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1. 发明公开

EP1406020A2 Vibrating pumping stage for vacuum pumps, and vacuum pump with vibrating pumping stages 有权
标题翻译： Schwingende PumpenstufefürVakuumpumpe und Vakuopsumpe mit schwingenden Pumpenstufen
公开(公告)号：EP1406020A2
公开(公告)日：2004-04-07
申请号：EP03021648.5
申请日：2003-09-26
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele
IPC分类号： F04D33/00
CPC分类号： F04D33/00 , F04B43/043 , F04B45/047
摘要： The invention concerns a micro-electro-mechanical vibrating pumping stage comprising a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) and a device controlling said membrane in order to make it oscillate with respect to said substrate. The invention further concerns a molecular vacuum pump incorporating said stage.
摘要翻译：本发明涉及一种包括硅衬底（15）的微机电振动泵送级，其上形成有单层或多层振荡组件（27; 127; 227; 327）和控制所述膜的装置，以便使其相对于所述衬底振荡。本发明还涉及包含所述级的分子真空泵。

2. 发明公开

EP1808685A2 Pressure sensor with vibrating member 有权
标题翻译： Drucksensor mit Schwingungselement
公开(公告)号：EP1808685A2
公开(公告)日：2007-07-18
申请号：EP07105760.8
申请日：2003-11-07
申请人： VARIAN S.p.A.
发明人： Maccarrone, Cristian , Correale, Raffaele , Busso, Mario
IPC分类号： G01L21/22
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： The invention concerns a pressure sensor including: a micro-electromechanical vibrating device, comprising a silicon substrate (15') onto which a multilayer vibrating assembly (321) is formed; a control device (21') of said assembly in order to make it oscillate relative to said substrate at the resonance frequency or at another known frequency; and a detector for detecting the actual frequency and/or amplitude of said oscillation. Since said actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment, the variations of said frequency and said amplitude with respect to the values set by said control device can be used to measure pressure variations in the surrounding environment.
摘要翻译：本发明涉及一种压力传感器，包括：微机电振动装置，其包括形成多层振动组件（321）的硅衬底（15'）; 所述组件的控制装置（21'），以使其以共振频率或另一已知频率相对于所述衬底振荡; 以及用于检测所述振荡的实际频率和/或振幅的检测器。由于所述实际频率和/或振幅受到外部环境的条件特别是压力的影响，因此所述频率和所述振幅相对于由所述控制装置设定的值的变化可用于测量压力变化周边环境。

3. 发明公开

EP1406020A3 Vibrating pumping stage for vacuum pumps, and vacuum pump with vibrating pumping stages 有权
标题翻译：振动泵级真空泵和真空泵与摆动泵级
公开(公告)号：EP1406020A3
公开(公告)日：2005-01-12
申请号：EP03021648.5
申请日：2003-09-26
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele
IPC分类号： F04D33/00
CPC分类号： F04D33/00 , F04B43/043 , F04B45/047
摘要： The invention concerns a micro-electro-mechanical vibrating pumping stage comprising a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) and a device controlling said membrane in order to make it oscillate with respect to said substrate. The invention further concerns a molecular vacuum pump incorporating said stage.

4. 发明公开

EP1722210A3 Pressure sensor with a vibrating member 审中-公开
标题翻译：用振动元件压力传感器
公开(公告)号：EP1722210A3
公开(公告)日：2010-01-27
申请号：EP06113734.5
申请日：2006-05-09
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele
IPC分类号： G01L9/00
CPC分类号： G01L9/0098 , G01L9/0019 , G01L9/002
摘要： A pressure sensor comprising a vibrating microassembly fastened to a supporting base, a control device for said assembly to make it oscillate relative to said supporting base at known frequency and amplitude, and means for detecting the deviations of the frequency and/or amplitude of said oscillation of said assembly from said known frequency and/or amplitude, wherein said control device is driven by a constant frequency signal, and wherein said detection means allow a direct detection of said deviations, for instance by optical or electrical means.

