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1. 发明专利

JP5189784B2 Plasma generation device in the peripheral plasma gun to the electrical neutrality 有权
公开(公告)号：JP5189784B2
公开(公告)日：2013-04-24
申请号：JP2007093356
申请日：2007-03-30
申请人：株式会社フェローテック
发明人：祐一椎名
IPC分类号： C23C14/24 , C23C14/00 , H05H1/32
CPC分类号： H01J37/32633 , H01J37/147 , H01J37/3178 , H01J37/32055 , H01J2237/022 , H01J2237/05 , H01J2237/3142 , H05H1/48

2. 发明专利

JP3364830B2 Ion beam processing apparatus 失效
公开(公告)号：JP3364830B2
公开(公告)日：2003-01-08
申请号：JP16027198
申请日：1998-06-09
申请人：株式会社日立製作所
发明人：鉦太郎大石 , 聰小倉 , 智市村 , 橋本　　勲
IPC分类号： H05H1/46 , B23K15/00 , C23F4/00 , H01J27/18 , H01J37/08 , H01L21/302 , H01L21/3065
CPC分类号： H01J37/08 , H01J27/18 , H01J2237/0041 , H01J2237/0817 , H01J2237/3142

3. 发明专利

JP4405027B2 Cold cathode element 有权
公开(公告)号：JP4405027B2
公开(公告)日：2010-01-27
申请号：JP2000060443
申请日：2000-03-01
申请人：本田技研工業株式会社
发明人：孝岩佐 , 順三石川
IPC分类号： C23C14/06 , H01J1/304 , C23C14/32 , H01J1/30 , H01J1/316 , H01J9/02
CPC分类号： H01J1/316 , H01J9/027 , H01J2237/3142

4. 发明专利

JP2008248347A Plasma generator in which the circumference of plasma gun is made electrically neutral 有权
标题翻译：等离子体枪的电子等离子体发生器电中性
公开(公告)号：JP2008248347A
公开(公告)日：2008-10-16
申请号：JP2007093356
申请日：2007-03-30
申请人： Ferrotec Corp , 株式会社フェローテック
发明人： SHIINA YUICHI
IPC分类号： C23C14/32 , C23C14/00 , H05H1/48
CPC分类号： H01J37/32633 , H01J37/147 , H01J37/3178 , H01J37/32055 , H01J2237/022 , H01J2237/05 , H01J2237/3142 , H05H1/48
摘要： PROBLEM TO BE SOLVED: To provide a plasma generator where, in a plasma gun, without reducing the effective amount of plasma generated by vacuum arc discharge, droplets intruding into the plasma can be efficiently removed, further, droplet removal parts can be easily and inexpensively composed, and the improvement in the precision of surface treatment such as film deposition by high purity plasma can be attained. SOLUTION: In the plasma generator, the circumference of a plasma gun cathode 407 is surrounded by an enclosure member 420, and the inside of the enclosure member 420 is provided with a droplet removal apparatus 406 composed of a plurality of collecting members 411 collecting droplets, so as to be a multilayer shape. The enclosure member 420, the collecting members 411 and a plasma progression path 402 have no connected relation with an arc source 409, and are held to an electrically neutral floating state. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供等离子体发生器，其中在等离子体枪中，在不减少由真空电弧放电产生的等离子体的有效量的情况下，可以有效地去除入射到等离子体中的液滴，此外，液滴去除部分可以容易且廉价地组成，并且可以获得表面处理的精度的提高，例如通过高纯度等离子体的膜沉积。解决方案：在等离子体发生器中，等离子体枪阴极407的圆周被外壳构件420包围，并且外壳构件420的内部设置有由多个收集构件411组成的液滴去除装置406 收集液滴，以便成为多层形状。封闭构件420，收集构件411和等离子体前进路径402与电弧源409没有连接关系，并且保持在电中性浮动状态。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2008134103A Standard member for calibration, its manufacturing method and scanning electron microscope using standard member for calibration 有权
标题翻译：用于校准的标准会员，其制造方法和使用标准会员进行校准的扫描电子显微镜
公开(公告)号：JP2008134103A
公开(公告)日：2008-06-12
申请号：JP2006319191
申请日：2006-11-27
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： NAKAYAMA YOSHINORI , HAYATA YASUNARI , HITOMI KEIICHIRO , KOYANAGI HAJIME
IPC分类号： G01N1/28 , H01J37/20
CPC分类号： H01J37/28 , H01J37/244 , H01J37/263 , H01J2237/24578 , H01J2237/2816 , H01J2237/2823 , H01J2237/2826 , H01J2237/30433 , H01J2237/3142 , H01J2237/31732
摘要： PROBLEM TO BE SOLVED: To provide a standard member for calibration for performing the calibration of magnification used in a scanning electron microscope with high precision, and a scanning electron-microscopic technique using it.
SOLUTION: The standard member for calibration is constituted so as to calculate the scanning electron microscope, which measures the pattern in the observation region on a measuring sample, from the data of the intensity of a secondary electron or reflected electron produced by scanning the observation region by an incident electron beam and has the first substrate keeping multilayered films (1 and 2) overlying and a second substrate (3) having a recess for holding the first substrate on its surface. The first substrate is held in the recess of the second substrate so that the normal line direction of the surfaces of the multilayered films becomes almost perpendicular to that of the surface of the second substrate and the multilayered films have a multilayered structure of a silicon-containing film (1) and a molybdenum-containing film (2).
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供用于校准的标准构件，用于以高精度进行扫描电子显微镜中使用的倍率的校准，以及使用它的扫描电子显微技术。
解决方案：用于校准的标准构件构成为计算扫描电子显微镜，其根据由扫描产生的二次电子或反射电子的强度的数据来测量测量样品上的观察区域中的图案所述观察区域由入射电子束构成，并且具有保持多层膜（1和2）的第一衬底和具有用于将第一衬底保持在其表面上的凹部的第二衬底（3）。第一基板保持在第二基板的凹部中，使得多层膜的表面的法线方向几乎垂直于第二基板的表面的方向，并且多层膜具有含硅的多层结构膜（1）和含钼膜（2）。版权所有（C）2008，JPO＆INPIT

