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    • 3. 发明公开
    • VORRICHTUNG UND VERFAHREN ZUM TRENNEN EINES SUBSTRATS VON EINEM TRÄGERSUBSTRAT
    • VORRICHTUNG UND VERFAHREN ZUM TRENNEN EINES SUBSTRATS VON EINEMTRÄGERSUBSTRAT
    • EP2422357A1
    • 2012-02-29
    • EP10712355.6
    • 2010-03-31
    • EV Group GmbH
    • WIMPLINGER, MarkusLINDNER, Paul
    • H01L21/00
    • B32B38/10B32B43/006H01L21/67092H01L21/67132Y10T156/1105Y10T156/1168Y10T156/1189Y10T156/19Y10T156/1906Y10T156/1972
    • A device for separating a substrate from a carrier substrate bonded to the substrate by a bonding layer, with a carrier substrate receptacle with a receiving surface for receiving the carrier substrate, a substrate receptacle, arranged opposite the carrier substrate receptacle, with a substrate receiving surface that can be arranged parallel to the first-mentioned receiving surface and is intended for receiving the substrate, wherein separating means are provided for the parallel displacement of the substrate with respect to the carrier substrate in a bonded state of the substrate and the carrier substrate. Furthermore, the invention relates to a method for separating a substrate from a carrier substrate bonded to the substrate by a bonding layer with the following steps: receiving a bonded substrate/carrier-substrate assembly comprising the carrier substrate, the bonding layer and the substrate, between a substrate receiving surface of a substrate receptacle and a receiving surface of a carrier substrate receptacle that can be arranged parallel to the substrate receiving surface and separation of the substrate from the carrier substrate by parallel displacement of the substrate with respect to the carrier substrate in a bonded state of the substrate and the carrier substrate.
    • 用于通过互连层与衬底分离衬底与装置衬底的装置。 该装置包括具有用于保持载体衬底的保持表面的载体衬底保持器和与载体衬底保持器相对定位的衬底保持器,衬底保持表面可平行于容纳衬底的保持表面定位。 在衬底和载体衬底的互连状态下,存在用于平行移动衬底相对于载体衬底的分离装置。
    • 5. 发明公开
    • Automatic mask peeling apparatus
    • 自动掩膜剥离装置
    • EP2100706A2
    • 2009-09-16
    • EP09250673.2
    • 2009-03-10
    • NGK Insulators, Ltd.
    • Furukubo, Hiroshi
    • B28B11/00B28B17/00B29C63/00
    • B28B11/006B28B17/00B29C63/0013Y10T156/1137Y10T156/1168Y10T156/1939Y10T156/1972Y10T156/1978Y10T156/1989
    • An automatic mask peeling apparatus 10 includes: a brushing apparatus 30 for removing solidified plugging slurry attached to the mask 24; an air injection apparatus 36 for injecting, after the removal of the solidified plugging slurry, air from the opposite end face-side of the one end face to raise a folded surplus part of the mask from the one end face; a mask peeling apparatus 50 for holding the part raised by the air injection apparatus 36 to peel the mask 24; and a carrying apparatus 55 for carrying a masked plugging honeycomb structure 200 from the brushing apparatus 30 to the mask peeling apparatus 50. This apparatus can be used to peel a mask 24 which has been used for plugging only the predetermined cells of a masked plugging honeycomb structure 200; the mask 24 having an area larger than the area of the end face of the structure.
    • 自动掩模剥离装置10包括:用于去除附着于掩模24的固化封堵浆液的刷洗装置30; 空气注入装置36,用于在去除凝固的封堵浆液之后从该一个端面的相反端面侧注入空气,以从该一个端面升起掩模的多余部分; 掩模剥离装置50,用于保持由空气注射装置36抬起的部分以剥离掩模24; 以及用于将来自刷洗装置30的掩蔽堵塞蜂窝结构200运送到掩模剥离装置50的运送装置55.该装置可用于剥离仅用于堵塞掩蔽堵塞蜂窝的预定孔格的掩模24 结构200; 掩模24的面积大于结构端面的面积。