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1. 发明公开

EP1808685A2 Pressure sensor with vibrating member 有权
标题翻译： Drucksensor mit Schwingungselement
公开(公告)号：EP1808685A2
公开(公告)日：2007-07-18
申请号：EP07105760.8
申请日：2003-11-07
申请人： VARIAN S.p.A.
发明人： Maccarrone, Cristian , Correale, Raffaele , Busso, Mario
IPC分类号： G01L21/22
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： The invention concerns a pressure sensor including: a micro-electromechanical vibrating device, comprising a silicon substrate (15') onto which a multilayer vibrating assembly (321) is formed; a control device (21') of said assembly in order to make it oscillate relative to said substrate at the resonance frequency or at another known frequency; and a detector for detecting the actual frequency and/or amplitude of said oscillation. Since said actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment, the variations of said frequency and said amplitude with respect to the values set by said control device can be used to measure pressure variations in the surrounding environment.
摘要翻译：本发明涉及一种压力传感器，包括：微机电振动装置，其包括形成多层振动组件（321）的硅衬底（15'）; 所述组件的控制装置（21'），以使其以共振频率或另一已知频率相对于所述衬底振荡; 以及用于检测所述振荡的实际频率和/或振幅的检测器。由于所述实际频率和/或振幅受到外部环境的条件特别是压力的影响，因此所述频率和所述振幅相对于由所述控制装置设定的值的变化可用于测量压力变化周边环境。

2. 发明公开

EP0735354A1 Micromechanical pressure gauge having extended sensor range 失效
标题翻译：具有扩展范围的微机械压力传感器
公开(公告)号：EP0735354A1
公开(公告)日：1996-10-02
申请号：EP96301794.2
申请日：1996-03-15
申请人： VARIAN ASSOCIATES, INC.
发明人： Martin, Jacob H. , Kelley, William P.
IPC分类号： G01L21/22
CPC分类号： G01L21/22 , G01L9/0019
摘要： An improved gas pressure gauge is disclosed that extends the linear range of pressure dependent damping to higher pressures by placing a stationary member (22) in very close proximity to the vibrating member (21). This range linear dependent damping is also extended to lower pressures by making the vibrating member (21) large in area relative to its small distance from a fixed planar member, which can also serve as its supporting member, by making it vibrate in a direction perpendicular to the fixed planar member, and by making the springs that support the vibrating member from a high Q and conductive material, such as boron doped single crystal silicon. These features for extending the range to higher and lower pressures can be built separately into two independent vibrating elements that can be used individually or in tandem, or they can be built into a single vibrating element that can be made to vibrate in two modes, one parallel and one perpendicular to a fixed member. The preferred method of measuring gas pressure with these gauges is to determine the drive voltage necessary to drive the mechanical oscillator to a fixed amplitude against the pressure dependent damping of the gas that is being measured.

3. 发明公开

EP0330385A3 Pressure gauge with oscillating means 失效
标题翻译：压力计与振荡装置
公开(公告)号：EP0330385A3
公开(公告)日：1991-06-05
申请号：EP89301555.2
申请日：1989-02-17
申请人： SEIKO ELECTRONIC COMPONENTS LTD.
发明人： Tamura, Fujio c/o Seiko Electronic Components Ltd.
IPC分类号： G01L21/22 , G01L9/08
CPC分类号： G01L21/22 , G01L9/0022
摘要： A pressure gauge comprising a chamber adapted to contain a gas whose pressure is to be measured; a sensor means (1) which is mounted in the chamber, the sensor means (1) being responsive to the value of a characteristic of the said gas which is related to its pressure; and display and/or control means (8) which displays the pressure of the said gas and/or exercises a control in dependence upon said pressure, the display or control means (8) being itself controlled by the output of the sensor means (1) characterised in that the sensor means comprises oscillating means (1) whose oscillation frequency is dependent upon its body temperature.

