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1. 发明公开

EP1725847A2 AN IONIZATION GAUGE 审中-公开
标题翻译：电离规
公开(公告)号：EP1725847A2
公开(公告)日：2006-11-29
申请号：EP05725266.0
申请日：2005-03-10
申请人： Brooks Automation, Inc.
发明人： ARNOLD, Paul, C. , RUTT, Paul, M.
IPC分类号： G01L21/32 , H01J41/00 , H01J33/00 , H01J41/04
CPC分类号： G01L21/32 , H01J41/06 , H01J49/26
摘要： An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) can be located within the anode volume or outside the anode volume. The ionization gauge can have a mass filter for separating the ions based on mass-to-charge ratio. The ionization gauge can be a Bayard-Alpert type that measures pressure or a residual gas analyzer that determines a gas type.
摘要翻译：用于将电子源与气体分子隔离的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的碰撞形成的离子的集电极以及将电子源与气体分子隔离的电子窗口。电离计可具有限定阳极体积并将电子保持在阳极区域中的阳极。电离计可以具有多个电子源和/或集电极。集电极可位于阳极体积内或阳极体积外。电离计可以具有用于基于质荷比分离离子的质量过滤器。电离规可以是测量压力的Bayard-Alpert型或确定气体类型的残余气体分析仪。

2. 发明授权

EP0396843B1 Gas partial pressure sensor for vacuum chamber 失效
标题翻译：感测真空室中的气体的分压。
公开(公告)号：EP0396843B1
公开(公告)日：1994-06-22
申请号：EP89420314.0
申请日：1989-08-25
申请人： LEYBOLD INFICON INC.
发明人： Gogol, Carl A.
IPC分类号： G01N21/62 , G01N23/22 , H01J41/00 , G01L21/30 , G01N21/69
CPC分类号： G01L21/00 , G01N23/2251

3. 发明公开

EP0396843A2 Gas partial pressure sensor for vacuum chamber 失效
标题翻译： Fühlerdes Teildrucks eines气体在einer Vakuumkammer。
公开(公告)号：EP0396843A2
公开(公告)日：1990-11-14
申请号：EP89420314.0
申请日：1989-08-25
申请人： LEYBOLD INFICON INC.
发明人： Gogol, Carl A.
IPC分类号： G01N21/62 , G01N23/22 , H01J41/00 , G01L21/30 , G01N21/69
CPC分类号： G01L21/00 , G01N23/2251
摘要： A sensor for measuring the relative amount of a specific gas within a vacuum chamber, comprising :
- electron beam generator (20) providing an electron beam to excite within an interaction volume the atoms and molecules of said gas, whereby said atoms and molecules emit photons characteristic of said gas ;
- means in communication with said chamber for conducting said gas to said electron beam ;
- photodetector means (38) for viewing photons emitted by said atoms and molecules, including discriminating means (40) for selecting the photons of said wavelength and excluding others, and means for detecting the intensity of said photons and converting said intensity to a proportional electric signal ;
- a thermal isolation barrier (33) of a low thermal conductivity, low thermal inertia material disposed over said electron beam generator (20) and interaction volume to facilitate rapid thermal stabilization of the surroundings of the interaction volume.
摘要翻译：一种用于测量真空室内的特定气体的相对量的传感器，包括： - 电子束发生器（20），其提供电子束以在相互作用的体积内激发所述气体的原子和分子，由此所述原子和分子发射光子所述气体的特征; - 与所述室连通的装置，用于将所述气体导入所述电子束; - 用于观察由所述原子和分子发射的光子的光检测器装置（38），包括用于选择所述波长的光子并排除其他物质的识别装置（40），以及用于检测所述光子的强度并将所述强度转换成比例电信号 - 设置在所述电子束发生器（20）之上的低热导率，低热惯性材料的热隔离屏障（33）和相互作用体积，以促进相互作用体积的周围环境的快速热稳定。

4. 发明授权

EP2260502B1 COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP 有权
公开(公告)号：EP2260502B1
公开(公告)日：2023-05-03
申请号：EP09726197.8
申请日：2009-03-26
发明人： FERRIS, Michael Laurence , CONTE, Andrea
IPC分类号： H01J41/00

5. 发明授权

EP1853890B1 VACUUM MEASURING GAUGE 有权转让
标题翻译：下压力监测
公开(公告)号：EP1853890B1
公开(公告)日：2011-06-15
申请号：EP06707346.0
申请日：2006-03-01
申请人： Inficon GmbH
发明人： KNAPP, Wolfram , WÜEST, Martin
IPC分类号： G01L21/30 , G01L21/32 , G01L21/34 , H01J1/30 , H01J1/304 , H01J41/00 , H01J41/02 , H01J41/04 , H01J41/06 , H01J41/08 , H01J41/10 , H01J19/00 , H01J19/02 , H01J19/04 , H01J19/10
CPC分类号： G01L21/32 , G01L21/12 , H01J1/3042 , H01J41/04
摘要： An electron-emitting cathode (6) consists of an electrically conducting emitter layer (7) attached to a side wall (2) which consists of stainless steel and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (lie) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (VG) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (VA) and is regulated in such a way that an anode current (IA) is kept constant. The emitter layer (7) may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

