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    • 3. 发明公开
    • SMALL-TARGET X-RAY SYSTEM
    • EP4336540A1
    • 2024-03-13
    • EP22195135.3
    • 2022-09-12
    • Excillum AB
    • NILSSON, DanielLUNDSTRÖM, Ulf
    • H01J35/08H01J35/14H01J35/30H05G1/52
    • An X-ray system comprising an X-ray source; a sample position; a detector arranged to detect X-ray radiation downstream of said sample position; and a controller is disclosed. The X-ray source comprises an electron source arranged to provide an electron beam; a target arranged to produce X-ray radiation upon impact by said electron beam at an electron beam spot, wherein said target comprises a substrate and a target layer, and wherein said target layer exhibits a hole having a diameter smaller than a diameter of the electron beam spot; a deflector for directing the electron beam to a first position on said target where the electron beam spot is formed at a uniform portion of said target layer away from said hole, and to a second position on said target where the electron beam spot is formed at a portion of said target exhibiting said hole. The controller is configured to acquire, using said detector, a first image with the electron beam directed to said first position, and a second image with the electron beam directed to said second position, and to generate a difference image between the first image and the second image. A corresponding method is also disclosed.