4. 发明公开

EP0406460A1 Verfahren zur Messung des Druckes 失效
标题翻译： Verfahren zur Messung des Druckes。
公开(公告)号：EP0406460A1
公开(公告)日：1991-01-09
申请号：EP89112159.2
申请日：1989-07-04
申请人： LEYBOLD AKTIENGESELLSCHAFT
发明人： Benes, Ewald, Dr. , Müller, Walter , Stürmer, Johann , Thorn, Gernot
IPC分类号： G01L9/08 , G01L21/22
CPC分类号： G01L21/22
摘要： Die Erfindung betrifft ein Verfahren zur Messung des Druckes mit Hilfe eines Gasreibungsvakuummeters, das mit einem Oszillator und mit einem Schwingquarz als Sensor ausgerüstet ist und bei dem die druckabhängigen Dämpfungserscheinungen der Quarzschwingungen zur Meßwertbildung herangezogen werden; um bei diesem Verfahren genauere Meßwerte zu erzielen, wird vorgeschlagen, daß zur Meßwerterfassung der Oszillator (2) vom Schwingquarz (1) getrennt wird und daß aus dem Ausschwingverhalten des Quarzes der Druckwert gewonnen wird.
摘要翻译：本发明涉及一种借助于气体摩擦真空计测量压力的方法，该气体摩擦真空计配备有振荡器和石英振动器作为传感器，其中使用石英振荡的压力依赖衰减现象来形成被测量的值; 为了通过该方法获得更准确的测量值，提出为了测量的目的，振荡器（2）与石英振子（1）分离，并且压力值是从石英的瞬态特性获得的。

5. 发明公开

EP0379841A2 Gasdruck-Messgerät 失效
标题翻译： Gasdruck-Messgerät。
公开(公告)号：EP0379841A2
公开(公告)日：1990-08-01
申请号：EP89810928.5
申请日：1989-12-08
申请人： BALZERS AKTIENGESELLSCHAFT
发明人： Stocker, Rudolf, Dr. , Schaedler, Walter
IPC分类号： G01L21/12 , G01L21/22
CPC分类号： G01L21/12 , G01L21/22
摘要： Ein Verfahren zum Messen von Druck, vorzugsweise Vakuum wird vorgestellt. Die Mess-Signale aus einem Wärmeleitungsmanometer (12) und Mess-Signale aus einem Gasreibungsmanometer (22) werden vorzugsweise durch Multiplikation zu einem gemeinsamen Mess-Signal verarbeitet. Sie werden linear überlagert oder addiert. Vorzugsweise wird als Wärmeleitungsmanometer ein Piranimanometer und als Gasreibungsmanometer ein Stimmgabelquarzmanometer verwendet.
摘要翻译：提出了一种测量压力的方法，优选为真空。来自热导率测压计的测量信号和来自气摩擦压力计的测量信号优选通过乘法来处理，以形成公共测量信号。它们线性叠加或相加。优选使用Pirani压力计作为热传导率计，以及石英音叉压力计作为气摩擦压力计。 ... ...

6. 发明公开

EP2700928A3 Pressure sensor 有权转让
标题翻译：压力传感器
公开(公告)号：EP2700928A3
公开(公告)日：2017-08-23
申请号：EP13180970.9
申请日：2013-08-20
申请人： ams International AG
发明人： Besling, Willem Frederik Adrianus , Steeneken, Peter Gerard , Wunnicke, Olaf
IPC分类号： G01L9/00 , H04R19/00 , H04R31/00 , G01L21/22
摘要： As may be consistent with one or more embodiments discussed herein, an integrated circuit apparatus includes a membrane suspended over a cavity, with the membrane and cavity defining a chamber. The membrane has a plurality of openings therein that pass gas into and out of the chamber. As the membrane is actuated, the volume of the chamber changes to generate a gas pressure inside the chamber that is different than a pressure outside the chamber. A sensor detects a frequency-based characteristic of the membrane responsive to the change in volume, and therein provides an indication of the gas pressure outside the chamber.
摘要翻译：如可以与在此讨论的一个或多个实施例一致，集成电路设备包括悬置在空腔上的隔膜，膜和空腔限定腔室。膜内具有多个将气体传入和传出腔室的开口。当膜被致动时，腔室的体积改变以在腔室内产生不同于腔室外部的压力的气体压力。传感器响应于体积变化检测膜的基于频率的特性，并且其中提供室外气压的指示。

