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    • 115. 发明专利
    • Method for manufacturing monolithic array of vertical cavity optical device
    • 用于制造垂直孔光学装置的单片阵列的方法
    • JP2003332686A
    • 2003-11-21
    • JP2003126147
    • 2003-05-01
    • Agilent Technol Incアジレント・テクノロジーズ・インク
    • LESTER STEVEN DROBBINS VIRGINIA MMILLER JEFFREY N
    • H01S5/183H01S5/026H01S5/10H01S5/40H01S5/42
    • H01S5/423H01S5/18341H01S5/18358H01S5/18366H01S5/18369H01S5/4087
    • PROBLEM TO BE SOLVED: To obtain a different wavelength by providing a wafer having vertical resonance cavities of different heights.
      SOLUTION: A monolithic array of a vertical cavity laser has different radiation wavelengths on a single wafer. On a photoactive semiconductor structure (66), a first sacrifice island (70) having a first structure and a second sacrifice island (71) having a second structure different from the first structure are formed of sacrifice layers. First and second air gaps (84) and (85) are then formed by removing the first and second sacrifice islands (70) and (71). A first optical device is formed of a first reflector (64), the photoactive semiconductor structure (66), the first air gap (84) and a second reflector (80), and a second device is formed of the first reflector (64), the photoactive semiconductor structure (66), the second air gap (85) and a third reflector (81).
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:通过提供具有不同高度的垂直共振腔的晶片来获得不同的波长。 解决方案:垂直腔激光器的单片阵列在单个晶片上具有不同的辐射波长。 在光活性半导体结构(66)上,具有第一结构的第一牺牲岛(70)和具有与第一结构不同的第二结构的第二牺牲岛(71)由牺牲层形成。 然后通过去除第一和第二牺牲岛(70)和(71)形成第一和第二气隙(84)和(85)。 第一光学装置由第一反射器(64),光活性半导体结构(66),第一气隙(84)和第二反射器(80)形成,第二装置由第一反射器(64)形成, ,光活性半导体结构(66),第二气隙(85)和第三反射器(81)。 版权所有(C)2004,JPO