专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

EP2052404A2 METHOD AND APPARATUS FOR MAINTAINING EMISSION CAPABILITIES OF HOT CATHODES IN HARSH ENVIRONMENTS 审中-公开
标题翻译：方法和装置技能排放的IN HEISSKATODEN恶劣环境MAINTAINING
公开(公告)号：EP2052404A2
公开(公告)日：2009-04-29
申请号：EP07809618.7
申请日：2007-06-18
申请人： Brooks Automation, Inc.
发明人： CARMICHAEL, Larry, K. , BORENSTEIN, Michael, D. , ARNOLD, Paul, C. , BLOUCH, Stephen, C. , KNOTT, Richard, A.
IPC分类号： H01J41/04
CPC分类号： H01J41/04
摘要： A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

2. 发明公开

EP1725847A2 AN IONIZATION GAUGE 审中-公开
标题翻译：电离规
公开(公告)号：EP1725847A2
公开(公告)日：2006-11-29
申请号：EP05725266.0
申请日：2005-03-10
申请人： Brooks Automation, Inc.
发明人： ARNOLD, Paul, C. , RUTT, Paul, M.
IPC分类号： G01L21/32 , H01J41/00 , H01J33/00 , H01J41/04
CPC分类号： G01L21/32 , H01J41/06 , H01J49/26
摘要： An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) can be located within the anode volume or outside the anode volume. The ionization gauge can have a mass filter for separating the ions based on mass-to-charge ratio. The ionization gauge can be a Bayard-Alpert type that measures pressure or a residual gas analyzer that determines a gas type.
摘要翻译：用于将电子源与气体分子隔离的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的碰撞形成的离子的集电极以及将电子源与气体分子隔离的电子窗口。电离计可具有限定阳极体积并将电子保持在阳极区域中的阳极。电离计可以具有多个电子源和/或集电极。集电极可位于阳极体积内或阳极体积外。电离计可以具有用于基于质荷比分离离子的质量过滤器。电离规可以是测量压力的Bayard-Alpert型或确定气体类型的残余气体分析仪。

3. 发明授权

EP1825241B1 METHOD AND APPARATUS FOR STORING VACUUM GAUGE CALIBRATION PARAMETERS AND MEASUREMENT DATA ON A VACUUM GAUGE STRUCTURE 有权
标题翻译：方法和设备，用于存储真空表校准参数和测量真空测量装置
公开(公告)号：EP1825241B1
公开(公告)日：2014-03-05
申请号：EP05852494.3
申请日：2005-11-29
申请人： Brooks Automation, Inc.
发明人： ARNOLD, Paul, C. , CARMICHAEL, Larry, K. , RUTT, Paul, M.
IPC分类号： G01L21/10 , G01L21/30
CPC分类号： G01L21/30 , G01L21/10

4. 发明公开

EP1825241A1 METHOD AND APPARATUS FOR STORING VACUUM GAUGE CALIBRATION PARAMETERS AND MEASUREMENT DATA ON A VACUUM GAUGE STRUCTURE 有权
标题翻译：方法和设备，用于存储真空表校准参数和测量真空测量装置
公开(公告)号：EP1825241A1
公开(公告)日：2007-08-29
申请号：EP05852494.3
申请日：2005-11-29
申请人： Brooks Automation, Inc.
发明人： ARNOLD, Paul, C. , CARMICHAEL, Larry, K. , RUTT, Paul, M.
IPC分类号： G01L21/10 , G01L21/30
CPC分类号： G01L21/30 , G01L21/10
摘要： A method and apparatus for measuring gas pressure by combining an ionization gauge with at least one other vacuum sensor. Nonvolatile memory coupled to the vacuum gauge contains calibration parameters unique to each individual sensor based on factory calibration. The nonvolatile memory may contain calibration parameters for a heat-sensitive vacuum sensor to compensate for the temperature gradients generated by the ionization gauge. The calibration parameters are a function of calibration data determined when the ionization gauge is both on and off. The nonvolatile memory may store a window of measurement data of the vacuum gauge that is updated at predetermined time intervals and in response to an event, such as an error event, to aid in investigating the cause of vacuum gauge malfunction or failure.

5. 发明公开

EP1771711A1 METHOD OF OPERATING A RESISTIVE HEAT-LOSS PRESSURE SENSOR 有权
标题翻译：一种用于操作的电阻热损失压力传感器
公开(公告)号：EP1771711A1
公开(公告)日：2007-04-11
申请号：EP05772352.0
申请日：2005-07-19
申请人： Brooks Automation, Inc.
发明人： BORENSTEIN, Michael, D. , ARNOLD, Paul, C.
IPC分类号： G01L21/12
CPC分类号： G01L21/12
摘要： In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is placed in series with at least the compensating element. The current source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式