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1. 发明公开

EP1698878A1 Electrode configuration and pressure measuring apparatus 审中-公开
标题翻译： Elektrodenanordnung und Druckmessvorrichtung
公开(公告)号：EP1698878A1
公开(公告)日：2006-09-06
申请号：EP05004855.2
申请日：2005-03-04
申请人： Inficon GmbH
发明人： Knapp, Wolfram , Wüest, Martin
IPC分类号： G01L21/30 , G01L21/32 , G01L21/34 , H01J1/30 , H01J1/304 , H01J41/00 , H01J41/02 , H01J41/04 , H01J41/06 , H01J41/08 , H01J41/10 , H01J19/00 , H01J19/02 , H01J19/04 , H01J19/10 , H01J19/24 , H01J19/14 , H01J19/68 , H01J41/14 , H01J41/16
CPC分类号： G01L21/32 , G01L21/12 , H01J1/3042 , H01J41/04
摘要： An electron-emitting cathode (6) consists of an electricaly conducting emitter layer (7) attached to a side wall (2) and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (I IC ) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (Vc) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (V A ) and is regulated in such a way that an anode current (T A ) is kept constant. The emitter layer (7) may comprise an array of metal, e.g., nickel or molybdenum tips or consist essentially of a semiconductor material like silicon, preferably coated by, e.g., carbide, diamond-like carbon or molybdenum, or of carbon nanotubes or it may be a roughened surface portion of the side wall surface. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.
摘要翻译：电子发射阴极（6）由连接到侧壁（2）的电气传导发射极层（7）和在发射极层（7）的凹面发射器表面内的商场距离处固定的栅极（9）组成）。阴极（6）围绕包含圆柱形栅状阳极（5）的反应区域（3）和由直轴向丝线组成的中心离子收集器（4）。通过电流计（11）测量反映反应区域（3）中气体密度的离子集电极电流（I IC），同时在栅极电压（Vc）保持在发射极层（7）的接地电压之间，和较高的阳极电压（VA），并且以使得阳极电流（TA）保持恒定的方式被调节。发射极层（7）可以包括金属阵列，例如镍或钼尖端，或者基本上由诸如硅的半导体材料组成，优选地由碳化物，类金刚石碳或钼或碳纳米管或碳纳米管涂覆可以是侧壁表面的粗糙表面部分。栅极（9）可以是栅格，或者它可以由分布在发射区上的金属膜覆盖隔离物的贴片或覆盖放置在发射器表面上的电子渗透层的金属膜构成。

2. 发明授权

EP0469631B1 Ion pump and vacuum pumping unit using the same 失效
标题翻译：离子泵和真空泵系统
公开(公告)号：EP0469631B1
公开(公告)日：1996-07-17
申请号：EP91113057.3
申请日：1991-08-02
申请人： EBARA CORPORATION
发明人： Nagai, Kazutoshi
IPC分类号： H01J41/14
CPC分类号： H01J41/14

3. 发明公开

EP0499239A2 Ion pump and vacuum pumping unit using the same 失效
标题翻译： Ionenpumpe和Vakuumpumpanlagedafür。
公开(公告)号：EP0499239A2
公开(公告)日：1992-08-19
申请号：EP92102346.1
申请日：1992-02-12
申请人： EBARA CORPORATION
发明人： Nagai, Kazutoshi , Satake, Tohru , Hayashi, Hideaki , Yasui, Takanari
IPC分类号： H01J41/14
CPC分类号： H01J41/18 , H01J41/14
摘要： An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
摘要翻译：公开了一种包括这种高真空装置（50）和辅助真空泵（31）的排气装置和高真空泵送单元，其中在真空容器中实现高真空，使真空容器内的气体分子被离子化，加速耗尽，此外，在高真空泵送单元中，从真空泵吸收或解吸的那些气体分子被离子化并加速回到真空泵。

4. 发明公开

EP1756849A2 SYSTEM AND METHOD FOR SENSING USING ADJUSTABLE MODULATION TRANSFER FUNCTION (MTF) 失效
标题翻译：法测量一个可调调制传递函数的系统和方法（MTF）
公开(公告)号：EP1756849A2
公开(公告)日：2007-02-28
申请号：EP05753269.9
申请日：2005-05-19
申请人： KLA-Tencor Technologies Corporation
发明人： CHUANG, Yung-Ho , ARMSTRONG, Joseph, J. , BROWN, David, Lee , TSAI, Bin-Ming, Benjamin
IPC分类号： H01J5/02 , H01J41/14
CPC分类号： H01L27/14625 , H04N5/3559 , H04N5/357
摘要： A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as abasing and maintaining contrast.

