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131. 发明专利

JPS6228345B2 失效
公开(公告)号：JPS6228345B2
公开(公告)日：1987-06-19
申请号：JP7012280
申请日：1980-05-28
申请人： HITACHI LTD
发明人： INOE KO , MIZUMOTO MUNEO , SUZUKI SATOSHI , KOJIMA KAZUO
IPC分类号： F16J15/34 , F16J15/38

132. 发明专利

JPS629896A STRAIGHT-LINE INTRODUCING MACHINE 失效
公开(公告)号：JPS629896A
公开(公告)日：1987-01-17
申请号：JP14468185
申请日：1985-07-03
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , KANETOMO MASABUMI , YAMAGUCHI SUMIO
IPC分类号： B25J21/00 , H01L21/67 , H01L21/677 , H01L21/68

133. 发明专利

JPS61237416A ROTATING HOLDER OF SUBSTRATE OF MOLECULAR BEAM EPITAXY DEVICE 失效
公开(公告)号：JPS61237416A
公开(公告)日：1986-10-22
申请号：JP7830685
申请日：1985-04-15
申请人： HITACHI LTD
发明人： FUJIOKA KAZUMASA , OKUNO SUMIO , MIZUMOTO MUNEO , KANBARA HIDEAKI , UEDA SHINJIRO , KURODA TAKARO , YAMAGUCHI SUMIO , TAMURA NAOYUKI
IPC分类号： H01L21/203
摘要： PURPOSE:To curb the rise in temperature of a bearing element and to reduce the heat loss of a heater heating a substrate, by providing an element serving as a lead wire for electrifying the heater and a support for supporting the heater. CONSTITUTION:The heat from a heater 7 or a heater base 6, either of which is at a high temperature, is transmitted to a terminal plate 15 through an ele ment 8 serving as a lead wire and a support for the heater, and further it is transmitted to a bearing 10 through a holding plate 14 and a fixed shaft 4. Since the element 8 serving as a lead wire and a support for the heater has a large length, it renders a large heat resistance, and consequently the tempera ture is lowered sufficiently in the terminal plate 15. Since the element 8 has a sufficiently large diameter, in addition, the heat in the element 8 can be neglected substantially, and thus the fixed shaft 4 is not heated from inside. Therefore little heat is transmitted to the bearing 10, the temperature of the bearing 10 is kept at a remarkably low level, the reliability thereof is improved, and thus the lifetime of a holder is prolonged.

134. 发明专利

JPS60245236A SEMICONDUCTOR MANUFACTURING APPARATUS 失效
公开(公告)号：JPS60245236A
公开(公告)日：1985-12-05
申请号：JP10050284
申请日：1984-05-21
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , OKUNO SUMIO , FUJIOKA KAZUMASA , TAKAHASHI KUNIHIRO , YAMAGUCHI SUMIO , KURODA TAKAO , TAMURA NAOYUKI , TACHIBANA MITSUHIRO
IPC分类号： H01L21/20 , C30B25/02 , H01L21/50
摘要： PURPOSE:To transfer substrates of various patterns by independently and automatically carrying out the substrate transfer operation and substrate receiving and sending operation. CONSTITUTION:A molecular beam epitaxy apparatus comprises automatic control apparatuses 21, 22 which control sending and receiving of substrate within an introducing chamber to a transfer chamber, automatic control apparatuses 23, 24 which control sending and receiving of substrate within transfer chamber to an analyzing chamber, automatic control apparatuses 25, 26 which control sending and receiving of substrate within a transfer chamber to a growth chamber, automatic control apparatuses 27, 28 which control sending and receiving of substrate within a sending chamber to a transfer chamber and an automatic control apparatus 29 which controls the transfer mechanism of truck within the transfer chamber. The substrates of various patterns can be transferred by individually and automatically executing the substrate transfer operation and substrate sending and receiving operation.

