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11. 发明专利

JPH04191646A APPARATUS FOR X-RAY ANALYSIS 失效
公开(公告)号：JPH04191646A
公开(公告)日：1992-07-09
申请号：JP32165890
申请日：1990-11-26
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TAKENAKA HISATAKA , TANAKA TORU , MARUO TETSUYA , KUROSAWA MASARU
IPC分类号： G01N23/223
摘要： PURPOSE:To improve detection sensitivity and others by constructing a monochromatic device of a superlattice film prepared by making a laminate structure on a base of a curved structure, and by disposing a sample so that it is oscillated in the in-plane direction. CONSTITUTION:An X-ray is applied from an X-ray source 1 to a curved-type monochromatic device 2 which is formed of an alternate lamination film of tungsten and carbon and which makes the X-ray be monochromatic and condenses it, and is applied to a sample 4 for analysis in succession. Positioning of the sample 4 is conducted by a driving mechanism 6 for adjustment of a sample holding stage 5. Then, a fluorescent X-ray emitted from this sample 4 is inputted to a semiconductor detector 9 and the result of measurement thereby is inputted to an output mechanism 10 and displayed. In order to improve the precision of an element attracting the attention in the sample 4, on the occasion, the sample 4 is made uniform by its in-plane rotation, and the average value of concentration of the element attracting the attention in each sort of sample 4 is determined. According to this constitution, the intensity and the property of condensation of the X-ray applied to the sample 4 are increased and a spectrum of high sensitivity can be obtained.

12. 发明专利

JPS5892202A METHOD OF FORMING GOLD INDIUM THIN FILM RESISTANCE ELEMENT 失效
公开(公告)号：JPS5892202A
公开(公告)日：1983-06-01
申请号：JP19143081
申请日：1981-11-28
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： KUROSAWA MASARU , HASUMI YUUJI , ARAI KUNIHIRO , KURODA KENICHI , YANAGAWA FUMIHIKO
IPC分类号： H01C17/08 , H01L27/18 , H01L39/22

13. 发明专利

JPS51119930A RECTIFIER 失效
公开(公告)号：JPS51119930A
公开(公告)日：1976-10-20
申请号：JP4435375
申请日：1975-04-14
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： AOYANAGI MASARU , TAMURA SHIYOUZOU , KUROSAWA MASARU
IPC分类号： H02M1/14 , H02M7/04
摘要： PURPOSE:To eliminate effectively and in least loss the distortion of AC side by rectifier.

14. 发明专利

JPH0763710A STANDARD SAMPLE 失效
公开(公告)号：JPH0763710A
公开(公告)日：1995-03-10
申请号：JP21115993
申请日：1993-08-26
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TAKENAKA HISATAKA , HONMA YOSHIKAZU , SUZUKI MINEHARU , KUROSAWA MASARU , KATO MASAAKI
IPC分类号： G01N1/00 , G01N23/22
摘要： PURPOSE:To accurately evaluate a solving power of an Auger electron spectral analysis method and a secondary ion mass analysis method by laminating a layer comprising amorphous or polycrystalline material several times to make a standard sample. CONSTITUTION:The use of a layer comprising amorphous or polycrystalline material minimizes the anisotropy to allow the formation of a standard sample of a laminated film with a higher degree of homogeneity. The etching of the sample can reduce problems of changes and increase in surface roughness in etching rate depending on the direction and angle of incidence of ions for etching of a crystal axis. When a film of such a lamination structure is applied as standard sample for an Auger electron spectral analysis and a secondary ion mass analysis method, the relationship can be determined between the angle of incidence and the accuracy of element concentration distribution in and the direction of depth. The accuracy intrinsic to the analysis methods can be obtained when other material is analyzed.

