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1. 发明公开

EP3251760A1 DEBRIS REMOVAL FROM HIGH ASPECT STRUCTURES 审中-公开
公开(公告)号：EP3251760A1
公开(公告)日：2017-12-06
申请号：EP17172132.7
申请日：2017-05-22
申请人： Rave LLC
发明人： ROBINSON, Tod Evan , ARRUZA, Bernabe J. , ROESSLER, Kenneth Gilbert , BRINKLEY, David , LECLAIRE, Jeffrey E.
IPC分类号： B08B7/00 , G03F1/82 , G03F1/84 , G03F7/20
CPC分类号： G03F1/82 , B08B7/0028 , B08B7/0035 , G01N23/2252 , G01N23/2273 , G01N2021/95676 , G01N2223/6116 , G01N2223/652 , G01Q20/02 , G01Q60/42 , G01Q70/12 , G01Q80/00
摘要： A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.

2. 发明公开

EP2267428A4 SCANNING PROBE MICROSCOPE AND METHOD OF OBSERVING SAMPLE USING THE SAME 审中-公开
标题翻译： GRID探针显微镜及监测方法样本顺序
公开(公告)号：EP2267428A4
公开(公告)日：2013-03-27
申请号：EP08873098
申请日：2008-12-18
申请人： HITACHI LTD
发明人： NAKATA TOSHIHIKO , WATANABE MASAHIRO , INOUE TAKASHI , HIDAKA KISHIO , OKAI MAKOTO , MORITA TOSHIAKI , HIROOKA MOTOYUKI
IPC分类号： G01N21/64 , G01Q60/06 , G01Q60/18 , G01Q60/22 , G01Q70/12 , B82Y15/00 , B82Y20/00 , B82Y35/00
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12

3. 发明公开

EP1775568A3 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever 审中-公开
标题翻译：悬臂阵列，使得所述阵列和扫描探针显微镜载片的方法的导引，并使用悬臂阵列功能旋转机构，传感器，零差激光干涉仪和激光Dopplerinterferometer到样品的光激发，并
公开(公告)号：EP1775568A3
公开(公告)日：2007-08-29
申请号：EP07002541.6
申请日：2002-06-12
申请人： Japan Science and Technology Agency
发明人： Kawakatsu, Hideki
IPC分类号： G01N13/16 , G12B21/08 , G12B21/02 , G12B21/22
CPC分类号： G01B9/02045 , G01B9/02002 , G01H9/004 , G01Q20/02 , G01Q70/06 , G01Q70/12
摘要： There are provided a cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers.
The cantilever array includes a large number of compliant cantilevers (3) sliding on a surface (2) of a sample (1).
摘要翻译：悬臂阵列包括大量的符合悬臂（3）的表面上滑动的（2）试样的（1）试样的滑动引导和旋转机构，传感器，零差激光干涉仪和激光多普勒干涉仪装置光激发函数。

4. 发明授权

EP1672648B1 Rasterkraftsonde mit einer EBD-Abtastspitze. 有权
标题翻译：原子力探头的扫描EBD。
公开(公告)号：EP1672648B1
公开(公告)日：2007-03-14
申请号：EP04029525.5
申请日：2004-12-14
申请人： Nanoworld AG
发明人： Krause, Oliver, Dr. , Lehrer, Christoph , Petersen, Silke
IPC分类号： G12B21/02
CPC分类号： G01Q70/12

