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1. 发明专利

JP5560809B2 Mems structure 有权
公开(公告)号：JP5560809B2
公开(公告)日：2014-07-30
申请号：JP2010065710
申请日：2010-03-23
申请人：株式会社豊田中央研究所
发明人：良幸畑 , 裕野々村 , 基弘藤吉 , 博文船橋 , 照久明石 , 義輝大村
IPC分类号： G01P15/125 , B81B3/00 , G01P15/18 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a MEMS structure which maintains a relative position relationship between a movable electrode and a fixed electrode even if a warp occurs on a supporting substrate.SOLUTION: An acceleration sensor 10 includes a supporting substrate 21, a displacement member 41, a movable electrode 51, a fixed electrode 52, a first beam 42, a first fixed part 43, a second beam 53, a second fixed part 54. The fixed electrode 52 is supported by the supporting substrate 21 via the second beam 53. The distance between the first fixed part 43 and the second fixed part 54 is shorter than the distance between the first fixed part 43 and the fixed electrode 52.

2. 发明专利

JPWO2011045929A1 センサ装置およびセンサ装置の製造方法有权
公开(公告)号：JPWO2011045929A1
公开(公告)日：2013-03-04
申请号：JP2011536040
申请日：2010-10-13
申请人：国立大学法人東北大学 , 株式会社豊田中央研究所 , トヨタ自動車株式会社
发明人：田中　秀治 , 秀治田中 , 江刺　正喜 , 正喜江刺 , 真徳室山 , 真徳室山 , 栄松崎 , 栄松崎 , 光俊巻幡 , 光俊巻幡 , 裕野々村 , 裕野々村 , 基弘藤吉 , 基弘藤吉 , 貴裕中山 , 貴裕中山 , 山口　宇唯 , 宇唯山口 , 整山田 , 整山田
IPC分类号： G01L5/00 , B81B7/02 , B81C3/00 , G01K7/34 , G01L1/14 , H01L23/04 , H01L29/84
摘要：接触センシング面を有するセンサ構造部300とそのセンサ信号を処理する信号処理LSI部420とをパッケージ化する技術を提供する。センサ構造部300は、接触センシング面とセンサ電極320、330とを有する。半導体基板400には、信号処理用集積回路420が作りこまれている。接着層500によってセンサ構造部300と半導体基板400とが接合され、センサ装置200がワンチップ化されている。センサ電極320、330と集積回路420とはセンサ装置200の内側に封止されており、センサ電極320、330および集積回路420の外部端子は半導体基板400の側面を経由して半導体基板400の裏面に引き出されている。

3. 发明专利

JP4853530B2 Micro device having a movable part 有权
公开(公告)号：JP4853530B2
公开(公告)日：2012-01-11
申请号：JP2009046414
申请日：2009-02-27
申请人：株式会社豊田中央研究所
发明人：照久明石 , 博文船橋 , 基弘藤吉 , 裕野々村
IPC分类号： H01L29/84 , B81B3/00 , B81C1/00 , G01C19/56 , G01P15/125
CPC分类号： B81B3/001 , B81B2201/025 , G01P15/125 , G01P15/18
摘要： The micro device includes a support substrate, and a movable structure configured to move with respect to the support substrate. At least one of the support substrate and the movable structure is provided with at least one protrusion protruding towards the other of the support substrate and the movable structure. Further, a base portion extending into the one of the support substrate and the movable structure is provided integrally with the at least one protrusion. With this configuration, the protrusion is securely held by the base portion, and the detachment of the protrusion can therefore be prevented even after repeated collisions between the support substrate and the movable structure via the protrusion.

4. 发明专利

JP4491906B2 Pressure sensor 有权
公开(公告)号：JP4491906B2
公开(公告)日：2010-06-30
申请号：JP2000123893
申请日：2000-04-25
申请人：株式会社豊田中央研究所
发明人：厚志塚田 , 早苗徳光 , 健太朗水野 , 裕野々村
IPC分类号： G01L19/06 , G01L9/00 , G01L9/04

5. 发明专利

JP6119222B2 ＭＥＭＳ装置有权
公开(公告)号：JP6119222B2
公开(公告)日：2017-04-26
申请号：JP2012268320
申请日：2012-12-07
申请人：株式会社豊田中央研究所
发明人：勲青柳 , 勲青柳 , 村田　香苗 , 香苗村田 , 裕野々村 , 裕野々村 , 明石　照久 , 照久明石
IPC分类号： B81B3/00 , G02B26/08