5. 发明公开

EP1722210A2 Pressure sensor with a vibrating member 审中-公开
标题翻译： Drucksensor mit schwingendem元素
公开(公告)号：EP1722210A2
公开(公告)日：2006-11-15
申请号：EP06113734.5
申请日：2006-05-09
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele
IPC分类号： G01L9/00
CPC分类号： G01L9/0098 , G01L9/0019 , G01L9/002
摘要： A pressure sensor comprising a vibrating microassembly fastened to a supporting base, a control device for said assembly to make it oscillate relative to said supporting base at known frequency and amplitude, and means for detecting the deviations of the frequency and/or amplitude of said oscillation of said assembly from said known frequency and/or amplitude, wherein said control device is driven by a constant frequency signal, and wherein said detection means allow a direct detection of said deviations, for instance by optical or electrical means.
摘要翻译：一种压力传感器，包括紧固到支撑基座的振动微组件，用于所述组件的控制装置，使其以已知的频率和振幅相对于所述支撑基座振荡;以及用于检测所述振荡的频率和/或幅度的偏差的装置的所述组件，其中所述控制装置由恒定频率信号驱动，并且其中所述检测装置允许例如通过光学或电气装置直接检测所述偏差。

6. 发明授权

EP1519402B1 Ionisation vacuum gauge 有权
标题翻译：离子计
公开(公告)号：EP1519402B1
公开(公告)日：2009-12-30
申请号：EP04014546.8
申请日：2004-06-22
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele
IPC分类号： H01J41/06 , G01L21/34
CPC分类号： G01L21/34

7. 发明授权

EP1519401B1 Ionisation vacuum gauge 有权
标题翻译：电离真空计
公开(公告)号：EP1519401B1
公开(公告)日：2009-06-03
申请号：EP04014545.0
申请日：2004-06-22
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele
IPC分类号： H01J41/06 , G01L21/34
CPC分类号： B82Y10/00 , H01J41/06

8. 发明公开

EP1808685A3 Pressure sensor with vibrating member 有权
标题翻译：与振动器的压力传感器
公开(公告)号：EP1808685A3
公开(公告)日：2008-11-12
申请号：EP07105760.8
申请日：2003-11-07
申请人： VARIAN S.p.A.
发明人： Maccarrone, Cristian , Correale, Raffaele , Busso, Mario
IPC分类号： G01L21/22
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22
摘要： The invention concerns a pressure sensor including: a micro-electromechanical vibrating device, comprising a silicon substrate (15') onto which a multilayer vibrating assembly (321) is formed; a control device (21') of said assembly in order to make it oscillate relative to said substrate at the resonance frequency or at another known frequency; and a detector for detecting the actual frequency and/or amplitude of said oscillation. Since said actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment, the variations of said frequency and said amplitude with respect to the values set by said control device can be used to measure pressure variations in the surrounding environment.

9. 发明授权

EP1530036B1 Pressure sensor 有权
标题翻译：压力传感器
公开(公告)号：EP1530036B1
公开(公告)日：2007-04-18
申请号：EP03425724.6
申请日：2003-11-07
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele , Busso, Mario , Maccarrone, Cristian
IPC分类号： G01L9/00
CPC分类号： G01L9/0016 , G01L9/0019 , G01L21/22

10. 发明公开

EP1519402A1 Ionisation vacuum gauge 有权
标题翻译：电离真空计
公开(公告)号：EP1519402A1
公开(公告)日：2005-03-30
申请号：EP04014546.8
申请日：2004-06-22
申请人： VARIAN S.p.A.
发明人： Correale, Raffaele
IPC分类号： H01J41/06 , G01L21/34
CPC分类号： G01L21/34
摘要： The present invention relates to an ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump. The gauge comprises an electron-emitting cathode (17), a grid (13) for accelerating the electrons emitted by the cathode and a plate (15) collecting the ions and/or the ionised positive molecules of the gas, wherein said plate is placed outside said grid. Measuring the plate current by a galvanometer allows determining the value of the residual pressure inside the container.
摘要翻译：本发明涉及用于测量残留在容器（10）中的气体材料的残余压力的电离真空计，更具体地，在真空泵的操作之后。该仪器包括电子发射阴极（17），用于加速由阴极发射的电子的栅极（13）和收集气体的离子和/或电离的正极分子的板（15），其中所述板被放置在电网外面。用电流计测量平板电流可以确定容器内残余压力的值。

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