15. 发明专利

JPH03291559A LASER IONIZATION NEUTRAL PARTICLE MASS SPECTROMETER 失效
公开(公告)号：JPH03291559A
公开(公告)日：1991-12-20
申请号：JP9212590
申请日：1990-04-09
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： MARUO TETSUYA , HONMA YOSHIKAZU , KUROSAWA MASARU
IPC分类号： G01N27/64
摘要： PURPOSE:To obtain the mass spectrometer which can improve a spectral sensitivity and can make analysis in a depth direction by operating the detecting function of an ion detector only in the time when the arrival of the light excitation ions past the mass spectrometer is anticipated. CONSTITUTION:While the secondary ions 27 past the mass spectrograph 31 are a continuous quantity, the light excitation ion 29 is generated at every ionization by a UV laser beam 28. The light excitation ion 29 is, therefore, high in the peak value with respect to the secondary ion 27 but the quantity thereof is desultory. A light emitting signal 35 of the UV laser is generated by a UV laser detector 34. This signal 35 is introduced into a trigger signal generator 36 which generation a detection start signal 37 after the lapse of the prescribed time. The signal 37 is introduced to a signal gate 38 installed between the ion detector 32 and a pulse counter 33 to detect the ion pulse from the time when the signal 37 is introduced. A delay is necessary before the transmission of the signal 37 after the reception of the signal 35 and a detection signal 39 is generated for the prescribed time from the generator 36. The detection is ended by the gate 38. The detection only during the time when the light excitation ion is detected is thus executed.

16. 发明专利

JPH031427A ION GUN 失效
公开(公告)号：JPH031427A
公开(公告)日：1991-01-08
申请号：JP13501289
申请日：1989-05-29
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TANAKA TORU , KUROSAWA MASARU , MARUO TETSUYA
IPC分类号： G21K1/00 , H01J27/08 , H01J37/08
摘要： PURPOSE:To make it possible to radiate a specific ion selectively at altering speed by ionizing a solution containing a raw material by spraying and radiating the ionized material through a mass-velocity filter. CONSTITUTION:A raw material is given as a solution 1 so as to be easily refined. A solution 1 is atomized by a nebulizer 2, sent to a torch 3, and inductively coupled plasma is generated by a high frequency coil 4. Ions are taken out from the plasma through a sampling part consisting of a nozzle 5, a skimmer 6, and a lens 7, led to a mass-velocity filler 11, and only ions with a specific mass and desired speed can pass. The passed ions is radiated to a sample 13 passing a retarding system 12. By this method, deposition and etching can be carried out using the specific ions.

17. 发明专利

JPH0772100A STANDARD SAMPLE 失效
公开(公告)号：JPH0772100A
公开(公告)日：1995-03-17
申请号：JP22084093
申请日：1993-09-06
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TAKENAKA HISATAKA , KUROSAWA MASARU
IPC分类号： G01N1/00 , G01N23/22
摘要： PURPOSE:To obtain relation between analyzing conditions and a resolution in the depthwise direction by one analysis to interfaces of not smaller than a predetermined number of kinds of materials, by laminating not smaller than the predetermined number of kinds of material layers a plurality of number of times and using the laminate as the standard sample. CONSTITUTION:For example, three kinds of material layers, i.e., Mo, Ti and W layers are repeatedly layered to form a laminate film which is used as the standard sample. Relation between width of interface of three kinds of material layers, namely, resolution and depth of three kinds of material layers can be obtained at one measurement when the standard sample is used. If four kinds of material layers are repeatedly laminated to obtain a standard sample, width of interface of four kinds of material layers can be obtained at one measurement. When the laminate film is applied to the Auger electron spectroscopy or secondary ionic mass spectroscopy as a standard sample, it is possible to obtain width of interface of many material layers at one measurement. In other words, the time required for grasping analyzing conditions is remarkably reduced.