5. 发明公开

EP1680782A1 DISPOSITIF D' ENREGISTREMENT DE DONNEES A MICRO-POINTES CONDU CTRICES ET PROCEDE DE FABRICATION D' UN TEL DISPOSITIF 有权
标题翻译：随着对生产传导微尖和处理数据记录设备
公开(公告)号：EP1680782A1
公开(公告)日：2006-07-19
申请号：EP04805312.8
申请日：2004-10-26
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人： GIDON, Serge , SAMSON, Yves
IPC分类号： G11B9/00 , G11B11/00 , G01B7/34 , G12B21/02
CPC分类号： G11B9/14 , G01Q70/12 , G11B9/1409 , G11B9/1418 , G11B9/1472 , G11C2213/81
摘要： The invention relates to a data-recording device comprising conductive microtips and to the production method thereof. According to the invention, the microtip (1) comprises one end (2) which is intended to be brought into electrical contact with a recording medium (3). Moreover, the microtip (1) comprises a longitudinal conducting core (4) having an essentially constant cross-section. In addition, the microtip (1) is surrounded by a sheath (5) of non-conducting material, such that the free ends of the core (4) and the sheath (5) are level at the end (2) of the microtip (1). The cross-section of the sheath (5) can diminish towards the end (2) of the microtip (1), e.g. such as to form a truncated-cone-shaped part. The core (4) can comprise a carbon nanotube. Furthermore, a multitude of microtips (1) can be disposed in the form of a network, the ends (2) thereof generating an essentially-flat common surface. The inventive method comprises an abrasion step.

6. 发明公开

EP1672648A1 Rasterkraftsonde mit einer EBD-Abtastspitze. 有权
标题翻译： Rasterkraftsonde mit einer EBD-Abtastspitze。
公开(公告)号：EP1672648A1
公开(公告)日：2006-06-21
申请号：EP04029525.5
申请日：2004-12-14
申请人： Nanoworld AG
发明人： Krause, Oliver, Dr. , Lehrer, Christoph , Petersen, Silke
IPC分类号： G12B21/02
CPC分类号： G01Q70/12
摘要： Die Erfindung betrifft einen SPM-Sensor (1) für ein Rasterkraftmikroskop mit einem Biegebalken (3), einem Halteelement (2) an einem Ende des Biegebalkens (3) und einer Sensorspitze (4) mit einer EBD-Struktur (5) am anderen Ende des Biegebalkens (3) sowie ein Verfahren zur Herstellung derartiger Sensoren. Die EBD-Struktur (5) ist direkt im Substrat der Sensorspitze (4) verankert. Die Verankerung der EBD-Struktur (5) erfolgt form- und kraftschlüssig in einem Loch (6) der Sensorspitze (4), das durch Materialabtrag im Substrat der Sensorspitze (4) erzeugt ist. Das Verfahren sieht nach dem Materialabtrag durch fotolithographische Strukturierung mit nachfolgenden Ätzprozess bzw. mittels Teilchenstrahlen die Erzeugung der EBD-Struktur durch eine teilchenstrahlinduzierte Materialabscheidung im Loch der Sensorspitze vor.
摘要翻译：传感器具有设置在悬臂（3）的一端的保持部分（2）。传感器尖端（4）设置在悬臂的另一端，并且部分圆柱形的电子束感应沉积（EBD）扫描尖端从传感器尖端突出。该部分用于在扫描探针显微镜的测量头上接收和紧固传感器。悬臂带EBD扫描头的传感器端头。扫描探针显微镜（SPM）传感器的制造方法也包含独立的权利要求。

7. 发明公开

EP1054249A4 ELECTRONIC DEVICE SURFACE SIGNAL CONTROL PROBE AND METHOD OF MANUFACTURING THE PROBE 有权
标题翻译：电子设备的表面信号命令probe及其制备方法
公开(公告)号：EP1054249A4
公开(公告)日：2003-07-23
申请号：EP99973122
申请日：1999-11-12
申请人： DAIKEN CHEMICAL CO LTD , NAKAYAMA YOSHIKAZU
发明人： NAKAYAMA YOSHIKAZU , AKITA SEIJI , HARADA AKIO
IPC分类号： G01Q70/12 , B23Q17/09 , C01B31/02 , G01B5/28 , G01B7/34 , G01B21/30 , G01N1/04 , G01N13/00 , G01N19/02 , G01N21/75 , G01Q10/00 , G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/16 , G11B5/127 , G21G5/00 , G21K7/00
CPC分类号： G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/12 , Y10S977/869 , Y10S977/873 , Y10S977/876
摘要： A surface signal control probe high in resolution, rigidity, and bending elasticity which can be used for a scanning probe microscope and a highly accurate surface signal control probe for inputting and outputting signals which can be used for a high density magnetic information processing device, comprising a nanotube (24) small in tip curvature radius and high in rigidity and bending elasticity, a holder (2a) holding the nanotube (24), and a fixing means fixing the base part (24b) of the nanotube to the surface of the holder with the tip part (24a) of the nanotube (24) projecting from the holder, wherein the tip part (24a) of the nanotube is used as a probe and the fixing means is formed of a coating film (29) covering the base part (24b) of the nanotube (24) and a fused part where the base part (24b) is fused to the surface of the holder.

