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    • 5. 发明公开
    • POLY-CRYSTALLINE OR MULTI-CRYSTALLINE SILICON INGOT AND USE FOR THE MANUFACTURE OF SOLAR CELLS
    • 多晶或多晶硅锭及用于制造太阳能电池的用途
    • EP3176290A1
    • 2017-06-07
    • EP17151493.8
    • 2007-12-21
    • Freiberger Compound Materials GmbH
    • EICHLER, StefanWEINERT, BerndtJURISCH, Manfred
    • C30B29/06C30B11/00H01L31/18C30B11/06
    • C30B11/00C30B11/002C30B11/003C30B11/006C30B11/06C30B29/06H01L31/182Y02E10/546Y02P70/521
    • An ingot is disclosed which is formed of crystalline silicon through directed solidification of a silicon starting material, wherein the ingot comprises no or essentially no foreign precipitations or inclusions of silicon carbide (SiC) and/or silicon nitride (SiN, Si 3 N 4 ). A process and a device for producing crystalline silicon, particularly poly- or multi-crystalline silicon are described, wherein a melt of a silicon starting material is formed and the silicon melt is subsequently solidified in a directed orientation. A phase or a material is provided in gaseous, fluid or solid form above the melt in such a manner, that a concentration of a foreign atom selected from oxygen, carbon and nitrogen in the silicon melt and thus in the solidified crystalline silicon is controllable, and/or that a partial pressure of a gaseous component in a gas phase above the silicon melt is adjustable and/or controllable, the gaseous component being selected from oxygen gas, carbon gas and nitrogen gas and gaseous species containing at least one element selected from oxygen, carbon and nitrogen. The formation of impurity compound precipitations or inclusions, in particular of silicon carbide affecting electric properties of solar cells, can be effectively inhibited and prevented according to the present invention.
    • 公开了一种晶锭,其通过硅原材料的定向凝固由晶体硅形成,其中晶锭不包含或基本上不包含碳化硅(SiC)和/或氮化硅(SiN,Si 3 N 4)的外来沉淀或夹杂物。 描述了用于制造晶体硅,特别是多晶硅或多晶硅的方法和装置,其中形成硅原材料的熔体并随后将硅熔体以定向的方向固化。 在熔体上方以气态,流体或固体形式提供相或材料,使得在硅熔体中以及因此在固化的晶体硅中选自氧,碳和氮的外来原子的浓度是可控的, 和/或在硅熔体上方的气相中的气体组分的分压是可调节的和/或可控的,所述气体组分选自氧气,碳气和氮气以及包含选自以下的至少一种元素的气体物质: 氧气,碳和氮。 根据本发明,可以有效地抑制和防止杂质化合物沉淀或夹杂物,特别是影响太阳能电池电性能的碳化硅的形成。
    • 10. 发明公开
    • Method and apparatus for growing semiconductor crystals with a rigid support and with carbon doping
    • 用于生长具有刚性托架半导体的结晶,用碳掺杂方法和设备
    • EP2444531A2
    • 2012-04-25
    • EP11186406.2
    • 2002-07-03
    • Axt, Inc.
    • Liu, Xiao GordonLiu, Wei Guo
    • C30B11/06C30B27/00C30B29/42C30B35/00C30B11/12
    • C30B27/00C30B11/00C30B11/002C30B11/04C30B11/12C30B29/42C30B35/002Y10T117/1092
    • Group III-V, II-VI and related monocrystalline compounds are grown with a rigid support of a sealed ampoule (4000), carbon doping and resistivity control, and thermal gradient control in a crystal growth furnace (1000). A support cylinder provides structural support for the combined sealed ampoule (4000) crucible (3000) assembly, while low-density insulating material inside the support cylinder deters convection and conduction heating. Radiation channels penetrating the low-density material provide pathways for radiation heating into out of the seed well and transition regions of the crystal growth crucible. A hollow core (2030) in the insulation material (2060) directly beneath the seed well (4030) provides cooling in the center of the growing crystal, which enables uniform, level growth of the crystal ingot and a flat crystal-melt interface which results in crystal wafers with uniform electrical properties.
    • III-V族,II-VI和相关单晶化合物生长具有刚性支撑的密封安瓿(4000),碳掺杂和电阻率控制,以及热梯度控制在晶体生长炉(1000)的。 甲支承筒提供对组合的密封安瓿(4000)坩埚(3000)组件的结构支承,而低密度绝缘材料支承筒内部阻止对流和传导加热。 辐射通道穿透低密度材料提供辐射加热的途径进入出晶体生长坩埚的籽晶井和过渡区域。 在绝缘材料的中空芯(2030)(2060)的正下方的籽晶井(4030)中生长的晶体的中心,这使得能够均匀,晶体锭的水平生长和一个平坦的晶体 - 熔体界面,这导致提供了冷却 在具有均匀电特性的晶体的晶片。