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    • 11. 发明专利
    • High frequency filter
    • 高频滤波器
    • JP2002368504A
    • 2002-12-20
    • JP2001176680
    • 2001-06-12
    • Toshiba Corp株式会社東芝
    • INO TSUNEHIROFUKUYA HIROYUKI
    • H01L39/00H01L23/34H01L35/28H01P1/203H01P1/205H01P1/30
    • H01L2924/0002H01L2924/00
    • PROBLEM TO BE SOLVED: To provide a modulative high frequency filter which suppresses the widening of an end part in a filter frequency and attains a waveform which is made to be rectangular as much as possible. SOLUTION: The filter is provided with a substrate 32, a resonator 33 formed on the substrate 32, a dielectric body 34 formed in the neighborhood of the resonator 33 and a temperature control element 35 which is formed in the neighborhood of the dielectric body 34 and can control heating and cooling. In the high frequency filter, the temperature control element 35 heats or cools the dielectric body 34 and, then, a dielectric constant of the dielectric body 34 is made variable so that the frequency can be modulated.
    • 要解决的问题:提供抑制滤波器频率中的端部加宽的调制高频滤波器,并且尽可能地获得被做成矩形的波形。 解决方案:滤波器设置有基板32,形成在基板32上的谐振器33,形成在谐振器33附近的电介质体34和形成在电介质体34附近的温度控制元件35,以及 可以控制加热和冷却。 在高频滤波器中,温度控制元件35加热或冷却电介质体34,然后使电介质体34的介电常数可变,使得能够调制频率。
    • 13. 发明专利
    • Semiconductor element and semiconductor integrated circuit
    • 半导体元件和半导体集成电路
    • JP2008235704A
    • 2008-10-02
    • JP2007075376
    • 2007-03-22
    • Toshiba Corp株式会社東芝
    • INO TSUNEHIROKOYAMA MASATO
    • H01L27/10H01L21/82
    • PROBLEM TO BE SOLVED: To provide a semiconductor element capable of programming a logic operation and being operated as a nonvolatile memory element as well.
      SOLUTION: The semiconductor element comprises: a substrate 2; a first insulation film 4 provided on the substrate; an electric resistance change film 6 provided on the first insulation film; a first electrode 8 provided on the first insulation film on the side of one of both side faces of the electric resistance change film in contact with one side face of the electric resistance change film; a second electrode 10 provided on the first insulation film on the side of the other one of both side faces of the electric resistance change film in contact with the other side face of the electric resistance change film; a second insulation film 12 provided on the electric resistance change film; and a third electrode 14 provided on the second insulation film.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种能够对逻辑操作进行编程并作为非易失性存储元件操作的半导体元件。 解决方案:半导体元件包括:基板2; 设置在基板上的第一绝缘膜4; 设置在第一绝缘膜上的电阻变化膜6; 在所述电阻变化膜的两个侧面中的一个侧面的与所述电阻变化膜的一个侧面接触的第一绝缘膜上设置的第一电极8; 设置在第一绝缘膜上的电阻变化膜的另一侧的另一侧的与电阻变化膜的另一侧面接触的第二电极10; 设置在电阻变化膜上的第二绝缘膜12; 以及设置在第二绝缘膜上的第三电极14。 版权所有(C)2009,JPO&INPIT
    • 14. 发明专利
    • Semiconductor device and manufacturing method therefor
    • 半导体器件及其制造方法
    • JP2008066668A
    • 2008-03-21
    • JP2006245911
    • 2006-09-11
    • Toshiba Corp株式会社東芝
    • INO TSUNEHIROKOYAMA MASATO
    • H01L21/8246C23C14/08H01L27/10H01L27/105
    • PROBLEM TO BE SOLVED: To improve characteristics of an element using a single crystal having a perovskite structure by enabling formation of the single crystal having the perovskite structure of proper quality on a silicon substrate.
