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11. 发明专利

JPH11327166A FILM PATTERNING METHOD 失效
公开(公告)号：JPH11327166A
公开(公告)日：1999-11-26
申请号：JP13867798
申请日：1998-05-20
申请人： FUJITSU LTD
发明人： HOSHINO EIICHI , URAKUCHI MASAHIRO , MINAGAWA TOSHIKATSU , YAMAMOTO YUICHI , SATO YOSHIHIRO
IPC分类号： G03F7/004 , G03F1/68 , G03F1/80 , G03F7/038 , G03F7/40 , G03F7/42
摘要： PROBLEM TO BE SOLVED: To remove unnecessary resist residue after development from a board in a short time, in a film patterning method using resist for a mask. SOLUTION: A process to form a film 2 on a board 1, a process to paint resist on the film 2, a process to expose the resist, a process to develop the resist by liquid developer, a process to remove the liquid developer from the film 2, a process to radiate ultraviolet rays onto the resist remained on the film 2 in an atmosphere containing oxygen, a process to remove developed residue of the resist by supplying alkali aqueous solution 5 to the resist remained on the film 2, and a process to form a pattern on the film 2 by etching the film 2 exposed from the resist are contained in this film patterning method.

12. 发明专利

JPH1152544A PHOTOMASK AND ITS PRODUCTION AS WELL AS BAKING DEVICE 失效
公开(公告)号：JPH1152544A
公开(公告)日：1999-02-26
申请号：JP20908897
申请日：1997-08-04
申请人： FUJITSU LTD
发明人： SATO YOSHIHIRO , HOSHINO EIICHI
IPC分类号： G03F1/54 , H01L21/027 , G03F1/08
摘要： PROBLEM TO BE SOLVED: To provide a photomask which is free from peeling of a light shielding film while transporting and handling and a process for producing the same as well as a baking device for producing this photomask. SOLUTION: This process consists in forming a resist film 14 on a mask blank 16 formed with the light shielding film 12 on a substrate 10, selectively heating the prescribed regions exclusive of the peripheral edges of this mask blank and exposing the heated resist film with prescribed patterns. Further, the resist film at the peripheral edges is selectively dissolved and the exposed resist film is developed to the patterns. The light shielding film is etched with the patterned resist film as a mask to remove the light shielding film at the peripheral edges and the light shielding film is processed to the patterns.

13. 发明专利

JPH0660568A INFORMATION RECORDING/REPRODUCING DEVICE 失效
公开(公告)号：JPH0660568A
公开(公告)日：1994-03-04
申请号：JP21493192
申请日：1992-08-12
申请人： FUJITSU LTD
发明人： KUNIMATSU YASUNARI , SATO YOSHIHIRO
IPC分类号： G11B21/08 , G11B21/02
摘要： PURPOSE:To precisely detect the moving speed of a positioner. CONSTITUTION:A second coil 27 and a third coil 29 provided so that the axial directions thereof are aligned with the sliding direction of the positioner 23, a second magnet 28 and a third magnet 30 provided on a base 22 side and generating magnetic flux which is almost perpendicular to the axial directions of the respective coils and a first coil 24 provided at an almost identical distance to the distance between the respective coils 27 and 29 are provided. Then, connection is executed so that a noise voltage caused by the magnetic flux generated from the first coil is canceled and a signal voltage generated to the second and the third coils caused by the movement of the positioner is added. Besides, voltage obtained from the other end parts of the second and the third coils is set as the speed signals of the positioner 23.

14. 发明专利

JPH05320889A SPUTTERING SYSTEM 失效
公开(公告)号：JPH05320889A
公开(公告)日：1993-12-07
申请号：JP12769792
申请日：1992-05-20
申请人： FUJITSU LTD , FUJITSU TOHOKU ELECTRON KK
发明人： SATO YOSHIHIRO
IPC分类号： C23C14/34 , H01L21/203 , H01L21/31
摘要： PURPOSE:To prevent the sticking of water and humidification in a chamber involved by target replacement and to improve the quality of sputtering and the working ratio of equipment with respect to the structure of a sputtering system for producing semiconductor elements, etc. CONSTITUTION:A subchamber 2 is installed adjacently to a chamber 1 of the sputtering system so that it may have a vacuum system jointly with the chamber 1. A target 3 in the chamber 1 can be housed in the chamber 2 by a support mechanism 4 which is freely expandable and contractable and a means by which the subchamber 2 is movable is provided.