135. 发明专利

JPS60226134A SEMICONDUCTOR MANUFACTURE APPARATUS 失效
公开(公告)号：JPS60226134A
公开(公告)日：1985-11-11
申请号：JP8173684
申请日：1984-04-25
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , OKUNO SUMIO , FUJIOKA KAZUYA , TAKAHASHI KUNIHIRO , YAMAGUCHI SUMIO , KURODA TAKAROU , TAMURA NAOYUKI , TACHIBANA MITSUHIRO
IPC分类号： H01L21/67 , H01L21/00 , H01L21/203 , H01L21/677 , H01L21/68
摘要： PURPOSE:To improve reliability through accurate detection of transfer or reception of substrates by detecting direction of operations of substrate transfer and reception mechanism at the outside of apparatus and discriminating the substrate receiving and transfer operations with such detection signal. CONSTITUTION:A molecular epitaxy apparatus comprises a detector 13 which detects a direction (vertical direction) of movement of a member 11 of substrate transfer and reception mechanism at the outside of apparatus, a detector 14 which detects a direction (forward or backward direction) of movement of manipulator 10 at the outside of apparatus and a discriminating circuit 15 which discriminates the substrate transfer and reception operation by inputting a detection signals sent from the detectors 13, 14. When the substrate transfer or reception mechanism executes the substrate reception operation, directions in movement of manipular 10 and member 11 are detected by the detectors 13, 14. When the detection signal is input to the discrimination circuit 15, the discrimination circuit 15 issues a signal which indicates that the substrate reception is being carried out. When the substrate reception or transfer mechanism executes the substrate transfer operation, the discrimination circuit 15 issues a signal which indicates that the substrate transfer operation is being carried out.

136. 发明专利

JPS60178615A MOLECULAR BEAM SOURCE 失效
公开(公告)号：JPS60178615A
公开(公告)日：1985-09-12
申请号：JP3420284
申请日：1984-02-27
申请人： HITACHI LTD
发明人： TAKAHASHI KUNIHIRO , FUJIOKA KAZUMASA , MIZUMOTO MUNEO , TERASAKI MASAO , TAMURA NAOYUKI , KURODA TAKAROU
IPC分类号： H01L21/203
摘要： PURPOSE:To lower the temperatures of each apparatus and member, and to reduce unnecessary degassing by forming an arbitrary number of outward or inward upstands to the side end section of a support member for a shielding plate in the circumferential direction. CONSTITUTION:A large number of small projections 12 are formed to the outer circumferential surface or inner circumferential surface of a shielding plate 6. An arbitrary number of louvers 11 are formed to the outer circumferential surface of a lower end section at proper intervals in the circumferential direction. A plurality of such shielding plates 6 are superposed, and the shielding plates 6a-6n are superposed and connected through each luover 11a-11n while several space in the radial direction is held at the height of the small projections 12. Not only heat transmitted over the shielding plate 6a is difficult to be transmitted over a support member through the end section of the shielding plate 6a but also contact areas among the shielding plates and the support member are reduced.

137. 发明专利

JPS60154611A MOLECULAR BEAM EPITAXY APPARATUS 失效
公开(公告)号：JPS60154611A
公开(公告)日：1985-08-14
申请号：JP1007484
申请日：1984-01-25
申请人： HITACHI LTD
发明人： KONDOU YOSHIMASA , SATOU KAZUO , YAMAGUCHI SUMIO , MATSUMURA YASUHIDE , KANETOMO MASABUMI , TAKAHASHI TOSHIO , MIZUMOTO MUNEO
IPC分类号： H01L21/203
摘要： PURPOSE:To improve movement and stop accuracy of truck and easily realize maintenance and repair of transfer mechanism by providing a driver of transfer mechanism at the one end or both ends of substrate transfer chamber. CONSTITUTION:A transfer chamber is composed of a transfer chamber 18 and a drive chamber 19. Both ends of rail 11 extend up to the drive chamber 19 and are provided with a sprocket 15 for driving the chain or metal belt 13. The tension sprocket 20 is pushed by a spring 21 in order to give adequate tension to the belt 13 and preventing deflection of it. The truck 12 and belt are coupled in rigid, stop accuracy of truck 12 driven by rotation of sprocket 15 is remarkably improved and automatic send and receive of substrate can be realized easily. Since the sprocket 15 and tension mechanism are exposed by removing the drive chamber 19, it is no longer necessary to deassemble the transfer path in the maintenance and working efficiency of apparatus can be improved distinctively.

