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    • 4. 发明授权
    • Analyser arrangement for particle spectrometer
    • AnalilatoranordnungfürTeilchenspektrometer
    • EP2851933B1
    • 2016-10-19
    • EP14185601.3
    • 2012-03-06
    • Scienta Omicron AB
    • Wannberg, Björn
    • H01J49/06H01J37/05H01J49/48G01N23/227
    • H01J49/48G01N23/2273G01N2223/085H01J37/05H01J49/0031H01J49/06H01J49/061H01J49/484H01J2237/0535
    • The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample (11), e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system (13), and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance (8) of the measurement region (3) can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample (11). This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.
    • 本发明涉及一种用于确定与从粒子发射样品(11)发射的带电粒子有关的至少一个参数的方法,例如, 与能量,起始方向,起始位置或颗粒的旋转相关的参数。 该方法包括以下步骤:通过透镜系统(13)将带电粒子束引导到测量区域的入口,以及在测量区域内检测指示所述至少一个参数的粒子的位置。 此外,该方法包括以下步骤:在粒子束进入测量区域之前,在相同的坐标方向上将粒子束偏转至少两次。 因此,能够以在某种程度上不需要对样品(11)的物理操作的方式来控制测量区域(3)的入口(8)处的粒子束的位置和方向。 这又允许样品被有效地冷却,使得能量测量中的能量分辨率可以得到改善。