
申请日：1990-09-03
申请人： TEL SAGAMI LTD
发明人： MIYAGAWA KAZUHISA
IPC分类号： H01L21/22 , H01L21/205 , H01L21/31
摘要： PURPOSE:To prevent that an object to be treated such as a wafer or the like is contaminated when an impurity metal is diffused by a method wherein a mounting stand by which the other end side of a rod-shaped member for boat support use is supported by using the lower part of a boat mounting part is installed and a contact part of the mounting stand with the rod-shaped member for boat support use is constituted of quartz or SiC. CONSTITUTION:In a state that a boat mounting part on the other end side 1B at a fork 1 is separated from a contact member 19 at a mounting stand 17, an operator adjusts an up-and-down direction movement mechanism and adjusts the boat mounting part on the other end side 1B at the fork 1 in such a way that it comes into contact with the contact member 18 at the mounting stand 17. Crystal as the contact member 18 is cleaned so as to be completely free from impurities. Then, a boat 3 on which a plurality of wafers have been loaded is placed on the other end side 1B at the fork 1 by using an elevator mechanism. Then, the other end side 1B at the fork 1 is set to a state to be separated from the contact member 18 at the mounting stand 17. Since the contact member 18 is constituted of crystal in this case, impurities such as a metal and the like do not adhere to a contact part of the fork 1 with the contact member 18.

26. 发明专利

JPH04106392A SEALING DEVICE 失效
公开(公告)号：JPH04106392A
公开(公告)日：1992-04-08
申请号：JP22287290
申请日：1990-08-24
申请人： TOKYO ELECTRON LTD , TEL SAGAMI LTD , KISHIKAWA TOKUSHIYU BARUBU SEI
发明人： IWATA TERUO , SEKIZUKA HIROSHI , KAWAUCHI YOICHI , FUJISAWA HISAO
IPC分类号： C23C14/48 , C23C14/00 , C23C16/44 , F27D7/06 , H01L21/205
摘要： PURPOSE:To form a sealing part and keep a vessel airtight by a method wherein a first annular groove, provided in the sealing part, is evacuated by an evacuating means and a pressure in a second annular groove is kept higher than the same in the first annular groove to achieve airtight contact of a metallic thin plate, covering the second annular groove through airtight sealing, with the first annular groove. CONSTITUTION:A groove 30, having an annular opening 36 for example, is provided on one side or manifold side 20, for example, between the lid body 40 for airtight sealing and the flange of the opening end 22 of the manifold 20 while an air discharging port 31, connected to the groove in the wall surface of the manifold 20, is provided in the groove 30 so as to be capable of discharging air by a vacuum pump. The lid body 40, opposed to the groove 30, is provided with an annular groove 34 and a metallic thin plate member 44 or the silver plate (stainless steel, nickel or the like can be used) of thickness 0.2mm, for example, having an elasticity, is welded to the groove 34 so as to be airtight while inert gas or nitrogen gas, for example, can be supplied into the groove 34 from a gas supplying source through a gas introducing port 35.

27. 发明专利

JPH0499350A WAFER CARRIER TRANSPORT DEVICE 失效
公开(公告)号：JPH0499350A
公开(公告)日：1992-03-31
申请号：JP21691390
申请日：1990-08-17
申请人： TEL SAGAMI LTD
发明人： SHIRAIWA HIROTSUGU
IPC分类号： B65G25/06 , H01L21/677 , H01L21/68
摘要： PURPOSE:To achieve a long-distance transportation by bringing a rotary axis of a motor into contact with a belt and moving a main body by motor drive for extending a length of the belt. CONSTITUTION:A motor 33 is fixed on a main body 31 and a main pulley 37 is provided at a rotary axis 35 of the motor 33. The main pulley 37 and an auxiliary pulley 45 are wound around a belt 39 which is extended outside. Since the main body 31 is provided so that it can travel, a carrier liner 25 travels due to friction since the belt 39 is extended so that it does not slip to the main pulley 37 when the motor 33 is driven. It is possible to carry the main body 31 even for a long distance if a long belt 39 is used.

