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    • 1. 发明公开
    • SMALL-TARGET X-RAY SYSTEM
    • EP4336540A1
    • 2024-03-13
    • EP22195135.3
    • 2022-09-12
    • Excillum AB
    • NILSSON, DanielLUNDSTRÖM, Ulf
    • H01J35/08H01J35/14H01J35/30H05G1/52
    • An X-ray system comprising an X-ray source; a sample position; a detector arranged to detect X-ray radiation downstream of said sample position; and a controller is disclosed. The X-ray source comprises an electron source arranged to provide an electron beam; a target arranged to produce X-ray radiation upon impact by said electron beam at an electron beam spot, wherein said target comprises a substrate and a target layer, and wherein said target layer exhibits a hole having a diameter smaller than a diameter of the electron beam spot; a deflector for directing the electron beam to a first position on said target where the electron beam spot is formed at a uniform portion of said target layer away from said hole, and to a second position on said target where the electron beam spot is formed at a portion of said target exhibiting said hole. The controller is configured to acquire, using said detector, a first image with the electron beam directed to said first position, and a second image with the electron beam directed to said second position, and to generate a difference image between the first image and the second image. A corresponding method is also disclosed.
    • 7. 发明公开
    • X-ray inspection system with coordination between detector and multiple focal spots
    • Röntgen-Durchleuchtungsanlage mit Multi-Fokus und darauf abgestimmten Detektor
    • EP1840935A1
    • 2007-10-03
    • EP07104944.9
    • 2007-03-27
    • General Electric Company
    • Birdwell, Thomas WilliamGalish, Andrew Joseph
    • H01J35/30H05G1/52
    • H01J35/30G01N23/04
    • A radiographic inspection system (10) includes an electron gun (20), a fixed anode (22) of a dense material, and apparatus for steering an electron beam (32) generated by the electron gun (20) to multiple focal spots (44) on the anode (22). A detector (14) includes a plurality of individual detector elements (38). Operation of the system is carried out by directing the electron beam (32) at a first time interval to a first focal spot (44) on the anode (22), generating a first X-ray beam (46) aligned with a first detector element (38). During a second time interval, the electron beam (32) is directed to a second focal spot (44) on the anode (22), spaced-away from the first focal spot (44), generating a second X-ray beam (46) aligned with a second detector element (38). This cycle is repeated with additional focal spots (44) in a one-dimensional or two-dimensional pattern. The detector element output is read in coordination with the position of the electron beam (32).
    • 射线检查系统(10)包括电子枪(20),致密材料的固定阳极(22)和用于将由电子枪(20)产生的电子束(32)转向多个焦点(44)的装置 )在阳极(22)上。 检测器(14)包括多个单独的检测器元件(38)。 通过将电子束(32)以第一时间间隔引导到阳极(22)上的第一焦点(44)来执行系统的操作,产生与第一检测器对准的第一X射线束(46) 元件(38)。 在第二时间间隔期间,电子束(32)被引导到与第一焦斑(44)间隔开的阳极(22)上的第二焦点(44),产生第二X射线束(46) )与第二检测器元件(38)对准。 以一维或二维图案的附加焦斑(44)重复该循环。 与电子束(32)的位置协调地读取检测器元件输出。
    • 9. 发明公开
    • X-ray source with beam steering
    • 带有光束转向的X射线源
    • EP0869534A3
    • 1998-11-18
    • EP98112612.1
    • 1995-01-19
    • PHOTOELECTRON CORPORATION
    • Dinsmore, Mark T.Smith, Donald O.
    • H01J35/32H01J35/30
    • A61N5/1001A61B90/11A61B2090/101A61N2005/1005H01J35/065H01J35/08H01J35/30H01J35/32H01J2201/342H05G1/06H05G1/10H05G1/32H05G1/34
    • This invention is directed to an x-ray source comprising a housing (12), a power supply (12A), an elongated tubular probe (14), a target assembly (26), and a beam steering assembly (29). The housing encloses an electron beam source (22), and has elements for generating an electron beam along a beam path. The power supply (12A) is programmable to control the voltage, current and timing of assembly (26) extends along the central axis and is adapted for coupling to end of the probe (14) distal from the housing (12). The target assembly (26) includes target element (26A) positioned along the beam path, wherein the target element (26A) is adapted to emit x-rays in a predetermined spectral range in response to incident electrons. The beam steering assembly (29) includes a deflection element (30), a feedback network (31) and a deflection controller (144). The deflection element (30) deflects the beam from a nominal axis to a selected surface region on the target element (26) in response to a deflection control signal. The feedback network (31) includes deflection sensing elements for sensing the deflection of the beam and elements for generating feedback signal representative thereof.
    • 本发明涉及包括外壳(12),电源(12A),细长管状探头(14),靶组件(26)和射束转向组件(29)的X射线源。 壳体包围电子束源(22),并具有用于沿着光束路径产生电子束的元件。 电源(12A)是可编程的,以控制组件(26)的电压,电流和定时沿着中心轴线延伸并适于耦合到远离壳体(12)的探针(14)的末端。 目标组件(26)包括沿着光束路径定位的目标元件(26A),其中目标元件(26A)适于响应入射电子发射预定光谱范围内的X射线。 波束转向组件(29)包括偏转元件(30),反馈网络(31)和偏转控制器(144)。 偏转元件(30)响应于偏转控制信号将光束从标称轴偏转到目标元件(26)上的选定表面区域。 反馈网络(31)包括用于检测光束偏转的偏转检测元件和用于产生代表其反馈信号的元件。