138. 发明专利

JPS60117614A MOLECULAR BEAM EPITAXY DEVICE 失效
公开(公告)号：JPS60117614A
公开(公告)日：1985-06-25
申请号：JP22414383
申请日：1983-11-30
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , OKUNO SUMIO , FUJIOKA KAZUMASA , TAKAHASHI KUNIHIRO , SATOU KAZUO , YAMAGUCHI SUMIO , KURODA TAKAROU , TAMURA NAOYUKI
IPC分类号： H01L21/203
摘要： PURPOSE:To detect the presence of a substrate on a transporter positively, and to facilitate the remote control of the transporter by providing a sensing means detecting the presence of the substrate on the transporter in a molecular beam epitaxy device in which the transporter on which the substrate is loaded is mounted movably in a carrying chamber for carrying the substrate to each treating chamber. CONSTITUTION:Conductive base plates 9A1, 9A2 buried to a transporter 8 made of a non-conductive material with a guide roller 13 rolling along a rail 7 made of a non-conductive material installed into a carrying chamber 5 are mounted to the transporter 8 in order to load a conductive substrate 15 after crystal growth. When the substrate 15 is loaded on the base plates 9A1, 9A2, currents flow and a conduction sensor 29 is operated because sliding contacts 21a, 21b are each brought into pressure-contact with buried plates 22, 24 for conduction through springs 20a, 20b by the load of the substrate. When the substrate 15 is removed from the base plates 9A1, 9A2, while the conduction sensor 29 is returned to an original state because currents stops by operation reverse to the one mentioned above. Accordingly, the presence of the substrate 15 on the base plates 9A1, 9A2 can be discriminated positively.

139. 发明专利

JPS58119926A BEARING DEVICE FOR SUPERCHARGER 失效
公开(公告)号：JPS58119926A
公开(公告)日：1983-07-16
申请号：JP32082
申请日：1982-01-06
申请人： HITACHI LTD
发明人： YOSHIOKA MASAHIRO , MIZUMOTO MUNEO , YAMADA KOUICHIROU
IPC分类号： F02B39/00 , F01D25/16 , F16C17/18
摘要： PURPOSE:To facilitate the work of assembly, disassembly, or others by removing the necessity of the exchange of a center housing itself even if the sliding part of the center housing is worn off. CONSTITUTION:An intermediate ring 15 is provided between a center housing 4 and a floating bush 3, and positioned by a snap ring 17. Lubricating oil supplied from an oil supply hole 13 is sent to the floating bush 3 via an oil supply hole 16. Even if the sliding face of the intermediate ring 15 is worn off, a captioned device can be reused only by exchanging the intermediate ring 15. Meanwhile, when the material of the intermediate ring 15 is selected to be resistive against heat and abrasion only on the side of a turbine, the amounts of wear and tear of left and right intermediate rings 15 can be equalized.

140. 发明专利

JPS5728540A Refrigerant feed and exhaust device for superconductive generator 失效
标题翻译：用于超级发电机的制冷剂进料和排气装置
公开(公告)号：JPS5728540A
公开(公告)日：1982-02-16
申请号：JP9992480
申请日：1980-07-23
申请人： Hitachi Ltd
发明人： MIZUMOTO MUNEO
IPC分类号： H02K9/00 , H02K55/04
CPC分类号： H02K55/04 , Y02E40/625
摘要： PURPOSE:To permit a vacuum extraction method when replacing the air in helium flow paths in a rotor with helium, by providing a separate mechanism at the location closer to an atmospheric pressure side than magnetic fluid sealing sections sealing a fixed section and a rotary section. CONSTITUTION:A fixed section 16 is provided around a rotary cylinder section 15 having a liquid helium feed path 15a, a helium gas exhaust path 15b, and helium gas exhaust holes 20 to arrange bearings 17, and a helium gas exhaust side flow paths 22 is formed by providing magnetic fluid sealing sections 18 as well. Furthermore, a separate sealing mechanism 27 is provided at the location closer to an atmospheric pressure side than the magnetic fluid sealing sections 18, and vacuum sealing valves 34 are provided at a helium feed pipe 9 and a helium exhaust pipe 10 as well. When the air in the helium paths are replaced with helium prior to the operation, vacuum extraction is applied to the inside air, and then the air is replaced with the helium by supplying the helium.
摘要翻译：目的：为了在用氦转子更换氦气流路中的空气时，通过在比固定部分和旋转部分密封的磁性流体密封部分更靠近大气压力侧的位置提供分离的机构，允许真空抽吸方法。构成：在具有液氦供给路径15a，氦气排气路径15b和氦气排气孔20的旋转筒部15的周围设置固定部16，配置轴承17，氦气排气侧流路22为通过提供磁性流体密封部18也形成。此外，在比磁性流体密封部分18更靠近大气压侧的位置处设置单独的密封机构27，并且在氦气输送管9和氦排气管10处设置真空密封阀34。当操作之前氦气路径中的空气被氦替代时，真空抽吸被施加到内部空气中，然后通过供应氦将空气替换为氦气。

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