会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明公开
    • SMALL-TARGET X-RAY SYSTEM
    • EP4336540A1
    • 2024-03-13
    • EP22195135.3
    • 2022-09-12
    • Excillum AB
    • NILSSON, DanielLUNDSTRÖM, Ulf
    • H01J35/08H01J35/14H01J35/30H05G1/52
    • An X-ray system comprising an X-ray source; a sample position; a detector arranged to detect X-ray radiation downstream of said sample position; and a controller is disclosed. The X-ray source comprises an electron source arranged to provide an electron beam; a target arranged to produce X-ray radiation upon impact by said electron beam at an electron beam spot, wherein said target comprises a substrate and a target layer, and wherein said target layer exhibits a hole having a diameter smaller than a diameter of the electron beam spot; a deflector for directing the electron beam to a first position on said target where the electron beam spot is formed at a uniform portion of said target layer away from said hole, and to a second position on said target where the electron beam spot is formed at a portion of said target exhibiting said hole. The controller is configured to acquire, using said detector, a first image with the electron beam directed to said first position, and a second image with the electron beam directed to said second position, and to generate a difference image between the first image and the second image. A corresponding method is also disclosed.