15. 发明专利

JPS63149864A DISK CARTRIDGE DRIVING DEVICE 失效
公开(公告)号：JPS63149864A
公开(公告)日：1988-06-22
申请号：JP29574986
申请日：1986-12-13
申请人： FUJITSU LTD , COPAL CO LTD
发明人： SATO YOSHIHIRO , SHIMURA SOICHI , MUTO YOSHIRO , TAKAHASHI MITSUO , ASAKO KOJI
IPC分类号： G11B17/04 , G11B17/043
摘要： PURPOSE:To eliminate damage and abrasion between a cartridge and an arm coupling and to improve the reliability by engaging a notch of the side face and an engaging part of the tip of a turnable lock body at the end time for inserting the cartridge. CONSTITUTION:The tip of a cartridge 100 inserted into a housing comes into contact with a driven part 8, a lock body 2 turns clockwise centering around a pin 11 against a spring 14, an engaging part 13 of its tip is engaged to a notch 100a of the side face of the cartridge, a shutter is also opened, and in this state, even if a hand is set free, the cartridge is not discharged. Simultaneously, by an engagement of a lock body shaft 22 and a lever 5, a sensor 4 detects a complete insertion, the housing 1 descends and a disk becomes an operating state. Accordingly, since its is unnecessary to allow a cartridge discharging arm to has a detaining function, abrasion and damage of an arm coupling part and the cartridge are eliminated and the reliability can be improved.

16. 发明专利

JPS62114182A DISK CARTRIDGE 失效
公开(公告)号：JPS62114182A
公开(公告)日：1987-05-25
申请号：JP25402285
申请日：1985-11-13
申请人： FUJITSU LTD
发明人： SATO YOSHIHIRO , TAKAHASHI TATSUO
IPC分类号： G11B23/28
摘要： PURPOSE:To shorten access time by providing a feature section for detecting direction of a cartridge on at least one of end face excepting front end face of the cartridge. CONSTITUTION:Guide grooves 27', 28' are provided on end faces 27, 28 of both sides of a cartridge 2, and a notched part 5' as a feature section is provided in the rear end 26 side of one guide groove 27'. The guide grooves 27', 28' are made to enable a driving pin provided in reading and writing device side for opening and closing a shutter 3 when attaching and detaching the disk cartridge to move, and formed only in the front end face 25 side of side end faces 27, 28, and the rear end face 26 side is left as a holding part by a robot hand. When the cartridge 2 is held by the robot hand in the notched part 5' provided in a part of a holding part on a side end face 27, presence of the notched part 5' is detected by a turning lever 71 and an optical detecting element 72 provided in the robot hand 6 and direction of the cartridge 2 is discriminated.

17. 发明专利

JPS61250881A DISC CARTRIDGE 失效
公开(公告)号：JPS61250881A
公开(公告)日：1986-11-07
申请号：JP9246485
申请日：1985-04-30
申请人： FUJITSU LTD
发明人： SATO YOSHIHIRO , OKADA SHINJI , KOBAYASHI KATSUYORI
IPC分类号： G11B23/03 , G11B23/033
摘要： PURPOSE:To prevent the adhesion of external dust or finger print when a cartridge is not in use by providing a slot through which the pin of a driver side is moved to the front part of the entire moving range of the guide member of a cartridge case and using the slot so as to decrease the external exposure of the guide member. CONSTITUTION:In loading a disc cartridge 1' to a driver, the pin 13 of the driver pushes down a guide member 14, and when the member 14 comes to a position 14', a steel belt 12 opens openings 6-8 shut by a shutter 9 so as to attain read/write. In ejecting the disc cartridge 1' from the driver, the guide member 14 restores the home position by the returning force of the steel belt 12, the shutter 9 is restored to close the openings 6-8. Since the exposed part of the guide member 14 to the outside of the case is formed as a small slot 20 close to the pin width of the drive side, the guide member 14 of the disc cartridge 1' is not moved easily externally and the shutter 9 is not opened. Thus, the adhesion of dust or finger print is prevented.