18. 发明专利

JPH0689899A HEATING DEVICE FOR SEMICONDUCTOR WAFER 失效
公开(公告)号：JPH0689899A
公开(公告)日：1994-03-29
申请号：JP25692991
申请日：1991-09-09
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： HONMA YOSHIKAZU , KUROSAWA MASARU
IPC分类号： H01L21/302 , H01L21/324
摘要： PURPOSE:To flatter a semiconductor wafer even of large diameter by the order of one atomic layer by providing an electrode aligned board in contact with a periphery of a semiconductor wafer and on which at least three electrodes are aligned circularly and by selecting two out of the electrode of at least three in order to connect them to a power source. CONSTITUTION:A semiconductor wafer W is arranged on a semiconductor wafer mounting board 12 and further on the wafer W, an electrode aligned board M is mounted, for example, formed of quarz into a circle and on one of whose main surfaces Ma, a plurality of (n) (n is an integral number of at least 3,) for example, 8 electrodes E1-E8 of circular arc shape made of a bent conductor mold are aligned at equal intervals. Then, movable contacts C1 and C2 of rotation type of a power source connecting means are rotated continuously and intermittently in a comparatively short time, whereby the operation for energizing the semiconductor wafers W through a pair of two electrodes E1 and E5...E4 and E8 in order is repeated. As a result, the semiconductor wafers W are heated up to high temperature and the surface of the wafer W is flattened to the order of unevenness of one atomic layer.

19. 发明专利

JPH039259A MASS SPECTROMETER BY HIGH-REPETITION LASER STIMULATION 失效
公开(公告)号：JPH039259A
公开(公告)日：1991-01-17
申请号：JP14221689
申请日：1989-06-06
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： MARUO TETSUYA , HONMA YOSHIKAZU , KUROSAWA MASARU , ISHII YOSHIICHI
IPC分类号： G01N27/62 , G01N27/64 , H01J49/26
摘要： PURPOSE:To allow the mass analysis with a high sensitivity and good quantitative characteristic by irradiating the surface of a sample with repeatedly generated pulse laser beams, making mass sepn. of the generated ions and making measurement only when the ions arrive at an ion detector. CONSTITUTION:The sample 5 is irradiated, via a condenser system 4, with the pulse lasers 3 generated from a pulse laser generator 1 by receiving the high-repetition pulse signals form a signal generator 2. The ions 6 evaporated from the sample 5 are accelerated and converged by a leader electrode 7 and are made incident to a mass spectrograph 8. The spectrograph 8 makes the mass sepn. of only the prescribed ion and makes the ion incident to the ion detector 9. The detector 9 has a detecting time limiting means which operates only when the ion arrives at the detector. An ion detecting part 10 generates a signal by detecting the ion and an AND circuit 12 outputs a pulse when this signal and the delay signal from a delay signal generator 11 arrive simultaneously at the AND circuit. The pulses are counted by a pulse counter 13.

20. 发明专利

JPH02310460A MASS ANALYSIS AND MASS ANALYSIS APPARATUS 失效
公开(公告)号：JPH02310460A
公开(公告)日：1990-12-26
申请号：JP13368889
申请日：1989-05-26
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： MARUO TETSUYA , HONMA YOSHIKAZU , KUROSAWA MASARU
IPC分类号： G01N27/62 , H01J49/16 , H01J49/34
摘要： PURPOSE:To improve the dynamic range of the analysis method and to allow the measurement of a large dynamic range by providing an ion decelerating means between an ion accelerating means and an ion detector. CONSTITUTION:A pulse laser generator 21 generates a UV pulse laser 22 of a high luminance. The pulse laser 22 is condensed by a laser condensing means 23 to bombard the surface of a sample 24. Ions 25 are generated from the surface of the sample 22 by the impact of the pulse laser 22. The ions 25 are accelerated and collected by an ion leader electrode 26. A deceleration electrode 28 is installed between a quadrupole type mass analyzer 27 and the ion leader electrode 26 and a deceleration voltage is impressed thereto from a deceleration voltage power source 29. The acceleration ions lead out by the ion leader electrode 26 are decelerated by the potential difference between the deceleration electrode 28 and the ion leader electrode 26 and are made incident to the quadrupole type mass analyzer 27. The ions subjected to the mass analysis by the quadrupole type mass analyzer 27 are measured in a detecting section 12. The measurement of the large dynamic range is possible in this way.

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