7. 发明公开

EP2021756A1 MEMS VAKUUMSENSOR NACH DEM REIBUNGSPRINZIP 审中-公开
标题翻译： MEMS传感器真空摩擦原理AFTER
公开(公告)号：EP2021756A1
公开(公告)日：2009-02-11
申请号：EP07725001.7
申请日：2007-05-09
申请人： Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. , Technische Universität Chemnitz
发明人： KURTH, Steffen , TENHOLTE, Dirk , HILLER, Karla , KAUFMANN, Christian , GESSNER, Thomas , DÖTZEL, Wolfram
IPC分类号： G01L9/00 , G01L21/22
CPC分类号： G01L21/22
摘要： The invention relates to a pressure-measuring sensor element having a substrate (5) and at least one mass element (1) which is arranged at a distance from the substrate (5) and is connected to the substrate (5) and/or a support body (6), which cannot move relative to the substrate (5), such that it can oscillate, with the result that a gap whose width can be varied by oscillations of the mass element (1) exists between the mass element (1) and the substrate (5). At least one depression and/or at least one bushing, which is used to reduce the damping of the oscillation of the mass element by the gas or plasma surrounding the mass element (1), is/are situated in that area of the substrate (5) which borders the gap. The sensor element is used, in particular, in pressure sensors for measuring pressures in the vacuum area. Maximum pressures into the range of atmospheric air pressure can be detected using the sensor element according to the invention as a pressure sensor. The lowest pressures to be determined are in the range of 10-6 mbar.

8. 发明公开

EP1808685A3 Pressure sensor with vibrating member 有权
标题翻译：与振动器的压力传感器
公开(公告)号：EP1808685A3
公开(公告)日：2008-11-12
申请号：EP07105760.8
申请日：2003-11-07
申请人： VARIAN S.p.A.
发明人： Maccarrone, Cristian , Correale, Raffaele , Busso, Mario
IPC分类号： G01L21/22
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： The invention concerns a pressure sensor including: a micro-electromechanical vibrating device, comprising a silicon substrate (15') onto which a multilayer vibrating assembly (321) is formed; a control device (21') of said assembly in order to make it oscillate relative to said substrate at the resonance frequency or at another known frequency; and a detector for detecting the actual frequency and/or amplitude of said oscillation. Since said actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment, the variations of said frequency and said amplitude with respect to the values set by said control device can be used to measure pressure variations in the surrounding environment.

9. 发明公开

EP0379841A3 Gasdruck-Messgerät 失效
标题翻译：气压测量装置
公开(公告)号：EP0379841A3
公开(公告)日：1991-06-05
申请号：EP89810928.5
申请日：1989-12-08
申请人： BALZERS AKTIENGESELLSCHAFT
发明人： Stocker, Rudolf, Dr. , Schaedler, Walter
IPC分类号： G01L21/12 , G01L21/22
CPC分类号： G01L21/12 , G01L21/22
摘要： Ein Verfahren zum Messen von Druck, vorzugsweise Vakuum wird vorgestellt. Die Mess-Signale aus einem Wärmeleitungsmanometer (12) und Mess-Signale aus einem Gasreibungsmanometer (22) werden vorzugsweise durch Multiplikation zu einem gemeinsamen Mess-Signal verarbeitet. Sie werden linear überlagert oder addiert. Vorzugsweise wird als Wärmeleitungsmanometer ein Piranimanometer und als Gasreibungsmanometer ein Stimmgabelquarzmanometer verwendet.

10. 发明授权

EP2700928B1 Pressure sensor 有权转让
公开(公告)号：EP2700928B1
公开(公告)日：2020-04-22
申请号：EP13180970.9
申请日：2013-08-20
申请人： ams International AG
发明人： Besling, Willem Frederik Adrianus , Steeneken, Peter Gerard , Wunnicke, Olaf
IPC分类号： G01L9/00 , H04R19/00 , H04R31/00 , G01L21/22

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