6. 发明公开

EP2260502A1 COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP 有权
标题翻译：吸气剂泵和离子泵组合的泵系统
公开(公告)号：EP2260502A1
公开(公告)日：2010-12-15
申请号：EP09726197.8
申请日：2009-03-26
申请人： SAES GETTERS S.p.A.
发明人： FERRIS, Michael Laurence , CONTE, Andrea
IPC分类号： H01J41/00
CPC分类号： H01J41/00
摘要： A combined pumping system (10) comprises a getter pump (12) and an ion pump (13). The getter and ion pumps (12, 13) are mounted on a same flange (11) and are arranged on the same side of said flange (11) at two different points thereof.

7. 发明公开

EP1853890A1 VACUUM MEASURING GAUGE 有权转让
标题翻译：下压力监测
公开(公告)号：EP1853890A1
公开(公告)日：2007-11-14
申请号：EP06707346.0
申请日：2006-03-01
申请人： Inficon GmbH
发明人： KNAPP, Wolfram , WÜEST, Martin
IPC分类号： G01L21/30 , G01L21/32 , G01L21/34 , H01J1/30 , H01J1/304 , H01J41/00 , H01J41/02 , H01J41/04 , H01J41/06 , H01J41/08 , H01J41/10 , H01J19/00 , H01J19/02 , H01J19/04 , H01J19/10
CPC分类号： G01L21/32 , G01L21/12 , H01J1/3042 , H01J41/04
摘要： An electron-emitting cathode (6) consists of an electrically conducting emitter layer (7) attached to a side wall (2) which consists of stainless steel and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (lie) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (VG) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (VA) and is regulated in such a way that an anode current (IA) is kept constant. The emitter layer (7) may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

8. 发明公开

EP1698878A1 Electrode configuration and pressure measuring apparatus 审中-公开
标题翻译： Elektrodenanordnung und Druckmessvorrichtung
公开(公告)号：EP1698878A1
公开(公告)日：2006-09-06
申请号：EP05004855.2
申请日：2005-03-04
申请人： Inficon GmbH
发明人： Knapp, Wolfram , Wüest, Martin
IPC分类号： G01L21/30 , G01L21/32 , G01L21/34 , H01J1/30 , H01J1/304 , H01J41/00 , H01J41/02 , H01J41/04 , H01J41/06 , H01J41/08 , H01J41/10 , H01J19/00 , H01J19/02 , H01J19/04 , H01J19/10 , H01J19/24 , H01J19/14 , H01J19/68 , H01J41/14 , H01J41/16
CPC分类号： G01L21/32 , G01L21/12 , H01J1/3042 , H01J41/04
摘要： An electron-emitting cathode (6) consists of an electricaly conducting emitter layer (7) attached to a side wall (2) and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (I IC ) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (Vc) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (V A ) and is regulated in such a way that an anode current (T A ) is kept constant. The emitter layer (7) may comprise an array of metal, e.g., nickel or molybdenum tips or consist essentially of a semiconductor material like silicon, preferably coated by, e.g., carbide, diamond-like carbon or molybdenum, or of carbon nanotubes or it may be a roughened surface portion of the side wall surface. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.
摘要翻译：电子发射阴极（6）由连接到侧壁（2）的电气传导发射极层（7）和在发射极层（7）的凹面发射器表面内的商场距离处固定的栅极（9）组成）。阴极（6）围绕包含圆柱形栅状阳极（5）的反应区域（3）和由直轴向丝线组成的中心离子收集器（4）。通过电流计（11）测量反映反应区域（3）中气体密度的离子集电极电流（I IC），同时在栅极电压（Vc）保持在发射极层（7）的接地电压之间，和较高的阳极电压（VA），并且以使得阳极电流（TA）保持恒定的方式被调节。发射极层（7）可以包括金属阵列，例如镍或钼尖端，或者基本上由诸如硅的半导体材料组成，优选地由碳化物，类金刚石碳或钼或碳纳米管或碳纳米管涂覆可以是侧壁表面的粗糙表面部分。栅极（9）可以是栅格，或者它可以由分布在发射区上的金属膜覆盖隔离物的贴片或覆盖放置在发射器表面上的电子渗透层的金属膜构成。

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