28. 发明专利

JPH0499349A CARRIER TRANSPORT DEVICE 失效
公开(公告)号：JPH0499349A
公开(公告)日：1992-03-31
申请号：JP21691190
申请日：1990-08-17
申请人： TEL SAGAMI LTD
发明人： SHIRAIWA HIROTSUGU , TANAHASHI TAKASHI
IPC分类号： B66F7/08 , H01L21/22 , H01L21/677 , H01L21/68
摘要： PURPOSE:To enable a plurality of carriers to be transported individually by providing an arm which is equipped so that it can travel in horizontal and vertical directions and a plurality of holding mechanisms which are provided on a lower surface of the arm, operate independently one another, and hold the carriers. CONSTITUTION:A carrier arm 29 with six holding mechanisms for holding a carrier which stores wafers is provided so that it can move in the direction of X and Z axes within a carrier stocker 1. The six holding mechanism 36 are driven independently by a control part. Therefore, it is possible that a certain holding mechanism 36 holds carriers, while it does not drive other holding progressions 36. When carriers 14 are held by a holding nib 43, a first ball screw part 31 and a second ball screw part 33 are driven, an arm 35 is transported to an upper part of a specified shelf 15, and then is lowered and allows a carrier 47 to be placed on the shelf 15.

29. 发明专利

JPH0499315A SUPPORT MECHANISM OF BOAT AT HEAT TREATMENT APPARATUS 失效
公开(公告)号：JPH0499315A
公开(公告)日：1992-03-31
申请号：JP21690990
申请日：1990-08-17
申请人： TEL SAGAMI LTD
发明人： ASANO TAKAYASU
IPC分类号： H01L21/22 , H01L21/205 , H01L21/31
摘要： PURPOSE:To reduce that dust particles and the like are produced by a method wherein a bellows which can be expanded and contracted freely is installed at a coupling means in such a way that the dust particles produced by a movement mechanism are covered. CONSTITUTION:A support member 26 which holds the upper end part of a boat 4 is installed at the upper part of a mounting stand 24 so as to be capable of being moved up and down. A metal bellows 113 which can be expanded and contracted freely is installed between a pedestal 111 and a first cylinder part 115. A coupling piece 119 is installed at a second cylinder part 117, and the coupling piece 119 is coupled to a coupling part 123 installed at the upper end of the boat 4. The coupling piece 119 is lowered in a position in which a wafer 3 is transferred to the boat 4, and supports the boat 4. Dust particles produced at a sliding and moving part between a support plate 101 and a rod 109 are not scattered to the outside of the pedestal 111 and the metal bellows 113.

30. 发明专利

JPH0468522A VERTICAL HEAT TREATMENT DEVICE 失效
公开(公告)号：JPH0468522A
公开(公告)日：1992-03-04
申请号：JP18069390
申请日：1990-07-10
申请人： TEL SAGAMI LTD
发明人： WATANABE SHINGO
IPC分类号： F27B17/00 , F27D7/02 , H01L21/22 , H01L21/31
摘要： PURPOSE:To improve sectional heat equalization property of a treatment object and to realize in-plane uniformity of a high density element by making treatment gas flow inside a vertical reaction tube which contains a plurality of treatment objects for pre-heating and by injecting treatment gas to the treatment objects thereafter. CONSTITUTION:When a wafer 19 is mounted on a specified position of a boat 20 and is transferred into a reaction tube 11, the tube 11 is heated to a set temperature by a heater 17. A clearance is provided to an outer peripheral wall of the reaction tube 11 to arrange an outer tube 12 coaxially and gas distribution means 13 is provided to the inside of the clearance; then, treatment gas supplied to a gas supply port 15 rises and flows in laminar flow uniformly through gas distribution holes 14a to 14e provided inside a clearance between the reaction tube 11 and the outer tube 12. Since treatment gas is pre-heated uniformly by the heater 17 and gas whose temperature is close to a gas temperature inside the reaction tube 11 is introduced, generation of downflow is reduced and a treatment gas temperature is approximately the same in any places in a plane of the wafer 19. Thereby, it is possible to improve sectional heat equalization property and to realize in-plane uniformity of a high density element.

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