8. 发明公开

EP0615124A1 Method for in-situ growth of single crystal whiskers 失效
标题翻译： Verfahren zur In-Situ-Kristallzüchtungvon Einkristallwhiskern。
公开(公告)号：EP0615124A1
公开(公告)日：1994-09-14
申请号：EP94102706.2
申请日：1994-02-23
申请人： International Business Machines Corporation
发明人： Clabes, Joachim Gerhard , Fuentes, Ricardo Indalecio
IPC分类号： G01N27/00 , G01B7/34 , C30B25/00
CPC分类号： G01Q70/16 , C30B25/005 , G01Q70/12
摘要： The invention provides a single crystal tip which can be used, for example, for scanning the topography of a surface. The tip comprises a single crystal whisker having a sharpened end thereon, which can be mounted on an arm so that the tip extends away from the arm. A method of producing the tips/tip structures is also provided which utilizes the principles of a vapor-liquid-solid (VLS) mechanism.
摘要翻译：本发明提供一种单晶尖端，其可用于例如扫描表面的形貌。尖端包括其上具有尖锐端的单晶须，其可以安装在臂上，使得尖端远离臂延伸。还提供了一种制造尖端/尖端结构的方法，其利用气 - 液 - 固（VLS）机理的原理。

9. 发明公开

EP3408707A1 DEBRIS REMOVAL FROM HIGH ASPECT STRUCTURES 审中-公开
公开(公告)号：EP3408707A1
公开(公告)日：2018-12-05
申请号：EP17744875.0
申请日：2017-01-26
申请人： Rave LLC
发明人： ROBINSON, Tod
IPC分类号： G03F1/82 , G03F7/00 , G01Q70/12 , B08B1/00 , B08B7/00
CPC分类号： B08B7/0028 , G01Q60/42 , G01Q70/12 , G01Q80/00 , G03F1/82
摘要： A system for removing debris from a surface of a substrate, the system including a cantilever arm and a tip supported by the cantilever arm. The tip has a proximal portion and a distal portion such that the tip is supported by the cantilever arm via the proximal portion. The system further includes at least one nanofibril attached to the distal portion of the tip, and the at least one nanofibril is configured to elastically deform against or around the debris or the surface of the substrate.

10. 发明授权

EP1742034B8 Method of fabrication of a SPM thin line probe 有权转让
公开(公告)号：EP1742034B8
公开(公告)日：2018-11-14
申请号：EP05734701.5
申请日：2005-04-20
申请人： Olympus Corporation
发明人： KITAZAWA, Masashi , OTA, Ryo , TANEMURA, Masaki
IPC分类号： G01Q70/12
CPC分类号： G01Q70/12 , Y10S977/849 , Y10S977/86
摘要： An SPM cantilever of the present invention including: a support portion (1) fabricated by processing a single crystal silicon wafer; a lever portion (2) formed in a manner extended from the support portion; a probe (3) disposed at a free end side of the lever portion; a coating of graphite film (5) covering all over the side on which the probe is formed and the entire probe; and a piece of thin line (6) consisting of a carbon nanofiber (CNF) or carbon nanotube (CNT) or graphite nanofiber (GNF) grown/formed from the graphite film at a probe terminal end portion (3a).

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