5. 发明授权

EP0499239B1 Ion pump and vacuum pumping unit using the same 失效
标题翻译：离子泵和真空泵系统
公开(公告)号：EP0499239B1
公开(公告)日：1999-07-07
申请号：EP92102346.1
申请日：1992-02-12
申请人： EBARA CORPORATION
发明人： Nagai, Kazutoshi , Satake, Tohru , Hayashi, Hideaki , Yasui, Takanari
IPC分类号： H01J41/14
CPC分类号： H01J41/18 , H01J41/14

6. 发明公开

EP0499239A3 Ion pump and vacuum pumping unit using the same 失效
标题翻译：离子泵和真空泵浦单元使用它
公开(公告)号：EP0499239A3
公开(公告)日：1993-03-03
申请号：EP92102346.1
申请日：1992-02-12
申请人： EBARA CORPORATION
发明人： Nagai, Kazutoshi , Satake, Tohru , Hayashi, Hideaki , Yasui, Takanari
IPC分类号： H01J41/14
CPC分类号： H01J41/18 , H01J41/14
摘要： An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

7. 发明公开

EP4172501A1 VACUUM CELL WITH ELECTRIC-FIELD CONTROL 审中-实审
公开(公告)号：EP4172501A1
公开(公告)日：2023-05-03
申请号：EP21829087.2
申请日：2021-06-22
申请人： Coldquanta, Inc.
发明人： SAFFMAN, Mark , NOEL, Thomas, William , HUGHES, Steven, Michael
IPC分类号： F04B37/14 , H01J41/12 , H01J41/14 , H01J41/16 , H01J41/18

8. 发明公开

EP1756849A4 SYSTEM AND METHOD FOR SENSING USING ADJUSTABLE MODULATION TRANSFER FUNCTION (MTF) 失效
标题翻译：法测量一个可调调制传递函数的系统和方法（MTF）
公开(公告)号：EP1756849A4
公开(公告)日：2008-12-24
申请号：EP05753269
申请日：2005-05-19
申请人： KLA TENCOR TECH CORP
发明人： CHUANG YUNG-HO , ARMSTRONG JOSEPH J , BROWN DAVID LEE , TSAI BIN-MING BENJAMIN
IPC分类号： H01J5/02 , H01J40/14 , H01J41/14 , H01L27/146
CPC分类号： H01L27/14625 , H04N5/3559 , H04N5/357
摘要： A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as abasing and maintaining contrast.

9. 发明公开

EP1095217A4 PLASMA VACUUM PUMPING CELL 审中-公开
标题翻译：真空泵等离子
公开(公告)号：EP1095217A4
公开(公告)日：2006-08-02
申请号：EP99930173
申请日：1999-06-29
申请人： TOKYO ELECTRON LTD
发明人： DANDL RAPHAEL A , GUEST GARETH , JOHNSON WAYNE L
IPC分类号： F04B37/14 , F04B17/00 , H01J37/32 , H01J41/12 , H01J41/14 , H01J41/18 , H05H1/54
CPC分类号： H01J37/32834 , F04B17/00 , F04B37/14 , H01J37/3266 , H01J41/14 , H05H1/54
摘要： A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member (4) positioned between the first and second regions, the partition member (4) having a through opening defining a conduit (22); a plurality of magnets (24) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source (34) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit (22) to the second region.

10. 发明公开

EP0469631A3 Ion pump and vacuum pumping unit using the same 失效
标题翻译：离子泵和真空泵浦单元使用它
公开(公告)号：EP0469631A3
公开(公告)日：1992-07-01
申请号：EP91113057.3
申请日：1991-08-02
申请人： EBARA CORPORATION
发明人： Nagai, Kazutoshi
IPC分类号： H01J41/14
CPC分类号： H01J41/14
摘要： 5 n7 An exhaust apparatus and a vacuum pumping unit using the exhaust apparatus are disclosed. The exhaust apparatus comprises a thermionic emission source, an electron accelerating grid surrounding the thermionic emission source, an outer electrode surrounding the electron accelerating grid, an ion accelerating grid intersecting an axis of the outer electrode and installed apart from the outer electrode, a vessel containing the thermionic emission source, the electron accelerating grid, the outer electrode, and the ion accelerating grid therein, a magnet disposed outside of the vessel and generating a magnetic field almost parallel to the axis of the outer electrode, a power supply for heating the thermionic emission source, a first DC power supply for applying a voltage between the electron accelerating grid, the outer electrode and the thermionic emission source, a second DC power supply for applying a voltage between the outer electrode and the ion accelerating grid so as to get the outer electrode positive. The vacuum pumping unit is constituted by interposing the exhaust apparatus between a vacuum vessel to be evacuated and an auxiliary vacuum pump. By this, gas molecules in the vacuum vessel are ionized by electron bombardment and accelerated toward the auxiliary vacuum pump to be exhausted.

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