      SOLUTION: A semiconductor device using a ferroelectric film having the perovskite structure includes: an a-axis orientation single-crystal buffer film 13 of Zr
      1-x Si
      x O
      2 (0.08≤x≤0.10) formed on a single-crystal silicon substrate 11; a lower electrode 14 which is made of the single crystal of the perovskite structure or Pt and formed on the buffer film 13; the ferroelectric film 15, which is made of the single crystal of the perovskite structure and formed on the lower electrode 14; and an upper electrode 16, which is formed as a single crystal of the perovskite structure or Pt and formed on the ferroelectric film 15.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了通过在硅衬底上形成具有适当质量的钙钛矿结构的单晶来提高使用具有钙钛矿结构的单晶的元件的特性。 &lt; P&gt;解决方案:使用具有钙钛矿结构的铁电体膜的半导体器件包括:Zr <1> x x 的a轴取向单晶缓冲膜13, 在单晶硅基板11上形成的O 2 (0.08≤x≤0.10) 形成在缓冲膜13上的下部电极14,其由钙钛矿结构的单晶或Pt构成, 形成在下部电极14上的由钙钛矿结构的单晶构成的铁电体膜15; 以及形成为钙钛矿结构的单晶或Pt并形成在铁电体膜15上的上电极16。(C)2008,JPO&INPIT
    • 18. 发明专利
    • Semiconductor storage element, and method of manufacturing the same
    • 半导体存储元件及其制造方法
    • JP2010087089A
    • 2010-04-15
    • JP2008252411
    • 2008-09-30
    • Toshiba Corp株式会社東芝
    • INO TSUNEHIROFUJII AKISUKEFUJIKI JUNTAKASHIMA AKIRASHINGU MASAOMATSUSHITA DAISUKEYASUDA NAOKIMURAOKA KOICHI
    • H01L21/8247H01L27/115H01L29/788H01L29/792
    • H01L29/792H01L29/517H01L29/66833
    • PROBLEM TO BE SOLVED: To provide a semiconductor storage element that can accumulate and erase electric charge with higher efficiency than a conventional charge storage film using SiN, and holds the accumulated electric charge for a long time, and to provide a method of manufacturing the semiconductor storage element.
      SOLUTION: The semiconductor storage element includes: a source region and a drain region provided in a semiconductor substrate; a tunnel insulating film provided on the semiconductor substrate between the source region and the drain region; a charge storage film provided on the tunnel insulating film; a block insulating film provided on the charge storage film; a gate electrode provided on the block insulating film; and a region containing gas molecules, the region being provided in a neighborhood of an interface between the charge storage film and the block insulating film.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种半导体存储元件,其可以比使用SiN的常规电荷存储膜更高的效率地累积和擦除电荷,并且长时间保持积累的电荷,并且提供一种方法 制造半导体存储元件。 解决方案:半导体存储元件包括:设置在半导体衬底中的源极区域和漏极区域; 设置在所述源极区域和所述漏极区域之间的所述半导体衬底上的隧道绝缘膜; 设置在隧道绝缘膜上的电荷存储膜; 设置在电荷存储膜上的块状绝缘膜; 设置在所述块绝缘膜上的栅电极; 以及包含气体分子的区域,该区域设置在电荷存储膜和块绝缘膜之间的界面附近。 版权所有(C)2010,JPO&INPIT
    • 20. 发明专利
    • Semiconductor device and its manufacturing method
    • 半导体器件及其制造方法
    • JP2006012900A
    • 2006-01-12
    • JP2004183801
    • 2004-06-22
    • Toshiba Corp株式会社東芝
    • KAMIMUTA YUICHIKOYAMA MASATOINO TSUNEHIRONISHIYAMA AKIRA
    • H01L29/78
    • PROBLEM TO BE SOLVED: To provide a semiconductor device which is prevented from a change in threshold value and equipped with a MOS transistor having high reliability against electrical stress.
      SOLUTION: The semiconductor device comprises a semiconductor substrate (11) wherein an element isolation region (12) for demarcating an element region is formed, a source/drain region (25) formed away from the element region of the semiconductor substrate, gate insulation films (13 and 14) formed on the element region of the semiconductor substrate, and a gate electrode (15) containing a semiconductor which is formed on the gate insulation films. The gate insulation films are a first insulation film (13) containing metal and oxygen, and a second insulation film (14) which is formed on the first insulation film and contains silicon and oxygen. The content of metal contained in the second insulation film is 6.6 atomic % at an interface with the gate electrode.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种防止阈值变化并配备有对电应力具有高可靠性的MOS晶体管的半导体器件。 解决方案:半导体器件包括半导体衬底(11),其中形成用于划分元件区域的元件隔离区(12),远离半导体衬底的元件区形成的源/漏区(25) 形成在半导体衬底的元件区域上的栅极绝缘膜(13和14)以及形成在栅极绝缘膜上的包含半导体的栅电极(15)。 栅绝缘膜是含有金属和氧的第一绝缘膜(13)和形成在第一绝缘膜上并含有硅和氧的第二绝缘膜(14)。 包含在第二绝缘膜中的金属的含量在与栅电极的界面处为6.6原子%。 版权所有(C)2006,JPO&NCIPI