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    • 3. 发明公开
    • SIGNAL DETECTION DEVICE, MEASUREMENT DEVICE, AND MASS SPECTROMETER
    • EP4372784A1
    • 2024-05-22
    • EP22841881.0
    • 2022-06-20
    • HITACHI HIGH-TECH CORPORATION
    • NISHIMOTO, TakumaFURUYA, IsaoKONDO, Suguru
    • H01J49/02H01J49/26
    • H01J49/02H01J49/26
    • In order to reduce an influence of disturbance propagation noise inside and outside a signal detection device and improve signal detection accuracy, the present disclosure provides a signal detection device including: detection equipment including a photoelectric conversion element configured to convert a photon as a detection target into a current signal, and a current-voltage converter configured to convert the current signal into a voltage signal; a transmission unit configured to transmit the voltage signal; and a data collection unit configured to detect and collect the transmitted voltage signal. Here, the detection equipment is disposed inside a first shield case connected to a frame ground. The current-voltage converter includes a differential amplifier having first and second input terminals, the first input terminal is connected to a first output terminal of the photoelectric conversion element via a first input resistor, the second input terminal is connected to a second output terminal of the photoelectric conversion element and a ground via a second input resistor having a resistance value larger than that of the first input resistor. First and second output terminals of the current-voltage converter are connected to the data collection unit by a cable transmission unit. The cable transmission unit is connected to the ground together with the current-voltage converter and the data collection unit (see FIG. 1).