18. 发明专利

JP2001253491A CASE FOR STORING AND TRANSPORTING MEMBER FOR FABRICATING SEMICONDUCTOR DEVICE 失效
公开(公告)号：JP2001253491A
公开(公告)日：2001-09-18
申请号：JP2000070401
申请日：2000-03-14
申请人： FUJITSU LTD , FUJITSU VLSI LTD
发明人： HIRANO HIROAKI , SATO YOSHIHIRO
IPC分类号： B65D85/86 , G03F1/40 , G03F1/66 , H01L21/027 , H01L21/673 , H01L21/68 , G03F1/14
摘要： PROBLEM TO BE SOLVED: To provide a case for storing and transporting a member for fabricating a semiconductor device, capable of controlling contamination of a wafer, a reticle or the like for a semiconductor due to adhesion of particles and preventing the electrostatic breaking of these device patterns. SOLUTION: The case for storing and transporting a member for fabricating a semiconductor device has a bottom tray 10 on which the member such as a reticle 12 is set and an upper lid 20 for covering the bottom tray 10. The bottom tray 10 is formed of a polycarbonate to which carbon is added, and the upper lid 20 is formed of a non-conductive plastic resin.

19. 发明专利

JPH0831783A METHOD AND APPARATUS FOR DICING SUBSTRATE 失效
公开(公告)号：JPH0831783A
公开(公告)日：1996-02-02
申请号：JP16182994
申请日：1994-07-14
申请人： FUJITSU LTD
发明人： KOKUBU MAMORU , FUKUNISHI RYUICHI , SATO YOSHIHIRO
IPC分类号： H01L21/304 , H01L21/301
摘要： PURPOSE:To make it possible to clean both faces of a substrate at the same time without damaging a pattern formed on the rear face, by positioning the substrate vertically and cleaning the front and rear faces after the dicing slit face is cleaned. CONSTITUTION:In a dicing unit 21, a rotating cutter 22 makes a slit on a substrate. In this step, cutting fluid (water) is used and the slit substrate is cleaned and dried by using a cleaning nozzle 23 and a warm air nozzle 24 in the dicing unit 21. When a dicing table 7, on which the wafer is put horizontally, is returned to a substrate mounting position, the substrate is moved upward to a given level by a shift arm 8 and turned and held vertically by turning a substrate supporting holder. The substrate is put in a cleaning unit 31 by the shift arm 81. In the cleaning unit 31, a cleaning liquid is sprayed to both faces of the substrate positioned vertically at the same time and dried by blowing air.

20. 发明专利

JPH05217261A DISK CHUCKING MECHANISM 失效
公开(公告)号：JPH05217261A
公开(公告)日：1993-08-27
申请号：JP1900892
申请日：1992-02-04
申请人： FUJITSU LTD
发明人： SATO YOSHIHIRO
IPC分类号： G11B17/03 , G11B17/028
摘要： PURPOSE:To prevent the slip of a recording medium and to suppress its adverse effect even in high speed starting and stopping operation by providing a friction member on the hub of a medium rotating motor and pressing and energizing it to the hub of the recording medium. CONSTITUTION:A magneto-optical disk 57 is placed on a motor hub 55 and the tip of a motor center pin 53 is inserted into the holes 58a, 59a of the medium hubs 58, 59 of the disk 57. Then chucking is performed by the attracting force of a magnet 56 provided on the motor hub 55 to the plate 60 of the medium hub 58. Further, by inserting the medium hub 58 of the disk 57 into the motor hub 55, a rubber 62 provided on a leaf spring 63 is pressurized by the medium hub 58 and the leaf spring 63 is bended and the rubber 62 is energized in the direction of the medium hub 58 by its repulsion. Thus, the friction force of a rotating direction generating between a rotating motor 51 and the medium hub 58 is increased and the slip of the disk 57 is prevented even in the high speed starting and stopping operation of the rotating motor 51 and the adverse effect by the slip is suppressed.

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