6. 发明专利

JP5418355B2 An angular velocity sensor 有权
公开(公告)号：JP5418355B2
公开(公告)日：2014-02-19
申请号：JP2010070932
申请日：2010-03-25
申请人：株式会社豊田中央研究所
发明人：基弘藤吉 , 裕野々村 , 照久明石 , 義輝大村 , 博文船橋 , 良幸畑
IPC分类号： G01C19/5733 , G01C19/5755
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity sensor, capable of suppressing a leakage vibration in the same direction as that of a Coriolis force, which occurs during an excitation of a spindle, and capable of accurately detecting displacements of the spindle caused by the Coriolis force.SOLUTION: An x-vibrator composed of an x-spindle 24 and an x-displacement detection beam 20 and a z-vibrator composed of a z-spindle 22 and a z-displacement detection beam 18, are supported by a plate 16, and the plate 16 is supported by an excitation beam 12. The excitation beam 12 is vibrated in y-axis direction by an excitation of an excitation electrode 26. The leakage vibration which can occur during the excitation can be suppressed by separating a beam for excitation and a beam for detection. Coriolis force exerted on the x-vibrator and the z-vibrator can accurately be measured by getting the leakage vibration suppressed.

7. 发明专利

JP5328924B2 Method of manufacturing a sensor device and a sensor device 有权
公开(公告)号：JP5328924B2
公开(公告)日：2013-10-30
申请号：JP2011536040
申请日：2010-10-13
申请人：国立大学法人東北大学 , 株式会社豊田中央研究所 , トヨタ自動車株式会社
发明人：秀治田中 , 正喜江刺 , 真徳室山 , 栄松崎 , 光俊巻幡 , 裕野々村 , 基弘藤吉 , 貴裕中山 , 宇唯山口 , 整山田
IPC分类号： G01L5/00 , B81B7/02 , B81C3/00 , G01K7/34 , G01L1/14 , H01L23/04 , H01L29/84

8. 发明专利

JP5206709B2 Apparatus comprising a movable member 有权
公开(公告)号：JP5206709B2
公开(公告)日：2013-06-12
申请号：JP2010043880
申请日：2010-03-01
申请人：株式会社豊田中央研究所
发明人：照久明石 , 裕野々村 , 基弘藤吉 , 博文船橋
IPC分类号： G01C19/5733
CPC分类号： G01C19/5719 , G01P2015/082
摘要： An apparatus with a second movable portion that moves along an x-axis direction and a z-axis direction and a first movable portion that only moves along the z-axis direction is disclosed. The apparatus is provided with a fixed portion fixed to a support portion, a plurality of first spring portions connected to the fixed portion, a first movable portion connected to the plurality of first spring portions, a second spring portion connected to the first movable portion, and a second movable portion connected to the second spring portion. A spring constant of each of the plurality of first spring portions in the z-axis direction is lower than spring constants of each of the plurality of first spring portions in the x-axis and a y-axis directions respectively, and a spring constant of the second spring portion in the x-axis direction is lower than spring constants of the second spring portion in the y-axis and the z-axis directions respectively. The first movable portion is configured to move along the z-axis but not to move along the x-axis and the y-axis nor to rotate around the z-axis, and the second movable portion is configured to move along the x-axis and the z-axis with respect to the support portion.

9. 发明专利

JP4905574B2 Laminated structure comprises a movable portion 有权
公开(公告)号：JP4905574B2
公开(公告)日：2012-03-28
申请号：JP2010070077
申请日：2010-03-25
申请人：株式会社豊田中央研究所
发明人：義輝大村 , 照久明石 , 良幸畑 , 博文船橋 , 基弘藤吉 , 裕野々村
IPC分类号： G01C19/5762 , G01P15/125
CPC分类号： G01C19/574 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A structure having a first movable portion displaced perpendicular to a substrate surface and a second movable portion displaced parallel to the substrate surface is realized by a laminated structure employing a nested structure for the first portion and the second portion. The laminated structure is provided with inner and outer movable portions. A y spring is connected to the outer portion, and the outer portion is supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner portion, and the inner portion is supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer portion at a height apart from the outer movable portion.

10. 发明专利

JP4751931B2 Fiber optic gyro of the abnormality detection device 有权
公开(公告)号：JP4751931B2
公开(公告)日：2011-08-17
申请号：JP2008524612
申请日：2006-08-01
申请人：トヨタ自動車株式会社 , 株式会社豊田中央研究所
发明人：久義杉原 , 基弘藤吉 , 裕野々村
IPC分类号： G01C19/72
CPC分类号： G01C19/721

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