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1. 发明公开

EP2700928A3 Pressure sensor 有权转让
标题翻译：压力传感器
公开(公告)号：EP2700928A3
公开(公告)日：2017-08-23
申请号：EP13180970.9
申请日：2013-08-20
申请人： ams International AG
发明人： Besling, Willem Frederik Adrianus , Steeneken, Peter Gerard , Wunnicke, Olaf
IPC分类号： G01L9/00 , H04R19/00 , H04R31/00 , G01L21/22
摘要： As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.
摘要翻译：如可以与在此讨论的一个或多个实施例一致，集成电路设备包括悬置在空腔上的隔膜，膜和空腔限定腔室。膜内具有多个将气体传入和传出腔室的开口。当膜被致动时，腔室的体积改变以在腔室内产生不同于腔室外部的压力的气体压力。传感器响应于体积变化检测膜的基于频率的特性，并且其中提供室外气压的指示。

2. 发明公开

EP2021756A1 MEMS VAKUUMSENSOR NACH DEM REIBUNGSPRINZIP 审中-公开
标题翻译： MEMS传感器真空摩擦原理AFTER
公开(公告)号：EP2021756A1
公开(公告)日：2009-02-11
申请号：EP07725001.7
申请日：2007-05-09
申请人： Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. , Technische Universität Chemnitz
发明人： KURTH, Steffen , TENHOLTE, Dirk , HILLER, Karla , KAUFMANN, Christian , GESSNER, Thomas , DÖTZEL, Wolfram
IPC分类号： G01L9/00 , G01L21/22
CPC分类号： G01L21/22
摘要： The invention relates to a pressure-measuring sensor element having a substrate (5) and at least one mass element (1) which is arranged at a distance from the substrate (5) and is connected to the substrate (5) and/or a support body (6), which cannot move relative to the substrate (5), such that it can oscillate, with the result that a gap whose width can be varied by oscillations of the mass element (1) exists between the mass element (1) and the substrate (5). At least one depression and/or at least one bushing, which is used to reduce the damping of the oscillation of the mass element by the gas or plasma surrounding the mass element (1), is/are situated in that area of the substrate (5) which borders the gap. The sensor element is used, in particular, in pressure sensors for measuring pressures in the vacuum area. Maximum pressures into the range of atmospheric air pressure can be detected using the sensor element according to the invention as a pressure sensor. The lowest pressures to be determined are in the range of 10-6 mbar.

3. 发明公开

EP1808685A3 Pressure sensor with vibrating member 有权
标题翻译：与振动器的压力传感器
公开(公告)号：EP1808685A3
公开(公告)日：2008-11-12
申请号：EP07105760.8
申请日：2003-11-07
申请人： VARIAN S.p.A.
发明人： Maccarrone, Cristian , Correale, Raffaele , Busso, Mario
IPC分类号： G01L21/22
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： The invention concerns a pressure sensor including: a micro-electromechanical vibrating device, comprising a silicon substrate (15') onto which a multilayer vibrating assembly (321) is formed; a control device (21') of said assembly in order to make it oscillate relative to said substrate at the resonance frequency or at another known frequency; and a detector for detecting the actual frequency and/or amplitude of said oscillation. Since said actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment, the variations of said frequency and said amplitude with respect to the values set by said control device can be used to measure pressure variations in the surrounding environment.

4. 发明公开

EP0379841A3 Gasdruck-Messgerät 失效
标题翻译：气压测量装置
公开(公告)号：EP0379841A3
公开(公告)日：1991-06-05
申请号：EP89810928.5
申请日：1989-12-08
申请人： BALZERS AKTIENGESELLSCHAFT
发明人： Stocker, Rudolf, Dr. , Schaedler, Walter
IPC分类号： G01L21/12 , G01L21/22
CPC分类号： G01L21/12 , G01L21/22
摘要： Ein Verfahren zum Messen von Druck, vorzugsweise Vakuum wird vorgestellt. Die Mess-Signale aus einem Wärmeleitungsmanometer (12) und Mess-Signale aus einem Gasreibungsmanometer (22) werden vorzugsweise durch Multiplikation zu einem gemeinsamen Mess-Signal verarbeitet. Sie werden linear überlagert oder addiert. Vorzugsweise wird als Wärmeleitungsmanometer ein Piranimanometer und als Gasreibungsmanometer ein Stimmgabelquarzmanometer verwendet.

5. 发明授权

EP2637007B1 MEMS capacitive pressure sensor 有权转让
公开(公告)号：EP2637007B1
公开(公告)日：2020-01-22
申请号：EP12158617.6
申请日：2012-03-08
申请人： ams International AG
发明人： Besling, Willem , Goossens, Martijn , Van Beek, Jozef , Steeneken, Peter , Wunnicke, Olaf
IPC分类号： G01L27/00 , G01L9/00 , G01L21/12 , G01L21/22 , G01L15/00 , G01L13/02

6. 发明授权

EP2309241B1 MEMS pressure sensor 有权转让
标题翻译： MEMS压力传感器
公开(公告)号：EP2309241B1
公开(公告)日：2016-11-30
申请号：EP09172478.1
申请日：2009-10-07
申请人： ams international AG
发明人： Suijlen, Matthijs , Koning, Jan Jacob , Beijerinck, Herman Coenraad Willem
IPC分类号： G01L9/00 , G01L21/22
CPC分类号： G01L9/0019 , G01L21/22