9. 发明专利

KR20210025981A KR20210025981A - Magnetic flux induction device for metal target with adjustable magnetic flux density and ion plating device using it 审中-公开
公开(公告)号：KR20210025981A
公开(公告)日：2021-03-10
申请号：KR1020190106112A
申请日：2019-08-28
申请人： 주식회사 탑테크이십일
发明人： 문창성
IPC分类号： C23C14/32 , H01J37/32
CPC分类号： C23C14/32 , H01J37/3266 , H01J2237/3142
摘要： 본 발명은 자속 세기의 조절이 가능한 금속타겟용 자속 유도구 및 이를 이용한 이온 플레이팅 장치에 관한 것이다.
본 발명의 자속 세기의 조절이 가능한 금속타겟용 자속 유도구는 진공 상태의 챔버 내측면에 마련되는 금속타겟의 일면에 결합되는 판 형상의 고정플레이트; 상기 고정플레이트의 후면에 고정되어 있으며 내부에는 외부의 전원공급원에 연결된 전선을 통해 전류가 인가되면 자장이 형성되도록 사각 링 형태를 가지면서 권선되어 있는 제1 자속유도선과, 사각 링 형태를 가지며 상기 제1 자속유도선의 내측에 위치되는 제2 자속유도선으로 이루어진 자속유도선; 및 상기 챔버의 외부에 배치되고 상기 전선에 연결되어 상기 제1,2 자속유도선에 인가되는 전류량을 조절하여 상기 제1,2 자속유도선의 자속 세기를 조절하는 제어부;를 포함하는 것을 특징으로 한다. 따라서, 제1,2 자속유도선에 의하여 금속타겟에 자속이 균일하게 유도되어 아크 방전시 금속타겟의 표면이 전체적으로 균일하게 증발될 수 있고, 코팅할 대상의 종류에 따라 제어부를 통해 자속 세기를 조절하여 금속타켓의 소모율을 감소시킬 수 있어, 금속타겟의 사용효율을 증가시켜 원가를 절감할 수 있다.

10. 发明专利

JP2011003457A Charged particle separation apparatus and charged particle irradiation apparatus 审中-公开
标题翻译：充电颗粒分离装置和充电颗粒辐照装置
公开(公告)号：JP2011003457A
公开(公告)日：2011-01-06
申请号：JP2009146765
申请日：2009-06-19
申请人： Hyogo Prefecture , Tokyo Electron Ltd , 兵庫県 , 東京エレクトロン株式会社
发明人： NARISHIMA MASAKI , MORI KOICHI , YAMADA AKIRA , TOYODA KISHO
IPC分类号： H01J37/05 , B01D53/32 , H01J37/147 , H01J37/305 , H01J37/317
CPC分类号： H01J49/421 , H01J27/026 , H01J37/147 , H01J2237/3142 , H01J2237/3151 , H01J2237/31701
摘要： PROBLEM TO BE SOLVED: To provide a charged particle separation apparatus that separates ionized gas clusters by ionization valences.SOLUTION: A charged sorting separation apparatus that separates ionized gas clusters includes three or more electric field applying sections for applying an electric field arranged in an incident direction of an ionized gas cluster, and a slit for separating the gas clusters. The electric field applying section includes two electrodes and deflects the ionized gas cluster by applying AC voltage to the electrode, wherein in the adjacent electric field applying sections, an AC voltages with different phases are applied. The slit has an opening on the extended line of the direction made incident, and thereby the object is attained.
摘要翻译：要解决的问题：提供一种通过电离化合价分离电离气体团的带电粒子分离装置。解决方案：分离电离气体团的带电分选分离装置包括三个或更多个用于施加布置在事件中的电场的电场施加部分离子化气体簇的方向，以及用于分离气体团的狭缝。电场施加部分包括两个电极，并通过向电极施加AC电压使电离气体簇发生偏转，其中在相邻的电场施加部分中施加具有不同相位的AC电压。狭缝在入射方向的延长线上具有开口，从而达到目的。

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