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    • 94. 发明专利
    • Magnetic recording element, its manufacturing method, and magnetic memory
    • 磁记录元件,其制造方法和磁记忆
    • JP2009094244A
    • 2009-04-30
    • JP2007262575
    • 2007-10-05
    • Toshiba Corp株式会社東芝
    • OSAWA YUICHINAKAMURA SHIHOMORISE HIROSHIYANAGI SATOSHISAIDA DAISUKE
    • H01L43/08H01L21/8246H01L27/105H01L43/12
    • G11C11/1675G11C11/161G11C11/1659Y10T428/11Y10T428/1121Y10T428/1143Y10T428/115
    • PROBLEM TO BE SOLVED: To provide a magnetic recording element easily manufacturable, and excelling in operational stability, and also to provide its manufacturing method, and a magnetic memory. SOLUTION: This magnetic recording element 10 is provided with: a layered body S having a first magnetic layer whose magnetization is substantially fixed in a first direction nearly perpendicular to a film surface, a second magnetic layer whose magnetization is fixed in a second direction nearly perpendicular to the film surface and opposite to the first direction, a third magnetic layer formed between the first and second magnetic layers, and whose magnetization direction is variable, a first intermediate layer B1 formed between the first and third magnetic layers, and a second intermediate layer B2 formed between the second and third magnetic layers; and a pair of electrodes 5 carrying a current in a direction nearly perpendicular to the film surface of the layered product. The magnetic recording element 10 is characterized in that the cross-sectional area in a direction parallel to the film surface at a thickness midpoint of the first magnetic layer is larger than that of the second magnetic layer. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供易于制造和优异的操作稳定性的磁记录元件,以及提供其制造方法和磁存储器。 解决方案:该磁记录元件10设置有:具有第一磁性层的层叠体S,第一磁性层的磁化基本上固定在与膜表面几乎垂直的第一方向上,第二磁性层的磁化固定在第二磁性层 近似垂直于膜表面并与第一方向相反的方向的第一中间层B1,形成在第一和第二磁性层之间并且其磁化方向可变的第三磁性层,形成在第一和第三磁性层之间的第一中间层B1和 形成在第二和第三磁性层之间的第二中间层B2; 以及一对电极5,其沿着与层叠体的膜表面大致垂直的方向承载电流。 磁记录元件10的特征在于,在第一磁性层的厚度中点处平行于膜表面的方向上的横截面积大于第二磁性层的横截面积。 版权所有(C)2009,JPO&INPIT
    • 97. 发明专利
    • Cpp type giant magnetoresistance head
    • CPP型巨型磁阻头
    • JP2005044489A
    • 2005-02-17
    • JP2004047756
    • 2004-02-24
    • Alps Electric Co Ltdアルプス電気株式会社
    • NISHIYAMA YOSHIHIROSAITO MASAJIHASEGAWA NAOYAHAYAKAWA YASUOUMETSU EIJIIDE YOSUKE
    • G11B5/39H01L43/08H01L43/10
    • B82Y25/00B82Y10/00G01R33/093G11B5/3929G11B2005/3996H01F10/3218H01F10/3263H01F10/3272Y10T428/1121Y10T428/1143Y10T428/1171Y10T428/1193
    • PROBLEM TO BE SOLVED: To obtain a CPP (Current Perpendicular to the Plane) type giant magnetoresistance head, with which a high output is obtained by firmly fixing the magnetization of a fixed magnetic layer while reducing joule heat. SOLUTION: This CPP type giant magnetoresistive head includes lower and upper shield layers and a giant magnetoresistance element having pinned and free magnetic layers disposed between the upper and lower shield layers through a non-magnetic layer. A current flows perpendicularly to the film plane of the giant magnetoresistance element. An anti-ferromagnetic layer is provided in the rear of the giant magnetoresistance element in the height direction to make contact with the upper or lower surface of a rear portion of the pinned magnetic layer extending in the height direction, and an exchange coupling magnetic field is produced at the interface with the upper or lower surface, so that the magnetization direction of the pinned magnetic layer is pinned by this exchange coupling magnetic field. For the anti-ferromagnetic layer, an insulating anti-ferromagnetic layer formed of NiO or α-Fe 2 O 3 is used . COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了获得CPP(垂直于平面的电流)型巨磁电阻头,通过在减少焦耳热的同时牢固地固定固定磁性层的磁化来获得高输出。 解决方案:该CPP型巨磁阻头包括下屏蔽层和上屏蔽层,以及具有通过非磁性层设置在上屏蔽层和下屏蔽层之间的固定和自由磁性层的巨磁阻元件。 A电流垂直于巨磁阻元件的薄膜平面流动。 在巨磁阻元件的高度方向的后方设有反铁磁层,以与高度方向延伸的被钉扎磁性层的后部的上表面或下表面接触,交换耦合磁场为 在与上表面或下表面的界面处产生,使得被钉扎的磁性层的磁化方向被该交换耦合磁场固定。 对于反铁磁层,使用由NiO或α-Fe O 3 形成的绝缘反铁磁层。 版权所有(C)2005,JPO&NCIPI
    • 99. 发明专利
    • Manufacture of magnetic reluctance element
    • 磁性元件的制造
    • JPH11274600A
    • 1999-10-08
    • JP7184498
    • 1998-03-20
    • Fujitsu Ltd富士通株式会社
    • MIKAMI MASAAKIITO TAKASHIORIMOTO TAKAMITSUOKADA MITSUMASA
    • G11B5/39G01R33/09G11B5/31H01L43/08H01L43/12
    • B82Y25/00G01R33/093G11B5/3116G11B5/3903G11B5/3932H01L43/12Y10T29/49021Y10T29/49032Y10T29/49046Y10T29/49048Y10T428/1143
    • PROBLEM TO BE SOLVED: To obtain a highly reliable magnetic reluctance element which is excellent in magnetic reluctance characteristics with good yield. SOLUTION: In a manufacturing method of a magnetic reluctance element by forming a first magnetic film 12, a non-magnetic film 14 and a second magnetic film 16 on an insulation film 10 one by one, providing a shielding resist 20 forming an element main body part on the second magnetic film 16, etching a side surface of the first magnetic film 12, the non-magnetic film 14 and the second magnetic film 16 to a tilting surface on the insulation film 10 by ion milling from the side of the second magnetic film 16, applying and forming a terminal 18 from on the insulation film 10 to the tilting surface and obtaining a magnetic reluctance element by removing the resist 20, the first magnetic film 12 is left and etched on the insulation film 10 in an outside region of the tilting surface when the first magnetic film 12, the non-magnetic film 14 and the second magnetic film 16 are subjected to ion milling.
    • 要解决的问题:获得具有优异磁阻特性的高可靠性磁阻元件,具有良好的收率。 解决方案:在通过在绝缘膜10上逐个形成第一磁性膜12,非磁性膜14和第二磁性膜16的磁阻元件的制造方法中,提供形成元件主体的屏蔽抗蚀剂20 部分在第二磁性膜16上,通过从第二磁性膜16的侧面离子研磨将第一磁性膜12,非磁性膜14和第二磁性膜16的侧表面蚀刻到绝缘膜10上的倾斜表面 膜16,将绝缘膜10上的端子18施加到倾斜表面,并且通过去除抗蚀剂20获得磁阻元件,第一磁性膜12在绝缘膜10的外部区域中留下并蚀刻 当第一磁性膜12,非磁性膜14和第二磁性膜16进行离子铣削时的倾斜表面。