7. 发明授权

EP0379841B2 Gasdruck-Messgerät 失效
标题翻译：气体压力计
公开(公告)号：EP0379841B2
公开(公告)日：1998-11-04
申请号：EP89810928.5
申请日：1989-12-08
申请人： BALZERS AKTIENGESELLSCHAFT
发明人： Stocker, Rudolf, Dr. , Schaedler, Walter
IPC分类号： G01L21/12 , G01L21/22
CPC分类号： G01L21/12 , G01L21/22

8. 发明公开

EP0347144A3 Vacuum gauge 失效
标题翻译：真空计
公开(公告)号：EP0347144A3
公开(公告)日：1990-12-19
申请号：EP89305908.9
申请日：1989-06-12
申请人： SEIKO ELECTRONIC COMPONENTS LTD.
发明人： Tamura, Fujio c/o SEIKO ELECTRONIC COMPONENTS LTD.
IPC分类号： G01L21/22
CPC分类号： G01L21/22
摘要： A vacuum gauge for measuring pressure of a gas comprises a quartz resonator (1) located in the gas the pressure of which is to be measured and having a resonant frequency dependent on its body temperature which is dependent on relatively low pressure and having a resonant current which is dependent on relatively high pressure, a control circuit (5, 6, 7) and a heat source (8) which is disposed adjacent to the resonator (1), for supplying a first output signal (Vf) to heat the resonator (1) so as to maintain the body temperature thereof and resonant frequency thereof substantially constant, the first output signal (Vf) being representative of the pressure of the gas in a relatively low pressure range, a converting circuit (9) for converting the resonant current of the resonator into a corresponding second output signal (Vr) representative of the value of the pressure of the gas in a relatively high pressure range, and a meter (11) for indicating the value of pressure according to the first and second output signals (Vf, Vr).

9. 发明公开

EP0379840A2 Stimmgabel-Quarz-Manometer 失效
标题翻译：音叉石英压力计。
公开(公告)号：EP0379840A2
公开(公告)日：1990-08-01
申请号：EP89810927.7
申请日：1989-12-08
申请人： BALZERS AKTIENGESELLSCHAFT
发明人： Stocker, Rudolf, Dr.
IPC分类号： G01L21/22 , G01L19/04
CPC分类号： G01L9/0022 , G01L9/085 , G01L21/22
摘要： Beim vorliegenden Verfahren zur Druckmessung wird das Dämpfungssignal eines Stimmgabelquarz-Manometers, welches ein Mass für den herrschenden Druck ist, mit einem zur jeweiligen Resonanzfrequenz proportionalen Korrekturwert so verknüpft, dass ein Messresultat erzielt wird, welches unabhängig von allfälligen Verschmutzungen des Stimmgabelquarzes ist.
Vorzugsweise wird nebst der Resonanzfrequenz (f R ) des Messquarzes (11) auch die Resonanzfrequenz (f R ′) eines auf konstantem Druck gehaltenen Referenzquarzes (21) bestimmt. Dadurch kann das Dämpfungssignal (R S ) um einen zur Differenz zwischen den beiden Referenzfrequenzen (f R ′ - f R ) proportionalen Korrekturwert korrigiert werden, welcher weitgehend temperaturunabhängig ist.
摘要翻译：在用于测量音叉石英压力计，这对于存在的压力的测量值的衰减信号压力本发明的方法中，与比例相关联，使得获得的测量结果各自的谐振频率修正值，它是独立于音叉石英的可能的污染。优选地，测量石英（11）还与所述谐振频率（FR）一起确定的谐振频率在恒定的压力（21）所保持的参考晶体的（F R“）。其结果是，阻尼信号（RS）的两个参考频率之间（FR“ - FR）的差成比例的校正值来校正，这在很大程度上是依赖于温度的。

10. 发明公开

EP1808685A2 Pressure sensor with vibrating member 有权
标题翻译： Drucksensor mit Schwingungselement
公开(公告)号：EP1808685A2
公开(公告)日：2007-07-18
申请号：EP07105760.8
申请日：2003-11-07
申请人： VARIAN S.p.A.
发明人： Maccarrone, Cristian , Correale, Raffaele , Busso, Mario
IPC分类号： G01L21/22
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： The invention concerns a pressure sensor including: a micro-electromechanical vibrating device, comprising a silicon substrate (15') onto which a multilayer vibrating assembly (321) is formed; a control device (21') of said assembly in order to make it oscillate relative to said substrate at the resonance frequency or at another known frequency; and a detector for detecting the actual frequency and/or amplitude of said oscillation. Since said actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment, the variations of said frequency and said amplitude with respect to the values set by said control device can be used to measure pressure variations in the surrounding environment.
摘要翻译：本发明涉及一种压力传感器，包括：微机电振动装置，其包括形成多层振动组件（321）的硅衬底（15'）; 所述组件的控制装置（21'），以使其以共振频率或另一已知频率相对于所述衬底振荡; 以及用于检测所述振荡的实际频率和/或振幅的检测器。由于所述实际频率和/或振幅受到外部环境的条件特别是压力的影响，因此所述频率和所述振幅相对于由所述控制装置设定的值的变化可用于测量压力变化周边环境。

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